CN217865729U - Closed material pipe of taking out of tetraethoxysilane - Google Patents
Closed material pipe of taking out of tetraethoxysilane Download PDFInfo
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- CN217865729U CN217865729U CN202222141434.6U CN202222141434U CN217865729U CN 217865729 U CN217865729 U CN 217865729U CN 202222141434 U CN202222141434 U CN 202222141434U CN 217865729 U CN217865729 U CN 217865729U
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Abstract
The utility model discloses a closed material pipe that takes out of tetraethoxysilane, include: the device comprises a sealing cover, a liquid extracting pipe, a waste gas connecting pipe and a nitrogen connecting pipe; the sealing cover can be arranged on the opening of the raw material barrel and is provided with a liquid pumping pipe mounting hole, a waste gas connecting pipe mounting hole and a nitrogen connecting pipe mounting hole which penetrate through the sealing cover; the top end of the liquid extracting pipe is fixedly connected with the quick connector, the bottom end of the liquid extracting pipe extends into the raw material barrel, and the liquid extracting pipe can be inserted into the liquid extracting pipe mounting hole and is fixedly connected with the sealing cover; the waste gas connecting pipe can be inserted into the mounting hole of the waste gas connecting pipe and fixedly connected with the sealing cover, and the waste gas connecting pipe can be connected with a gas recovery device; the nitrogen gas connecting pipe is inserted into the mounting hole of the nitrogen gas connecting pipe and is fixedly connected with the sealing cover, and the nitrogen gas connecting pipe can be connected with a nitrogen gas pipeline. The problem of in the tetraethoxysilane need be followed the raw materials bucket and leaded to the raw materials storage tank through the pumping pipe, its pollution that need be protected to this process to need the recovered gas to avoid the accident, ordinary pumping pipe can't satisfy the production demand is solved.
Description
Technical Field
The utility model relates to a material pumping pipe field especially relates to a closed material pumping pipe of tetraethoxysilane.
Background
With the development of semiconductor and integrated circuit manufacturing technologies, the requirements for raw materials are increasing, and there is a higher demand for the purity of tetraethoxysilane required for depositing and growing silicon dioxide.
The ethyl orthosilicate gradually becomes turbid in humid air, and precipitates after standing, and is flammable and irritant.
In the production process, tetraethoxysilane is required to be guided into a completely pollution-free raw material storage tank from a raw material barrel through a pumping pipe, tetraethoxysilane is required to be protected from pollution in the process, tetraethoxysilane gas is required to be recovered, accidents are avoided, and the common pumping pipe cannot meet the production requirement.
Disclosure of Invention
The utility model provides a closed pumping pipe of tetraethyl orthosilicate to overcome tetraethyl orthosilicate and need follow in the raw materials bucket through the leading-in raw materials storage tank that does not have pollution completely of pumping pipe, this process needs to protect tetraethyl orthosilicate not receive the pollution, and need retrieve the gaseous accident of avoiding causing of tetraethyl orthosilicate, the unable problem that satisfies the production demand of ordinary pumping pipe.
In order to realize the purpose, the technical scheme of the utility model is that:
an ethyl orthosilicate closed pumping pipe, comprising: the device comprises a sealing cover, a liquid pumping pipe, a waste gas connecting pipe and a nitrogen connecting pipe;
the sealing cover can be arranged on the opening of the raw material barrel and is provided with a liquid suction pipe mounting hole, an exhaust gas connecting pipe mounting hole and a nitrogen connecting pipe mounting hole which penetrate through the sealing cover;
the top end of the liquid extracting pipe is fixedly connected with the quick connector, the bottom end of the liquid extracting pipe extends into the raw material barrel, and the liquid extracting pipe can be inserted into the liquid extracting pipe mounting hole and is fixedly connected with the sealing cover;
the waste gas connecting pipe can be inserted into the waste gas connecting pipe mounting hole and fixedly connected with the sealing cover, and the waste gas connecting pipe can be connected with a gas recovery device;
the nitrogen connecting pipe is inserted into the nitrogen connecting pipe mounting hole and fixedly connected with the sealing cover, and the nitrogen connecting pipe can be connected with a nitrogen pipeline.
Further, the device also comprises a switch valve, a discharge pipe, a pneumatic diaphragm pump and a metal hose; one end of the metal hose is connected with the quick connector, and the other end of the metal hose is connected with the pneumatic diaphragm pump; the pneumatic diaphragm pump is connected with a discharge pipe, and the discharge pipe is provided with a switch valve.
Furthermore, a ferrule type straight joint for connecting a quick joint is arranged at the top end of the liquid pumping pipe.
Furthermore, waste gas connecting pipe top is equipped with waste gas connecting pipe quick-operation joint, nitrogen gas connecting pipe top is equipped with nitrogen gas connecting pipe quick-operation joint.
Furthermore, the sealing cover is provided with a rectangular fastening block which is convenient for a wrench to tighten.
Further, the sealing cover is provided with threads for mounting with the raw material barrel.
Further, the sealing cover is provided with a skirt.
The utility model discloses beneficial effect:
can install the closing cap on former storage bucket bung hole and set up and be used for installing the waste gas connecting pipe, the mounting hole of nitrogen gas connecting pipe, the waste gas connecting pipe can be connected the tetraethyl orthosilicate gas in the gas recovery unit recovery former storage bucket, the nitrogen gas connecting pipe can be connected the nitrogen pipeline and make and let in nitrogen gas in the former storage bucket and not receive air pollution, solved tetraethyl orthosilicate and need follow in the former storage bucket through the leading-in raw materials storage tank that takes out the material pipe and pollution-free completely, this process need protect tetraethyl orthosilicate not receive the pollution, and need retrieve tetraethyl orthosilicate gas and avoid causing the accident, the problem that the production demand can't be satisfied to ordinary taking out the material pipe.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive labor.
Fig. 1 is a schematic structural view of a sealed tetraethoxysilane material pumping pipe disclosed by the present invention;
fig. 2 is a schematic structural view of a sealed tetraethoxysilane material pumping pipe additionally provided with a pneumatic diaphragm pump;
fig. 3 is a schematic structural view of a sealing cover of a sealed tetraethoxysilane material pumping pipe disclosed by the present invention;
fig. 4 is a cross-sectional view of a sealing cover of the tetraethoxysilane closed type pumping pipe disclosed by the utility model;
fig. 5 is a schematic structural view of a waste gas connecting pipe and a nitrogen connecting pipe of the closed tetraethoxysilane material pumping pipe disclosed by the present invention;
fig. 6 is a schematic half-sectional view of a sealed tetraethoxysilane material pumping pipe inserted into a raw material barrel disclosed by the present invention;
in the figure: 1. the device comprises a switch valve, 2, a discharge pipe, 3, a pneumatic diaphragm pump, 4, a metal hose, 5, a quick connector, 6, a ferrule type straight-through connector, 7, a rectangular fastening block, 8, a sealing cover, 8-1, a liquid pumping pipe mounting hole, 8-2 waste gas connecting pipe mounting holes, 8-3, a nitrogen gas connecting pipe mounting hole, 8-4, threads, 9, a skirt edge, 10, a liquid pumping pipe, 11, a waste gas connecting pipe, 11-1, a waste gas connecting pipe quick connector, 12, a nitrogen gas connecting pipe, 12-1, a nitrogen gas connecting pipe quick connector, A and a raw material barrel.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
This embodiment provides a closed material pipe of taking out of tetraethoxysilane, as shown in fig. 1, includes: a sealing cover 8, a liquid extracting pipe 10, a waste gas connecting pipe 11 and a nitrogen connecting pipe 12;
the sealing cover 8 can be installed on the opening of the raw material barrel, as shown in fig. 3 and 4, the sealing cover 8 is provided with a liquid suction pipe installation hole 8-1, an exhaust gas connecting pipe installation hole 8-2 and a nitrogen connecting pipe installation hole 8-3 which penetrate through the sealing cover 8;
the top end of the liquid extracting pipe 10 is fixedly connected with the quick coupling 5, as shown in fig. 6, the bottom end of the liquid extracting pipe 10 extends into the raw material barrel a, and the liquid extracting pipe 10 can be inserted into the liquid extracting pipe mounting hole 8-1 to be welded and fixed with the sealing cover 8;
the waste gas connecting pipe 11 can be inserted into a waste gas connecting pipe mounting hole 8-2 to be welded and fixed with the sealing cover 8, and the waste gas connecting pipe 11 can be connected with a gas recovery device, so that the phenomenon that people inhale tetraethoxysilane gas to damage bodies due to misoperation is avoided;
the nitrogen connecting pipe 12 is inserted into the nitrogen connecting pipe mounting hole 8-3 and is welded and fixed with the sealing cover 8, the nitrogen connecting pipe 12 can be connected with a nitrogen pipeline, the raw material barrel is guaranteed to be in a positive pressure nitrogen protection state, and air pollution to ethyl orthosilicate is avoided.
In the specific embodiment, as shown in fig. 2, the device further comprises an on-off valve 1, a discharge pipe 2, an air-operated diaphragm pump 3 and a metal hose 4; one end of the metal hose 4 is connected with the quick connector 5, and the other end of the metal hose is connected with the pneumatic diaphragm pump 3; the pneumatic diaphragm pump 3 is connected with a discharge pipe 2, and the discharge pipe 2 is provided with a switch valve 1. Tetraethoxysilane is flammable, no heat is generated during the work of the pneumatic diaphragm pump 1, electric sparks cannot be generated, suction force can be provided on the premise of ensuring safety, the metal hose is connected and conveniently moved, and the switch valve is conveniently butted with a raw material storage tank.
In the specific embodiment, the top end of the liquid extracting tube 10 is provided with a ferrule type straight joint 6 for connecting the quick joint 5.
In an embodiment, as shown in fig. 5, the top end of the exhaust connection pipe 11 is provided with an exhaust connection pipe quick coupling 11-1, and the top end of the nitrogen connection pipe 12 is provided with a nitrogen connection pipe quick coupling 12-1.
Waste gas connecting pipe quick-operation joint makes the waste gas connecting pipe can with gas recovery device high-speed joint, and nitrogen gas connecting pipe quick-operation joint makes the nitrogen gas connecting pipe can with nitrogen gas pipeline high-speed joint, the operating personnel's of being convenient for installation.
In a particular embodiment, as shown in fig. 3, the cover 8 is provided with a rectangular fastening block 7 facilitating the tightening of a wrench.
In a particular embodiment, as shown in fig. 1, the cover 8 is provided with threads 8-4 for mounting with a vat of stock material. The closing cap is screwed on the raw material barrel, so that the closing cap is convenient to disassemble.
In a particular embodiment, as shown in fig. 3, the cover 8 is provided with a skirt 9. The sealing cover is provided with the skirt edge, so that the contact area between the sealing cover and the opening of the raw material barrel is increased, and the sealing performance of the sealing cover is improved.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (7)
1. The utility model provides a closed material pipe that draws of tetraethoxysilane which characterized in that includes: a sealing cover (8), a liquid pumping pipe (10), a waste gas connecting pipe (11) and a nitrogen connecting pipe (12);
the sealing cover (8) can be arranged on the opening of the raw material barrel, and the sealing cover (8) is provided with a liquid pumping pipe mounting hole (8-1), an exhaust gas connecting pipe mounting hole (8-2) and a nitrogen connecting pipe mounting hole (8-3) which penetrate through the sealing cover (8);
the top end of the liquid extracting pipe (10) is fixedly connected with the quick connector (5), the bottom end of the liquid extracting pipe (10) extends into the raw material barrel, and the liquid extracting pipe (10) can be inserted into a liquid extracting pipe mounting hole (8-1) to be fixedly connected with the sealing cover (8);
the waste gas connecting pipe (11) can be inserted into the waste gas connecting pipe mounting hole (8-2) and fixedly connected with the sealing cover (8), and the waste gas connecting pipe (11) can be connected with a gas recovery device;
the nitrogen connecting pipe (12) is inserted into the nitrogen connecting pipe mounting hole (8-3) and is fixedly connected with the sealing cover (8), and the nitrogen connecting pipe (12) can be connected with a nitrogen pipeline.
2. The closed type tetraethyl orthosilicate material pumping pipe according to claim 1, further comprising a switch valve (1), a material discharging pipe (2), a pneumatic diaphragm pump (3) and a metal hose (4); one end of the metal hose (4) is connected with the quick connector (5), and the other end of the metal hose is connected with the pneumatic diaphragm pump (3);
the pneumatic diaphragm pump (3) is connected with the discharge pipe (2), and the discharge pipe (2) is provided with a switch valve (1).
3. The sealed tetraethyl orthosilicate extracting tube according to claim 1, characterized in that the top of the extracting tube (10) is provided with a ferrule type through joint (6) for connecting a quick joint (5).
4. The sealed tetraethyl orthosilicate discharging tube according to claim 1, wherein a waste gas connecting tube quick coupling (11-1) is arranged at the top end of the waste gas connecting tube (11), and a nitrogen gas connecting tube quick coupling (12-1) is arranged at the top end of the nitrogen gas connecting tube (12).
5. The sealed pumping pipe of tetraethoxysilane according to claim 1, characterized in that the cover (8) is provided with a rectangular fastening block (7) for facilitating the tightening of a wrench.
6. The sealed pumping pipe of tetraethoxysilane according to claim 1, characterized in that the cover (8) is provided with a thread (8-4) for mounting with a raw material barrel.
7. The sealed tetraethoxysilane drawing tube according to claim 1, wherein the sealing cover (8) is provided with a skirt (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222141434.6U CN217865729U (en) | 2022-08-15 | 2022-08-15 | Closed material pipe of taking out of tetraethoxysilane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222141434.6U CN217865729U (en) | 2022-08-15 | 2022-08-15 | Closed material pipe of taking out of tetraethoxysilane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217865729U true CN217865729U (en) | 2022-11-22 |
Family
ID=84076563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222141434.6U Active CN217865729U (en) | 2022-08-15 | 2022-08-15 | Closed material pipe of taking out of tetraethoxysilane |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217865729U (en) |
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2022
- 2022-08-15 CN CN202222141434.6U patent/CN217865729U/en active Active
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