CN217869046U - Cooling roller of high-safety ion beam deposition equipment - Google Patents
Cooling roller of high-safety ion beam deposition equipment Download PDFInfo
- Publication number
- CN217869046U CN217869046U CN202220997076.6U CN202220997076U CN217869046U CN 217869046 U CN217869046 U CN 217869046U CN 202220997076 U CN202220997076 U CN 202220997076U CN 217869046 U CN217869046 U CN 217869046U
- Authority
- CN
- China
- Prior art keywords
- pipe
- ion beam
- conservancy diversion
- water conservancy
- beam deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007737 ion beam deposition Methods 0.000 title claims abstract description 20
- 238000001816 cooling Methods 0.000 title claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 30
- 230000002457 bidirectional effect Effects 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 4
- 241000309551 Arthraxon hispidus Species 0.000 claims 1
- 239000000498 cooling water Substances 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- 238000005096 rolling process Methods 0.000 abstract 3
- 238000000926 separation method Methods 0.000 abstract 1
- 238000009434 installation Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000001105 regulatory effect Effects 0.000 description 5
- 238000011900 installation process Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The utility model discloses a high safe type ion beam deposition equipment's chill roll belongs to ion beam deposition equipment technical field, the rolling apparatus comprises a roll body, the both ends of rolling apparatus all are provided with the support shaft cover, the inside of support shaft cover all is provided with the joint, evenly be fixed with the ring pipe on the inner wall of rolling apparatus, the inside of ring pipe all is fixed with the baffle, and the inside of ring pipe is provided with the water conservancy diversion chamber, the water conservancy diversion chamber is located between the baffle, first shunt tubes is installed to the one end in water conservancy diversion chamber, the second shunt tubes is installed to the other end in water conservancy diversion chamber. The utility model discloses the setting of the inside multiunit of roll body evenly arranges the toroidal tube, through the inside baffle of toroidal tube become different water conservancy diversion chambeies with the inside space separation of toroidal tube, recycle the first shunt tubes at water conservancy diversion chamber both ends, the second shunt tubes respectively with inlet tube, switch on between the drain pipe, can reduce the dwell time of cooling water in the toroidal tube, ensured the cooling effect in the use then.
Description
Technical Field
The utility model relates to a chill roll especially relates to high safe type ion beam deposition equipment's chill roll belongs to ion beam deposition equipment technical field.
Background
Ion beam deposition is a method for transporting carbon particles in the form of ions to the surface of a substrate for deposition, and the ion beam deposition equipment needs to transport and cool a film through a cooling roller in the process of producing the film.
The cooling roller in the prior art has the following problems:
1. cooling water takes heat away through a coil pipe in the roller body to realize a cooling function, but the temperature of the cooling water is in a changing state in the flowing process, so that the temperature difference between the water inlet end and the water outlet end of the coil pipe is large, the temperature of the outer surface of the roller body is uneven, and the cooling effect is influenced;
2. in the process of installation and use, the roller body is inconvenient to install;
the cooling roller of the high-safety ion beam deposition equipment is designed for optimizing the problems.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a main objective is in order to provide high safe type ion beam deposition equipment's chill roll, the inside multiunit of roll body evenly arranges the setting of the ring pipe, separate into different water conservancy diversion chambeies through the inside baffle of ring pipe with the inside space of ring pipe, recycle the first shunt tubes at water conservancy diversion chamber both ends, the second shunt tubes respectively with the inlet tube, switch on between the drain pipe, can reduce the dwell time of cooling water in the ring pipe inside, the cooling effect in the use has then been ensured, the setting of back shaft sleeve inside joint, the connecting pipe on the cooperation supporting seat is used, make the in-process at the installation, utilize the bottom plate, the spout, two-way screw rod, the telescopic machanism that the regulating block is constituteed, the removal in opposite directions of two sets of supporting seats of control, peg graft between connecting pipe and the joint, make the installation of roll body use more convenient.
The purpose of the utility model can be achieved by adopting the following technical scheme:
high safe type ion beam deposition equipment's chill roll, including the roll body, the both ends of roll body all are provided with the support shaft sleeve, the inside of support shaft sleeve all is provided with the joint, evenly be fixed with the annular tube on the inner wall of roll body, the inside of annular tube all is fixed with the baffle, and the inside of annular tube is provided with the water conservancy diversion chamber, the water conservancy diversion chamber is located between the baffle, first shunt is installed to the one end in water conservancy diversion chamber, second shunt is installed to the other end in water conservancy diversion chamber, the inlet tube is installed to the one end that the annular tube was kept away from to first shunt, the one end that the annular tube was kept away from to the second shunt is installed the drain pipe, the inlet tube is connected with the inside joint of support shaft sleeve respectively with the drain pipe, the outside of support shaft sleeve is provided with the supporting seat.
Preferably, the following components: the cross-sectional shape of annular pipe is the rectangle, laminate each other between the annular pipe.
Preferably: the inner sides of the supporting seats are all provided with slots, the clamping joints are inserted in the slots, connecting pipes are mounted in the slots and are inserted in the clamping joints, and a telescopic mechanism is arranged between the two groups of supporting seats.
Preferably, the following components: and a sealing ring is arranged on the outer side of one end, close to the clamping joint, of the connecting pipe.
Preferably: the telescopic mechanism comprises a bottom plate, a sliding groove and a bidirectional screw rod, the sliding groove is formed in the top of the bottom plate, the supporting seat is located at two ends inside the sliding groove, the supporting seat is connected with the sliding groove in a sliding mode, the bidirectional screw rod is arranged between two ends of the sliding groove, and two ends of the bidirectional screw rod are connected with the supporting seat in a threaded mode respectively.
Preferably: two ends of the bidirectional screw rod extend to the outer side of the bottom plate, and adjusting blocks are fixed at the outer end parts of the bidirectional screw rod.
Preferably: the shape of regulating block is circular, and the outside of regulating block all is provided with anti-skidding line.
The utility model has the advantages that:
the utility model provides a cooling roller of high safe type ion beam deposition equipment, the setting of the inside multiunit of roll body annular pipe of evenly arranging, through the inside baffle of annular pipe separate the space of annular pipe into different water conservancy diversion chambeies, recycle the first shunt tubes, the second shunt tubes at water conservancy diversion chamber both ends and switch on respectively with inlet tube, drain pipe, can reduce the dwell time of cooling water in the annular pipe, then ensured the cooling effect in the use;
the setting of the inside joint of supporting axle sleeve, the connecting pipe on the cooperation supporting seat is used for at the in-process of installation, utilize the telescopic machanism that bottom plate, spout, two-way screw rod, regulating block are constituteed, the removal in opposite directions of two sets of supporting seats of control is pegged graft between connecting pipe and the joint, makes the installation of roll body use more convenient.
Drawings
Fig. 1 is a front sectional view of the present invention;
fig. 2 is an enlarged view of the structure a in fig. 1 according to the present invention;
FIG. 3 is a cross-sectional view of the annular tube of the present invention;
fig. 4 is a base structure diagram of the present invention.
In the figure: 1. a roller body; 2. a support shaft sleeve; 3. a clamping head; 4. an annular tube; 5. a partition plate; 6. a flow guide cavity; 7. a first shunt pipe; 8. a second shunt pipe; 9. a water inlet pipe; 10. a drain pipe; 11. a supporting base; 12. a slot; 13. a connecting pipe; 14. a telescoping mechanism; 15. a base plate; 16. a chute; 17. a bidirectional screw; 18. and a regulating block.
Detailed Description
In order to make the technical solutions of the present invention clearer and clearer for those skilled in the art, the present invention will be described in further detail with reference to the following embodiments and drawings, but the embodiments of the present invention are not limited thereto.
Example one
As shown in fig. 1-4, this embodiment provides a cooling roller of high safety type ion beam deposition equipment, including roller body 1, roller body 1's both ends all are provided with supporting shaft sleeve 2, supporting shaft sleeve 2's inside all is provided with joint 3, evenly be fixed with annular pipe 4 on roller body 1's the inner wall, annular pipe 4's inside all is fixed with baffle 5, annular pipe 4's inside is provided with water conservancy diversion chamber 6, water conservancy diversion chamber 6 is located between the baffle 5, first shunt pipe 7 is installed to the one end of water conservancy diversion chamber 6, second shunt pipe 8 is installed to the other end of water conservancy diversion chamber 6, inlet tube 9 is installed to the one end that annular pipe 4 was kept away from to first shunt pipe 7, drain pipe 10 is installed to the one end that annular pipe 4 was kept away from to second shunt pipe 8, inlet tube 9 is connected with the inside joint 3 of supporting shaft sleeve 2 respectively with drain pipe 10, supporting shaft sleeve 2's outside is provided with supporting seat 11, annular pipe 4's cross sectional shape is the rectangle, laminate each other between the annular pipe 4.
Before using, install roll body 1 between supporting seat 11, then switch on cold water pipe and the connecting pipe 13 of inlet tube 9 tip, and switch on another group of connecting pipe 13 and basin inside, during the use, the cooling water enters into the inside of inlet tube 9, the inside of the water conservancy diversion chamber 6 in the annular tube 4 is entered into through the first shunt tubes 7 of multiunit, flow into the other end then from the inside discharge of second shunt tubes 8 from the one end of water conservancy diversion chamber 6, take away the heat and cool down the outside of roll body 1, then enter into the inside of drain pipe 10, flow out the outside of roll body 1.
Example two
In the present embodiment, as shown in fig. 1-4, slots 12 are formed on inner sides of the supporting bases 11, the clamping head 3 is inserted into the slots 12, connecting pipes 13 are installed inside the slots 12, the connecting pipes 13 are inserted into the clamping head 3, and a telescopic mechanism 14 is disposed between the two supporting bases 11.
In the installation process of the roller body 1, the supporting shaft sleeve 2 is aligned to the slot 12 of the supporting seat 11, then the two groups of supporting seats 11 are controlled to move oppositely by the aid of the telescopic mechanisms 14, the supporting shaft sleeve 2 is inserted into the slot 12, and meanwhile, the connecting pipe 13 is aligned with the clamping joint 3 to complete installation.
In this embodiment, a sealing ring is provided on the outer side of the connecting pipe 13 near one end of the bayonet 3.
A sealing effect between the connecting tube 13 and the bayonet joint 3 is ensured.
In this embodiment, the telescopic mechanism 14 includes a bottom plate 15, a sliding groove 16 and a bidirectional screw 17, the sliding groove 16 is opened at the top of the bottom plate 15, the supporting seat 11 is located at two ends inside the sliding groove 16, the supporting seat 11 is slidably connected to the sliding groove 16, the bidirectional screw 17 is disposed between two ends of the sliding groove 16, and two ends of the bidirectional screw 17 are respectively connected to the supporting seat 11 by threads.
In the installation process, the two-way screw 17 is rotated, and the two groups of supporting seats 11 are controlled to move oppositely due to the threaded connection between the two-way screw 17 and the supporting seats 11.
In the present embodiment, both ends of the bidirectional screw 17 extend to the outside of the bottom plate 15, and the adjusting block 18 is fixed to the outer end of the bidirectional screw 17.
The rotation of the bidirectional screw 17 is conveniently controlled by using the adjusting block 18.
In the present embodiment, the adjusting block 18 is circular, and the outer side of the adjusting block 18 is provided with anti-slip threads.
The hand is prevented from slipping during rotation by the anti-slip threads on the outer side of the adjusting block 18.
The above description is only a further embodiment of the present invention, but the scope of protection of the present invention is not limited thereto, and any person skilled in the art can replace or change the technical solution and the concept of the present invention within the scope of the present invention.
Claims (7)
1. High safe type ion beam deposition equipment's chill roll, its characterized in that: including roll body (1), the both ends of roll body (1) all are provided with supporting shaft sleeve (2), the inside of supporting shaft sleeve (2) all is provided with joint (3), evenly be fixed with annular pipe (4) on the inner wall of roll body (1), the inside of annular pipe (4) all is fixed with baffle (5), and the inside of annular pipe (4) is provided with water conservancy diversion chamber (6), water conservancy diversion chamber (6) are located between baffle (5), first shunt pipe (7) are installed to the one end in water conservancy diversion chamber (6), second shunt pipe (8) are installed to the other end in water conservancy diversion chamber (6), the one end that annular pipe (4) were kept away from in first shunt pipe (7) is installed inlet tube (9), water drain pipe (10) are installed to the one end that annular pipe (4) was kept away from in second shunt pipe (8), inlet tube (9) and water drain pipe (10) are connected with supporting shaft sleeve (2) inside joint head (3) respectively, the outside of supporting shaft sleeve (2) is provided with supporting seat (11).
2. The cooling roller of the ion beam deposition apparatus according to claim 1, wherein: the cross section of the annular pipe (4) is rectangular, and the annular pipes (4) are mutually attached.
3. The cooling roll of the ion beam deposition apparatus of claim 2, wherein: the inner sides of the supporting seats (11) are provided with slots (12), the clamping joints (3) are inserted into the slots (12), connecting pipes (13) are mounted inside the slots (12), the connecting pipes (13) are inserted into the clamping joints (3), and a telescopic mechanism (14) is arranged between the two groups of supporting seats (11).
4. The cooling roller of the ion beam deposition apparatus according to claim 3, wherein: and a sealing ring is arranged on the outer side of one end, close to the clamping joint (3), of the connecting pipe (13).
5. The cooling roller of the ion beam deposition apparatus according to claim 4, wherein: telescopic machanism (14) include bottom plate (15), spout (16) and two-way screw rod (17), spout (16) have been seted up at the top of bottom plate (15), supporting seat (11) are located the both ends of spout (16) inside, sliding connection between supporting seat (11) and spout (16), be provided with two-way screw rod (17) between the both ends of spout (16), the both ends of two-way screw rod (17) respectively with supporting seat (11) threaded connection.
6. The cooling roller of the ion beam deposition apparatus according to claim 5, wherein: two ends of the bidirectional screw rod (17) extend to the outer side of the bottom plate (15), and the outer end part of the bidirectional screw rod (17) is fixed with an adjusting block (18).
7. The cooling roller of the ion beam deposition apparatus according to claim 6, wherein: the adjusting block (18) is circular, and the outer side of the adjusting block (18) is provided with anti-skid grains.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220997076.6U CN217869046U (en) | 2022-04-24 | 2022-04-24 | Cooling roller of high-safety ion beam deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220997076.6U CN217869046U (en) | 2022-04-24 | 2022-04-24 | Cooling roller of high-safety ion beam deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217869046U true CN217869046U (en) | 2022-11-22 |
Family
ID=84088588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220997076.6U Expired - Fee Related CN217869046U (en) | 2022-04-24 | 2022-04-24 | Cooling roller of high-safety ion beam deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217869046U (en) |
-
2022
- 2022-04-24 CN CN202220997076.6U patent/CN217869046U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20221122 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |