CN217795208U

CN217795208U - Excitation driving power supply for cathode arc ion plating target

Info

Publication number: CN217795208U
Application number: CN202221366897.6U
Authority: CN
Inventors: 吕大银; 包建平
Original assignee: Foshan Chengxin Electronics Co ltd
Current assignee: Foshan Chengxin Electronics Co ltd
Priority date: 2022-06-02
Filing date: 2022-06-02
Publication date: 2022-11-15
Anticipated expiration: 2032-06-02

Abstract

The utility model relates to the technical field of electrical equipment, and a cathode arc ion plating target excitation drive power supply is disclosed, which comprises an outer shell, the inside of shell body is provided with the mounting box, the positive fixed mounting of mounting box has the panel, the back of panel is provided with dust screen installation mechanism, dust screen installation mechanism includes the mount, mount fixed mounting is at the back of panel, the inboard of mount is provided with the joint groove, the inside joint in joint groove has fixed frame, the intermediate position fixed mounting of fixed frame has the dust screen body, the back fixed mounting of panel has the installing frame, the inside slidable mounting of installing frame has the sliding block, fixed mounting has reset spring between the outside of sliding block and the inner wall of installing frame. This cathode arc ion plating target excitation drive power supply is convenient for install fast and is dismantled the dust screen to more convenient clear up the dust screen, prevent to accumulate too much dust on the dust screen and make the radiating effect reduce.

Description

Excitation driving power supply for cathode arc ion plating target

Technical Field

The utility model relates to an electrical equipment technical field specifically is cathodic arc ion coating target excitation drive power supply.

Background

The driving power supply is a power conversion device which converts power supply into specific voltage and current to drive the equipment to operate. The driving power supply has high reliability and has functions of overcurrent protection, open circuit protection and the like, and the driving power supply needs to have a good heat dissipation effect due to long-time use.

In the prior art, the used driving power supply is usually directly and fixedly installed inside the power supply, so that dust is not convenient to clean, and the heat dissipation net is easy to block after being used for a long time, thereby affecting the heat dissipation effect.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a cathode arc ion plating target excitation drive power supply to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the cathode arc ion plating target excitation driving power supply comprises an outer shell, wherein a mounting box is arranged inside the outer shell, a panel is fixedly mounted on the front side of the mounting box, a positioning and mounting mechanism is arranged outside the mounting box, and a dust screen mounting mechanism is arranged on the back of the panel.

The utility model discloses a dustproof net installation structure, including the panel, the inside of panel is provided with the joint groove, the inside joint in joint groove has fixed frame, the intermediate position fixed mounting of fixed frame has the dustproof net body, the back fixed mounting of panel has the installing frame, the inside slidable mounting of installing frame has the sliding block, fixed mounting has reset spring between the outside of sliding block and the inner wall of installing frame, the inboard fixed mounting of sliding block has the piece of pegging graft, the back fixed mounting of installing frame has the apron, the back fixed mounting of sliding block has the pulling piece.

Preferably, the inboard of fixed frame is provided with the convex body with joint groove matched with, and the convex body joint is in the joint groove, is convenient for make the medial extremity fixed mounting of fixed frame on the mount.

Preferably, the inner side of the fixed frame and the corresponding position of the insertion block are provided with through holes, the corresponding position of the fixed frame and the insertion block is provided with insertion grooves, and the insertion block penetrates through the through holes to be inserted in the insertion grooves, so that the insertion block can fixedly install the installation frame.

Preferably, a through groove is formed in the corresponding position of the cover plate and the pulling block, and the pulling block penetrates through the through groove, so that the pulling block can conveniently penetrate through the cover plate to slide.

Preferably, the dust screen mounting mechanisms are arranged in two groups, and the two groups of dust screen mounting mechanisms are respectively arranged on the back of the panel.

Preferably, location installation mechanism includes the handle, handle fixed mounting is in the front of panel, the louvre has been seted up in the front of panel, just the position of louvre is corresponding with the position of dust screen body, fixed mounting has excitation coil on the bottom inner wall of mounting box, fixed mounting has the mounting panel on the inner wall of mounting box, the positive fixed mounting of mounting panel has the heat dissipation fan, just the position of heat dissipation fan is corresponding with the louvre, is convenient for prevent through the dust screen body that the dust from entering into the inside of mounting box from the louvre department.

Preferably, the bottom fixed mounting of mounting box has the connecting block, be provided with the constant head tank on the bottom inner wall of shell body, just the connecting block is pegged graft in the constant head tank, is convenient for make mounting box and shell body location installation.

Compared with the prior art, the utility model provides a cathode arc ion coating target excitation drive power supply possesses following beneficial effect:

1. this cathode arc ion plating target excitation drive power supply, through the dust screen installation mechanism that sets up, in the use, be convenient for install fast the dust screen and dismantle to more convenient clear up the dust screen, prevent that the dust screen from accumulating too much dust and make the radiating effect reduce.

2. This cathode arc ion plating target excitation drive power supply through the location installation mechanism that sets up, in the use, carries out the installation of fixing a position fast through the connecting block of mounting box bottom and the constant head tank on the shell body, makes the mounting box align with the quick location of screw hole on the shell body to reached and need not the effect of many times adjustment position between mounting box and the shell body.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained without inventive exercise based on the drawings:

FIG. 1 is a schematic view of the appearance structure of the present invention;

fig. 2 is a schematic view of the bottom view structure of the present invention;

FIG. 3 is an exploded view of the present invention;

FIG. 4 is a rear view of the panel and the connecting mechanism of the present invention;

FIG. 5 is a schematic cross-sectional view of the panel and the connecting mechanism of the present invention;

fig. 6 is an enlarged schematic view of a structure shown in fig. 5 according to the present invention.

In the figure: 1. an outer housing; 2. mounting a box; 3. a panel; 4. a positioning and mounting mechanism; 41. a handle; 42. connecting blocks; 43. positioning a groove; 44. heat dissipation holes; 45. a field coil; 46. mounting a plate; 47. a heat dissipation fan; 5. a dust screen mounting mechanism; 51. a fixed mount; 52. a clamping groove; 53. a fixing frame; 54. a dust screen body; 55. installing a frame; 56. a slider; 57. a return spring; 58. a cover plate; 59. an insertion block; 510. and pulling the block.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

Referring to fig. 1-6, the present invention provides a technical solution: cathode arc ion plating target excitation drive power supply, including shell body 1, the inside of shell body 1 is provided with mounting box 2, and the front fixed mounting of mounting box 2 has panel 3, and the outside of mounting box 2 is provided with location installation mechanism 4, and the back of panel 3 is provided with dust screen installation mechanism 5.

The dustproof net mounting mechanism 5 comprises a fixing frame 51, the fixing frame 51 is fixedly mounted on the back of the panel 3, a clamping groove 52 is formed in the inner side of the fixing frame 51, a fixing frame 53 is clamped in the clamping groove 52, a dustproof net body 54 is fixedly mounted at the middle position of the fixing frame 53, a mounting frame 55 is fixedly mounted on the back of the panel 3, a sliding block 56 is slidably mounted in the mounting frame 55, a reset spring 57 is fixedly mounted between the outer side of the sliding block 56 and the inner wall of the mounting frame 55, an inserting block 59 is fixedly mounted on the inner side of the sliding block 56, a cover plate 58 is fixedly mounted on the back of the mounting frame 55, a pulling block 510 is fixedly mounted on the back of the sliding block 56, a convex body matched with the clamping groove 52 is arranged on the inner side of the fixing frame 53, the convex body is clamped in the clamping groove 52, the inner side end of the fixing frame 53 is fixedly mounted on the fixing frame 51 conveniently, a through hole is formed in the position corresponding to the inner side of the inserting block 53, inserting groove is formed in the position corresponding to the fixing frame 53 and the inserting block 59, inserting groove is formed in the position corresponding to the inserting block 59, the inserting groove 59 penetrates through holes, two groups of the sliding groove 510, and the sliding block 510 is arranged on the panel 5, and the panel 5.

Location installation mechanism 4 includes handle 41, handle 41 fixed mounting is in the front of panel 3, louvre 44 has been seted up in the front of panel 3, and the position of louvre 44 is corresponding with the position of dust screen body 54, fixed mounting has excitation coil 45 on the bottom inner wall of mounting box 2, fixed mounting has mounting panel 46 on the inner wall of mounting box 2, mounting panel 46's front fixed mounting has heat dissipation fan 47, and heat dissipation fan 47's position is corresponding with louvre 44, be convenient for prevent through dust screen body 54 that the dust from entering into the inside of mounting box 2 from louvre 44, the bottom fixed mounting of mounting box 2 has connecting block 42, be provided with constant head tank 43 on the bottom inner wall of shell body 1, and connecting block 42 pegs graft in constant head tank 43, be convenient for make mounting box 2 and shell body 1 location installation.

Programmable current output is provided to the excitation coil 45 of the target material, and the telecontrol track of the arc spot on the target surface is controlled by the Lorentz force generated by the magnetic field of the coil. The arc spot movement track reasonably covers the whole target surface and the physical characteristics of the cathode arc, so that the utilization rate of the target material is increased and the overall controllability of the coating process is improved.

Inputting parameters: AC220V input, maximum current 5A.

Outputting parameters: two independent channel outputs, each channel can provide an output capability of 400W. Each channel can be individually switched in 1 to 8 arc sources (a specific number is premised on not exceeding the total output power).

If the access load exceeds the total power, all arc sources of the channel cannot distribute enough power, and the working effect is affected.

In the actual operation process, when the device is used, the upper convex body of the fixed frame 53 is inserted into the clamping groove 52, then the sliding block 56 is pulled by the pulling block 510 to slide outwards, so that the sliding block 56 presses the return spring 57, meanwhile, the sliding block 56 drives the inserting block 59 to slide outwards, then the fixed frame 53 is pressed towards the panel 3, the fixed frame 53 is tightly attached to the fixed frame 51, then the pulling block 510 is released, the sliding block 56 is reset under the action of the return spring 57, and the sliding block 56 drives the inserting block 59 to be inserted into the inserting groove on the fixed frame 53, so that the fixed frame 53 is fixedly installed, and the dustproof net body 54 is fixedly installed at the inner side of the panel 3;

through holding handle 41, align the connecting block 42 and the constant head tank 43 of mounting box 2 bottom, insert the constant head tank 43 with connecting block 42, insert mounting box 2 simultaneously in the shell body 1, the rethread screw is fixed can, rotate through heat dissipation fan 47, pass through dust screen body 54 and louvre 44 with the inside heat of mounting box 2 and discharge.

It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element described by the phrase "comprising a. -" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Claims

1. Cathode arc ion plating target excitation drive power supply, including shell body (1), its characterized in that: a mounting box (2) is arranged inside the outer shell (1), a panel (3) is fixedly mounted on the front surface of the mounting box (2), a positioning and mounting mechanism (4) is arranged outside the mounting box (2), and a dust screen mounting mechanism (5) is arranged on the back of the panel (3);

dust screen installation mechanism (5) are including mount (51), mount (51) fixed mounting is at the back of panel (3), the inboard of mount (51) is provided with joint groove (52), the inside joint of joint groove (52) has fixed frame (53), the intermediate position fixed mounting of fixed frame (53) has dust screen body (54), the back fixed mounting of panel (3) has installing frame (55), the inside slidable mounting of installing frame (55) has sliding block (56), fixed mounting has reset spring (57) between the outside of sliding block (56) and the inner wall of installing frame (55), the inboard fixed mounting of sliding block (56) has plug block (59), the back fixed mounting of installing frame (55) has apron (58), the fixed mounting of sliding block (56) has pull block (510).

2. The cathode arc ion plating target excitation driving power supply according to claim 1, characterized in that: the inner side of the fixing frame (53) is provided with a convex body matched with the clamping groove (52), and the convex body is clamped in the clamping groove (52).

3. The excitation driving power supply for cathode arc ion plating target material according to claim 1, characterized in that: through holes are formed in the positions, corresponding to the inserting blocks (59), of the inner side of the fixing frame (53), inserting grooves are formed in the positions, corresponding to the inserting blocks (59), of the fixing frame (53), and the inserting blocks (59) penetrate through the through holes to be inserted into the inserting grooves.

4. The excitation driving power supply for cathode arc ion plating target material according to claim 1, characterized in that: through grooves are formed in the positions, corresponding to the pulling blocks (510), of the cover plate (58), and the pulling blocks (510) penetrate through the through grooves.

5. The excitation driving power supply for cathode arc ion plating target material according to claim 1, characterized in that: the dustproof net mounting mechanisms (5) are arranged in two groups, and the two groups of dustproof net mounting mechanisms (5) are respectively arranged on the back of the panel (3).

6. The excitation driving power supply for cathode arc ion plating target material according to claim 1, characterized in that: location installation mechanism (4) are including handle (41), handle (41) fixed mounting is in the front of panel (3), louvre (44) have been seted up in the front of panel (3), just the position of louvre (44) is corresponding with the position of dust screen body (54), fixed mounting has excitation coil (45) on the bottom inner wall of mounting box (2), fixed mounting has mounting panel (46) on the inner wall of mounting box (2), the front fixed mounting of mounting panel (46) has heat dissipation fan (47), just the position of heat dissipation fan (47) is corresponding with louvre (44).

7. The cathodic arc ion plating target excitation drive power supply of claim 6, characterized in that: the bottom fixed mounting of mounting box (2) has connecting block (42), be provided with constant head tank (43) on the bottom inner wall of shell body (1), just connecting block (42) are pegged graft in constant head tank (43).