CN217847885U

CN217847885U - Film pasting equipment for wafer

Info

Publication number: CN217847885U
Application number: CN202221703313.XU
Authority: CN
Inventors: 刘烽; 郁曹佳; 殷秋鹤; 刘兆山; 郭云静
Original assignee: Jiaxing Liankangwoyuan Technology Co ltd
Current assignee: Jiaxing Liankangwoyuan Technology Co ltd
Priority date: 2022-06-30
Filing date: 2022-06-30
Publication date: 2022-11-18
Anticipated expiration: 2032-06-30

Abstract

The utility model provides a pad pasting equipment for wafer belongs to mechanical technical field. This a pad pasting equipment for wafer, including the casing that has the supporting legs, the support is installed to casing one end, can dismantle on the support and rotate and be connected with the membrane material and unreel the axle, membrane material assistance-localization real-time strip has still been had on the support, casing one side is fixed with mounting bar one, be fixed with guide rail one on the mounting bar one, sliding connection has slider one on the guide rail one, slider one links to each other with the traction frame that is the U type, the traction frame tip all is fixed with the finger cylinder, the finger tip of finger cylinder has the clamp splice that is used for pressing from both sides tight membrane material, still be fixed with rack one on the mounting bar one, install servo motor one on the slider one, servo motor one's output shaft tip and gear one link to each other, the casing top is fixed with mounting bar two, be fixed with guide rail two on the mounting bar two, sliding connection has slider two on the guide rail two, be fixed with the location strip on the slider two, be fixed with cylinder one on the location strip, the piston rod tip and the lift fork of cylinder one link to each other.

Description

Film pasting equipment for wafer

Technical Field

The utility model belongs to the technical field of machinery, a pad pasting equipment, especially a pad pasting equipment for wafer is related to.

Background

Wafer refers to a silicon wafer used for making silicon semiconductor circuits, the starting material of which is silicon. And dissolving the high-purity polycrystalline silicon, doping the dissolved high-purity polycrystalline silicon into silicon crystal seed crystals, and slowly pulling out the silicon crystal seed crystals to form cylindrical monocrystalline silicon. The wafer film pasting is to paste a blue film or a UV film on a wafer, and the wafer is protected to be used for subsequent semiconductor processes such as polishing, thinning and cutting.

After retrieval, as disclosed in the chinese patent document, a wafer film pasting device [ application number: 200920253961.8; publication No.: CN 201623009U. The wafer film pasting device comprises a frame; a panel is fixed on the rack, a through round hole is formed in the middle of the panel, a chip platform is arranged on the panel, the upper surface of the chip platform is higher than the upper surface of the panel, a gap is reserved between the inner diameter of the through round hole and the outer diameter of the chip platform, and a positioning hoop is detachable from the panel and is concentric with the chip platform in arrangement position; a bracket with a Z-shaped sliding groove is fixed below the panel, a sliding block is installed on the outer side of each bracket, a bearing is arranged on each sliding block, each bearing is embedded in the Z-shaped sliding groove and reciprocates along the Z-shaped sliding groove, the middle part of each sliding block is connected with an elastic roller, each sliding block drives the elastic roller to reciprocate, each elastic roller can rotate around the axis of the corresponding elastic roller, and the initial position of each elastic roller is positioned above one end of the panel; the Z-shaped sliding chute is fixed below the panel, and the length of the Z-shaped sliding chute corresponds to the length of the panel; the rear end of the frame is also fixed with a glue film sleeve, and a glue film is wound on the glue film sleeve.

Although the circular film sticking device disclosed in the patent has a simple structure and a low failure rate, the device can only stick films to the wafers on one wafer turnover plate at a time, and the efficiency is low, so that a film sticking device for the wafers is necessary to design.

Disclosure of Invention

The utility model aims at having the above-mentioned problem to current technique, provided a pad pasting equipment for wafer, this pad pasting equipment has the characteristics that work efficiency is high.

The purpose of the utility model can be realized by the following technical proposal: a film sticking device for a wafer comprises a shell with supporting legs and is characterized in that a support is mounted at one end of the shell, a film unwinding shaft is detachably and rotatably connected to the support, a film auxiliary positioning strip is further arranged on the support, a first mounting strip is fixed to one side of the shell, a first guide rail is fixed to the first mounting strip, a first sliding block is slidably connected to the first guide rail, the first sliding block is connected with a U-shaped traction frame, finger cylinders are fixed to the end portions of the traction frames, clamping blocks used for clamping the film are arranged at the finger end portions of the finger cylinders, a first rack is further fixed to the first mounting strip, a first servo motor is mounted on the first sliding block, the end portion of an output shaft of the first servo motor is connected with the first gear, the first gear is meshed with the first rack, a second mounting strip is fixed to the top of the shell, A second guide rail is fixed on the second mounting bar, a second sliding block is connected to the second guide rail in a sliding mode, a positioning bar is fixed on the second sliding block, a first air cylinder is fixed on the positioning bar, a piston rod of the first air cylinder is vertically downward, the end portion of a piston rod of the first air cylinder is connected with a lifting fork, the lifting fork is horizontally rotated and provided with a pressing roller, a second rack is further fixed on the second mounting bar, a second servo motor is installed on the second sliding block, the end portion of an output shaft of the second servo motor is connected with the second gear, the second gear is meshed with the second rack, an operation opening is formed in one side of the shell, a plurality of placing platforms used for placing crystal circumferential rotating plates are connected to the operation opening in a sliding mode, the placing platforms are evenly distributed, a plurality of second air cylinders are further fixed on the other side of the shell, piston rods of the second cylinders are horizontally arranged, and the end portions of the piston rods of the second cylinders are connected with blades.

The working principle of the utility model is as follows: the placing table is pulled out, the wafer turnover plate is placed on the placing table, the placing table is pushed back into the shell, the finger cylinder clamps the membrane material at the auxiliary membrane material positioning strip, the servo motor drives the first gear to rotate, the first gear is meshed with the first rack and drives the first sliding block to horizontally move on the first guide rail, the finger cylinder drives the membrane material to move, and the membrane material unwinding shaft unwinds; the air cylinder drives the compression roller to descend to abut against the wafer circumferential rotating plate, the servo motor II drives the gear II to rotate, the gear II is meshed with the rack II and drives the sliding block II to horizontally move on the guide rail II, the film material is attached to the wafer on the wafer circumferential rotating plate, and the air cylinder II pushes the blade to cut off the film material; the film sticking can be simultaneously carried out on the wafers on the plurality of wafer turnover plates, and the film sticking efficiency is high.

Can press the membrane material on membrane material assistance-localization real-time strip when the compression roller pushes down, behind the membrane material is decided to the blade, because of there being the autohension on the membrane material, membrane material and the adhesion of membrane material assistance-localization real-time strip make the membrane material unreel the axle and leave out one section membrane material between the membrane material assistance-localization real-time strip, make things convenient for finger cylinder to press from both sides the membrane material next time, when finger cylinder clamp got membrane material back horizontal migration, can make and break away from between membrane material and the membrane material assistance-localization real-time strip through the pulling effect of finger cylinder.

And an electric cabinet is further installed on one side of the shell, and the first air cylinder, the second air cylinder, the finger air cylinder, the first servo motor and the second servo motor are electrically connected with the electric cabinet through circuits.

The placing table is connected with a handle.

Structure more than adopting, the platform is placed in convenient utilization handle promotion when getting the brilliant circumference of putting commentaries on classics board.

Both sides of the placing table are also provided with taking and placing gaps.

By adopting the structure, when the crystal circumferential rotating plate is taken out, the crystal circumferential rotating plate can be conveniently taken out by utilizing the taking and placing gap.

The top of the shell is provided with a plurality of auxiliary openings, and the top of the shell is hinged with a cover plate capable of sealing the auxiliary openings.

With the structure, a series of operations such as replacement of a film roll, inspection and maintenance and the like can be conveniently carried out on the inner part of the shell through the auxiliary port.

Compared with the prior art, the film sticking equipment for the wafer has the advantages that: the utility model discloses in pull out and place the platform and place wafer turnover board on placing the platform, will place the platform and push back the casing in, the membrane material is got to finger cylinder clamp at membrane material auxiliary positioning strip department, servo motor drive gear one and rotate, gear one meshes with rack one and drives slider one and move on guide rail one, finger cylinder drives the membrane material and moves, membrane material unreeling axle unreels; the air cylinder drives the compression roller to descend to abut against the wafer circumferential rotating plate, the servo motor II drives the gear II to rotate, the gear II is meshed with the rack II and drives the sliding block II to horizontally move on the guide rail II, the film material is attached to the wafer on the wafer circumferential rotating plate, and the air cylinder II pushes the blade to cut off the film material; the film can be pasted on the wafers on the plurality of wafer turnover plates at the same time, and the film pasting efficiency is high.

Drawings

Fig. 1 is a schematic perspective view of the present invention.

Fig. 2 is a schematic plan view of the present invention.

Fig. 3 is a schematic plan view of the removed part of the present invention.

Fig. 4 is a schematic plan view of the first mounting bar of the present invention.

Fig. 5 is a schematic perspective view of the middle traction frame of the present invention.

Fig. 6 is a schematic perspective view of the placement table according to the present invention.

In the figure, 1, a housing; 2. a cover plate; 3. a support; 4. an electric cabinet; 5. a handle; 6. a placing table; 6a, taking and placing gaps; 7. mounting a first bar; 8. rotating the wafer circumferentially; 9. a second air cylinder; 10. a blade; 11. auxiliary positioning strips for the membrane material; 12. a traction frame; 13. a finger cylinder; 14. unwinding a membrane material reel; 15. a first rack; 16. mounting a second bar; 17. a second rack; 18. a second guide rail; 19. a positioning bar; 20. a second sliding block; 21. a second gear; 22. a servo motor II; 23. a first cylinder; 24. a lifting fork; 25. a pressure roller; 26. a first guide rail; 27. a first sliding block; 28. supporting legs; 29. a first servo motor; 30. a first gear; 31. and (6) clamping blocks.

Detailed Description

The following are specific embodiments of the present invention and the accompanying drawings are used to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

As shown in fig. 1-6, the film pasting device for the wafer comprises a housing 1 with supporting legs 28, a support 3 is installed at one end of the housing 1, a film unreeling shaft 14 is detachably and rotatably connected to the support 3, a film auxiliary positioning strip 11 is further arranged on the support 3, a first mounting strip 7 is fixed on one side of the housing 1, a first guide rail 26 is fixed on the first mounting strip 7, a first slider 27 is slidably connected to the first guide rail 26, the first slider 27 is connected to a U-shaped traction frame 12, finger cylinders 13 are fixed at the end portions of the traction frame 12, clamping blocks 31 for clamping the film are arranged at the finger end portions of the finger cylinders 13, a first rack 15 is further fixed on the first mounting strip 7, a first servo motor 29 is installed on the first slider 27, the end portion of an output shaft of the first servo motor 29 is connected to a first gear 30, the first gear 30 is engaged with the first rack 15, a second mounting strip 16 is fixed at the top of the housing 1, and a second guide rail 18 is fixed on the second mounting strip 16, a second sliding block 20 is connected on the second guide rail 18 in a sliding manner, a positioning strip 19 is fixed on the second sliding block 20, a first air cylinder 23 is fixed on the positioning strip 19, a piston rod of the first air cylinder 23 is vertically downward, the end part of a piston rod of the first air cylinder 23 is connected with a lifting fork 24, a pressing roller 25 is horizontally and rotatably installed on the lifting fork 24, a second rack 17 is further fixed on the second mounting strip 16, a second servo motor 22 is installed on the second sliding block 20, the end part of an output shaft of the second servo motor 22 is connected with a second gear 21, the second gear 21 is meshed with the second rack 17, an operation opening is formed in one side of the shell 1, a placing table 6 used for placing the crystal circumferential rotating plate 8 is slidably connected at the operation opening, the number of the placing tables 6 is 3, the placing tables 6 are uniformly distributed, a second air cylinder 9 is further fixed on the other side of the shell 1, the number of the second air cylinders 9 is 3, and the piston rods of the second air cylinders 9 are horizontally arranged, the end of a piston rod of the second air cylinder 9 is connected with the blade 10.

An electric cabinet 4 is further installed on one side of the shell 1, and the first cylinder 23, the second cylinder 9, the finger cylinder 13, the first servo motor 29 and the second servo motor 22 are all electrically connected with the electric cabinet 4 through circuits.

The placing table 6 is connected with a handle 5.

By adopting the structure, the placing table 6 is convenient to push by the handle 5 when the crystal circumferential rotating plate 8 is placed.

The placing table 6 is also provided with taking and placing notches 6a at two sides.

By adopting the structure, when the crystal circumferential rotating plate 8 is taken out, the crystal circumferential rotating plate can be conveniently taken out by utilizing the taking and placing gap 6a.

The top of the shell 1 is provided with a plurality of auxiliary openings, and the top of the shell 1 is hinged with a cover plate 2 capable of sealing the auxiliary openings.

With the above structure, a series of operations such as replacement of a film roll, inspection and maintenance, etc. are conveniently performed to the inside of the housing 1 through the auxiliary port.

When the finger cylinder 13 is opened, the film can pass through the middle of the finger cylinder 13, and when the finger cylinder 13 is closed, the film can be clamped through the clamping block 31.

The cylinder I23, the cylinder II 9, the finger cylinder 13, the servo motor I29 and the servo motor II 22 are electrically connected with the electric cabinet 4 through circuits in the prior art.

The working principle of the utility model is as follows: pulling out the placing table 6, placing the wafer circumferential rotating plate 8 on the placing table 6, pushing the placing table 6 back into the shell 1, clamping the film material at the auxiliary film material positioning strip 11 by using the finger cylinder 13, driving the first gear 30 to rotate by using the first servo motor 29, meshing the first gear 30 with the first rack 15 and driving the first slider 27 to horizontally move on the first guide rail 26, driving the film material to move by using the finger cylinder 13, and unreeling the film material unreeling shaft 14; the first air cylinder 23 drives the pressing roller 25 to descend to abut against the wafer circumferential rotating plate 8, the second servo motor 22 drives the second gear 21 to rotate, the second gear 21 is meshed with the second rack 17 and drives the second sliding block 20 to horizontally move on the second guide rail 18, the film is attached to the wafer on the wafer circumferential rotating plate 8, and the second air cylinder 9 pushes the blade 10 to cut off the film; the film can be pasted on the wafers on the plurality of wafer circumferential rotating plates 8 at the same time, and the film pasting efficiency is high.

Pressing roll 25 can press the membrane material on membrane material assistance-localization real-time strip 11 when pushing down, behind the membrane material is decided to blade 10, because of there being the autohension on the membrane material, membrane material and the adhesion of membrane material assistance-localization real-time strip 11 make the membrane material unreel the axle 14 and leave one section membrane material between the membrane material assistance-localization real-time strip 11, make things convenient for finger cylinder 13 next time to press from both sides to get the membrane material, when finger cylinder 13 presss from both sides and gets membrane material horizontal migration, can make and break away from between membrane material and the membrane material assistance-localization real-time strip 11 through the pulling effect of finger cylinder 13.

The above components are all standard components or components known to those skilled in the art, and the structure and principle thereof can be known to those skilled in the art through technical manuals or through routine experiments.

The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described herein may be made by those skilled in the art without departing from the spirit of the invention or exceeding the scope of the invention as defined in the accompanying claims.

Claims

1. The film sticking equipment for the wafer comprises a shell (1) with supporting legs (28), and is characterized in that a support (3) is installed at one end of the shell (1), the support (3) is detachably and rotatably connected with a film unwinding shaft (14), a film auxiliary positioning strip (11) is further arranged on the support (3), a first mounting strip (7) is fixed on one side of the shell (1), a first guide rail (26) is fixed on the first mounting strip (7), a first sliding block (27) is connected on the first guide rail (26) in a sliding manner, the first sliding block (27) is connected with a U-shaped traction frame (12), finger cylinders (13) are fixed at the end parts of the traction frame (12), clamping blocks (31) for clamping the film are arranged at the finger end parts of the finger cylinders (13), a first rack (15) is further fixed on the first mounting strip (7), a first servo motor (29) is installed on the first sliding block (27), the output shaft end part of the first servo motor (29) is connected with the first gear (30), the first gear (30) is meshed with the first rack (15), a second guide rail (16) is fixed at the top of the shell (1), a second sliding block (18) is fixed on the second guide rail (18), a second sliding block (20) is fixed on the second sliding block (18), be fixed with cylinder one (23) on location strip (19), and the piston rod of cylinder one (23) is vertical downwards, the tailpiece of the piston rod portion and lift fork (24) of cylinder one (23) link to each other, lift fork (24) are gone up the level and are rotated and install compressing roller (25), still be fixed with rack two (17) on mounting bar two (16), install servo motor two (22) on slider two (20), the output shaft tip and gear two (21) of servo motor two (22) link to each other, gear two (21) and rack two (17) mesh mutually, casing (1) one side has the operation mouth, operation mouth department sliding connection has a plurality of platforms (6) of placing that are used for placing brilliant circumference rotor plate (8), and place platform (6) and be evenly distributed, casing (1) opposite side still is fixed with a plurality of cylinder two (9), and the piston rod level of cylinder two (9) sets up, the tailpiece of the piston rod portion and blade (10) of cylinder two (9) link to each other.

2. The film sticking equipment for the wafer according to claim 1, wherein an electric cabinet (4) is further installed on one side of the shell (1), and the first air cylinder (23), the second air cylinder (9), the finger air cylinder (13), the first servo motor (29) and the second servo motor (22) are electrically connected with the electric cabinet (4) through circuits.

3. The film laminating apparatus for the wafer according to claim 1, wherein a handle (5) is connected to the placing table (6).

4. The film pasting equipment for wafer as claimed in claim 1, wherein the placing table (6) is further provided with access notches (6 a) at two sides.

5. The film sticking equipment for the wafer as claimed in claim 1, wherein the top of the shell (1) is provided with a plurality of auxiliary openings, and the top of the shell (1) is hinged with a cover plate (42) capable of closing the auxiliary openings.