CN217798162U

CN217798162U - Target material leveling equipment for thin-film solar cell

Info

Publication number: CN217798162U
Application number: CN202221845049.3U
Authority: CN
Inventors: 陈箫箫
Original assignee: Yaxin Electronic Technology Changzhou Co ltd; Yaxin Semiconductor Materials Jiangsu Co ltd
Current assignee: Yaxin Electronic Technology Changzhou Co ltd; Yaxin Semiconductor Materials Jiangsu Co ltd
Priority date: 2022-07-18
Filing date: 2022-07-18
Publication date: 2022-11-15
Anticipated expiration: 2032-07-18

Abstract

The utility model discloses a target levelling equipment for thin-film solar cell relates to target levelling technical field. The utility model discloses a bottom plate, bottom plate top rotate be connected with the disc, and disc top sliding connection has places the platform, and disc excircle face symmetry fixedly connected with stand is equipped with the backup pad between the coexistence post, the equal fixedly connected with pivot in backup pad both ends, and pivot one end rotates with adjacent stand to be connected, and one of them pivot one end run through the stand and with first motor output end fixed connection, first motor fixed mounting in the stand outside. The utility model discloses a second motor drives the driving gear rotation to under driven gear's cooperation, drive the support column and rotate, and then drive the synchronous revolution of disc, and under the cooperation of fluted disc piece and bevel gear, drive first screw rod and rotate, drive first slider and slide, adjust the percentage table in the position of placing a top portion, realize carrying out the purpose of the detection of roughness to the different positions of planar target.

Description

Target material leveling equipment for thin-film solar cell

Technical Field

The utility model belongs to the technical field of the target levelling, especially, relate to a target levelling equipment for thin-film solar cell.

Background

Thin-film solar cells are second generation solar cells made by depositing one or more thin layers or films (TF) of photovoltaic material on a substrate such as glass, plastic or metal. Sputter targets are important source materials in the deposition process. Thin film solar cells are commercially used in a variety of technologies including cadmium telluride thin films, copper indium gallium selenide thin films, and gallium arsenide thin films. Cadmium telluride sputtering targets, copper indium gallium selenide sputtering targets and gallium arsenide sputtering targets are indispensable. When the planar target is subjected to sputtering film forming, the flatness error of the planar target is too large, which causes the problems of non-uniform film forming, poor adhesion between the formed film and the substrate, and the like. Through search, the current chinese patent application No. CN202021690516.0 discloses a planar target leveling device. Compared with the prior art, the method has the advantages that: the utility model adopts the mode that the flatness detection and the leveling of the plane target material are separately carried out, the flatness detection is carried out firstly, and then the uneven part on the uneven plane target material is flattened by the single flattening machine, so that the efficiency is higher; the planar target can be efficiently leveled, so that the flatness error of the planar target can be reduced, and the later-stage film coating is more uniform. However, we have found that this solution, when used, still has some disadvantages: because the position of the dial indicator is relatively fixed, the dial indicator can only slide along the sliding groove in a single direction, and the position is difficult to adjust, so that the flatness of different positions of the planar target is difficult to detect, and the detection efficiency is further reduced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a target levelling equipment for thin-film solar cell, it is rotatory to drive the driving gear through the second motor, and under driven gear's cooperation, it rotates to drive the support column, and then drives disc synchronous revolution, and under the cooperation of fluted disc piece and bevel gear, drive first screw rod and rotate, drive first slider and slide, adjust the percentage table in the position of placing a top, realize carrying out the purpose of the detection of roughness to the different positions of plane target.

In order to solve the technical problem, the utility model discloses a realize through following technical scheme:

the utility model relates to a target material leveling device for thin-film solar cells, which comprises a bottom plate, wherein the top of the bottom plate is rotationally connected with a disc, the top of the disc is slidably connected with a placing table, the outer circle surface of the disc is symmetrically and fixedly connected with stand columns, a supporting plate is arranged between the two stand columns, both ends of the supporting plate are fixedly connected with rotating shafts, one end of each rotating shaft is rotationally connected with an adjacent stand column, one end of each rotating shaft runs through the stand column and is fixedly connected with the output end of a first motor, and the first motor is fixedly arranged outside the stand column; the bottom of one side of the supporting plate is fixedly connected with a connecting plate, a first sliding groove is formed in the bottom of the connecting plate, a first sliding block is connected in the first sliding groove in a sliding mode, a telescopic adjusting rod is fixedly connected to the bottom of the first sliding block, a dial indicator is fixedly mounted at the bottom of the telescopic adjusting rod, a first screw rod is connected in the first sliding groove in a rotating mode, the first screw rod is in threaded connection with the first sliding block, one end of the first screw rod penetrates through the connecting plate and a bevel gear, the top of the bottom plate is located on the outer side of a disc, the top of the bottom plate is connected with a vertical plate in a clamping mode, the vertical plate is matched with a toothed disc block in a clamping mode, and the toothed disc block is meshed with the bevel gear.

As a preferred technical scheme of the utility model, the bottom plate top is rotated and is connected with the support column, support column top and disc fixed connection, the fixed cover of disc is equipped with driven gear outside the support column, bottom plate top fixedly connected with second motor, second motor output end fixedly connected with driving gear, driving gear and driven gear meshing.

As a preferred technical scheme of the utility model, open at the disc top has the second spout, place a bottom fixedly connected with and second spout sliding fit's interior second slider, the second spout internal rotation is connected with the second screw rod, second screw rod and second slider threaded connection, fixed mounting has the third motor in the second spout, third motor output and second screw rod one end fixed connection.

As a preferred technical scheme of the utility model, place a plurality of support piece of bench top equidistance fixedly connected with, support piece top fixedly connected with slipmat.

As a preferred technical scheme of the utility model, the backup pad deviates from connecting plate one side and opens there is the third spout, sliding connection has the third slider in the third spout, third slider one end fixedly connected with pneumatic cylinder, pneumatic cylinder one end fixedly connected with clamp plate, the third spout internal rotation is connected with the third screw rod, third screw rod and third slider threaded connection, third screw rod one end run through to the backup pad outside and with fourth motor output fixed connection, fourth motor fixed mounting is in the backup pad outside.

As a preferred technical scheme of the utility model, open at the riser top has the joint groove, fluted disc piece bottom fixedly connected with joint post, the cooperation of joint post and joint groove joint.

The utility model discloses following beneficial effect has:

1. the utility model discloses a start the third motor and drive the second screw rod and rotate, and under the cooperation of second slider, the drive is placed the platform and is made a round trip to slide along the second spout, the drive is placed in placing the planar target synchronous motion on the platform, make the percentage table carry out the roughness to planar target surface and detect, it is rotatory to drive the driving gear through starting the second motor, and under driven gear's cooperation, it rotates to drive the support column, and then drive the disc synchronous revolution, after the disc rotates the round, under fluted disc piece and bevel gear's cooperation, it rotates to drive first screw rod, make first slider drive adjust the percentage table in the position of placing a top, the realization is to the purpose of carrying out the detection of roughness to the different positions of planar target.

2. The utility model discloses a start first motor and drive the pivot and rotate, and then drive the backup pad and rotate for first spout and third spout opening part are towards placing the platform in turn, make and accomplish to placing the plane target on placing the platform when the percentage table and carry out the roughness and detect the back, drive the clamp plate and place the platform towards, through adjusting plate's position, support the pressure levelling to target department of deformation.

Of course, it is not necessary for any particular product to achieve all of the above-described advantages at the same time.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural view of a target leveling apparatus for a thin-film solar cell according to the present invention.

Fig. 2 is a schematic structural view of fig. 1 from another view angle.

Fig. 3 is a schematic structural view of another state of fig. 1.

FIG. 4 is a schematic structural diagram of a combination of a support plate, a rotating shaft, a connecting plate, a first sliding block, a telescopic adjusting rod, a dial indicator, a first screw and a bevel gear.

Fig. 5 is a schematic structural view of fig. 4 from another view angle.

Fig. 6 is a schematic structural view of fig. 4 from another view angle.

Fig. 7 is a schematic structural view of the placement stage.

Fig. 8 is a structural schematic diagram of a vertical plate, a toothed disc block and a clamping column combination.

In the drawings, the reference numbers indicate the following list of parts:

1-bottom plate, 2-disc, 201-second chute, 3-placing table, 4-upright column, 5-support plate, 501-third chute, 6-rotating shaft, 7-first motor, 8-connecting plate, 801-first chute, 9-first slide block, 10-telescopic adjusting rod, 11-dial indicator, 12-first screw rod, 13-bevel gear, 14-vertical plate, 141-clamping groove, 15-toothed disc block, 16-support column, 17-driven gear, 18-second motor, 19-driving gear, 20-second slide block, 21-second screw rod, 22-third motor, 23-support piece, 24-non-slip mat, 25-third slide block, 26-hydraulic cylinder, 27-pressing plate, 28-third screw rod, 29-fourth motor and 30-clamping column.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

The specific embodiment is as follows:

referring to fig. 1-8, the utility model relates to a target leveling device for thin-film solar cells, which comprises a base plate 1, a disc 2 is rotatably connected to the top of the base plate 1, a placing table 3 is slidably connected to the top of the disc 2, columns 4 are symmetrically and fixedly connected to the outer circular surface of the disc 2, the placing table 3 is located between the two columns 4, a supporting plate 5 is arranged between the two columns 4, rotating shafts 6 are fixedly connected to both ends of the supporting plate 5, one end of each rotating shaft 6 is rotatably connected to the adjacent column 4, one end of one rotating shaft 6 penetrates through the column 4 and is fixedly connected to the output end of a first motor 7, and the first motor 7 is fixedly mounted on the outer side of the column 4; the bottom of one side of the supporting plate 5 is fixedly connected with a connecting plate 8, the bottom of the connecting plate 8 is provided with a first sliding groove 801, the first sliding groove 801 is internally and slidably connected with a first sliding block 9, the bottom of the first sliding block 9 is fixedly connected with a telescopic adjusting rod 10, the bottom of the telescopic adjusting rod 10 is fixedly provided with a dial indicator 11, the dial indicator is a part for detecting unevenness on a planar target material at present, no explanation is needed, the telescopic adjusting rod 10 is provided with a stud for adjusting the telescopic length of the telescopic adjusting rod 10, further, the distance between the dial indicator 11 and the placing table 3 is adjusted, the first sliding groove 801 is rotatably connected with a first screw 12, the first screw 12 is in threaded connection with the first sliding block 9, one end of the first screw 12 penetrates through to the outer side of the connecting plate 8 and is fixedly connected with a bevel gear 13, the top of the bottom plate 1 is fixedly connected with a vertical plate 14 on the outer side of the disc 2, the top of the vertical plate 14 is in clamping fit with a toothed plate block 15, the toothed plate 15 is meshed with the toothed plate 15, the toothed plate 15 is in an arc structure, after the disc 2 rotates for a circle, the first sliding block 9 is driven to rotate, and the first sliding block 11 is driven to adjust the position of the top of the placing table 3, and the target material at different planar target material, and the different target material, and the target material detection purpose of the target material.

Wherein, 1 top of bottom plate rotates and is connected with

support column

16, 16 tops of support column and 2 fixed connection of disc, the fixed cover in outer disc of support column 16 is equipped with driven gear 17, 1 top fixedly connected with second motor 18 of bottom plate, 18 output end fixedly connected with driving gear 19 of second motor, driving gear 19 and driven gear 17 meshing, it is rotatory to drive driving gear 19 through starting second motor 18, and under driven gear 17's cooperation, drive support column 16 and rotate, and then drive disc 2 synchronous revolution.

Wherein, 2 tops of disc have second spout 201, place 3 bottoms fixedly connected with of platform and second spout 201 sliding fit's interior second slider 20, the internal rotation of second spout 201 is connected with second screw rod 21, second screw rod 21 and second slider 20 threaded connection, fixed mounting has third motor 22 in the second spout 201, third motor 22 output and second screw rod 21 one end fixed connection, drive second screw rod 21 and rotate through starting third motor 22, and under the cooperation of second slider 20, the drive is placed platform 3 and is made a round trip to slide along second spout 201.

Wherein, place a plurality of support piece 23 of platform 3 top equidistance fixedly connected with, support piece 23 top fixedly connected with slipmat 24 for stable the placing on platform 3 of plane target.

Wherein, the supporting plate 5 deviates from 8 one sides of connecting plate and is opened third spout 501, sliding connection has third slider 25 in the third spout 501, third slider 25 one end fixedly connected with pneumatic cylinder 26, pneumatic cylinder 26 one end fixedly connected with clamp plate 27, third spout 501 internal rotation is connected with third screw 28, third screw 28 and third slider 25 threaded connection, third screw 28 one end is run through to the supporting plate 5 outside and with fourth motor 29 output end fixed connection, fourth motor 29 fixed mounting is in the supporting plate 5 outside, drive pivot 6 through starting first motor 7 and rotate, and then drive supporting plate 5 and rotate, make first spout 801 and third spout 501 opening part alternative orientation place platform 3, make after the completion carries out the roughness to the plane target of placing on placing platform 3 when percentage table 11 detects, drive clamp plate 27 towards placing the platform, adjust the position of clamp plate 27 through starting pneumatic cylinder 26, support the pressure leveling to the target department of deformation.

Wherein, riser 14 top is opened there is joint groove 141, and fluted disc piece 15 bottom fixedly connected with joint post 30, joint post 30 and the cooperation of joint groove 141 joint, are convenient for change fluted disc piece 15.

One specific application of this embodiment is: when the device is used, a planar target is placed on the placing table 3, the distance between the dial indicator 11 and the placing table 3 is adjusted through the telescopic adjusting rod 10, the third motor 22 is started to drive the second screw 21 to rotate, the placing table 3 is driven to slide back and forth along the second sliding groove 201 under the coordination of the second sliding block 20, and the flatness of the planar target is detected; then, a second motor 18 is started to drive a driving gear 19 to rotate, and under the coordination of a driven gear 17, a supporting column 16 is driven to rotate, so that the disc 2 is driven to synchronously rotate, after the disc 2 rotates for a circle, a bevel gear 13 and a fluted disc block 15 are driven to be meshed, a first screw rod 12 is driven to rotate, so that a first sliding block 9 drives and adjusts the position of a dial indicator 11 at the top of the placing table 3, and the purpose of detecting the flatness of different positions of the planar target material is achieved; drive pivot 6 through starting first motor 7 and rotate, and then drive backup pad 5 and rotate for platform 3 is placed to first spout 801 and the orientation in turn of third spout 501 opening part, makes and accomplishes carrying out the roughness to placing the plane target of placing on platform 3 and detect the back when percentage table 11, drives clamp plate 27 orientation and places the platform, adjusts the position of clamp plate 27 through starting hydraulic cylinder 26, supports to press the levelling to target deformation department.

In the description of the present specification, reference to the description of "one embodiment," "an example," "a specific example," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A target leveling device for thin film solar cells, comprising a base plate (1), characterized in that:

the top of the bottom plate (1) is rotatably connected with a disc (2), the top of the disc (2) is slidably connected with a placing table (3), the outer circle surface of the disc (2) is symmetrically and fixedly connected with upright columns (4), a supporting plate (5) is arranged between the two upright columns (4), two ends of the supporting plate (5) are fixedly connected with rotating shafts (6), one end of each rotating shaft (6) is rotatably connected with the adjacent upright column (4), one end of each rotating shaft (6) penetrates through the upright column (4) and is fixedly connected with the output end of a first motor (7), and the first motor (7) is fixedly arranged on the outer side of the upright column (4);

the bottom of one side of the supporting plate (5) is fixedly connected with a connecting plate (8), a first sliding groove (801) is formed in the bottom of the connecting plate (8), a first sliding block (9) is connected in the first sliding groove (801) in a sliding mode, a telescopic adjusting rod (10) is fixedly connected to the bottom of the first sliding block (9), a dial indicator (11) is fixedly mounted at the bottom of the telescopic adjusting rod (10), a first screw (12) is connected to the first sliding groove (801) in a rotating mode, the first screw (12) is connected with the first sliding block (9) in a threaded mode, one end of the first screw (12) penetrates through the outer side of the connecting plate (8) and is fixedly connected with a bevel gear (13), the top of the bottom plate (1) is fixedly connected with a vertical plate (14) located on the outer side of the disc (2), the top of the vertical plate (14) is clamped and matched with a toothed disc block (15), and the toothed disc block (15) is meshed with the bevel gear (13).

2. The target material leveling device for the thin film solar cell according to claim 1, wherein a supporting column (16) is rotatably connected to the top of the base plate (1), the top of the supporting column (16) is fixedly connected to the disc (2), a driven gear (17) is fixedly sleeved on the outer circular surface of the supporting column (16), a second motor (18) is fixedly connected to the top of the base plate (1), a driving gear (19) is fixedly connected to the output end of the second motor (18), and the driving gear (19) is meshed with the driven gear (17).

3. The target material leveling device for the thin film solar cell according to claim 1, wherein a second sliding groove (201) is formed in the top of the disc (2), an inner second sliding block (20) in sliding fit with the second sliding groove (201) is fixedly connected to the bottom of the placing table (3), a second screw rod (21) is rotatably connected to the second sliding groove (201), the second screw rod (21) is in threaded connection with the second sliding block (20), a third motor (22) is fixedly installed in the second sliding groove (201), and an output end of the third motor (22) is fixedly connected with one end of the second screw rod (21).

4. The target leveling device for thin-film solar cells according to claim 1, wherein a plurality of support members (23) are fixedly connected to the top of the placing table (3) at equal intervals, and anti-slip pads (24) are fixedly connected to the tops of the support members (23).

5. The target leveling device for the thin-film solar cell according to claim 1, wherein a third sliding groove (501) is formed in one side, away from the connecting plate (8), of the supporting plate (5), a third sliding block (25) is connected in the third sliding groove (501) in a sliding manner, a hydraulic cylinder (26) is fixedly connected to one end of the third sliding block (25), a pressing plate (27) is fixedly connected to one end of the hydraulic cylinder (26), a third screw (28) is connected to the third sliding groove (501) in a rotating manner, the third screw (28) is in threaded connection with the third sliding block (25), one end of the third screw (28) penetrates through the outer side of the supporting plate (5) and is fixedly connected with an output end of a fourth motor (29), and the fourth motor (29) is fixedly mounted on the outer side of the supporting plate (5).

6. The target leveling device for the thin-film solar cell as claimed in claim 1, wherein a clamping groove (141) is formed in the top of the vertical plate (14), a clamping column (30) is fixedly connected to the bottom of the gear disc block (15), and the clamping column (30) is in clamping fit with the clamping groove (141).