CN217846947U - Super-large-flow gas mass flow controller - Google Patents

Super-large-flow gas mass flow controller Download PDF

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Publication number
CN217846947U
CN217846947U CN202222190731.XU CN202222190731U CN217846947U CN 217846947 U CN217846947 U CN 217846947U CN 202222190731 U CN202222190731 U CN 202222190731U CN 217846947 U CN217846947 U CN 217846947U
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China
Prior art keywords
shell
sensor
solenoid valve
gas
mass flow
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CN202222190731.XU
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Chinese (zh)
Inventor
刘志新
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Shanxi Renhe Microelectronics Technology Co ltd
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Shanxi Renhe Microelectronics Technology Co ltd
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Abstract

The utility model discloses a gas mass flow controller of super large flow, including first shell, the both sides of first shell are provided with air inlet and gas outlet respectively, and have the second shell at the upper end rigid coupling of first shell, be provided with sensor, solenoid valve and circuit board in the second shell, sensor, solenoid valve respectively with sensor electric connection, still be provided with the valves in the first shell. The utility model discloses in the implementation, through the linkage cooperation of solenoid valve and valves, and then realize controlling bigger gas flow.

Description

Super-large flow gas mass flow controller
Technical Field
The utility model belongs to the technical field of the flowmeter, specifically be a gas mass flow controller of super large flow.
Background
The gas mass flow controller is a device for controlling the flow of gas, and when the gas mass flow controller is used, the gas mass flow controller is internally provided with electric elements such as a circuit board, a sensor, an electromagnetic valve and the like so as to control the flow of gas.
When a general gas mass flow controller is used, the electromagnetic valve directly controls a gas circuit, and the electromagnetic valve cannot control gas with larger flow because of smaller tube pass, so that certain defects exist in actual use.
Disclosure of Invention
To the above situation, for overcoming prior art's defect, the utility model provides a gas mass flow controller of super large flow, the effectual problem of having solved in the background art.
In order to achieve the above purpose, the utility model provides a following technical scheme: the utility model provides a gas mass flow controller of super large flow, includes first shell, the both sides of first shell are provided with air inlet and gas outlet respectively, and have the second shell at the upper end rigid coupling of first shell, be provided with sensor, solenoid valve and circuit board in the second shell, sensor, solenoid valve respectively with sensor electric connection, still be provided with the valves in the first shell.
Furthermore, a flow divider channel is arranged in the first shell.
Furthermore, a plug is arranged at the upper end of the second shell.
Compared with the prior art, the beneficial effects of the utility model are that:
1) The utility model discloses when using, through the linkage cooperation of solenoid valve and valves, and then realize controlling bigger gas flow.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is a schematic diagram of the internal structure of the present invention.
In the figure: 1. a first housing; 3. an air inlet; 4. an air outlet; 5. a second housing; 6. a plug; 16. a sensor; 17. an electromagnetic valve; 18. a valve block; 19. a diverter channel.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments; based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Given by fig. 1-2, the utility model discloses a gas mass flow controller of super large flow, including first shell 1, the both sides of first shell 1 are provided with air inlet 3 and gas outlet 4 respectively, and have second shell 5 at the upper end rigid coupling of first shell 1, are provided with sensor 16 in the second shell 5, solenoid valve 17 and circuit board, sensor 16, solenoid valve 17 respectively with sensor electric connection, still be provided with valves 18 in the first shell 1, solenoid valve 16 is in the operation, can link with valves 18, and then realize the control to the gas circuit.
A diverter channel 19 is also provided in the first housing 1.
The upper end of the second housing 5 is provided with a plug 6 to be connected to an external circuit.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (3)

1. A super large flow gas mass flow controller, comprising a first housing (1), characterized in that: the utility model discloses a sensor, including first shell (1), sensor (16), solenoid valve (17), circuit board, air inlet (3) and gas outlet (4) are provided with respectively to the both sides of first shell (1), and have second shell (5) at the upper end rigid coupling of first shell (1), be provided with sensor (16), solenoid valve (17) and circuit board in second shell (5), sensor (16), solenoid valve (17) respectively with sensor electric connection, still be provided with valves (18) in first shell (1).
2. The mass flow controller for super large flows of gas of claim 1, wherein: a flow divider channel (19) is also arranged in the first shell (1).
3. The mass flow controller for super large flows of gas of claim 1, wherein: and a plug (6) is arranged at the upper end of the second shell (5).
CN202222190731.XU 2022-08-19 2022-08-19 Super-large-flow gas mass flow controller Active CN217846947U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222190731.XU CN217846947U (en) 2022-08-19 2022-08-19 Super-large-flow gas mass flow controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222190731.XU CN217846947U (en) 2022-08-19 2022-08-19 Super-large-flow gas mass flow controller

Publications (1)

Publication Number Publication Date
CN217846947U true CN217846947U (en) 2022-11-18

Family

ID=84016263

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202222190731.XU Active CN217846947U (en) 2022-08-19 2022-08-19 Super-large-flow gas mass flow controller

Country Status (1)

Country Link
CN (1) CN217846947U (en)

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