CN217789952U

CN217789952U - Automatic change plasma treatment equipment

Info

Publication number: CN217789952U
Application number: CN202221751090.4U
Authority: CN
Inventors: 刘锋; 张洪彬
Original assignee: Shenzhen Ruibao Technology Co ltd
Current assignee: Shenzhen Ruibao Technology Co ltd
Priority date: 2022-07-08
Filing date: 2022-07-08
Publication date: 2022-11-11
Anticipated expiration: 2032-07-08

Abstract

The utility model discloses an automatic plasma processing device in the technical field of plasma equipment, which comprises a mounting device, a loading box and a storage device, wherein the mounting device comprises a base, a vacuum pump, a second electric push rod and a third electric push rod, the vacuum pump is fixed on the left side wall of the base through a bolt, and the right end of the second electric push rod is fixed on the top of the base through a fixing plate; this automatic change plasma treatment equipment's setting, structural design is reasonable, install storage device and loading case through the top at the base, cut apart into a plurality of cavities in the inside of loading case, and two electrode plates of installation are used for carrying out the ionization to oxygen in every cavity, make each cavity all can be solitary handle the work piece, cross influence has been avoided appearing each other, can once only handle the multi-disc work piece simultaneously, and whole automatic operation, thereby the treatment effeciency of improvement work piece that can be by a wide margin.

Description

Automatic plasma treatment equipment

Technical Field

The utility model relates to a plasma equipment technical field specifically is an automatic change plasma treatment equipment.

Background

Plasma refers to a partially or completely ionized gas, and the sum of the positive and negative charges of free electrons and ions completely offsets, and macroscopically presents neutral electricity. Plasma, also called plasma, is an ionized gaseous substance consisting of atoms from which some electrons are deprived and positive and negative electrons generated by ionization of atoms, and is widely present in the universe and is often regarded as a fourth state in which substances exist except solid, liquid and gas.

Chinese patent CN214046096U discloses an automatic plasma processing apparatus which can be adapted to products of various sizes, and improves the versatility of the automatic plasma processing apparatus. When the existing plasma processing equipment is used, a plurality of workpieces are processed in one chamber, and loading and unloading are required manually, so that the processing efficiency of the workpieces can be reduced. For this reason, new technical solutions need to be designed to solve the problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an automatic change plasma treatment equipment to the ion treatment equipment who proposes in solving above-mentioned background art is handled a plurality of work pieces in a cavity when using, and need the manual work go on go up unloading, thereby can reduce the problem of the treatment effeciency of work piece.

In order to achieve the above object, the utility model provides a following technical scheme: an automatic plasma processing device comprises a mounting device, a loading box and a storage device, wherein the mounting device comprises a base, a vacuum pump, a second electric push rod and a third electric push rod, the vacuum pump is fixed on the left side wall of the base through a bolt, the right end of the second electric push rod is fixed on the top of the base through a fixing plate, and the third electric push rod is in contact with the rear side wall of the storage device through a push plate; the loading box comprises partition plates, an upper electrode plate and a lower electrode plate, the partition plates are distributed in the inner cavity of the loading box at equal distances and are divided into a plurality of cavities with the same size, the top and the bottom of the inner cavity of each cavity are respectively embedded with the upper electrode plate and the lower electrode plate, and the vacuum pump is communicated with each cavity through a guide pipe; the material storage device comprises a vertical plate, a loading plate and scraping plates, wherein the number of the loading plates is the same as that of the cavities, the scraping plates are fixed at one side, close to the loading box, of the vertical plate through bolts, the scraping plates are fixed at the bottom of the loading plate through connecting rods, the bottoms of the scraping plates are in contact with the bottom of the cavities, and the second electric push rod is connected with the vertical plate through a connecting piece.

In order to make the gliding that storage device can be smooth, as the utility model discloses an automatic change that plasma treatment equipment is preferred, base top front side is inclined plane.

In order to prevent two upper and lower cavities from influencing each other, conduct the utility model discloses an automatic change plasma treatment equipment preferred, the inside of division board is inlayed and is had the shielding net.

In order to make storage device can enough break away from second electric putter under third electric putter's effect, also can be horizontal migration under second electric putter's effect, conduct the utility model discloses an automatic change that plasma processing equipment is preferred, the connecting piece includes the buckle and draws the knot, the buckle with draw and detain reverse joint.

In order to restrict the movement of the workpiece on the surface of the loading plate, it is preferable that the top of the loading plate is fixed with a plurality of projections by bolts.

In order to inject storage device's shift position, conduct the utility model discloses an automatic change plasma treatment equipment is preferred, peg graft in the inside of base and have the baffle, the bottom of baffle is passed through the bolt fastening and is had first electric putter.

Compared with the prior art, the beneficial effects of the utility model are that: this automatic change plasma treatment equipment's setting, structural design is reasonable, install storage device and loading case through the top at the base, cut apart into a plurality of cavities in the inside of loading case, and two electrode plates of installation are used for carrying out the ionization to oxygen in every cavity, make each cavity all can be solitary handle the work piece, cross influence has been avoided appearing each other, can once only handle the multi-disc work piece simultaneously, and whole automatic operation, thereby the treatment effeciency of improvement work piece that can be by a wide margin.

Drawings

FIG. 1 is a schematic view of the three-dimensional structure of the present invention;

FIG. 2 is a schematic sectional view of the present invention;

fig. 3 is a schematic view of the top view structure of the present invention.

In the figure: 100. mounting means; 110. a base; 120. a vacuum pump; 130. a first electric push rod; 131. a baffle plate; 140. a second electric push rod; 141. pulling the button; 150. a third electric push rod; 151. pushing the plate; 200. a loading bin; 210. a partition plate; 211. a shielding mesh; 220. an upper electrode plate; 230. a lower electrode plate; 300. a material storage device; 310. a vertical plate; (ii) a 311. Buckling; 320. a loading plate; 321. a bump; 330. a scraper.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: including a mounting device 100, a loading bin 200, and a stocker 300.

In the technical scheme, the mounting device 100 comprises a base 110, a vacuum pump 120, a second electric push rod 140 and a third electric push rod 150, wherein the vacuum pump 120 is fixed on the left side wall of the base 110 through a bolt, the right end of the second electric push rod 140 is fixed on the top of the base 110 through a fixing plate, and the third electric push rod 150 is in contact with the rear side wall of the material storage device 300 through a push plate 151;

in this embodiment, the base 110 is used to provide a supporting point for mounting each component, the vacuum pump 120 is used to pump air out of the cavity of the partition plate 210 to provide a vacuum environment for processing the workpiece, the second electric push rod 140 is used to control the movement of the magazine 300 in the X-axis direction, and the third electric push rod 150 is used to control the movement of the magazine 300 in the Y-axis direction.

In the technical scheme, the loading box 200 comprises partition plates 210, an upper electrode plate 220 and a lower electrode plate 230, the partition plates 210 are distributed in the inner cavity of the loading box 200 at equal distances and are divided into a plurality of cavities with the same size, the top and the bottom of the inner cavity of each cavity are respectively embedded with the upper electrode plate 220 and the lower electrode plate 230, and the vacuum pump 120 is communicated with each cavity through a conduit;

in this embodiment, the partition plates 210 are used to divide the inner cavity of the loading box 200 into a plurality of chambers with the same size, and the upper electrode plate 220 and the lower electrode plate 230 are used to ionize the gas in the chambers, so as to process the workpieces.

In the technical scheme, the storage device 300 comprises a vertical plate 310, loading plates 320 and scrapers 330, wherein the loading plates 320 with the same number as the cavities are fixed on one side of the vertical plate 310 close to the loading box 200 through bolts, the scrapers 330 are fixed at the bottom of the loading plates 320 through connecting rods, the bottoms of the scrapers 330 are in contact with the bottoms of the cavities, and the second electric push rod 140 is connected with the vertical plate 310 through a connecting piece;

in this embodiment, the vertical plates 310 are used to provide support points for the installation of the loading plates 320, each loading plate 320 extends into a chamber, and the scraper 330 is used to scrape the bottom of the chamber to remove the settled ash.

In some embodiments, referring to fig. 1, the front side of the top of the base 110 is an inclined slope.

In this solution, the top of the bevel extends at the central axis of the horizontal movement of the magazine 300, and the third electric ram 150 only needs to push the magazine 300 slightly to slide the magazine 300 down the bevel.

In some embodiments, referring to fig. 2, a shielding net 211 is embedded in the partition plate 210.

In the technical scheme, the upper chamber and the lower chamber can be isolated by using the shielding net 211, so that the upper chamber and the lower chamber are prevented from being influenced when being used simultaneously.

In some technical solutions, referring to fig. 1 to 3, the connecting member includes a buckle 311 and a tab 141, and the buckle 311 and the tab 141 are reversely clamped.

In this kind of technical scheme, this connecting piece adopts swing joint's mode to be connected the magazine 300 with second electric putter 140, can play the second electric putter 140 and control the removal of magazine 300 in the X axle direction, and magazine 300 also can break away from second electric putter 140 along the Y axle direction under the effect of third electric putter 150.

In some embodiments, referring to fig. 1, a plurality of protrusions 321 are fixed to the top of the loading plate 320 by bolts.

In this solution, the bump 321 is used to limit the workpiece and limit the workpiece on the surface of the loading plate 320, so as to prevent the workpiece from falling.

In some technical solutions, referring to fig. 1 and 3, a baffle 131 is inserted into the base 110, and a first electric push rod 130 is fixed to the bottom of the baffle 131 through a bolt.

In this solution, the first electric pushing rod 130 and the blocking plate 131 cooperate with each other to effectively control the position of the magazine 300 moving in the Y-axis direction, so that the magazine 300 is aligned with the loading box 200.

The working principle is as follows: the workpiece is grabbed to the surface of the loading plate 320 under the action of a manipulator (not shown in the figure), a control switch of a first electric push rod 130, a second electric push rod 140, a third electric push rod 150 and a vacuum pump 120 on an external control device is operated, the third electric push rod 150 pushes the vertical plate 310 along the Y-axis direction, at this time, the baffle 131 moves upwards under the action of the first electric push rod 130, the pull buckle 141 contacts with the right side wall of the vertical plate 310 under the action of the second electric push rod 140 until the loading plate 320 contacts with the baffle 131, at this time, the buckle 311 and the pull buckle 141 are clamped with each other, at this time, the second electric push rod 140 drives the pull buckle 141 to move along the X-axis, the loading plate 320 is pushed into the inner cavity of the loading box 200, the vertical plate 310 seals the opening of the right side wall of the loading box 200, at this time, the switches of the upper electrode plate 220 and the lower electrode plate 230 are opened, the vacuum pump 120 extracts gas in the cavity, then opens the pipeline valve on the left side wall of the loading box 200 to introduce oxygen into each ionization chamber, the gas to move, and further process the workpiece, after the processing is completed, the vertical plate, the second electric push rod 150 contacts with the lower push rod 130, and the bottom of the first electric push rod 300 to slightly move downwards to push the first electric push rod 300 to push the first electric push rod 130 to push the bottom of the chute 300 to push the chute to push rod.

It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

While the invention has been described above with reference to an embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, as long as there is no structural conflict, the various features of the disclosed embodiments of the present invention can be used in any combination with each other, and the description of such combinations is not exhaustive in the present specification only for the sake of brevity and resource conservation. Therefore, it is intended that the invention not be limited to the particular embodiments disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims

1. An automated plasma processing apparatus, characterized in that: the device comprises a mounting device (100), a loading box (200) and a storage device (300), wherein the mounting device (100) comprises a base (110), a vacuum pump (120), a second electric push rod (140) and a third electric push rod (150), the vacuum pump (120) is fixed on the left side wall of the base (110) through a bolt, the right end of the second electric push rod (140) is fixed on the top of the base (110) through a fixing plate, and the third electric push rod (150) is in contact with the rear side wall of the storage device (300) through a push plate (151);

the loading box (200) comprises partition plates (210), an upper electrode plate (220) and a lower electrode plate (230), the partition plates (210) are distributed in the inner cavity of the loading box (200) at equal distances and are divided into a plurality of chambers with the same size, the top and the bottom of the inner cavity of each chamber are respectively embedded with the upper electrode plate (220) and the lower electrode plate (230), and the vacuum pump (120) is communicated with each chamber through a conduit;

the storing device (300) comprises a vertical plate (310), a loading plate (320) and a scraper (330), wherein the loading plate (320) with the same number of cavities is fixed on one side, close to the loading box (200), of the vertical plate (310) through bolts, the scraper (330) is fixed at the bottom of the loading plate (320) through a connecting rod, the bottom of the scraper (330) is in contact with the bottom of the cavities, and a second electric push rod (140) is connected with the vertical plate (310) through a connecting piece.

2. An automated plasma processing apparatus according to claim 1, wherein: the front side of the top of the base (110) is an inclined plane.

3. An automated plasma processing apparatus according to claim 1, wherein: and a shielding net (211) is embedded in the partition plate (210).

4. An automated plasma processing apparatus according to claim 1, wherein: the connecting piece comprises a buckle (311) and a pull buckle (141), wherein the buckle (311) and the pull buckle (141) are reversely clamped.

5. An automated plasma processing apparatus according to claim 1, wherein: a plurality of projections (321) are fixed to the top of the loading plate (320) by bolts.

6. An automated plasma processing apparatus according to claim 1, wherein: a baffle (131) is inserted into the base (110), and a first electric push rod (130) is fixed at the bottom of the baffle (131) through a bolt.