CN217839098U - Metal mask - Google Patents
Metal mask Download PDFInfo
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- CN217839098U CN217839098U CN202221296574.4U CN202221296574U CN217839098U CN 217839098 U CN217839098 U CN 217839098U CN 202221296574 U CN202221296574 U CN 202221296574U CN 217839098 U CN217839098 U CN 217839098U
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Abstract
The utility model discloses a metal mask version relates to and shows technical field, and it can solve among the prior art at least part when mask version uses the pulling force of opening a net, the frame district and the wire side district of mask version main part need different pulling forces, cause wire side district dog-ear department to appear deformation easily, influence the problem of mask version finished product quality. The embodiment of the utility model provides a pair of metal mask version, including having the mask version main part that shelters from the district, the top half etching that shelters from the district has the heavy unit that subtracts that a plurality of spaced apart formulas set up, and unit area subtracts heavy unit distribution density and is regular formula reduction toward the corner position along the intermediate position that shelters from the district top.
Description
Technical Field
The utility model relates to a show technical field, concretely relates to metal mask version.
Background
The metal mask is one of main tools in an AMOLED product evaporation process, and an evaporation area is limited through an opening in the mask. The preparation of metal mask version needs to use certain net pulling force stretch-draw with the metal mask version and then use laser to weld the mask version on the frame through a net technology to resist the wire side flagging amount that wire side gravity caused, but stretch-net pulling force itself can make the wire side produce deformation in the face, influence the position accuracy of wire side pattern.
In the past, in order to solve the above-mentioned strain problem, it is common practice to: when the deformation allowance is set, the same shrinkage rate is used for the whole edge of the metal mask. Under this condition, as shown in fig. 2, because each vertex angle position of the metal mask plate is not easy to generate tensile deformation, the metal mask plate can generate a preset deformation allowance only by using larger tension force at the positions, but the mesh surface of the metal mask plate is easier to deform at each corner position due to the overlarge tension force, and the quality of a finished product of the mask plate is further influenced.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a metal mask version and manufacturing method for when solving among the prior art mask version and using a net pulling force, the frame district and the wire side district of mask version main part need different pulling forces, cause wire side district dog-ear department to appear deformation easily, influence the problem of mask version finished product quality.
In order to solve the technical problem, the utility model discloses a following scheme:
an aspect of the utility model provides a metal mask version, including having the mask version main part that shelters from the district, the top half etching that shelters from the district has the heavy unit that subtracts that a plurality of spaced apart formulas set up, and unit area subtracts heavy unit distribution density and is regular formula reduction toward the corner position along the intermediate position that shelters from the district top.
Optionally, the shielding area includes a frame shielding area, and the distribution density of the weight reduction units decreases toward a corner of the frame shielding area along a middle position of the frame shielding area.
Optionally, the frame shielding area includes a long frame shielding area and a short frame shielding area, and the long frame shielding area and the short frame shielding area form a rectangular frame shielding area;
the length and the width that long frame sheltered from the district all are greater than short frame and shelter from the district, and long frame shelters from the weight unit distribution density that subtracts in district and reduces toward the dog-ear department that long frame sheltered from the district along its intermediate position.
Optionally, the long-frame shielding area is provided with two rows of weight reduction units arranged in parallel, and the distribution density of the two rows of weight reduction units is reduced towards the break angle along the middle position of the long-frame shielding area; the short frame shielding area is provided with at least one row of weight reduction units.
Optionally, the shielding area further includes a mesh shielding area disposed in the frame shielding area, and the distribution density of the weight reduction units decreases toward the frame shielding area along the central position of the mesh shielding area;
the distribution density of the weight reduction units in the net surface shielding area is smaller than that of the frame shielding area.
Optionally, the distribution density rule of the weight reduction units includes, but is not limited to, the following three rules:
rule one: the distribution density is uniformly reduced from the middle position of the top of the shielding area to the corner position;
rule two: the distribution density is in direct proportion along the distance from the gravity arm to the corner position;
rule three: the distribution density is in direct proportion to the standing sag of the shielding area at the distribution position.
Optionally, the distribution density of the weight reducing units is distributed according to a first rule.
Optionally, the shapes of the weight-reducing units include, but are not limited to, the following: circular, oval, circular or regular polygonal hole shape.
Optionally, the weight reducing units have the same structure and are all round blind holes.
Another aspect of the present invention provides a method for manufacturing a metal mask, which is used for manufacturing any one of the above metal masks, and specifically includes the following steps:
step S1: when the evaporation area is half-etched on the top of the mask plate main body, the weight reduction unit is half-etched in the shielding area;
step S2: on the basis of the step S1, only the evaporation area is etched until the evaporation area is etched through.
The utility model discloses beneficial effect who has:
the utility model discloses a metal mask version, including having the mask version main part that shelters from the district, the top half etching that shelters from the district has the heavy unit that subtracts that a plurality of spaced apart formulas set up, and unit area subtracts heavy unit distribution density and is the reduction of regular formula toward the corner position along the intermediate position that shelters from the district.
The function is as follows: the weight reducing units are arranged at the top of the mask main body in a half etching interval mode, the weight reducing units in unit area are regularly reduced from the middle position of the shielding area to the corner position, the gravity moment of each position of the shielding area of the mask main body can be reduced and balanced, the screen drooping amount of the middle position of the mask main body is reduced, the tension required by each position of the shielding area of the mask main body is reduced, meanwhile, the arranged weight reducing units can directly damage the whole structure of the shielding area of the mask main body, the structural strength of the mask main body is reduced, the tension required by pulling the mask main body to deform is reduced, the tension difference between the screen area and the shielding area is reduced, therefore, the weight reducing units with the distribution density gradually reduced from the middle to the edge are arranged in the shielding area at the top of the mask main body, the deformation amount of four corners of the screen area of the mask main body can be reduced from two aspects of directly reducing the screen drooping and balancing the tension, the quality of a finished product of the mask is improved, and the problem that the quality of a finished product of the mask is influenced by the deformation of the screen shielding area at each corner in the screen shielding area in the prior art is solved.
Drawings
FIG. 1 is a schematic top view of a metal mask in the prior art;
FIG. 2 is a schematic diagram of a prior art top view of a tensioned metal mask;
FIG. 3 is a left side view schematic diagram of a metal mask plate with a mesh surface standing and sagging in the prior art;
FIG. 4 is a schematic top view of a metal mask according to an embodiment;
FIG. 5 is a schematic top view of a metal mask according to a second embodiment;
fig. 6 is a schematic left-view diagram of the shielding region in the second embodiment after the gravitational moment at each position is balanced;
FIG. 7 is a schematic top view of a tensioned metal mask in accordance with the second embodiment;
description of reference numerals: 1-mask main body, 11-frame shielding area, 111-long frame shielding area, 112-short frame shielding area, 12-screen surface shielding area, 13-weight reduction unit and 14-evaporation area.
Detailed Description
The present invention will be described in further detail with reference to the following examples and drawings, but the present invention is not limited thereto.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and the terms are only for convenience of description of the present invention and simplifying the description, but do not indicate or imply that the device or element to which the term refers must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, it should be further noted that, unless otherwise explicitly specified or limited, the terms "disposed," "opened," "installed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The invention is explained in detail below with reference to the figures and with reference to exemplary embodiments:
the first embodiment is as follows:
as shown in fig. 4, an aspect of the present invention provides a metal mask, including having mask main body 1 that shelters from the district, the top half-etching that shelters from the district has a plurality of spaced type settings subtract heavy unit 13, and unit area's the unit 13 distribution density that subtracts is the regular reduction toward the corner position along the intermediate position that shelters from the district top.
Through the weight reducing units 13 arranged at the top of the mask plate main body 1 in a semi-etching interval manner, the weight reducing units 13 in unit area are regularly reduced towards corner positions along the middle position of the shielding area, the gravity moment of each position of the shielding area of the mask plate main body 1 can be reduced and balanced, the mesh surface sag of the middle position of the mask plate main body 1 is reduced, the tensile force required by each position of the shielding area of the mask plate main body 1 is reduced, meanwhile, the arranged weight reducing units 13 can directly damage the whole structure of the shielding area of the mask plate main body 1, the structural strength of the mask plate main body is reduced, the tensile force required by pulling the mask plate main body 1 to deform is reduced, therefore, the weight reducing units 13 with the distribution density gradually reduced from the middle part to the edge are arranged in the shielding area at the top of the mask plate main body 1, the tensile force difference required by pulling the shielding area and the mesh surface area can be reduced from the aspects of directly reducing the mesh surface sag and the tensile force, the deformation quantity of the mesh surface area at the break angle of the mask plate main body 1 is reduced, the finished product quality of the mask plate is improved, and the problem that the deformation of the mesh surface shield area 12 easily occurs at the break angle in the prior art is solved.
In the prior art, as shown in fig. 1 to 3, the shielding widths of the mesh areas of the mask main body 1 are uniform from the middle position to the edge, so that the gravitational moment of the mask main body 1 gradually decreases from the middle position to the edge position, which results in that the sagging amount of the mesh area of the mask main body 1 gradually decreases from the middle position to the edge position. In the prior art, in order to resist the sagging of the screen surface of the mask plate main body 1, the method of using the same shrinkage rate for the whole edge is generally adopted, however, since the shielding width of the frame area of the shielding area of the mask plate main body 1 is larger than that of the screen area, the deformation amount of the frame area is not up to standard when the same or similar pulling force F is used around the mask plate main body 1, and similarly, as shown in fig. 2, in order to make the deformation amount of the frame area up to standard, the deformation amount of the folding angle of the screen surface shielding area 12 is larger when a larger pulling force is used at the folding angle of the frame, and further the final quality of the mask plate finished product is influenced.
Generally, because the method for resisting the screen surface sag of the mask plate main body 1 in the prior art is a method using the same shrinkage rate for the same edge, and the problem in the prior art is that the deformation amount of a screen surface folding angle caused by the larger tension at the frame is larger, in order to solve the problem, the common solution idea is to use different shrinkage rates according to the different positions of the mask plate main body 1, so that the stress at each position of the mask plate main body 1 is different, and the same or similar deformation amount still exists.
The solution idea of this embodiment is: reduce the tensioning pulling force that the pulling frame sheltered from district 11 and the sagging tensioning pulling force of opposition wire side through destroying the structural strength who shelters from the district and reconfiguring two aspects of the gravity distribution who shelters from the district, and then dwindle the pulling force difference that the pulling frame sheltered from district 11 and wire side district, and then reduce four dog-ear deformation volume in mask version main part 1 wire side district.
In this embodiment, the sagging amount of each position of the mesh surface shielding region 12 can be directly reduced and balanced by reconfiguring the gravity distribution of each position of the mask plate main body 1, the tensioning tension resisting the sagging of the mesh surface is reduced, and the deformation amount of four folding angles of the mesh surface region of the mask plate main body 1 is reduced; simultaneously, because subtract heavy unit 13 among this embodiment for the spaced type set up on sheltering from the district, consequently shelter from the overall structure in district and can be destroyed directly, shelter from the overall structure intensity in district and reduce, the pulling shelters from the required pulling force reduction of district deformation, thereby lead to the wire side to shelter from the deformation volume reduction of 12 dog-ear departments in district, consequently, this embodiment reduces and balanced pulling force for two aspects of the reduction wire side sag and the destruction of sheltering from district overall structure intensity through balanced gravity distribution, with the design concept that reduces the deformation volume, for general solution thinking, the utility model discloses design concept's mask version main part 1 of route more is laminating actual production. Tests show that in the prior art, the middle position of the frame of the mask plate main body 1 needs 30N to 40N, and the folding angle needs 100N to 200N of tensioning force to resist the sagging of the net surface; in this embodiment, the change of the tension of the middle position of the frame of the mask main body 1 is small, but the tension of the folded angle can be reduced by about half, that is, the sagging amount of the screen surface can be resisted, so that the tension difference between the middle position and the folded angle is reduced.
Specifically, the shielding area includes a frame shielding area 11, and the distribution density of the weight reduction units 13 decreases toward the corner of the frame shielding area 11 along the middle position of the frame shielding area 11.
Specifically, the frame shielding area 11 includes a long frame shielding area 111 and a short frame shielding area 112, and the long frame shielding area 111 and the short frame shielding area 112 form a rectangular frame shielding area 11;
the length and the width of the long frame shielding area 111 are both larger than those of the short frame shielding area 112, and the distribution density of the weight reducing units 13 of the long frame shielding area 111 is reduced towards the folding angle of the long frame shielding area 111 along the middle position thereof.
In this embodiment, the frame shielding area 11 includes two long frame shielding areas 111 and two short frame shielding areas 112, each long frame shielding area 111 is provided with two rows of weight reducing units 13 arranged in parallel, and each short frame shielding area 112 is provided with one row of weight reducing units 13.
Specifically, the long-frame shielding area 111 is provided with two rows of weight reduction units 13 arranged in parallel, and the distribution density of the two rows of weight reduction units 13 is reduced towards the folding angle along the middle position of the long-frame shielding area 111; the short-frame shielding area 112 is provided with at least one row of weight reduction units 13. The weight reducing units 13 arranged in parallel in two rows are uniformly reduced from the middle position to the corner of the long-frame shielding area 111.
Specifically, the shapes of the weight reduction units 13 include, but are not limited to, the following: circular, oval, circular or regular polygonal hole shape. When the weight reduction unit 13 is an elliptical hole, a connecting line between two focuses of the elliptical hole of the long-frame shielding region 111 is perpendicular to a side of the long frame, and similarly, a connecting line between two focuses of the elliptical hole of the short-frame shielding region 112 is perpendicular to a side of the short frame. The weight-reducing unit 13 may also be in the shape of a circular ring hole or a regular polygonal hole. When the weight-reducing unit 13 has a regular polygon shape, it may have a regular hexagon shape.
Specifically, the weight reducing units 13 have the same structure and are all round blind holes. In the embodiment, the design of the circular blind holes is adopted, and meanwhile, the warping caused by the stress change of the etching section can be effectively reduced due to the interval arrangement of the circular blind holes.
In this embodiment, the mask body 1 is provided with the weight reducing unit 13 only on one side surface, so as to avoid the situation that the liquid medicine cannot be cleaned, and the weight reducing unit 13 in the shape of the circular hole in this embodiment can reduce the weight of the mask body 1 and can reduce the friction area between the mask body 1 and the glass.
Example two:
on the basis of the first embodiment, specifically, as shown in fig. 5 to 7, the shielding region further includes a mesh shielding region 12 disposed in the frame shielding region 11, and the distribution density of the weight reduction units 13 decreases toward the frame shielding region 11 along the central position of the mesh shielding region 12;
the distribution density of the weight reducing units 13 of the screen surface shielding area 12 is less than that of the frame shielding area 11.
In this embodiment, as shown in fig. 5, the mesh-surface shielding region 12 is in a grid shape, and the evaporation region 14 of the mask plate main body 1 is in the grid, so that the mass and the weight of the mesh-surface shielding region 12 per unit area are both smaller than the mass and the weight of the frame shielding region 11, and therefore, to balance the gravitational moments of the mesh-surface shielding region 12 and the frame shielding region 11, the distribution density of the weight reduction units 13 of the mesh-surface shielding region 12 is smaller than the distribution density of the frame shielding region 11; meanwhile, the whole width of the frame shielding area 11 is larger than that of the mesh surface shielding area 12, and the weight reduction units 13, which are more dense in the frame shielding area 11, can damage the whole structural strength of the frame shielding area 11, so that the frame shielding area 11 reduces the tensile force required by the deformation amount of the frame shielding area 11.
In this embodiment, as shown in fig. 5, the weight reducing units 13 in the mesh-surface shielding area 12 are distributed in a queue along the long-frame shielding area 111, and the distribution density of the weight reducing units 13 in the mesh-surface shielding area 12 is uniformly reduced from the central position to the long-frame direction and the short-frame direction.
Optionally, the distribution density rule of the weight reducing units 13 includes, but is not limited to, the following three rules:
rule one: the distribution density is uniformly reduced from the middle position of the top of the shielding area to the corner position;
rule two: the distribution density is in direct proportion along the distance from the gravity arm to the corner position;
and a rule III: the distribution density is in direct proportion to the standing sag of the shielding area at the distribution position.
Preferably, the distribution density of the weight reducing units 13 is distributed according to a regular pattern.
In this embodiment, the distribution rule of the weight reducing units 13 may also be distributed by using rule two or rule three.
In the second rule, the greater the distance between the weight reducing units 13 and the gravity arm at the corner position is, the greater the distribution density of the weight reducing units 13 is, the greater the density of the weight reducing units 13 in a unit area is, and therefore, in the second rule, the greater the gravity arm is, the smaller the mass and the weight in the unit area is, and because the gravity moment is the product of gravity and the gravity arm, the gravity moment of the weight reducing units 13 in the second rule can make the gravity moments of the mask main body 1 at all positions tend to be consistent, so that the tensioning tension of the mask main body 1 at all positions can be reduced and balanced, and the quality of a mask finished product is improved.
In the third law, when mask version main part 1 is unsettled fixed, the flagging amount of stewing of its different positions department is different, and generally speaking, toward central point more, the flagging amount of stewing is big more, consequently, subtracts heavy unit 13's distribution density and shelters from the district flagging amount of stewing and is the direct proportion setting, can reach the result of use that reduces tensioning pulling force, promotes mask version finished product quality through balanced and the gravitational moment that reduces each position.
In this embodiment, the weight reduction unit 13 may further adopt a distribution rule that the distribution density decreases in equal proportion from the middle position of the top of the shielding area to the corner position. And after the mask plate main body 1 is tensioned, the distribution density of the weight reduction units 13 is gradually increased along with the deformation of the frame shielding area 11 and the screen surface shielding area 12.
Example three:
on the basis of the second embodiment, another aspect of the present invention provides a method for manufacturing a metal mask, which is used for manufacturing any one of the metal masks described above, and specifically includes the following steps:
step S1: a weight reduction unit 13 is half-etched in the shielding area while the evaporation area 14 is half-etched on the top of the mask plate main body 1;
step S2: on the basis of step S1, only the evaporation zone 14 is etched until the evaporation zone 14 is etched through.
In this embodiment, the weight reducing units 13 are round blind holes, the evaporation regions 14 are distributed in an array in the grids of the mesh surface shielding region 12, and the evaporation regions 14 are square holes distributed in an array.
Before step S1, conventional cleaning, film pasting, exposure, development and other steps are also included.
It is to be understood that the above embodiments are merely exemplary embodiments that have been employed to illustrate the principles of the present invention, and that the present invention is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the invention, and such changes and modifications are to be considered as within the scope of the invention.
Claims (8)
1. A metal mask comprises a mask body (1) with a shielding area, and is characterized in that a plurality of weight reducing units (13) arranged at intervals are half-etched on the top of the shielding area, and the distribution density of the weight reducing units (13) in unit area is regularly reduced from the middle position of the top of the shielding area to the corner position;
the distribution density rule of the weight reducing units (13) comprises the following three types:
rule one: the distribution density is uniformly reduced from the middle position of the top of the shielding area to the corner position;
rule two: the distribution density is in direct proportion along the distance from the gravity arm to the corner position;
rule three: the distribution density is in direct proportion to the standing sagging amount of the shielding area at the distribution position.
2. The metal mask according to claim 1, wherein the shielding region comprises a frame shielding region (11), and the distribution density of the weight reduction units (13) decreases from the middle position of the frame shielding region (11) to the corner of the frame shielding region (11).
3. The metal mask according to claim 2, wherein the frame shielding region (11) comprises a long frame shielding region (111) and a short frame shielding region (112), and the long frame shielding region (111) and the short frame shielding region (112) form a rectangular frame shielding region (11);
the length and the width of the long frame shielding area (111) are both larger than those of the short frame shielding area (112), and the distribution density of the weight reducing units (13) of the long frame shielding area (111) is reduced towards the corner of the long frame shielding area (111) along the middle position of the weight reducing units.
4. The metal mask plate according to claim 3, wherein the long-frame shielding area (111) is provided with two rows of weight reduction units (13) arranged in parallel, and the distribution density of the two rows of weight reduction units (13) is reduced towards the folding angle along the middle position of the long-frame shielding area (111); the short frame shielding area (112) is provided with at least one row of weight reduction units (13).
5. The metal mask according to claim 2, wherein the shielding region further comprises a mesh shielding region (12) disposed in the frame shielding region (11), and the distribution density of the weight reduction units (13) decreases toward the frame shielding region (11) along the central position of the mesh shielding region (12);
the distribution density of the weight reduction units (13) of the net surface shielding area (12) is smaller than that of the frame shielding area (11).
6. The metal mask according to claim 1, wherein the distribution density of the weight reduction units (13) is distributed according to a regular pattern.
7. The metal mask according to claim 1, wherein the weight-reducing unit (13) has a shape comprising: circular, oval, circular or regular polygonal hole shape.
8. The metal mask according to claim 7, wherein the weight reducing units (13) have the same structure and are round blind holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221296574.4U CN217839098U (en) | 2022-05-27 | 2022-05-27 | Metal mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221296574.4U CN217839098U (en) | 2022-05-27 | 2022-05-27 | Metal mask |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217839098U true CN217839098U (en) | 2022-11-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221296574.4U Active CN217839098U (en) | 2022-05-27 | 2022-05-27 | Metal mask |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217839098U (en) |
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2022
- 2022-05-27 CN CN202221296574.4U patent/CN217839098U/en active Active
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