CN217809649U - Multifunctional vacuum equipment observation window - Google Patents
Multifunctional vacuum equipment observation window Download PDFInfo
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- CN217809649U CN217809649U CN202122633912.0U CN202122633912U CN217809649U CN 217809649 U CN217809649 U CN 217809649U CN 202122633912 U CN202122633912 U CN 202122633912U CN 217809649 U CN217809649 U CN 217809649U
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- observation window
- glass
- electromagnetic radiation
- sealing
- vacuum equipment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A30/00—Adapting or protecting infrastructure or their operation
- Y02A30/24—Structural elements or technologies for improving thermal insulation
- Y02A30/249—Glazing, e.g. vacuum glazing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B80/00—Architectural or constructional elements improving the thermal performance of buildings
- Y02B80/22—Glazing, e.g. vaccum glazing
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The utility model discloses a multi-functional vacuum apparatus observation window, including the observation window lid, its characterized in that, the observation window lid is connected with the observation window seat, install anti-electromagnetic radiation glass and sealed glass in the observation window seat, be equipped with antifouling glass in the observation window lid, observation window lid and observation window seat bottom all are equipped with the mounting hole, and rotation axis one end is installed in the mounting hole, the rotation axis other end passes through the nut and is connected with manual baffle. The utility model discloses an install baffle, anti-electromagnetic radiation glass, sealed glass, antifouling glass respectively in observation window seat front and back side and then prevent pollution, the effect that X ray made the injury to the human body when reaching observation vacuum coating.
Description
Technical Field
The utility model relates to a vacuum coating technical field particularly, relates to a multi-functional vacuum apparatus observation window.
Background
Along with the increase of vacuum coating equipment demand, higher operation requirement has been proposed to the vacuum observation window gradually, through the investigation, in the actual production process, the observation window is more kind, but big same little difference, the function is single, can't satisfy the user demand of some equipment, conventional vacuum observation window single structure, observation window glass is very easily contaminated at the coating process, it is inconvenient to change, even there is baffle structure, also can be by the deposit pollution when observing, to some high energy ion sputtering class's coating equipment, still very easily produce the X ray at the coating process, cause the injury to the human body.
SUMMERY OF THE UTILITY MODEL
To the above-mentioned technical problem among the correlation technique, the utility model provides a multi-functional vacuum apparatus observation window can overcome prior art's the above-mentioned not enough.
In order to achieve the technical purpose, the technical scheme of the utility model is realized as follows:
the utility model provides a multi-functional vacuum apparatus observation window, includes the observation window lid, its characterized in that, the observation window lid is connected with the observation window seat, install anti-electromagnetic radiation glass and sealed glass in the observation window seat, be equipped with antifouling glass in the observation window lid, observation window lid and observation window seat bottom all are equipped with the mounting hole, and rotation axis one end is installed in the mounting hole, the rotation axis other end passes through the nut and is connected with manual baffle.
Furthermore, the observation window seat is provided with a flange neck which is welded with the inner side wall of the observation window cavity.
Furthermore, sealing rings are arranged among the anti-electromagnetic radiation glass, the sealing glass and the antifouling glass, and rubber cushions are arranged at the contact positions of the anti-electromagnetic radiation glass, the sealing glass and the antifouling glass with the observation window seat.
Furthermore, the sealing glass is made of high borosilicate glass and has a thickness of 10mm.
Furthermore, a hand wheel is fixed to the top end of the rotating shaft through a jackscrew, a sealing rubber ring is installed in the middle of the rotating shaft, the rotating shaft penetrates through the installation hole, and the rotating shaft is fixed through a shaft retainer ring.
Furthermore, the anti-electromagnetic radiation glass is non-sealing glass, is made of lead glass and has the thickness of 5mm.
Furthermore, the sealing glass is fixed in a manner of compressing the observation window cover, and the anti-electromagnetic radiation glass and the antifouling glass are fixed by adopting glass clamp springs.
The utility model has the advantages that: the front and the rear of the observation window seat are respectively provided with a baffle plate, electromagnetic radiation resistant glass, sealing glass and antifouling glass, thereby achieving the effect of preventing pollution and X-rays from damaging human bodies when observing vacuum coating.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
fig. 1 is an exploded view of a multifunctional vacuum equipment observation window according to an embodiment of the present invention.
Fig. 2 is a schematic view of a rotating shaft and a baffle of a multifunctional vacuum equipment observation window according to an embodiment of the present invention.
Fig. 3 is a schematic view of the range of motion of the baffle plate of the observation window of the multifunctional vacuum apparatus according to the embodiment of the present invention.
In the figure: 1. the inspection window comprises an inspection window cover, 2. An inspection window seat, 3. Electromagnetic radiation prevention glass, 4. Sealing glass, 5. Antifouling glass, 6. A sealing ring, 7. A soft rubber pad, 8. A rotating shaft, 9. A shaft retainer ring, 10. A sealing rubber ring, 11. A hand wheel, 12. A nut, 13. A manual baffle.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art all belong to the protection scope of the present invention.
As shown in fig. 1-3, according to the utility model discloses a multi-functional vacuum apparatus observation window, including the observation window lid, its characterized in that, the observation window lid is connected with the observation window seat, install anti-electromagnetic radiation glass and sealed glass in the observation window seat, be equipped with antifouling glass in the observation window lid, observation window lid and observation window seat bottom all are equipped with the mounting hole, and rotation axis one end is installed in the mounting hole, the rotation axis other end passes through the nut and is connected with manual baffle.
In an embodiment of the present invention, the observation window seat is provided with a flange neck, which is welded to the inner side wall of the observation window cavity.
In an embodiment of the present invention, the sealing ring is disposed between the electromagnetic radiation preventing glass, the sealing glass and the anti-fouling glass, and the contact positions of the electromagnetic radiation preventing glass, the sealing glass and the anti-fouling glass with the observation window seat are all provided with the rubber soft pad.
In an embodiment of the present invention, the sealing glass is made of borosilicate glass and has a thickness of 10mm.
As shown in fig. 2, in an embodiment of the present invention, a hand wheel is fixed on the top end of the rotating shaft through a jackscrew, a sealing rubber ring is installed in the middle of the rotating shaft, the rotating shaft passes through the installation hole, and the rotating shaft is fixed through a shaft retaining ring.
In an embodiment of the present invention, the electromagnetic radiation preventing glass is non-sealing glass, made of lead glass, and has a thickness of 5mm.
In an embodiment of the present invention, the sealing glass is fixed by pressing the observation window cover, and the electromagnetic radiation preventing glass and the anti-fouling glass are both fixed by using the glass snap spring.
For the convenience of understanding the above technical solutions of the present invention, the above technical solutions of the present invention are explained in detail through specific use modes below.
When specifically using, according to a multi-functional vacuum apparatus observation window, when observing vacuum coating, as shown in fig. 3, put aside the baffle through the handle rotation, when the handle is rotatory to assigned position, the baffle is blocked to the retaining ring for the axle, prevents that the displacement volume is too big, treats to make the baffle back move the normal position with hand wheel counter-rotation after the observation, when filming equipment sent X ray, anti-electromagnetic radiation glass blockked the ray, prevented that the injury is human.
To sum up, with the help of the above technical scheme of the utility model, through install baffle, anti-electromagnetic radiation glass, sealing glass, antifouling glass respectively at the observation window seat front and back side and then prevent pollution, the effect that X ray caused the injury to the human body when reaching observation vacuum coating. The vacuum equipment observation window is simple in structure and easy to replace, and effectively solves the problems that X-rays hurt a human body when observing vacuum coating and the vacuum equipment observation window is inconvenient to replace.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. The utility model provides a multi-functional vacuum apparatus observation window, includes observation window lid (1), its characterized in that, observation window lid (1) is connected with observation window seat (2), install anti-electromagnetic radiation glass (3) and sealed glass (4) in observation window seat (2), be equipped with antifouling glass (5) in observation window lid (1), observation window lid (1) and observation window seat (2) bottom all are equipped with the mounting hole, and rotation axis (8) one end is installed in the mounting hole, rotation axis (8) other end passes through nut (12) and is connected with manual baffle (13).
2. The multifunctional vacuum equipment observation window according to the claim 1, characterized in that the observation window base (2) is provided with a flange neck, which is welded with the inner wall of the observation window cavity.
3. The multifunctional vacuum equipment observation window according to claim 1, wherein sealing rings (6) are arranged among the electromagnetic radiation preventing glass (3), the sealing glass (4) and the antifouling glass (5), and rubber cushions (7) are arranged at the contact positions of the electromagnetic radiation preventing glass (3), the sealing glass (4) and the antifouling glass (5) and the observation window seat (2).
4. The multifunctional vacuum equipment observation window according to claim 1, wherein the sealing glass (4) is made of borosilicate glass and has a thickness of 10mm.
5. The multifunctional vacuum equipment observation window according to claim 1, wherein a hand wheel (11) is fixed on the top end of the rotating shaft (8) through a jackscrew, a sealing rubber ring (10) is installed in the middle of the rotating shaft (8), the rotating shaft (8) passes through the installation hole, and the rotating shaft (8) is fixed through a shaft retainer ring (9).
6. The multifunctional vacuum equipment observation window according to claim 1, wherein the electromagnetic radiation preventing glass (3) is non-sealing glass, is made of lead glass, and has a thickness of 5mm.
7. The multifunctional vacuum equipment observation window according to claim 1, wherein the sealing glass (4) is fixed by pressing the observation window cover (1), and the electromagnetic radiation preventing glass (3) and the antifouling glass (5) are fixed by glass snap springs.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202122633912.0U CN217809649U (en) | 2021-11-01 | 2021-11-01 | Multifunctional vacuum equipment observation window |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202122633912.0U CN217809649U (en) | 2021-11-01 | 2021-11-01 | Multifunctional vacuum equipment observation window |
Publications (1)
Publication Number | Publication Date |
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CN217809649U true CN217809649U (en) | 2022-11-15 |
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CN202122633912.0U Active CN217809649U (en) | 2021-11-01 | 2021-11-01 | Multifunctional vacuum equipment observation window |
Country Status (1)
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CN (1) | CN217809649U (en) |
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2021
- 2021-11-01 CN CN202122633912.0U patent/CN217809649U/en active Active
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