CN217844695U - Roller hearth type annealing furnace hot air circulating device - Google Patents

Abstract

The utility model discloses a roller hearth type annealing furnace heated air circulation device, including annealing furnace body, annealing furnace body inside is equipped with the circulation blade, annealing furnace body bottom is equipped with the bottom plate, install actuating mechanism on the bottom plate, annealing furnace body top is equipped with heated air circulation mechanism, heated air circulation mechanism includes the fill of admitting air, the top at annealing furnace body is installed to the fill of admitting air, and the top installation circulating pipe of the fill of admitting air, the circulating pipe is kept away from the one end of the fill of admitting air and is extended to the outside of annealing furnace body, the outer wall of circulating pipe is equipped with the outlet duct, and the internal connection that outlet duct one end extends to annealing furnace body has out the fill of admitting air. The utility model discloses in, through the actuating mechanism who sets up, can drive circulating blade and rotate the inside hot-blast rebound that makes annealing stove body to discharge to the outside of annealing stove body through air inlet hopper and circulating pipe, make the inside of getting back to annealing stove body once more hot-blast by the outlet duct with giving vent to anger fill again at last, realize heated air circulation's effect, make this internal temperature of annealing stove unanimous.

Description

Roller hearth type annealing furnace hot air circulating device

Technical Field

The utility model relates to an annealing furnace technical field especially relates to a roller hearth type annealing furnace heated air circulation device.

Background

An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties. The roller hearth annealing furnace is one of the annealing furnaces, the height and the inner space of the roller hearth annealing furnace are narrow, and because the circulating device is not arranged inside the furnace body, the temperature is not uniform when the heat conduction is caused, the furnace wall and the furnace body have large temperature difference, the heating temperature of the product in the middle is high, the heating temperatures of the two sides are low, and the deviation of the hardness of the product is easy to occur.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a roller hearth annealing furnace hot air circulating device.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a roller hearth type annealing furnace heated air circulation device, includes annealing furnace body, annealing furnace body's inside is equipped with the circulation blade, annealing furnace body's bottom is equipped with the bottom plate, install on the bottom plate and be used for driving circulation blade pivoted actuating mechanism, annealing furnace body's top is equipped with heated air circulation mechanism, heated air circulation mechanism is including admitting air the fill, admit air the fill and install at annealing furnace body's top, and admit air the top of fighting and install the circulating pipe, the circulating pipe is kept away from the one end that admits air the fill and is extended to annealing furnace body's outside, the outer wall equidistance of circulating pipe is equipped with a plurality of outlet ducts, and the one end that the circulating pipe was kept away from to the outlet duct extends to annealing furnace body's internal connection has out the air fill.

Preferably, the driving mechanism comprises a motor, the motor is installed at the top of the bottom plate, the output end of the motor is coaxially connected with a first rotating shaft, and one end, far away from the motor, of the first rotating shaft extends to the inside of the annealing furnace body and is fixedly connected with the circulating blades.

Preferably, the inside of annealing stove body is equipped with second pivot and third pivot respectively, and the top of second pivot and third pivot all installs and places the board, the bottom of annealing stove body is all passed and first gear and second gear are fixed mounting respectively to the bottom of second pivot and third pivot, the outer wall of second pivot and third pivot still is equipped with the anticreep piece.

Preferably, a rotating disc is fixedly arranged on the outer wall of one end, close to the motor, of the first rotating shaft, a plurality of driving blocks are uniformly distributed on the outer wall of the rotating disc, and the driving blocks are respectively in rotating fit with the first gear and the second gear.

Preferably, the top of the annealing furnace body is provided with an opening, a top cover covers the opening, and a handle is fixedly arranged at the top of the top cover.

Preferably, the heating plate is installed on the inner bottom surface of the annealing furnace body, and a plurality of supporting legs are arranged at the bottom of the annealing furnace body.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the arranged driving mechanism can drive the circulating blades to rotate, so that hot air in the annealing furnace body moves upwards and is discharged to the outside of the annealing furnace body through the air inlet hopper and the circulating pipe, and finally the hot air returns to the inside of the annealing furnace body again through the air outlet pipe and the air outlet hopper, thereby realizing the effect of hot air circulation and ensuring the temperature in the annealing furnace body to be consistent;

2. when the motor drives the circulating blade pivoted, the carousel of first pivot outer wall and drive block together rotate to through first gear and the second gear with drive block engaged with, drive the board intermittent type rotation of placing at second pivot, third pivot and top, the work piece of conveniently placing on the board is heated evenly, increases the practicality of device.

Drawings

FIG. 1 is a schematic structural view of a hot air circulating device of a roller hearth annealing furnace according to the present invention;

fig. 2 is a sectional view of the structure of fig. 1.

In the figure: 1. an annealing furnace body; 2. a top cover; 3. a handle; 4. a circulation pipe; 5. an air outlet pipe; 6. a support leg; 7. a base plate; 8. an air inlet hopper; 9. placing the plate; 10. a second rotating shaft; 11. a motor; 12. a turntable; 13. a drive block; 14. a first rotating shaft; 15. a circulating blade; 16. a first gear; 17. a second gear; 18. an anti-drop block; 19. a third rotating shaft; 20. an air outlet hopper.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-2, a roller hearth annealing furnace hot air circulating device, including annealing furnace body 1, annealing furnace body 1's inside is equipped with circulation blade 15, annealing furnace body 1's bottom is equipped with bottom plate 7, install on bottom plate 7 and be used for driving circulation blade 15 pivoted actuating mechanism, annealing furnace body 1's top is equipped with hot air circulation mechanism, hot air circulation mechanism includes air intake hopper 8, air intake hopper 8 installs at annealing furnace body 1's top, and air intake hopper 8's top installs circulating pipe 4, circulating pipe 4 keeps away from the one end of air intake hopper 8 and extends to annealing furnace body 1's outside, circulating pipe 4's outer wall equidistance is equipped with a plurality of outlet ducts 5, and outlet duct 5 keeps away from the one end of circulating pipe 4 and extends to annealing furnace body 1's internal connection has air outlet hopper 20. Through the rotation of circulating blade 15 for the interior hot-blast upward movement of annealing stove body 1 to discharge to circulating pipe 4 in through advancing air hopper 8, then by circulating pipe 4 outer wall's outlet duct 5 and play air hopper 20 make hot-blast get back to annealing stove body 1 once more in, realize hot-blast circulation, and then realize the unanimity of annealing stove body 1 interior temperature.

The driving mechanism comprises a motor 11, the motor 11 is installed at the top of the bottom plate 7, the output end of the motor 11 is coaxially connected with a first rotating shaft 14, and one end, far away from the motor 11, of the first rotating shaft 14 extends to the inside of the annealing furnace body 1 and is fixedly connected with a circulating blade 15. The starting motor 11 drives the first rotating shaft 14 to rotate, and then drives the circulating blade 15 to rotate in the annealing furnace body 1, so that the hot air in the annealing furnace body 1 can move upwards.

The inside of annealing stove body 1 is equipped with second pivot 10 and third pivot 19 respectively, and the top of second pivot 10 and third pivot 19 is all installed and is placed board 9, the bottom of annealing stove body 1 is all passed and fixed mounting has first gear 16 and second gear 17 respectively to the bottom of second pivot 10 and third pivot 19, the outer wall of second pivot 10 and third pivot 19 still is equipped with anticreep piece 18, first pivot 14 is close to the fixed carousel 12 that is equipped with of one end outer wall of motor 11, and the outer wall evenly distributed of carousel 12 has a plurality of drive blocks 13, a plurality of drive blocks 13 rotate the cooperation with first gear 16 and second gear 17 respectively, the top of annealing stove body 1 is equipped with the opening, and the opening part lid is equipped with top cap 2, the top of top cap 2 is fixed and is equipped with handle 3, the hot plate is installed to the interior bottom surface of annealing stove body 1, the bottom of annealing stove body 1 is equipped with a plurality of landing legs 6. When the motor 11 drives the first rotating shaft 14 to rotate, the rotating disc 12 and the driving block 13 on the outer wall of the first rotating shaft 14 rotate, so that the first gear 16 and the second gear 17 meshed with the driving block 13 rotate together intermittently, the second rotating shaft 10 and the third rotating shaft 19 are driven to rotate intermittently in the annealing furnace body 1, and a workpiece placed at the top of the placing plate 9 can be heated uniformly.

In the utility model, the starting motor 11 drives the first rotating shaft 14 to rotate, and then drives the circulating blade 15 to rotate in the annealing furnace body 1, so that the hot air in the annealing furnace body 1 can move upwards and be discharged into the circulating pipe 4 through the air inlet hopper 8, and then the hot air is returned into the annealing furnace body 1 again through the air outlet pipe 5 and the air outlet hopper 20 on the outer wall of the circulating pipe 4, thereby realizing the circulation of the hot air and further realizing the consistency of the temperature in the annealing furnace body 1; when the motor 11 drives the first rotating shaft 14 to rotate, the rotating disc 12 and the driving block 13 on the outer wall of the first rotating shaft 14 rotate, so that the first gear 16 and the second gear 17 meshed with the driving block 13 rotate intermittently together, the second rotating shaft 10 and the third rotating shaft 19 are driven to rotate intermittently in the annealing furnace body 1, and workpieces placed on the top of the placing plate 9 can be heated uniformly.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (6)

1. The utility model provides a roller hearth type annealing furnace heated air circulation device, includes annealing furnace body (1), its characterized in that, the inside of annealing furnace body (1) is equipped with circulation blade (15), the bottom of annealing furnace body (1) is equipped with bottom plate (7), install on bottom plate (7) and be used for driving circulation blade (15) pivoted actuating mechanism, the top of annealing furnace body (1) is equipped with heated air circulation mechanism, heated air circulation mechanism is including admitting air fill (8), admit air fill (8) and install at the top of annealing furnace body (1), and admit air the top of fighting (8) and install circulating pipe (4), the one end that admits air fill (8) was kept away from in circulating pipe (4) extends to the outside of annealing furnace body (1), the outer wall equidistance of circulating pipe (4) is equipped with a plurality of outlet duct (5), and outlet duct (5) keep away from the one end of circulating pipe (4) and extend to the internal connection of annealing furnace body (1) has air-out fill (20).

2. The hot air circulating device of the roller hearth annealing furnace according to the claim 1, characterized in that the driving mechanism comprises a motor (11), the motor (11) is installed on the top of the bottom plate (7), the output end of the motor (11) is coaxially connected with a first rotating shaft (14), one end of the first rotating shaft (14) far away from the motor (11) extends to the inside of the annealing furnace body (1) and is fixedly connected with a circulating blade (15).

3. The roller hearth annealing furnace hot air circulating device according to claim 2, characterized in that the inside of the annealing furnace body (1) is respectively provided with a second rotating shaft (10) and a third rotating shaft (19), the top parts of the second rotating shaft (10) and the third rotating shaft (19) are respectively provided with a placing plate (9), the bottom ends of the second rotating shaft (10) and the third rotating shaft (19) penetrate through the bottom part of the annealing furnace body (1) and are respectively and fixedly provided with a first gear (16) and a second gear (17), and the outer walls of the second rotating shaft (10) and the third rotating shaft (19) are further provided with an anti-falling block (18).

4. The hot air circulating device of the roller hearth annealing furnace according to claim 3, wherein the outer wall of one end of the first rotating shaft (14) close to the motor (11) is fixedly provided with a rotating disc (12), a plurality of driving blocks (13) are uniformly distributed on the outer wall of the rotating disc (12), and the plurality of driving blocks (13) are respectively in rotating fit with the first gear (16) and the second gear (17).

5. The hot air circulating device of the roller hearth annealing furnace according to claim 1, characterized in that the top of the annealing furnace body (1) is provided with an opening, a top cover (2) is covered at the opening, and a handle (3) is fixedly arranged at the top of the top cover (2).

6. The hot air circulation device of the roller hearth annealing furnace according to the claim 1, characterized in that the inner bottom surface of the annealing furnace body (1) is installed with a heating plate, and the bottom of the annealing furnace body (1) is provided with a plurality of supporting legs (6).

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