CN217797555U

CN217797555U - Online radio frequency plasma device

Info

Publication number: CN217797555U
Application number: CN202222176241.4U
Authority: CN
Inventors: 王晓东
Original assignee: Tianjin Double Microelectronics Technology Co ltd
Current assignee: Tianjin Double Microelectronics Technology Co ltd
Priority date: 2022-08-18
Filing date: 2022-08-18
Publication date: 2022-11-15
Anticipated expiration: 2032-08-18

Abstract

The utility model relates to a radio frequency plasma technical field just discloses an online radio frequency plasma device, which comprises a frame, the lateral wall fixedly connected with transparent plate of frame, the side that the frame is close to the transparent plate is rotated and is connected with the threaded rod, the outside threaded connection of threaded rod has the support column, the one end fixedly connected with mounting bracket of threaded rod is kept away from to the support column, the gas storage chamber has been seted up to the inside of mounting bracket, the bottom fixedly connected with air pump of gas storage chamber, the piece is wiped to the lateral wall fixedly connected with of gas storage chamber, the movable chamber has been seted up to the inside of support column, is close to the lateral wall fixedly connected with of transparent plate through the mounting bracket and wipes the piece, and the mounting bracket is located the both sides of transparent plate respectively, wipes the piece and can clean the surface of transparent plate to it all cleans the inside and outside both sides of transparent plate to have reached, avoids causing the effect of image unsharpness when laser irradiation and camera are shot.

Description

Online radio frequency plasma device

Technical Field

The utility model relates to a radio frequency plasma technical field specifically is an online radio frequency plasma device.

Background

When observing and testing the movement of the radio frequency plasma, the radio frequency plasma device is used for testing, and in order to observe the movement state of the inside, a transparent plate is mounted on the side wall of the device, and the observation and the recording are carried out by a laser irradiation and an image pickup mode.

The side transparent plate of the on-line radio frequency plasma device does not have the function of automatic cleaning, and needs to be cleaned manually, so that the working efficiency is reduced, and meanwhile, the shot image is not clear, and the consequence of refraction is easy to generate during laser irradiation.

The transparent plate can be automatically cleaned by installing the cleaning mechanism on the side face of the transparent plate, so that the working efficiency is improved, the shooting definition is improved, and the effect of refraction of irradiated laser is avoided.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model provides a not enough to prior art, the utility model provides an online radio frequency plasma device possesses and to carry out automatic cleanness to the transparent plate, has improved work efficiency, has improved the definition of shooting simultaneously, and the laser of avoiding shining into takes place advantages such as refraction, has solved and needs the manual work to carry out cleaning to it, has reduced the efficiency of work like this, and the image of shooing simultaneously is not clear, produces the problem of refraction easily during laser irradiation.

(II) technical scheme

Can carry out automatic cleanness to the transparent plate for realizing the aforesaid, improve work efficiency, improve the definition of shooting simultaneously, avoid shining the purpose that the refraction takes place for the laser that advances, the utility model provides a following technical scheme: the utility model provides an online radio frequency plasma device, includes the frame, the lateral wall fixedly connected with transparent plate of frame, the side that the frame is close to the transparent plate is rotated and is connected with the threaded rod, the outside threaded connection of threaded rod has the support column, the one end fixedly connected with mounting bracket of threaded rod is kept away from to the support column, the gas storage storehouse has been seted up to the inside of mounting bracket, the bottom fixedly connected with air pump of gas storage storehouse, the lateral wall fixedly connected with of gas storage storehouse wipes the piece, the movable chamber has been seted up to the inside of support column, the inside rotation in movable chamber is connected with changes the board, the lateral wall fixedly connected with pivot of changeing the board, the spout has been seted up to the inside of changeing the board, the inside sliding connection of spout has the slider, the slider is close to the one end fixedly connected with reset spring of spout bottom, the inside sliding connection of slider has the metal contact, the inside fixedly connected with metal strip of the lateral wall of spout.

Preferably, the two ends of the frame, which are close to the transparent plate, are provided with grooves, the threaded rod is rotatably connected inside the grooves, and the bottom of the threaded rod is fixedly connected with a servo motor, so that the threaded rod can rotate inside the frame.

Preferably, the internal thread hole has been seted up to the inside of support column, threaded rod and the mutual threaded connection in internal thread hole can drive the support column with it meshing when the threaded rod rotates and reciprocate.

Preferably, the wiping block is internally provided with air holes, and the air storage bin is communicated with the air holes in the wiping block, so that air in the air storage bin can be sprayed on the surface of the transparent plate through the wiping block.

Preferably, the lateral surface fixedly connected with teeth of a cogwheel of commentaries on classics board, and changeing board and threaded rod in contact with each other, when the threaded rod drove the support column up-and-down motion, changeed the board and can rotate under the drive of threaded rod.

Preferably, the constant head tank has been seted up to the lateral wall of spout, metal strip fixed connection is in the bottom of constant head tank, metal contact and constant head tank are located same horizontal plane, can stretch into the inside of constant head tank when metal contact moves to the side of constant head tank to rather than the metal strip interconnect of bottom.

Preferably, the side face of the metal contact is fixedly connected with a spring, the other end of the spring is fixedly connected inside the sliding block, the metal contact is connected with a power supply, the metal strip is mutually communicated with an internal circuit of the air pump through an electric wire, and when the metal contact is mutually contacted with the metal strip, the air pump can start to work.

(III) advantageous effects

Compared with the prior art, the utility model provides an online radio frequency plasma device possesses following beneficial effect:

1. this online radio frequency plasma device rotates under servo motor's drive through the threaded rod for the support column up-and-down motion of meshing with it, the side fixedly connected with mounting bracket of support column, the lateral wall fixedly connected with that the mounting bracket is close to the transparent plate wipes the piece, and the mounting bracket is located the both sides of transparent plate respectively, it can clean the surface of transparent plate to wipe the piece, thereby it all cleans to have reached the inside and outside both sides of transparent plate, avoid causing the effect of the image unsharpness when laser irradiation and camera are shot.

2. This online radio frequency plasma device, when reciprocating through the support column, the lateral wall and the threaded rod meshing of commentaries on classics board, make to change the board and begin to rotate, the slider of changeing inboard portion slides to the outside under the effect of centrifugal force, make metal contact and metal strip contact each other, the air pump begins to work this moment, the air is through the gas storage storehouse, through wiping the inside surface of seting up the gas pocket injection at the transparent plate of offering of block, thereby reached and to have avoided the dust to be stained with and attach on the transparent plate surface, work efficiency's when clean effect has been improved.

Drawings

Fig. 1 is a schematic front perspective view of the rf plasma device of the present invention;

fig. 2 is a schematic cross-sectional structural view of the rf plasma device of the present invention;

FIG. 3 is a schematic view of the front cross-sectional structure of the cleaning mechanism of the present invention;

FIG. 4 is a schematic front sectional structural view of the support column of the present invention;

fig. 5 is a schematic front sectional structural view of the triggering mechanism of the present invention;

fig. 6 is a schematic front sectional view of the lifting mechanism of the present invention.

In the figure: 1. a frame; 2. a transparent plate; 3. a threaded rod; 4. a support pillar; 5. a mounting frame; 6. a gas storage bin; 7. an air pump; 8. wiping blocks; 9. a movable cavity; 10. rotating the plate; 11. a rotating shaft; 12. a chute; 13. a slider; 14. a return spring; 15. a metal contact; 16. a metal strip.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Please refer to fig. 1-6, an online radio frequency plasma device, which comprises a frame 1, a groove is formed at two ends of the frame 1 close to a transparent plate 2, a threaded rod 3 is rotatably connected inside the groove, and a bottom fixedly connected with servo motor of the threaded rod 3, so that the threaded rod 3 can rotate inside the frame 1, a side wall fixedly connected with transparent plate 2 of the frame 1, a side surface of the frame 1 close to the transparent plate 2 is rotatably connected with the threaded rod 3, an outer side thread of the threaded rod 3 is connected with a support column 4, an inner thread hole is formed inside the support column 4, the threaded rod 3 is in threaded connection with the inner thread hole, the threaded rod 3 can drive the support column 4 engaged with the threaded rod to move up and down when rotating, one end fixedly connected with an installation frame 5 of the support column 4 far away from the threaded rod 3, a gas storage 6 is formed inside the installation frame 5, a bottom fixedly connected with an air pump 7 of the gas storage 6, an outer side wall fixedly connected with a wiping block 8 of the gas storage 6, an air hole is formed inside the wiping block 8, the gas storage 6 and the air hole inside the gas storage block 8 are communicated with each other, so that the air inside the gas storage 6 can be sprayed on the surface of the transparent plate 2 through the wiping block 8.

Activity chamber 9 has been seted up to the inside of support column 4, the inside rotation in activity chamber 9 is connected with commentaries on classics board 10, the lateral surface fixedly connected with teeth of a cogwheel of commentaries on classics board 10, and commentaries on classics board 10 and threaded rod 3 contact each other, when threaded rod 3 drives support column 4 up-and-down motion, commentaries on classics board 10 can rotate under the drive of threaded rod 3, the lateral wall fixedly connected with pivot 11 of commentaries on classics board 10, spout 12 has been seted up to the inside of commentaries on classics board 10, the constant head tank has been seted up to the lateral wall of spout 12, metal strip 16 fixed connection is in the bottom of constant head tank, metal contact 15 is located same horizontal plane with the constant head tank, can stretch into the inside of constant head tank when metal contact 15 moves to the side of constant head tank, and 16 interconnect of metal strip of its bottom, the inside sliding connection of spout 12 has slider 13, slider 13 is close to the one end fixedly connected with reset spring 14 bottom spout 12, the inside sliding connection of slider 13 has metal contact 15, the side fixed connection of metal contact 15 has the spring, the other end fixed connection of spring is in the inside of slider 13, metal contact 15 is connected with the power, the inside fixed connection of slider 12, metal strip 16 of lateral wall, metal contact communicates with metal strip 16 through the inside circuit of electric wire and the air pump 7 each other, metal contact 15 and the air pump 16 of air pump, metal contact 16 when metal contact 7 can start work, the air pump, metal contact 16 can contact 16.

When using, when threaded rod 3 rotated under servo motor's drive, the inside internal thread cover of support column 4 can with threaded rod 3 intermeshing, drive support column 4 upward movement, when support column 4 upward movement, its inside pivoted changes board 10 side and threaded rod 3 contact each other, make and change board 10 and begin to rotate, can be under the effect of centrifugal force at the inside gliding slider 13 of commentaries on classics board 10, to the outer tip motion of spout 12, the inside metal contact 15 of slider 13 and the inside metal strip 16 of spout 12 lateral wall contact each other this moment, air pump 7 begins the inside of work with external air input gas storage storehouse 6 this moment, gas storage storehouse 6 is seted up in the inside of mounting bracket 5, and one side fixedly connected with that mounting bracket 5 is close to transparent plate 2 wipes piece 8 this moment, wipe the piece 8 and clean the surface of transparent plate 2 this moment, its inside of wiping piece 8 has seted up the gas pocket, make the inside air injection of gas storage storehouse 6 on the surface of transparent plate 2, prevent being stained with of dust and attach.

To sum up, this online radio frequency plasma device rotates under servo motor's drive through threaded rod 3 for 4 up-and-down motion of support column with it meshing, support column 4's side fixedly connected with mounting bracket 5, mounting bracket 5 is close to the lateral wall fixedly connected with of transparent plate 2 and wipes piece 8, and mounting bracket 5 is located the both sides of transparent plate 2 respectively, it can clean the surface of transparent plate 2 to wipe piece 8, thereby it all cleans to have reached the inside and outside both sides of transparent plate 2, avoid causing the effect that the image is unclear when laser irradiation and camera are shot.

This online radio frequency plasma device, when reciprocating through support column 4, the lateral wall and the threaded rod 3 meshing of commentaries on classics board 10, make commentaries on classics board 10 begin to rotate, change the inside slider 13 of board 10 and slide to the outside under the effect of centrifugal force, make metal contact 15 and metal strip 16 contact each other, air pump 7 begins to work this moment, the air is through gas storage 6, through wiping 8 inside surface of seting up the gas pocket injection at transparent plate 2, thereby reached and to have avoided the dust to be stained with on transparent plate 2 surface, work efficiency's when clean effect has been improved.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. An online radio frequency plasma device, comprising a frame (1), characterized in that: the side wall fixedly connected with transparent plate (2) of frame (1), frame (1) is close to the side of transparent plate (2) and rotates and is connected with threaded rod (3), the outside threaded connection of threaded rod (3) has support column (4), the one end fixedly connected with mounting bracket (5) of threaded rod (3) are kept away from in support column (4), gas storage storehouse (6) have been seted up to the inside of mounting bracket (5), bottom fixedly connected with air pump (7) of gas storage storehouse (6), piece (8) have been wiped to the lateral wall fixedly connected with of gas storage storehouse (6), movable chamber (9) have been seted up to the inside of support column (4), the inside rotation in movable chamber (9) is connected with commentaries on classics board (10), the lateral wall fixedly connected with pivot (11) of commentaries on classics board (10), spout (12) have slider (13) to inside sliding connection of spout (12), slider (13) are close to the one end fixedly connected with reset spring (14) of spout (12) bottom, the inside sliding connection of slider (13) has metal contact (15), the inside sliding connection has metal strip (16) of spout (12).

2. The online radio frequency plasma device of claim 1, wherein: the two ends, close to the transparent plate (2), of the rack (1) are provided with grooves, the threaded rod (3) is rotatably connected inside the grooves, and the bottom of the threaded rod (3) is fixedly connected with a servo motor.

3. An in-line rf plasma device as defined in claim 1, wherein: an internal thread hole is formed in the supporting column (4), and the threaded rod (3) is in threaded connection with the internal thread hole.

4. An in-line rf plasma device as defined in claim 1, wherein: the inside of the wiping block (8) is provided with air holes, and the air storage bin (6) is communicated with the air holes in the wiping block (8).

5. The online radio frequency plasma device of claim 1, wherein: the outer side face of the rotating plate (10) is fixedly connected with gear teeth, and the rotating plate (10) is in contact with the threaded rod (3) mutually.

6. The online radio frequency plasma device of claim 1, wherein: the side wall of the sliding groove (12) is provided with a positioning groove, the metal strip (16) is fixedly connected to the bottom of the positioning groove, and the metal contact (15) and the positioning groove are located on the same horizontal plane.

7. The online radio frequency plasma device of claim 1, wherein: the side face of the metal contact (15) is fixedly connected with a spring, the other end of the spring is fixedly connected inside the sliding block (13), the metal contact (15) is connected with a power supply, and the metal strip (16) is communicated with an internal circuit of the air pump (7) through an electric wire.