CN217786930U

CN217786930U - Substrate dislocation defect detection equipment

Info

Publication number: CN217786930U
Application number: CN202221682978.7U
Authority: CN
Inventors: 洪亚德; 王士奇; 赵凌焜
Original assignee: Xiamen G First Oeic Co ltd
Current assignee: Xiamen G First Oeic Co ltd
Priority date: 2022-06-30
Filing date: 2022-06-30
Publication date: 2022-11-11
Anticipated expiration: 2032-06-30

Abstract

The utility model discloses a substrate dislocation defect detection device, which comprises a frame, an optical detector and an objective table; the optical detector is arranged at the upper end of the rack, and the objective table is arranged at the lower end of the rack; the objective table comprises a mounting plate, a vacuum generator and a plurality of adsorption pieces; the mounting plate is provided with an air suction cavity, and the upper end of the mounting plate is provided with a plurality of air suction holes; the vacuum generator is communicated with the air suction cavity; the adsorption piece comprises a funnel part, a horn part, a mounting ring and a sealing ring; the lower end of the horn part is fixedly connected with the upper edge of the funnel part, and the upper end of the horn part extends outwards in an inclined manner; the lower end of the funnel part is in threaded connection with the air suction hole; the mounting ring is fixed on the outer wall of the middle of the funnel part, and the sealing ring is fixed at the lower end of the mounting ring; a sealing groove is formed in the mounting plate on the outer side of the upper end of the air suction hole; the mounting ring lower extreme is hugged closely and in the sealing washer closely imbeds the seal groove with the mounting panel, adsorbs the crystal material that awaits measuring on loudspeaker portion through vacuum generator.

Description

Substrate dislocation defect detection equipment

Technical Field

The utility model relates to a check out test set technical field, specific substrate dislocation defect detecting equipment that says so.

Background

Dislocations, which may also be referred to as dislocations, refer in material science to an internal microscopic defect of a crystalline material, i.e. a crystallographic defect resulting from a locally irregular arrangement of atoms. From a geometrical point of view, dislocations belong to a type of line defect, which can be seen as the boundary between slipped and unswept portions in the crystal, the presence of which has a great influence on the physical properties of the material. For the active area of the silicon substrate, if the abnormity exists, namely the dislocation line defect is just positioned in the active area of the device, junction puncture phenomenon can be caused, so that the electrical performance of the device is often influenced, certain electrical failure is caused, and the leakage influence degree of the junction puncture phenomenon is in direct proportion to the density of dislocation and the depth of dislocation. In order to detect different areas of the crystal material comprehensively, the crystal material is often moved so that the optical detector can detect the crystal material conveniently. However, the existing bottom dislocation defect detection equipment generally adopts a clamp to clamp the crystal material, the clamping mode is easy to damage the crystal material, the clamping part of the clamping mode is easy to shield the crystal, and the detection process is inconvenient.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a substrate dislocation defect detecting equipment, this substrate dislocation defect detecting equipment's sealing washer closely imbeds in the seal groove, can effectively improve the leakproofness of adsorbing piece and mounting panel, starts the back when vacuum generator, can adsorb the crystal material that awaits measuring on soft horn portion, and the installation or dismantle simple and convenient, be difficult for causing the crystal material damage, and can not cause the detection to shelter from.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a substrate dislocation defect detecting apparatus includes a frame, an optical detector, and a stage; the optical detector is arranged at the upper end of the rack, and the objective table is arranged at the lower end of the rack; the objective table comprises a mounting plate, a vacuum generator and a plurality of adsorption pieces; an air suction cavity is formed in the mounting plate, and a plurality of air suction holes communicated with the air suction cavity are formed in the upper end of the mounting plate; the air suction end of the vacuum generator is communicated with the air suction cavity; the adsorption piece comprises a funnel part, a soft horn part, a mounting ring and a sealing ring; the lower end of the horn part is fixedly connected with the upper edge of the funnel part, and the upper end of the horn part extends outwards in an inclined manner; the lower end of the funnel part is in threaded connection with the air suction hole; the mounting ring is fixed on the middle outer wall of the funnel part, and the sealing ring is fixed at the lower end of the mounting ring; a sealing groove is formed in the mounting plate on the outer side of the upper end of the air suction hole; the mounting ring lower extreme is hugged closely and in the sealing washer closely imbeds the seal groove with the mounting panel, adsorbs the crystal material that awaits measuring on loudspeaker portion through vacuum generator.

Further, the thickness of the funnel part is gradually reduced from bottom to top.

Furthermore, an air valve for controlling the ventilation flow is arranged on the funnel part at the upper end of the mounting ring.

Furthermore, a filtering plug net is tightly embedded in the inner cavity of the funnel part; the upper end of the filter plug net is fixed with a handle.

Further, the air suction hole is a stepped hole, and a rubber pipe is fixed at the lower end of the funnel part; the lower end of the rubber tube is provided with an embedding groove, and an embedding ring is fixed on the mounting plate in the stepped hole; the caulking ring is tightly embedded into the caulking groove.

Furthermore, a first displacement mechanism is fixed at the upper end of the rack, the optical detector is fixed on the first displacement mechanism, and the optical detector is driven to move left and right by the first displacement mechanism; and a second displacement mechanism is fixed at the lower end of the rack, the mounting plate is fixed on the second displacement mechanism, and the mounting plate is driven to move back and forth by the second displacement mechanism.

Further, a display is arranged on the rack; the display is connected with the optical detector, and the detection condition is observed through the display.

After the technical scheme is adopted, the utility model discloses following beneficial effect has:

1. the utility model relates to a substrate dislocation defect detecting equipment, in the inseparable embedding seal groove of sealing washer, can effectively improve the leakproofness of adsorbing piece and mounting panel, after vacuum generator starts, can adsorb the crystal material that awaits measuring on soft horn portion, and the installation or dismantle simple and conveniently, be difficult for causing the crystal material damage, and can not cause the detection to shelter from.

2. The utility model relates to a substrate dislocation defect detecting equipment can be according to the in-service use demand, through opening and shutting of pneumatic valve control funnel portion or adjust the flow of ventilating, and the flexibility is good, and filters the stopper net and can hinder large granule impurity from the funnel portion entering the intracavity of breathing in.

3. The utility model relates to a substrate dislocation defect detecting equipment, the caulking ring closely imbeds the caulking groove in, can further improve the leakproofness of adsorbing piece and mounting panel, and the gas tightness is good.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

fig. 2 is a schematic sectional structure diagram of the objective table of the present invention;

fig. 3 is a partially enlarged view of a portion a in fig. 2.

The reference numbers in the figures denote:

1. a frame; 2. an optical detector; 3. an object stage; 30. mounting a plate; 300. an air suction cavity; 301. a suction hole; 302. a sealing groove; 303. embedding a ring; 31. a vacuum generator; 32. an adsorbing member; 320. a funnel part; 321. a horn section; 322. a mounting ring; 323. a seal ring; 324. an air valve; 325. a filter plug net; 326. a handle; 327. a rubber tube; 3270. caulking grooves; 4. a crystalline material; 5. a first displacement mechanism; 6. a second displacement mechanism; 7. and a display.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.

Referring to fig. 1 to 3, a substrate dislocation defect detecting apparatus includes a frame 1, an optical detector 2, and a stage 3; the optical detector 2 is arranged at the upper end of the frame 1, and the objective table 3 is arranged at the lower end of the frame 1; the object stage 3 comprises a mounting plate 30, a vacuum generator 31 and a plurality of adsorption pieces 32; an air suction cavity 300 is arranged in the mounting plate 30, and a plurality of air suction holes 301 communicated with the air suction cavity 300 are formed in the upper end of the mounting plate 30; the suction end of the vacuum generator 31 is communicated with the suction cavity 300; the adsorption piece 32 comprises a funnel part 320, a soft horn part 321, a mounting ring 322 and a sealing ring 323; the lower end of the horn part 321 is fixedly connected with the upper edge of the horn part 320, and the upper end of the horn part 321 extends outwards in an inclined manner; the lower end of the funnel part 320 is in threaded connection with the air suction hole 301; the mounting ring 322 is fixed on the middle outer wall of the funnel part 320, and the sealing ring 323 is fixed at the lower end of the mounting ring 322; a sealing groove 302 is formed in the mounting plate 30 on the outer side of the upper end of the air suction hole 301; the lower end of the mounting ring 322 is tightly attached to the mounting plate 30, and the sealing ring 323 is tightly embedded into the sealing groove 302, so that the crystal material 4 to be measured is adsorbed on the horn 321 through the vacuum generator 31.

As shown in fig. 2 and 3, the thickness of the funnel part 320 is gradually reduced from bottom to top.

As shown in fig. 2 and 3, an air valve 324 for controlling the flow of air is provided on the funnel part 320 at the upper end of the mounting ring 322.

As shown in fig. 2 and 3, a filter plug 325 is tightly embedded in the inner cavity of the funnel part 320; a handle 326 is fixed on the upper end of the filter plug 325.

As shown in fig. 2 and 3, the air suction hole 301 is a stepped hole, and a rubber tube 327 is fixed at the lower end of the funnel part 320; the lower end of the rubber tube 327 is provided with an embedding groove 3270, and an embedding ring 303 is fixed on the mounting plate 30 in the stepped hole; the insert ring 303 is tightly inserted into the insert groove 3270.

As shown in fig. 1, a first displacement mechanism 5 is fixed at the upper end of the frame 1, the optical detector 2 is fixed on the first displacement mechanism 5, and the optical detector 2 is driven to move left and right by the first displacement mechanism 5; the lower end of the frame 1 is fixed with a second displacement mechanism 6, the mounting plate 30 is fixed on the second displacement mechanism 6, and the mounting plate 30 is driven to move back and forth by the second displacement mechanism 6.

As shown in fig. 1, a display 7 is arranged on the rack 1; the display 7 is connected with the optical detector 2, the detection condition is observed through the display 7, the display 7 can be the existing one, and the description is omitted here.

The above description is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A substrate dislocation defect detecting apparatus, characterized in that: comprises a frame (1), an optical detector (2) and an object stage (3); the optical detector (2) is arranged at the upper end of the rack (1), and the objective table (3) is arranged at the lower end of the rack (1); the objective table (3) comprises a mounting plate (30), a vacuum generator (31) and a plurality of adsorption pieces (32); an air suction cavity (300) is arranged in the mounting plate (30), and a plurality of air suction holes (301) communicated with the air suction cavity (300) are formed in the upper end of the mounting plate (30); the air suction end of the vacuum generator (31) is communicated with the air suction cavity (300); the adsorption piece (32) comprises a funnel part (320), a soft horn part (321), a mounting ring (322) and a sealing ring (323); the lower end of the horn part (321) is fixedly connected with the upper edge of the funnel part (320), and the upper end of the horn part (321) extends outwards in an inclined manner; the lower end of the funnel part (320) is in threaded connection with the air suction hole (301); the mounting ring (322) is fixed on the middle outer wall of the funnel part (320), and the sealing ring (323) is fixed at the lower end of the mounting ring (322); a sealing groove (302) is arranged on the mounting plate (30) on the outer side of the upper end of the air suction hole (301); the lower end of the mounting ring (322) is tightly attached to the mounting plate (30), the sealing ring (323) is tightly embedded into the sealing groove (302), and the crystal material (4) to be detected is adsorbed on the horn part (321) through the vacuum generator (31).

2. A substrate dislocation defect detecting apparatus as claimed in claim 1, wherein: the thickness of the funnel part (320) is gradually reduced from bottom to top.

3. A substrate dislocation defect detecting apparatus as claimed in claim 1, wherein: an air valve (324) used for controlling the ventilation flow is arranged on the funnel part (320) at the upper end of the mounting ring (322).

4. A substrate dislocation defect detecting apparatus as claimed in claim 1, wherein: a filtering plug net (325) is tightly embedded in the inner cavity of the funnel part (320); a handle (326) is fixed at the upper end of the filter plug net (325).

5. A substrate dislocation defect detecting apparatus as claimed in claim 1, wherein: the air suction hole (301) is a stepped hole, and a rubber pipe (327) is fixed at the lower end of the funnel part (320); the lower end of the rubber tube (327) is provided with an embedding groove (3270), and an embedding ring (303) is fixed on the mounting plate (30) in the stepped hole; the embedded ring (303) is tightly embedded in the embedded groove (3270).

6. A substrate dislocation defect detecting apparatus as claimed in claim 1, wherein: a first displacement mechanism (5) is fixed at the upper end of the rack (1), the optical detector (2) is fixed on the first displacement mechanism (5), and the optical detector (2) is driven to move left and right by the first displacement mechanism (5); a second displacement mechanism (6) is fixed at the lower end of the rack (1), the mounting plate (30) is fixed on the second displacement mechanism (6), and the mounting plate (30) is driven to move back and forth through the second displacement mechanism (6).

7. A substrate dislocation defect detecting apparatus as claimed in claim 1, wherein: a display (7) is arranged on the rack (1); the display (7) is connected with the optical detector (2), and the detection condition is observed through the display (7).