CN217816800U

CN217816800U - Reactor and waste gas treatment equipment

Info

Publication number: CN217816800U
Application number: CN202221777292.6U
Authority: CN
Inventors: 张伟明; 丁宇; 余欢; 荀本舟
Original assignee: Shanghai Shengjian Semiconductor Technology Co ltd
Current assignee: Shanghai Shengjian Semiconductor Technology Co ltd
Priority date: 2022-07-11
Filing date: 2022-07-11
Publication date: 2022-11-15
Anticipated expiration: 2032-07-11

Abstract

The utility model provides a reactor and exhaust-gas treatment equipment relates to gas purification equipment technical field. The reactor comprises a reaction cavity and a cooling layer. The reaction cavity is used for treating waste gas, the first cooling layer comprises a first flow guide part and a first shell, the first shell is sleeved outside the reaction cavity at intervals, the first flow guide part is arranged between the first shell and the reaction cavity and forms a first flow guide channel together with the first shell and the reaction cavity, the first shell is provided with a first air inlet and a first air outlet, high-pressure cooling gas is continuously introduced into the first flow guide channel through the first air inlet, the cooling gas is in full contact with the outer wall of the reaction cavity and takes away heat of the outer wall of the reaction cavity, and the effect of cooling of the reaction cavity which is obvious outside the reaction cavity is achieved. In addition, the cooling gas can not corrode the reaction cavity, the maintenance cost of the reactor is reduced, and the service life is prolonged.

Description

Reactor and waste gas treatment equipment

Technical Field

The utility model relates to a gas purification equipment technical field particularly, relates to a reactor and exhaust-gas treatment equipment.

Background

In the process of manufacturing some devices or materials (such as semiconductors), some gases harmful to human beings and the environment are generated, and the gases need to be changed into harmless gases through treatment equipment and are discharged into the atmospheric environment. The existing equipment for treating harmful gas is heated by burning in a reaction chamber, so that high-temperature waste gas is heated and decomposed. In the process of heating and treating the waste gas, the outer wall of the reaction cavity is also in a high-temperature state due to the high temperature in the reaction cavity, so that the whole equipment and maintenance personnel are threatened and even injured.

The existing treatment equipment is generally provided with a layer of water-cooled wall outside the reaction chamber, and the heat of the reaction chamber is taken away by cooling water. However, in the actual use process, the cooling water corrodes the outer wall of the reaction chamber, which not only reduces the service life of the equipment, but also increases the maintenance and operation costs.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a reactor and exhaust-gas treatment equipment, it can be effectively to the reaction chamber heat dissipation of cooling down.

The embodiment of the utility model is realized like this:

in a first aspect, an embodiment of the present invention provides a reactor, including a reaction chamber and a first cooling layer;

the reaction cavity is used for treating waste gas;

the first cooling layer comprises a first flow guide part and a first shell, the first shell is sleeved outside the reaction cavity at intervals, the first flow guide part is arranged between the first shell and the reaction cavity and forms a first flow guide channel together with the first shell and the reaction cavity, and two side edges of the first flow guide part are abutted against the first shell and the reaction cavity;

the first flow guide channel is provided with a first air inlet and a first air outlet, the first air inlet is used for introducing cooling gas into the first flow guide channel, and the first air outlet is used for discharging the cooling gas.

In the above embodiment, the cooling gas is introduced into the first flow guide channel, so that the cooling gas is fully contacted with the outer wall of the reaction cavity and takes away the heat of the outer wall of the reaction cavity, and an obvious cooling effect outside the reaction cavity is achieved. In addition, the cooling gas can not corrode the reaction cavity, the maintenance cost of the reactor is reduced, and the service life is prolonged.

In an optional embodiment, the first flow guide member is wound around the outer wall of the reaction cavity, and the first flow guide member is spiral, so that the first flow guide channel is spiral.

Through being the first water conservancy diversion spare of heliciform around establishing the outer wall at reaction cavity to make cooling gas along the first water conservancy diversion passageway spiral flow that is the heliciform that first water conservancy diversion spare formed, at this in-process, cooling gas fully contacts with reaction cavity's outer wall, takes away the heat of transmission to reaction cavity outer wall effectively, has improved the cooling effect.

In an alternative embodiment, the first gas inlet is near the top of the reaction chamber and the first gas outlet is near the bottom of the reaction chamber;

or the first air inlet is close to the bottom of the reaction cavity, and the first air outlet is close to the top of the reaction cavity.

In the embodiment, the cooling gas is introduced into the first flow guide channel through the first gas inlet at the top of the first shell, flows from top to bottom along the first flow guide channel in the first flow guide channel and is discharged through the first gas outlet at the bottom of the first shell, so that the cooling effect is good; or the cooling gas is introduced into the first flow guide channel through the first air inlet at the bottom of the first shell, flows upwards from bottom to top along the first flow guide channel in the first flow guide channel, and is discharged through the first air outlet at the top of the first shell, so that the cooling effect is good.

In an alternative embodiment, the first air inlet and the first air outlet are located on both circumferential sides of an arc-shaped surface of the first housing, respectively.

In the above embodiment, the cooling gas enters the first flow guide channel from the first gas inlet on one side of the reaction cavity, flows along the first flow guide channel, and is discharged from the first gas outlet on the other side of the reaction cavity, so that the cooling effect is good.

In an optional embodiment, the number of the cooling layers includes at least two, the reactor further includes at least one second cooling layer, and the at least one second cooling layer is sequentially sleeved outside the first cooling layer;

the second cooling layer comprises a second flow guide part and a second shell, and the second flow guide part and the second shell form a second flow guide channel with the adjacent first shell or the second shell.

In the above embodiment, at least two cooling layers are provided, that is, one first cooling layer and at least one second cooling layer arranged outside the first cooling layer are provided, so as to further improve the cooling effect and safety performance of the reaction chamber.

In an optional embodiment, the second casing located at the outermost side is provided with a second air inlet and a second air outlet, the second air inlet is communicated with the first air inlet and the at least one second flow guide channel, and the second air outlet is communicated with the first air outlet and the at least one second flow guide channel;

or the second shell is provided with a second air inlet and a second air outlet, the second air inlet is communicated with the corresponding second flow guide channel, and the second air outlet is communicated with the corresponding second flow guide channel.

In the above embodiment, the second gas inlet is used for simultaneously introducing cooling gas into the first flow guide channel and the at least one second flow guide channel and discharging the cooling gas from the second gas outlet together, so that the gas in the first cooling layer and the at least one second cooling layer cools the reaction chamber and can insulate heat, the temperature of the outer wall is further reduced, the structure is simple, and the manufacturing is easy.

Or, all set up the second air inlet on each second shell to let in cooling gas to the second water conservancy diversion passageway that corresponds through the second air inlet the same with second shell quantity, and let in cooling gas to first water conservancy diversion passageway through first air inlet, in order to let in cooling gas to first water conservancy diversion passageway and at least one second water conservancy diversion passageway respectively, the cooling gas in first water conservancy diversion passageway and the second water conservancy diversion passageway that corresponds is discharged respectively to the first gas outlet and second gas outlet of the same reason, thereby make the cooling gas circulation efficiency high, the radiating effect is good.

In an optional embodiment, the first flow guide part and the second flow guide part are both spiral, and winding tracks of the first flow guide part and at least one second flow guide part are the same or staggered.

In the above embodiment, the winding tracks of the first flow guide member and the at least one second flow guide member in the at least two cooling layers are the same or staggered, and when the winding tracks are the same, the mass production is facilitated, and the cost is low. When the winding tracks are staggered, the cooling gas spirally flows along the corresponding first flow guide channel or the second flow guide channel in the staggered direction, so that the cooling effect of at least two cooling layers is good.

In an alternative embodiment, the reaction chamber comprises a thermally insulating layer, the first baffle member being disposed between the thermally insulating layer and the outer shell.

In the above embodiment, through setting up the insulating layer to heat in the reduction reaction chamber is to outside conduction, avoids extravagant energy, also avoids leading to the too high damage equipment of outside temperature and even brings the potential safety hazard.

In an optional embodiment, the reaction chamber further comprises a refractory layer, and the heat insulation layer is disposed outside the refractory layer.

In the above embodiment, the reaction chamber may be protected by disposing the refractory layer, so as to prevent the reaction chamber from being damaged by high temperature.

In a second aspect, embodiments of the present invention provide an exhaust gas treatment device comprising a reactor according to any one of the preceding embodiments.

The embodiment of the utility model provides a reactor and exhaust-gas treatment equipment's beneficial effect includes: the cooling gas is introduced into the first flow guide channel through the first gas inlet, so that the cooling gas is fully contacted with the outer wall of the reaction cavity and takes away the heat of the outer wall of the reaction cavity, and a good cooling effect on the outer wall of the reaction cavity is achieved. In addition, the cooling gas can not corrode the reaction cavity, the maintenance cost of the reactor is reduced, and the service life is prolonged.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic view of a first perspective structure of a reactor according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a second view angle of the reactor according to an embodiment of the present invention;

fig. 3 isbase:Sub>A sectional view taken along the directionbase:Sub>A-base:Sub>A in fig. 2 according to an embodiment of the present invention;

fig. 4 is a perspective view of a cooling device according to an embodiment of the present invention;

fig. 5 is a schematic structural view of a flow guide member according to an embodiment of the present invention.

Icon: 10-a reactor; 100-a reaction chamber; 110-a thermal insulation layer; 120-a refractory layer; 200-a first cooling layer; 210-a first flow guide; 220-a first housing; 230-a first flow-directing passage; 240-a first air inlet; 250-first air outlet.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are absolutely horizontal or hanging, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The utility model provides a waste gas treatment equipment is applied to the exhaust-gas treatment field, and waste gas includes the gas harmful to the human body or to the environment. Waste gas treatment equipment includes reactor and heating device etc. lets in waste gas in the cavity in the reactor to heat it so that waste gas decomposes under the environment of high temperature through heating device, the reactor can be in real time to the reaction cavity of reaction high temperature heat dissipation cooling, thereby avoids the too high damage equipment of reactor temperature or produces the potential safety hazard.

First embodiment

Referring to fig. 1 to 5, the reactor 10 of the present invention includes a reaction chamber 100 and a first cooling layer 200, wherein the reaction chamber 100 is used for treating waste gas, and the first cooling layer 200 is disposed outside the reaction chamber 100 for cooling the reaction chamber.

In this embodiment, the reaction chamber 100 is heated by a heating device (not shown), and the exhaust gas is introduced into the reaction chamber 100 with a high temperature to be thermally decomposed.

In this embodiment, the first cooling layer 200 includes a first flow guiding element 210 and a first outer shell 220, the first outer shell 220 is sleeved outside the reaction cavity 100 at intervals, the first flow guiding element 210 is disposed between the first outer shell 220 and the reaction cavity 100, and forms a first flow guiding channel 230 together with the first outer shell 220 and the reaction cavity 100; the first housing 220 is provided with a first gas inlet 240 and a first gas outlet 250, the first gas inlet 240 is used for introducing cooling gas into the first flow guide channel 230, and the first gas outlet 250 is used for discharging the cooling gas.

In this embodiment, in the process of heating the waste gas, the first gas inlet 240 continuously introduces the high-pressure cooling gas into the first diversion channel 230, so that the cooling gas fully contacts with the outer wall of the reaction cavity 100 and takes away the heat of the outer wall of the reaction cavity 100, thereby achieving the effect of cooling the outer surface of the reaction cavity 100. In addition, the cooling gas does not corrode the reaction chamber 100, thereby reducing the maintenance cost of the reactor 10 and prolonging the service life.

It should be noted that two side edges of the first guiding member 210 are respectively abutted against the first housing 220 and the reaction chamber 100.

Further, the first flow guide member 210 is wound around the outer wall of the reaction chamber 100, so that the cooling gas is fully contacted with the outer wall of the reaction chamber 100 in the process of flowing along the first flow guide channel 230 formed by the first flow guide member 210, the heat transferred to the outer wall of the reaction chamber 100 is effectively taken away, and the cooling effect is improved.

Further, the first flow guiding element 210 is spiral, so that the first flow guiding channel 230 is spiral.

In this embodiment, the first flow guiding element 210 is a spiral thin plate, and has a simple structure and a small occupied volume, so as to ensure the flow area of the first flow guiding channel 230 and improve the cooling effect. The first flow guide member 210 is spirally arranged, so that the first flow guide channel 230 is also spirally formed, and therefore, the cooling gas can uniformly spirally flow in the first flow guide channel 230, the cooling gas is fully contacted with the outer wall of the reaction cavity 100, heat on the outer wall of the reaction cavity 100 is taken away, and a good cooling effect is achieved.

Further, the first air inlet 240 and the first air outlet 250 are both disposed on the first housing 220, the first air inlet 240 is close to the top of the reaction chamber 100, and the first air outlet 250 is close to the bottom of the reaction chamber 100.

In this embodiment, the high-pressure cooling gas is introduced into the first flow guide channel 230 through the first gas inlet 240 at the top of the first housing 220, flows along the first flow guide channel 230 in the first flow guide channel 230, and is discharged through the first gas outlet 250 at the bottom of the first housing 220, so that the cooling effect is good.

Optionally, in other embodiments of the present invention, the first air inlet 240 may also be close to the bottom of the reaction chamber 100, the first air outlet 250 is close to the top of the reaction chamber 100, and the first air inlet 240 and the first air outlet 250 may be disposed at different positions of the first housing 220 according to actual requirements, which is not limited herein.

Optionally, in other embodiments of the present invention, the opening diameters of the first air inlet 240 and the first air outlet 250 may be increased, and a fan may be used to deliver cooling air thereto.

Further, the first air inlet 240 and the first air outlet 250 are respectively located at two circumferential sides of the arc-shaped surface of the first housing 220, and the cooling gas enters the first flow guide channel 230 from the first air inlet 240 at one side of the reaction chamber 100 and flows along the first flow guide channel 230, and is discharged from the first air outlet 250 at the opposite side of the reaction chamber 100, so that the cooling effect is good.

Further, the first air inlet 240 and the first air outlet 250 are respectively located at both circumferential sides of the arc-shaped surface of the first housing 220. The cooling gas enters the first flow guide channel 230 from the first gas inlet 240 on one side of the reaction chamber 100, flows along the first flow guide channel 230, and is discharged from the first gas outlet 250 on the opposite side of the reaction chamber 100, so that the cooling effect is good.

Further, the reaction chamber 100 comprises a thermal insulation layer 110 and a refractory layer 120, the thermal insulation layer 110 is disposed outside the refractory layer 120, and the first flow guide member 210 is disposed between the thermal insulation layer 110 and the first outer shell 220.

In this embodiment, the refractory layer 120 is made of refractory material, and the exhaust gas is decomposed inside the refractory layer 120 at high temperature, so that the refractory layer 120 can protect the reaction chamber 100 from being damaged by high temperature. The outer wall of the refractory layer 120 is further sleeved with a heat insulation layer 110 to reduce the heat conduction in the reaction chamber 100 to the outside, avoid energy waste, and avoid the damage to equipment due to too high external temperature and even potential safety hazards.

To sum up, the utility model provides a reactor 10 and exhaust-gas treatment equipment, waste gas are heated decomposition in reaction chamber 100 of high temperature, and outside reaction chamber 100 was located to first shell 220 cover to form first water conservancy diversion passageway 230 jointly through first water conservancy diversion spare 210, first shell 220 and reaction chamber 100. In the process of heating the waste gas, the first gas inlet 240 continuously introduces high-pressure cooling gas into the first flow guide channel 230, so that the cooling gas fully contacts with the outer wall of the reaction cavity 100 and takes away heat from the outer wall of the reaction cavity 100, thereby achieving the effect of cooling the outer surface of the reaction cavity 100. In addition, the cooling gas does not corrode the reaction chamber 100, thereby reducing the maintenance cost of the reactor 10 and prolonging the service life.

Second embodiment

For the sake of brief description, the corresponding contents of the first embodiment can be referred to where not mentioned in this embodiment.

In this embodiment, the reactor 10 further includes at least one second cooling layer (not shown), and the at least one second cooling layer is sequentially sleeved outside the first cooling layer 200. The second cooling layer includes a second flow guide and a second housing forming a second flow guide passage with the adjacent first housing 220 or second housing.

In this embodiment, by providing at least two cooling layers, namely, a first cooling layer 200 and at least one second cooling layer disposed outside the first cooling layer, the cooling effect on the reaction chamber can be further improved, thereby further improving the safety performance.

It should be noted that the first air guide member and the second air guide member have the same structure.

Further, the second housing located at the outermost side is provided with a second air inlet and a second air outlet, the second air inlet is communicated with the first air inlet 240 and the at least one second flow guide channel, and the second air outlet is communicated with the first air outlet 250 and the at least one second flow guide channel.

In this embodiment, the first flow guiding channel 230 and the at least one second flow guiding channel are simultaneously supplied with the cooling gas through the second gas inlet and are exhausted from the second gas outlet together, so that the gas in the first cooling layer and the at least one second cooling layer cools the reaction chamber 100 and can insulate heat, and the temperature of the outer wall is further reduced. Simple structure and easy manufacture.

In another embodiment of the present invention, the second housing is provided with a second air inlet and a second air outlet, the second air inlet is communicated with the corresponding second flow guiding channel, and the second air outlet is communicated with the corresponding second flow guiding channel.

In this embodiment, all set up the second air inlet on each second shell to let in cooling gas to the second water conservancy diversion passageway that corresponds through the second air inlet the same with second shell quantity, and let in cooling gas to first water conservancy diversion passageway through first air inlet, with let in cooling gas to first water conservancy diversion passageway and at least one second water conservancy diversion passageway respectively, the cooling gas in first water conservancy diversion passageway and the second water conservancy diversion passageway that corresponds is discharged respectively to the first gas outlet of the same reason and second gas outlet, thereby make the cooling gas circulation efficiency high, the radiating effect is good.

Further, the first flow guiding element 210 and the second flow guiding element are both spiral, and the winding tracks of the first flow guiding element 210 and the at least one second flow guiding element are the same or staggered.

In this embodiment, the winding tracks of the first flow guiding element 210 and the at least one second flow guiding element in the at least two cooling layers are the same or staggered, and when the winding tracks are the same, the mass production is facilitated, and the cost is low. When the winding tracks are staggered, the cooling gas spirally flows along the corresponding first flow guide channel or the second flow guide channel in the staggered direction, so that the cooling effect of at least two cooling layers is good. The winding directions of the first flow guiding element 210 and the second flow guiding element can be adjusted according to actual requirements, so that the adaptability of the cooling device is improved.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A reactor, characterized by comprising a reaction chamber (100) and a first cooling layer (200);

the reaction cavity (100) is used for treating waste gas;

the first cooling layer (200) comprises a first flow guide piece (210) and a first shell (220), the first shell (220) is sleeved outside the reaction cavity (100) at intervals, the first flow guide piece (210) is arranged between the first shell (220) and the reaction cavity (100) and forms a first flow guide channel (230) together with the first shell (220) and the reaction cavity (100), wherein two side edges of the first flow guide piece (210) are respectively abutted against the first shell (220) and the reaction cavity (100);

the first shell (220) is provided with a first gas inlet (240) and a first gas outlet (250), the first gas inlet (240) is used for introducing cooling gas into the first flow guide channel (230), and the first gas outlet (250) is used for discharging the cooling gas.

2. The reactor according to claim 1, wherein the first flow guide member (210) is wound around the outer wall of the reaction chamber (100), and the first flow guide member (210) is helical, so that the first flow guide channel (230) is helical.

3. The reactor according to claim 1, wherein the first gas inlet (240) is near the top of the reaction chamber (100) and the first gas outlet (250) is near the bottom of the reaction chamber (100);

or, the first gas inlet (240) is close to the bottom of the reaction cavity (100), and the first gas outlet (250) is close to the top of the reaction cavity (100).

4. A reactor according to claim 3, wherein the first gas inlet (240) and the first gas outlet (250) are located on respective circumferential sides of an arcuate face of the first housing (220).

5. The reactor according to claim 1, further comprising at least one second cooling layer, wherein the at least one second cooling layer is sequentially sleeved outside the first cooling layer (200);

the second cooling layer includes a second flow guide and a second housing forming a second flow guide passage with the adjacent first housing (220) or the second housing.

6. A reactor according to claim 5, characterized in that the outermost second casing is provided with a second air inlet and a second air outlet, the second air inlet communicating with both the first air inlet (240) and with at least one of the second guide channels, the second air outlet communicating with both the first air outlet (250) and with at least one of the second guide channels;

7. The reactor according to claim 6, characterized in that the first flow guide element (210) and the second flow guide element are both helical, and the winding tracks of the first flow guide element (210) and at least one of the second flow guide elements are identical or staggered.

8. A reactor according to claim 1, wherein the reaction chamber (100) comprises a thermally insulating layer (110), the first baffle (210) being arranged between the thermally insulating layer (110) and the first shell (220).

9. The reactor according to claim 8, wherein the reaction chamber (100) further comprises a refractory layer (120), the insulating layer (110) being disposed outside the refractory layer (120).

10. An exhaust gas treatment device comprising a reactor according to any one of claims 1 to 9.