CN217884003U

CN217884003U - Novel wet etching machine liquid medicine groove heating structure

Info

Publication number: CN217884003U
Application number: CN202221708801.XU
Authority: CN
Inventors: 张�杰; 曾一鑫
Original assignee: Truly Opto Electronics Ltd
Current assignee: Truly Opto Electronics Ltd
Priority date: 2022-07-04
Filing date: 2022-07-04
Publication date: 2022-11-22
Anticipated expiration: 2032-07-04

Abstract

The utility model discloses a novel wet etching machine liquid medicine groove heating structure, include: a liquid medicine tank arranged in the etching machine and a constant temperature machine positioned outside the etching machine; the water outlet end of the thermostat is connected with a water outlet pipe, the end part of the water outlet pipe is communicated with a water outlet pipe through a sealing assembly, the water inlet end of the thermostat is connected with a water inlet pipe, the end part of the water inlet pipe is communicated with a water return pipe through a sealing assembly, the water return pipe and the water outlet pipe are communicated through a heat conduction pipe of an arc structure, the heat conduction pipe is arranged inside the liquid medicine tank, and the outer surface of the heat conduction pipe is sequentially connected with a heat conduction layer, a reinforcing layer and a protective coating from inside to outside; seal assembly includes that two connect respectively in two solid fixed ring and the integrative injection moulding of wet return and inlet tube periphery in a plurality of engaging lugs of solid fixed ring periphery. This novel wet etching machine liquid medicine groove heating structure, simple structure, the practicality is strong.

Description

Novel wet etching machine liquid medicine groove heating structure

Technical Field

The utility model belongs to the technical field of the etching machine, concretely relates to novel wet-type etching machine liquid medicine groove heating structure.

Background

In the electronic industry, two methods of dry etching and wet etching are generally adopted for manufacturing conductive circuits. The wet etching is a method of chemical etching by using chemical liquid (acidic substance) at a certain temperature, wherein the liquid is heated directly by using a heater immersed in a liquid tank body.

The publication number (CN 212894984U) discloses an etching machine with a turnover etching function, which comprises an etching machine body, wherein a limit box is fixedly connected to the upper end of the etching machine body, a rotary disc is movably clamped inside the limit box through a second limit hole, a pin body is movably clamped on the outer surface of the rotary disc through a first pin groove, a rotary shaft is fixedly connected to the middle of the rotary disc, a second clamp plate is fixedly connected to one end of the rotary shaft, a bolt is in threaded connection with the second clamp plate, a first clamp plate is in threaded connection with one end of the bolt, a limit block is fixedly connected to one end of the first clamp plate, a limit rod is movably sleeved inside the limit block through a first limit hole, a fixed block is fixedly connected to the end of the limit rod through a first limit groove, a rotary shaft is fixedly connected to the lower end of the fixed block, a first anti-corrosion pipe is arranged inside the etching machine body, a nozzle is fixedly connected to one end of the first anti-corrosion pipe, a water pump is fixedly connected to one end of the first anti-corrosion pipe, and a liquid medicine absorption tank is connected to the bottom of the water pump; has the advantages that: the etching machine with the turnover etching function realizes turnover of the iron sheet by the combined action of the turntable, the pin body and the first clamping plate; the method has the following defects: the heating by the heater in the liquid medicine groove body has the following defects: the heater is generally made of metal (stainless steel, titanium, etc.), and is easily and slowly corroded and damaged by the chemical solution (acidic substance), and the dissolving of trace amount of metal in the chemical solution affects the active etching ability of the chemical solution.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a novel wet etching machine liquid medicine groove heating structure, it is mainly through the newly-increased peripheral hardware auxiliary equipment constant temperature machine of wet etching machine, utilizes hydrologic cycle's mode and liquid medicine to carry out the heat exchange, makes liquid medicine thermally equivalent in the liquid medicine groove, and stops the corrosion damage that traditional metal material heater direct contact liquid medicine caused from the source to solve the problem that proposes in the above-mentioned background art.

In order to achieve the above purpose, the utility model provides a following technical scheme:

a novel wet etching machine liquid medicine groove heating structure includes:

a liquid medicine tank arranged in the etching machine and a constant temperature machine positioned outside the etching machine;

the water outlet end of the thermostat is connected with a water outlet pipe, the end part of the water outlet pipe is communicated with a water outlet pipe through a sealing component, the water inlet end of the thermostat is connected with a water inlet pipe, the end part of the water inlet pipe is communicated with a water return pipe through the sealing component, the heat conduction pipe of an arc-shaped structure is communicated between the water return pipe and the water outlet pipe, the heat conduction pipe is arranged inside the liquid medicine tank, and the outer surface of the heat conduction pipe is sequentially connected with a heat conduction layer, a reinforcing layer and a protective coating from inside to outside.

As the utility model provides a novel wet etching machine liquid medicine groove heating structure's a preferred embodiment, seal assembly includes that two connect respectively in two solid fixed rings of wet return and inlet tube periphery and integrative injection moulding in a plurality of engaging lugs of solid fixed ring periphery, and fix through the locking bolt locking that has the nut between two liang of a pair of engaging lugs.

As the utility model provides a novel wet etching machine liquid medicine groove heating structure's a preferred embodiment, the wet return is inserted towards the one end of inlet tube and is equipped with the slot, the inlet tube is connected with and inserts the ring with slot assorted towards the one end of wet return.

As a preferred embodiment of the novel wet etching machine chemical liquid tank heating structure provided by the present invention, the protective coating includes an inner anti-corrosion layer and an outer anti-aging layer.

As the utility model provides a novel wet etching machine liquid medicine groove heating structure's a preferred embodiment, the anticorrosion layer sets up to special fluorine dragon coating, the ageing resistance layer sets up to the phosphate dope layer.

As the utility model provides a novel wet etching machine liquid medicine groove heating structure's a preferred embodiment, the both ends of heat pipe all are connected with the screwed pipe, the heat pipe through two screwed pipes respectively with outlet pipe and wet return threaded connection.

As the utility model provides a novel wet etching machine liquid medicine groove heating structure's a preferred embodiment, the shape size of outlet pipe and wet return is the same.

As the utility model provides a novel wet etching machine liquid medicine groove heating structure's a preferred embodiment, it has sealed the pad to bond through the adhesive on inserting the outer wall of ring, and sealed the pad setting to bilayer structure.

As the utility model provides a novel wet etching machine liquid medicine groove heating structure's a preferred embodiment, the protective coating laminating is connected in the surface of enhancement layer, the enhancement layer laminating is connected in the surface of heat-conducting layer.

As the utility model provides a novel wet etching machine liquid medicine groove heating structure's a preferred embodiment, the heat-conducting layer sets up to graphite alkene layer.

Compared with the prior art, the utility model discloses a technological effect and advantage:

the utility model provides a novel wet etching machine liquid medicine groove heating structure, through the new peripheral hardware auxiliary equipment constant temperature machine that increases of wet etching machine, utilize the mode of hydrologic cycle to carry out the heat exchange with the liquid medicine, make liquid medicine in the liquid medicine groove evenly heated, and stop the corrosion damage that traditional metal material heater direct contact liquid medicine caused from the source;

the anti-corrosion layer increases the corrosion resistance of the heat conduction pipe and plays a role in adhesion prevention through the protective coating arranged on the heat conduction pipe, and the anti-aging layer further increases the aging resistance of the heat conduction pipe;

the heat conduction pipe is respectively in threaded connection with the water outlet pipe and the water return pipe through two threaded pipes, so that the water outlet pipe and the water return pipe can be conveniently mounted or dismounted, and the replacement requirement is met; this novel wet etching machine liquid medicine groove heating structure, simple structure, the practicality is strong.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the structure of the present invention showing the combination of the water return pipe and the water inlet pipe;

fig. 3 is a longitudinal sectional view of the heat conductive pipe of the present invention;

fig. 4 is a partial cross-sectional view of the protective coating of the present invention.

In the figure: 1. a thermostat; 2. a liquid medicine tank; 3. a water outlet pipe; 4. a heat conducting pipe; 41. a heat conductive layer; 42. a reinforcing layer; 43. a protective coating; 4301. an anti-corrosion layer; 4302. an anti-aging layer; 5. a water return pipe; 6. a water inlet pipe; 7. a fixing ring; 8. connecting lugs; 9. inserting slots; 10. inserting a ring; 11. a threaded pipe.

Detailed Description

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein may be combined with other embodiments.

As shown in fig. 1, a novel heating structure for a chemical liquid tank 2 of a wet etching machine comprises:

a liquid medicine tank 2 arranged in the etching machine and a constant temperature machine 1 positioned outside the etching machine;

the play water end of constant temperature machine 1 is connected with the drain pipe, and the tip of drain pipe has outlet pipe 3 through sealing component intercommunication, the end of intaking of constant temperature machine 1 is connected with the inlet tube, and the tip of inlet tube has wet return 5 through sealing component intercommunication, be linked together through heat pipe 4 of arc structure between wet return 5 and the outlet pipe 3, heat pipe 4 sets up in the inside of liquid medicine groove 2, the surface from interior to exterior of heat pipe 4 has connected gradually heat-conducting layer 41, enhancement layer 42 and protective coating 43.

The utility model provides a novel wet etching machine liquid medicine groove heating structure through the newly-increased peripheral hardware auxiliary assembly constant temperature machine of wet etching machine, utilizes hydrologic cycle's mode and liquid medicine to carry out the heat exchange, makes liquid medicine thermally equivalent in the liquid medicine groove, and stops the corrosion damage that traditional metal material heater direct contact liquid medicine caused from the source.

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them.

Thus, the following detailed description of the embodiments of the present invention is not intended to limit the scope of the invention as claimed, but is merely representative of some embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

It should be noted that, in the case of no conflict, the embodiments of the present invention and the features and technical solutions in the embodiments may be combined with each other.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined or explained in subsequent figures.

Embodiment 1 of the liquid chemical tank heating structure of the wet etching machine

As shown in fig. 1, fig. 2, fig. 3 and fig. 4, in order to fundamentally prevent the corrosion damage caused by the direct contact of the traditional metal heater with the chemical liquid, the novel wet etching machine chemical liquid tank heating structure includes: a liquid medicine tank 2 arranged in the etching machine and a constant temperature machine 1 positioned outside the etching machine; the play water end of constant temperature machine 1 is connected with the drain pipe, and the tip of drain pipe has outlet pipe 3 through sealing component intercommunication, the end of intaking of constant temperature machine 1 is connected with inlet tube 6, and inlet tube 6's tip has wet return 5 through sealing component intercommunication, be linked together through heat pipe 4 of arc structure between wet return 5 and the outlet pipe 3, outlet pipe 3 is the same with wet return 5's shape size, heat pipe 4 sets up in the inside of liquid medicine groove 2, the surface from interior to exterior of heat pipe 4 has connected gradually heat-conducting layer 41, enhancement layer 42 and protective coating 43.

Embodiment 2 of the liquid medicine tank heating structure of the wet etching machine

Protective coating 43 laminating is connected in the surface of enhancement layer 42, the surface of enhancement layer 42 laminating connection in heat-conducting layer 41, protective coating 43 includes inboard anti-corrosion coating 4301 and the anti-corrosion layer 4302 in the outside, anti-corrosion coating 4301 sets up to the teflon coating, anti-corrosion layer 4302 sets up to the phosphate dope layer, and anti-corrosion coating 4301 has increased heat pipe 4's corrosion resistance, and plays antiseized effect, and anti-corrosion layer 4302 has further increased heat pipe 4's ageing resistance, and heat-conducting layer 41 sets up to graphene layer, improves heat pipe 4's heat conduction effect, and enhancement layer 42 has reduced the probability of the breakdown that heat pipe 4 appeared when using.

Through the protective coating who sets up on the heat pipe, the corrosion resistant coating has increased the corrosion resistance of heat pipe, and plays antiseized effect, and the ageing resistance layer has further increased the ageing resistance of heat pipe.

Embodiment 3 of the novel wet etching machine chemical liquid tank heating structure

As shown in fig. 1 and fig. 2, be convenient for install or dismantle outlet pipe 3 and wet return 5, sealing component includes that two connect respectively in two solid fixed ring 7 and integrative injection moulding of wet return 5 and inlet tube 6 periphery in a plurality of engaging lugs 8 of solid fixed ring 7 periphery, and fix through the lock bolt lock that has the nut between two liang of a pair of engaging lugs 8, wet return 5 is inserted towards the one end of inlet tube 6 and is equipped with slot 9, inlet tube 6 is connected with towards the one end of wet return 5 with slot 9 assorted insert ring 10, and has sealed the pad through the adhesive bonding on the outer wall of insert ring 10, and sealed pad sets up to bilayer structure, inserts slot 9 on wet return 5 through insert ring 10 on inlet tube 6 to utilize a plurality of lock bolts to connect two solid fixed ring 7 laminating, sealed pad improves the leakproofness of butt joint between the two pipelines, the both ends of heat pipe 4 all are connected with screwed pipe 11, heat pipe 4 is connected with outlet pipe 3 and wet return 5 threaded connection respectively through two screwed pipe 11.

The utility model provides a novel wet etching machine liquid medicine groove heating structure's theory of operation: in use, the thermostatic machine 1 introduces water with temperature into the heat pipe 4 through the water outlet pipe 3 and the water outlet pipe (not shown in the figures), exchanges heat with the liquid medicine in the liquid medicine tank 2 through the heat pipe 4, returns to the thermostatic machine 1 through the water return pipe 5 and the water inlet pipe 6, and repeats the steps so as to uniformly heat the liquid medicine in the liquid medicine tank 2.

In the description of the present application, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the present application. In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; may be mechanically coupled, may be electrically coupled or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as the case may be.

It is to be understood that the above-described embodiments are merely illustrative of some, but not restrictive, of the broad invention, and that the appended drawings illustrate preferred embodiments of the invention and do not limit the scope of the invention. This application is capable of embodiments in many different forms and is provided for the purpose of enabling a thorough understanding of the disclosure of the application. Although the present application has been described in detail with reference to the foregoing embodiments, it will be apparent to one skilled in the art that the present application may be practiced without modification or with equivalents of some of the features described in the foregoing embodiments. All equivalent structures made by using the contents of the specification and the drawings of the present application are directly or indirectly applied to other related technical fields and are within the protection scope of the present application.

Claims

1. A novel wet etching machine liquid medicine groove heating structure includes:

a liquid medicine tank (2) arranged in the etching machine and a constant temperature machine (1) positioned outside the etching machine;

the method is characterized in that: the play water end of constant temperature machine (1) is connected with the drain pipe, and the tip of drain pipe has outlet pipe (3) through sealing component intercommunication, the end of intaking of constant temperature machine (1) is connected with inlet tube (6), and the tip of inlet tube (6) has wet return (5) through sealing component intercommunication, be linked together through heat pipe (4) of arc structure between wet return (5) and outlet pipe (3), heat pipe (4) set up in the inside of liquid medicine groove (2), the surface from interior to exterior of heat pipe (4) has connected gradually heat-conducting layer (41), enhancement layer (42) and protective coating (43).

2. The novel wet etching machine chemical liquid tank heating structure as claimed in claim 1, wherein: sealing assembly includes that two connect respectively in two solid fixed ring (7) and integrative injection moulding of wet return (5) and inlet tube (6) periphery in a plurality of engaging lugs (8) of solid fixed ring (7) periphery, and fixes through the lock bolt lock that has the nut between two liang of a pair of engaging lug (8).

3. The heating structure for a chemical solution tank of a wet etching machine as claimed in claim 2, wherein: one end of the water return pipe (5) facing the water inlet pipe (6) is inserted with a slot (9), and one end of the water inlet pipe (6) facing the water return pipe (5) is connected with an insertion ring (10) matched with the slot (9).

4. The novel wet etching machine chemical liquid tank heating structure as claimed in claim 1, wherein: the protective coating (43) comprises an inner anti-corrosion layer (4301) and an outer anti-aging layer (4302).

5. The novel wet etching machine chemical liquid tank heating structure as claimed in claim 4, wherein: the anti-corrosion layer (4301) is set to be a Teflon coating, and the anti-aging layer (4302) is set to be a phosphate coating layer.

6. The heating structure for a chemical solution tank of a wet etching machine as claimed in claim 1, wherein: both ends of heat pipe (4) all are connected with screwed pipe (11), heat pipe (4) are connected with outlet pipe (3) and wet return (5) screw thread formula respectively through two screwed pipe (11).

7. The heating structure for a chemical solution tank of a wet etching machine as claimed in claim 6, wherein: the water outlet pipe (3) and the water return pipe (5) are the same in shape and size.

8. The heating structure of the chemical solution tank of the wet etching machine as claimed in claim 3, wherein: the outer wall of the insert ring (10) is bonded with a sealing gasket through an adhesive, and the sealing gasket is of a double-layer structure.

9. The novel wet etching machine chemical liquid tank heating structure as claimed in claim 1, wherein: the protective coating (43) is attached to the outer surface of the reinforcing layer (42), and the reinforcing layer (42) is attached to the outer surface of the heat conducting layer (41).

10. The novel wet etching machine chemical liquid tank heating structure as claimed in claim 9, wherein: the heat conducting layer (41) is arranged as a graphene layer.