CN217757762U - Unpowered crystal bar taking device suitable for hard-axis silicon single crystal growth furnace - Google Patents

Abstract

The utility model discloses a crystal bar device is got to unpowered suitable for hard axle silicon single crystal growth furnace, include: a support; the sliding supporting plate is arranged on the lower part of the bracket in a vertically sliding manner; the clamping mechanism comprises two symmetrically arranged clamping jaws, and the clamping mechanism is matched with the support in a sliding manner in the horizontal direction; the transmission mechanisms are arranged on two sides of the support symmetrically and comprise a wedge block assembly and a connecting rod assembly, the wedge block assembly comprises a first wedge block and a second wedge block, the first wedge block is in sliding fit with the support along the vertical direction, one end of the second wedge block is in sliding fit with the first wedge block along the first direction, the other end of the second wedge block is connected with the clamping jaw, one end of the connecting rod assembly is connected with the sliding supporting plate, and the other end of the connecting rod assembly is connected with the first wedge block. The unpowered crystal bar taking device of the utility model is not provided with a power source, has low cost, simple and compact structure, is suitable for the use in the relatively narrow space of the auxiliary furnace chamber of the single crystal furnace, and has high safety factor.

Description

Unpowered crystal bar taking device suitable for hard-axis silicon single crystal growth furnace

Technical Field

The utility model relates to a hard axle silicon single crystal growth furnace field especially relates to a crystal bar device is got to unpowered suitable for hard axle silicon single crystal growth furnace.

Background

The hard shaft single crystal furnace has no structural characteristic that a soft shaft system of the soft shaft single crystal furnace is similar to a simple pendulum and a spring oscillator and is easy to generate inherent resonance interference, and the hard shaft single crystal furnace has more advantages in the aspects of improving the crystal forming rate of single crystal material growth and the internal quality of crystals compared with the soft shaft. However, the structure of the hard shaft system is relatively more complex, and in order to ensure high position precision, the hard shaft seed shaft is fixed on the furnace frame, so that when the hard shaft seed shaft is lowered into the auxiliary furnace chamber, the chamber is not allowed to move, so that the crystal taking is carried out in the auxiliary furnace chamber of the single crystal furnace, and the crystal taking is difficult under the working condition of a narrow space.

Most of rod taking equipment in the current market is electric equipment, and the problems of high cost, complex structure and safety risk exist in the rod taking equipment.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a powerless crystal bar taking device suitable for a hard shaft silicon single crystal growing furnace.

In order to solve the technical problem, the utility model adopts the following technical scheme:

an unpowered crystal bar taking device suitable for a hard shaft silicon single crystal growing furnace comprises:

a support;

the sliding supporting plate is used for supporting the cone part at the bottom of the crystal bar and is arranged at the lower part of the bracket in a vertically sliding manner;

the clamping mechanism comprises two symmetrically arranged clamping jaws, and the clamping mechanism is matched with the support in a sliding manner in the horizontal direction;

the transmission mechanism is provided with two transmission mechanisms which are symmetrically arranged on two sides of the support, each transmission mechanism comprises a wedge block assembly and a connecting rod assembly, each wedge block assembly comprises a first wedge block and a second wedge block, the first wedge block is matched with the support in a sliding mode along the vertical direction, one end of the second wedge block is matched with the first wedge block in a sliding mode along the first direction, the other end of the second wedge block is connected with the clamping jaw, one end of the connecting rod assembly is connected with the sliding support plate, and the other end of the connecting rod assembly is connected with the first wedge block.

The utility model discloses an in some embodiments, it is a plurality of, a plurality of to embrace and press from both sides the mechanism and fix along the interval in the upper and lower direction on the support, the support is improved level be fixed with embrace the horizontal guide rail that presss from both sides the mechanism one-to-one, embrace the back of pressing from both sides two clamping jaws of mechanism and fix a horizontal slider respectively, embrace two clamping jaws that press from both sides the mechanism and slide the cooperation through a horizontal slider and horizontal guide rail respectively.

The utility model discloses an in some embodiments, the perpendicular symmetry in the left and right sides of support is fixed with the vertical guide rail corresponding with voussoir one, the vertical setting of vertical guide rail, a side of voussoir one is fixed with vertical slider, the layer board that slides passes through vertical slider with vertical guide rail sliding connection.

The utility model discloses an in some embodiments, voussoir one is rectangular triangle cubic, the cooperation of sliding with vertical guide rail is located to the side of the right angle limit place of voussoir one, the slope guide rail is installed along length direction to the inclined plane of voussoir one, voussoir two has the inclined plane that parallels with the inclined plane of voussoir one, install the slope slider on the inclined plane of voussoir two, the slope slider slides the cooperation with the slope guide rail.

In some embodiments of the present invention, the connecting rod assembly comprises a connecting rod, in some embodiments of the present invention, both ends of the connecting rod are provided with joint bearings, the lower end of the connecting rod located at the lowest position is rotatably connected with the sliding support plate through the joint bearings, the upper end of the connecting rod is rotatably connected with the wedge block located at the lowest position through the joint bearings,

in some embodiments of the present invention, the top of the left and right ends of the bracket is provided with a buffer, two the buffer is just opposite to two wedges at the top.

The utility model discloses an in some embodiments, the perpendicular fixedly connected with fixed layer board in bottom of support, fixed layer board and the layer board parallel arrangement that slides, just fixed layer board is located the below of the layer board that slides.

The utility model discloses an in some embodiments, fixed layer board with be provided with stop gear between the layer board that slides, stop gear is used for the vertical displacement of restriction layer board that slides, stop gear includes heel post and compression spring, the symmetry is installed on the fixed layer board the heel post, the outside cover of heel post is equipped with compression spring, compression spring's internal diameter is not less than the diameter of heel post, compression spring is located fixed layer board with between the layer board that slides, when the layer board that slides does not receive pressure, compression spring is in the precompression state, compression spring highly be higher than the height of heel post, compression spring's elasticity makes embrace and press from both sides the mechanism and be in the open mode.

The utility model discloses an in some embodiments, the crystal bar device is got to unpowered still includes safe locking mechanical system, safe locking mechanical system includes elasticity graduation round pin, connecting plate and draw-in groove, the lower part vertical fixation of support has the connecting plate, install elasticity graduation round pin on the connecting plate, elasticity graduation round pin with support parallel arrangement, one side of the layer board that slides seted up with the draw-in groove that elasticity graduation round pin corresponds the setting, after the crystal bar was placed on the layer board that slides, the layer board that slides moves down, and elasticity graduation round pin relies on elasticity to slide into the draw-in groove automatically, locks the state of holding tightly of embracing the mechanism of pressing from both sides.

In some embodiments of the present invention, the unpowered crystal bar taking device further includes a plurality of supporting brackets, a plurality of the supporting brackets are spaced apart from each other in the up-down direction on the support, and the supporting brackets are recessed toward the direction close to the support to define a groove suitable for supporting the crystal bar.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

FIG. 1 is a schematic view of an unpowered ingot taking device suitable for a hard axis silicon single crystal growth furnace according to one embodiment of the present invention;

FIG. 2 is another schematic view of an unpowered ingot taking device suitable for use in a hard axis silicon single crystal growth furnace according to one embodiment of the present invention;

FIG. 3 is a cross-sectional view of an unpowered ingot taking apparatus suitable for use in a hard axis silicon single crystal growth furnace according to one embodiment of the present invention;

FIG. 4 is an enlarged view at A in FIG. 3;

FIG. 5 is a schematic view of the connection relationship of the wedge block assembly of the present invention;

FIG. 6 is a schematic structural view of a safety locking mechanism of the present invention;

FIG. 7 is a side view of an unpowered ingot taking apparatus suitable for use in a hard axis silicon single crystal growth furnace according to one embodiment of the present invention;

FIG. 8 is a schematic view of a crystal ingot in a sub-furnace chamber of a single crystal furnace before taking the ingot;

FIG. 9 is a side view of an unpowered ingot taking apparatus suitable for use in a hard axis silicon single crystal growth furnace according to one embodiment of the present invention;

FIG. 10 is a top view of a non-powered ingot puller suitable for use in a hard axis silicon single crystal growth furnace according to one embodiment of the present invention;

fig. 11 is a schematic structural diagram of the buffer of the present invention.

Reference numerals are as follows:

the unpowered crystal taking device 100, the crystal bar 200, the auxiliary furnace chamber 300 and the seed crystal clamp 400;

the device comprises a bracket 10, a sliding supporting plate 20, a clamping mechanism 30, a transmission mechanism 40, a limiting mechanism 50, a safety locking mechanism 60, an auxiliary bracket 70 and a clamping shaft 80;

horizontal guide rail 11, horizontal slider 12, vertical guide rail 13, vertical slider 14, inclined guide rail 15, inclined slider 16, buffer 17, housing 171, return spring 172, piston 173, piston rod 174, contact head 175, fluid medium 176, fixed pallet 18, support holder 19, groove 191;

a central hole 21, a first guide rail 22, a first slider 23;

a clamping jaw 31;

wedge assembly 41, wedge one 411, wedge two 412;

a connecting rod assembly 42, a connecting rod 421, an upper connecting rod 422, a lower connecting rod 423 and a joint bearing 424;

a load-bearing post 51, a compression spring 52;

elastic indexing pin 61, connecting plate 62, draw-in groove 63.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

The following disclosure provides many different embodiments or examples for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present disclosure provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the applicability of other processes and/or the use of other materials.

An unpowered ingot taking device 100 suitable for a hard shaft silicon single crystal growth furnace according to an embodiment of the invention is described below with reference to fig. 1-11.

Referring to fig. 1, a powerless crystal bar taking device 100 suitable for a hard axis silicon single crystal growth furnace according to an embodiment of the present invention comprises: the device comprises a support 10, a sliding supporting plate 20, a clamping mechanism 30 and a transmission mechanism 40.

Referring to fig. 1, the sliding support plate 20 is disposed at the lower portion of the support 10 in an up-and-down sliding manner, a central hole 21 adapted to be matched with a conical portion at the bottom of the ingot 200 is formed at the center of the sliding support plate 20, and the sliding support plate 20 is used for supporting the conical portion at the bottom of the ingot 200.

Referring to fig. 1, 2 and 7, the clamping mechanism 30 includes two symmetrically disposed clamping jaws 31, and the clamping mechanism 30 is slidably engaged with the bracket 10 in a horizontal direction; the number of the clasping mechanisms 30 is not less than one, and preferably, the clasping mechanisms 30 are plural, for example, as shown in fig. 1, two clasping mechanisms 30 are provided, and the two clasping mechanisms 30 are arranged on the support 10 at intervals in the up-down direction. Of course, the present invention is not limited thereto, and the number of the clasping mechanisms 30 may be 3 to 8, for example, 3, 4, 5, 6, 7 or 8.

Referring to fig. 1, 2 and 7, two transmission mechanisms 40 are provided, the two transmission mechanisms 40 are symmetrically arranged on two sides of the bracket 10, each transmission mechanism 40 includes a wedge assembly 41 and a connecting rod assembly 42, the wedge assembly 41 includes a first wedge 411 and a second wedge 412, the first wedge 411 is slidably fitted with the bracket 10 in the up-down direction, one end of the second wedge 412 is slidably fitted with the first wedge 411 in the first direction (the direction of the inclined surface of the first wedge 411), the other end of the second wedge 412 is connected with the clamping jaw 31, one end of the connecting rod assembly 42 is connected with the sliding support plate 20, and the other end of the connecting rod assembly 42 is connected with the first wedge 411.

It can be understood that, referring to fig. 1, when taking a crystal ingot 200, the clamping mechanism 30 is in a clamping state, the crystal ingot 200 enters the clamping mechanism 30 and moves downward, so that a cone portion of the crystal ingot 200 presses on the sliding support plate 20, the gravity of the crystal ingot 200 causes the sliding support plate 20 to move downward, the downward movement of the sliding support plate 20 drives the connecting rod assemblies 42 on both sides of the sliding support plate to move, the connecting rod assemblies 42 pull the first wedge block 411 of the wedge block assembly 41 to move downward, the inclined surfaces of the first wedge block 411 push the second wedge blocks 412 to move horizontally toward each other, so as to drive the two clamping jaws 31 of the clamping mechanism 30 to produce a clamping action, so as to clamp the crystal ingot 200.

In some embodiments of the present invention, referring to fig. 1, a horizontal guide rail 11 corresponding to the clasping mechanism 30 one-to-one is horizontally fixed on the support 10, a horizontal slider 12 is fixed on the back of each of the two clamping jaws 31 of the clasping mechanism 30, and the two clamping jaws 31 of the clasping mechanism 30 are respectively in sliding fit with the horizontal guide rail 11 through the horizontal slider 12. The horizontal guide rail 11 is arranged, so that the holding and clamping mechanism 30 can only move along the horizontal direction, and the holding and opening actions are realized.

In some embodiments of the present invention, referring to fig. 3, the vertical guide 13 corresponding to the first wedge 411 is fixed to the vertical symmetry of the left and right sides of the bracket 10, the vertical guide 13 is vertically arranged, a vertical slider 14 is fixed to a side of the first wedge 411, and the sliding support plate 20 is slidably connected to the vertical guide 13 through the vertical slider 14.

For example, referring to fig. 1, 3-5, in some embodiments of the present invention, the first wedge 411 is in a right triangle block shape, a side of the right side of the first wedge 411 is slidably engaged with the vertical rail 13, the inclined surface of the first wedge 411 is provided with the inclined rail 15 along the length direction of the inclined surface, the second wedge 412 has an inclined surface parallel to the inclined surface of the first wedge 411, the inclined surface of the second wedge 412 is provided with the inclined slider 16, and the inclined slider 16 is slidably engaged with the inclined rail 15. Because the first wedge 411 has the inclined surface, when the first wedge 411 moves vertically downwards, the first wedge 411 gives the second wedge 412 an obliquely downward pressure, the obliquely downward pressure is decomposed into a horizontal pushing force and a vertical downward force, and the second wedge 412 is fixed on the clamping jaw 31 of the clamping mechanism 30, cannot move downwards and can only move horizontally along the horizontal guide rail 11, so that the vertical movement of the first wedge 411 is converted into the horizontal movement of the second wedge 412 through the cooperation of the first wedge 411 and the second wedge 412.

In some embodiments of the present invention, referring to fig. 4, the vertex angle α of wedge block one 411 satisfies: alpha is more than 0 degree and less than 90 degrees, when the vertex angle alpha of the first wedge block 411 is less than 45 degrees, the horizontal thrust acting on the second wedge block 412 is larger than the vertical downward force on the premise of neglecting the rolling friction loss of the inclined guide rail 15, the clamping speed can be reduced, and the reliability of the clamping jaw 31 is improved; when the angle alpha is more than or equal to 45 degrees and less than 90 degrees, the horizontal thrust acting on the second wedge block 412 is less than the vertical downward force, the clamping speed can be accelerated, and the proper angle alpha is selected according to different actual requirements.

In some embodiments of the present invention, referring to fig. 1 and 7, the first guide rails 22 are symmetrically installed at the left and right ends of the lower portion of the bracket 10, and two first guide rails 22 are vertically disposed, one side of the sliding support plate 20 close to the bracket 10 is fixed with the first slider 23 corresponding to the two first guide rails 22, and the sliding support plate 20 is in sliding fit with the first guide rails 22 through the first slider 23.

In order to reduce the machining precision and adjust the opening and closing distance between the two clamping jaws 31 of the clamping mechanism 30, in some embodiments of the present invention, referring to fig. 2 and 7, the connecting rod assembly 42 includes a connecting rod 421, joint bearings 424 are mounted at both ends of the connecting rod 421, the rotating directions of the joint bearings 424 at both ends of the connecting rod 421 are opposite, so that the distance between the adjacent joint bearings 424 can be shortened or lengthened by clockwise or counterclockwise rotation, so that the distances between the adjacent upper and lower clamping mechanisms 30 and between the clamping mechanism 30 located at the lowermost position and the sliding support plate 20 can be adjusted, further, the joint bearing 424 is a rod-end joint bearing, that is, one end of the joint bearing 424 is rod-shaped with a threaded hole, and the other end thereof is a circular ball, the joint bearing 424 is a spherical sliding bearing, whose sliding contact surface is an inner spherical surface and an outer spherical surface, and can rotate and swing within an allowable inclination angle range during movement, and has a rotational freedom degree in any direction. The lower end of the connecting rod 421 at the lowest position is rotatably connected with the sliding support plate 20 through a joint bearing 424, and the upper end thereof is rotatably connected with the wedge block 411 at the lowest position through the joint bearing 424.

For example, referring to fig. 2 and 7, in the present embodiment, there are two clasping mechanisms 30, two connecting rods 421 in the connecting rod assembly 42 are respectively an upper connecting rod 422 and a lower connecting rod 423, the bottom of the lower connecting rod 423 is rotatably connected to the sliding support plate 20 through a straight rod type left-handed rod end joint bearing, the top of the lower connecting rod 423 is rotatably connected to the first wedge 411 located at the lowermost position through a bent rod type right-handed rod end joint bearing, the bottom of the upper connecting rod 422 is rotatably connected to the first wedge 411 located at the lower position through a bent rod type left-handed rod end joint bearing, and the top of the upper connecting rod 422 is rotatably connected to the first wedge 411 located at the upper position through a bent rod type right-handed rod end joint bearing.

In some embodiments of the present invention, referring to fig. 1 to 3, the top of the left and right ends of the bracket 10 is installed with the damper 17, the two dampers 17 are disposed opposite to the two wedges 411 located at the top, the specific structure of the damper 17 is shown in fig. 11, the damper 17 includes a housing 171, a return spring 172, a piston 173, a piston rod 174 and a contact head 175, the housing 171 is filled with a fluid medium 176, the return spring 172, the piston 173 and the piston rod 174 are sequentially disposed in the housing 171 from top to bottom, one end of the return spring 172 is connected to the top of the housing 171, the other end of the return spring is connected to the piston 173, the edge of the piston 173 and the inner side wall of the housing 171 leave a gap allowing the fluid medium 176 to pass through, the piston rod 174 is installed at the lower end of the piston 173, the bottom of the piston rod 174 penetrates out of the housing 171 and is connected to the contact head 175, when the clasping clip is opened, the wedges 411 moves upward, the piston rod 174 squeezes the piston rod 174, the piston 173 drives the piston 173 to move upward relative to the housing 171, the volume of the housing 171 is reduced, the pressure increases, the fluid medium 176 is forced to flow into the space 173 between the housing 171 and the piston 173, and is compressed by the return spring 172, and the energy is stored in the return spring 171. Since the gap between the housing 171 and the piston 173 is much smaller than the area of the piston 173, the fluid medium 176 has a high velocity at the gap, creating a large resistance, thereby cushioning the unclamping process of the clamping mechanism 30. When the wedge block 411 moves downwards to drive the clasping mechanism 30 to clamp, the return spring 172 is relaxed, the piston rod 174 is pushed to move downwards relative to the housing 171, and the fluid medium 176 flows back to the space of the housing 171 above the piston 173 through the gap between the edge of the piston 173 and the inner side wall of the housing 171.

A return spring 172 inside the damper, which spring acts only as a return, so that the contact head 175 is in constant contact with the upper surface of the wedge 411, but its resilience is relatively small, the damping being provided by the fluid medium 176 passing through the gap between the edge of the piston 173 and the inner side wall of the housing 171. The fluid medium 176 may be a gas such as nitrogen, or may be a fluid such as hydraulic oil.

In some embodiments of the present invention, the horizontal guide rail 11, the vertical guide rail 13, the inclined guide rail 15 and the first guide rail 22 all adopt a ball linear guide (rolling guide), the friction coefficient does not greatly give 1/10 of the friction coefficient of the sliding guide, the difference between the static friction factor and the dynamic friction factor is small, and during movement, the rolling friction loss is small. Of course, the present invention is not limited thereto, and the horizontal rail 11, the vertical rail 13, the inclined rail 15, and the first rail 22 may also be sliding rails.

In some embodiments of the present invention, referring to fig. 1 and fig. 2, a fixed supporting plate 18 is vertically and fixedly connected to the bottom of the bracket 10, the fixed supporting plate 18 is parallel to the sliding supporting plate 20, and the fixed supporting plate 18 is located below the sliding supporting plate 20; referring to fig. 1-3, as shown in fig. 6, a limiting mechanism 50 is disposed between the fixed support plate 18 and the sliding support plate 20, the limiting mechanism 50 is used for limiting vertical displacement of the sliding support plate 20, the limiting mechanism 50 includes a bearing column 51 and a compression spring 52, the bearing column 51 is symmetrically mounted on the fixed support plate 18, a compression spring 52 is sleeved outside the bearing column 51, an inner diameter of the compression spring 52 is not smaller than a diameter of the bearing column 51, the compression spring 52 is located between the fixed support plate 18 and the sliding support plate 20, a top of the compression spring 52 abuts against a lower surface of the sliding support plate 20, when the sliding support plate 20 is not under pressure (when the crystal ingot 200 is not placed on the sliding support plate 20), the compression spring 52 is in a pre-compression state, at this time, a height of the compression spring 52 is higher than a height of the bearing column 51, and an elastic force of the compression spring 52 makes the clasping mechanism 30 in an open state. When the crystal bar 200 is placed on the sliding support plate 20, the downward force applied by the crystal bar 200 to the sliding support plate 20 pushes the sliding support plate 20 to move downward, the compression spring 52 contracts and descends, the sliding support plate 20 drives the connecting rod assembly 42 to move downward, the wedge block assembly 41 drives the clamping mechanism 30 to gradually clamp until the sliding support plate 20 presses the bearing column 51, the descending is stopped, and the clamping mechanism 30 is in a clamping state at this time. The number of the limiting mechanisms can be 2, 4 or 6, and the limiting mechanisms are symmetrically arranged on two sides of a central circular hole (not marked in the figure) of the fixed supporting plate 18.

In some embodiments of the utility model, refer to fig. 1, the unpowered crystal bar taking device 100 further includes a safety locking mechanism 60, the safety locking mechanism 60 includes an elastic dividing pin 61, a connecting plate 62 and a clamping groove 63, the lower part of the support 10 is vertically fixed with the connecting plate 62, the elastic dividing pin 61 is installed on the connecting plate 62, the elastic dividing pin 61 is parallel to the plane where the support 10 is located, the clamping groove 63 corresponding to the elastic dividing pin 61 is provided on one side of the sliding support plate 20, after the crystal bar 200 is placed on the sliding support plate 20, the sliding support plate 20 moves down, the elastic dividing pin 61 automatically slides into the clamping groove 63 by means of elasticity, and the holding state of the holding clamp mechanism 30 is locked. The safety locking mechanism 60 can effectively prevent the clasping mechanism 30 from being opened in the transferring process, and the safety factor of the device is improved. When the locking mechanism needs to be opened, the handle of the elastic indexing pin 61 is rotated, so that the elastic indexing pin 61 is withdrawn from the clamping groove 63, namely, the locking state is withdrawn.

In some embodiments of the present invention, referring to fig. 1, 3, 7 and 10, the unpowered ingot taking device 100 further includes a plurality of supporting brackets 19, the supporting brackets 19 are spaced apart from each other in the up-down direction on the support 10, and the supporting brackets 19 are recessed toward the direction close to the support 10 to define a groove 191 adapted to support the ingot 200.

In some embodiments of the present invention, referring to fig. 1, fig. 2, fig. 7 and fig. 10, the unpowered crystal bar taking device 100 further includes an auxiliary support 70, the support is kept away from one side of the clamping mechanism 30 and is installed on the auxiliary support 70, the auxiliary support 70 is parallel to the support 10, the middle part of one side of the auxiliary support 70, which is kept away from the support 10, is horizontally provided with a clamping shaft 80, referring to fig. 9, and when taking the crystal bar 200, the single crystal furnace enters the crystal taking arm (not shown in the figure) and operates by clamping the clamping shaft 80.

The structure and operation of the spherical plain bearing 424 and the elastic index pin 61 according to the embodiment of the present invention are well known to those skilled in the art and will not be described in detail herein.

The working principle is as follows:

referring to fig. 8 and 9, when the ingot 200 needs to be taken out from the sub-furnace chamber 300, first, the side door of the sub-furnace chamber 300 is opened, the unpowered ingot taking device 100 is placed into the sub-furnace chamber 300 through the ingot taking arm of the single crystal furnace, the opening of the clamping mechanism 30 is opposite to the ingot 200 to enter, so that the ingot 200 is finally placed in the clamping mechanism 30, the central axis of the sliding support plate 20 and the central axis of the ingot 200 are on the same straight line, the ingot 200 is moved downward, the conical part at the bottom of the ingot 200 is dropped on the sliding support plate 20, the downward force applied by the ingot 200 to the sliding support plate 20 pushes the sliding support plate 20 to move downward, the compression spring 52 is stressed to contract and descend until the sliding support plate 20 presses against the load bearing column 51, the sliding support plate stops descending, the sliding support plate 20 drives the connecting rod assembly 42 to move downward, the first wedge 411 of the connecting rod assembly 42 to move downward, the vertical motion of the first wedge 411 is converted into the horizontal motion of the second wedge 412, the clamping mechanism 412 drives the clamping mechanism 30 to gradually clamp when the ingot is in the descending process, the clamping mechanism, the ingot taking device 200 is in an elastic force locking state, and the ingot taking device can realize the reliable clamping mechanism 200 and the ingot taking device 200 is connected with the ingot taking device in a reliable clamping groove 400 which is connected with the ingot taking device 200;

after the unpowered crystal taking device 100 loaded with the crystal bar 200 is transferred out of the auxiliary furnace chamber 300 by the crystal taking arm, the unpowered crystal taking device 100 and the crystal bar 200 are integrally transferred onto the cart, the unpowered crystal taking device 100 and the crystal bar 200 are changed from a vertical state (refer to fig. 9) to a horizontal state through a rotating mechanism of the cart, a handle of the elastic indexing pin 61 is rotated, the elastic indexing pin 61 is withdrawn from the clamping groove 63, the holding and clamping mechanism 30 is automatically opened, the crystal bar 200 is supported by the support bracket 19, and therefore a worker can take out the crystal bar 200 conveniently. The utility model discloses a crystal bar device is got to unpowered does not adopt power sources such as motor, greatly reduced the cost, and simple structure, compactness are suitable for the relatively narrow and small space of single crystal growing furnace auxiliary furnace room to use simultaneously, design benefit, and factor of safety is high.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrated; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. The utility model provides a crystal bar device is got to unpowered suitable for hard axle silicon single crystal growth furnace which characterized in that includes:

a support;

the sliding supporting plate is used for supporting the cone part at the bottom of the crystal bar and is arranged at the lower part of the bracket in a vertically sliding manner;

the clamping mechanism comprises two symmetrically arranged clamping jaws, and the clamping mechanism is in sliding fit with the support in the horizontal direction;

the transmission mechanism comprises two transmission mechanisms, the two transmission mechanisms are symmetrically arranged on two sides of the support, each transmission mechanism comprises a wedge block assembly and a connecting rod assembly, each wedge block assembly comprises a first wedge block and a second wedge block, the first wedge block is matched with the support in a sliding mode along the vertical direction, one end of the second wedge block is matched with the first wedge block in a sliding mode along the first direction, the other end of the second wedge block is connected with the clamping jaw, one end of the connecting rod assembly is connected with the sliding support plate, and the other end of the connecting rod assembly is connected with the first wedge block.

2. The unpowered crystal bar taking device suitable for the hard shaft silicon single crystal growth furnace as claimed in claim 1, wherein the holding and clamping mechanism is multiple, the multiple holding and clamping mechanisms are fixed on the support at intervals in the vertical direction, horizontal guide rails corresponding to the holding and clamping mechanisms one by one are horizontally fixed on the support, a horizontal slider is fixed on each of the back surfaces of two clamping jaws of the holding and clamping mechanism, and the two clamping jaws of the holding and clamping mechanism are in sliding fit with the horizontal guide rails through the horizontal slider.

3. The unpowered crystal taking rod device suitable for the hard shaft silicon single crystal growth furnace as claimed in claim 1, wherein vertical guide rails corresponding to the first wedge block are vertically and symmetrically fixed on the left side and the right side of the support, the vertical guide rails are vertically arranged, a vertical sliding block is fixed on one side surface of the first wedge block, and the sliding support plate is in sliding connection with the vertical guide rails through the vertical sliding blocks.

4. The unpowered crystal taking rod device suitable for the hard shaft silicon single crystal growing furnace as claimed in claim 1, wherein the first wedge block is in a right triangle block shape, the side surface of the right-angle edge of the first wedge block is in sliding fit with the vertical guide rail, the inclined surface of the first wedge block is provided with an inclined guide rail along the length direction, the second wedge block is provided with an inclined surface parallel to the inclined surface of the first wedge block, the inclined surface of the second wedge block is provided with an inclined slide block, and the inclined slide block is in sliding fit with the inclined guide rail.

5. The unpowered crystal taking rod device suitable for the hard shaft silicon single crystal growing furnace as claimed in claim 2, wherein the connecting rod assembly comprises a connecting rod, joint bearings are mounted at two end portions of the connecting rod, the lower end of the connecting rod positioned at the lowest position is rotatably connected with the sliding supporting plate through the joint bearings, and the upper end of the connecting rod is rotatably connected with the wedge block positioned at the lowest position through the joint bearings.

6. The unpowered crystal bar taking device suitable for the hard shaft silicon single crystal growing furnace as claimed in claim 1, wherein buffers are mounted at the top of the left end and the right end of the bracket, and the two buffers are arranged opposite to the first two wedges on the top.

7. The unpowered crystal taking rod device suitable for the hard shaft silicon single crystal growing furnace according to claim 1, wherein a fixed supporting plate is vertically and fixedly connected to the bottom of the support, the fixed supporting plate is arranged in parallel with the sliding supporting plate, and the fixed supporting plate is located below the sliding supporting plate.

8. The unpowered crystal taking rod device suitable for the hard shaft silicon single crystal growth furnace according to claim 7, wherein a limiting mechanism is arranged between the fixed supporting plate and the sliding supporting plate and used for limiting vertical displacement of the sliding supporting plate, the limiting mechanism comprises a bearing column and a compression spring, the bearing column is symmetrically installed on the fixed supporting plate, the compression spring is sleeved on the outer side of the bearing column, the inner diameter of the compression spring is not smaller than the diameter of the bearing column, the compression spring is located between the fixed supporting plate and the sliding supporting plate, when the sliding supporting plate is not under pressure, the compression spring is in a pre-compression state, the height of the compression spring is higher than that of the bearing column, and the elastic force of the compression spring enables the clamping mechanism to be in an open state.

9. The unpowered crystal taking rod device suitable for the hard shaft silicon single crystal growth furnace according to claim 1, further comprising a safety locking mechanism, wherein the safety locking mechanism comprises an elastic indexing pin, a connecting plate and a clamping groove, the connecting plate is vertically fixed at the lower portion of the support, the elastic indexing pin is mounted on the connecting plate, the elastic indexing pin and the support are arranged in parallel, and the clamping groove corresponding to the elastic indexing pin is formed in one side, close to the elastic indexing pin, of the sliding support plate.

10. The unpowered crystal bar taking device suitable for the hard shaft silicon single crystal growing furnace according to claim 1, further comprising a plurality of support brackets, wherein the support brackets are arranged on the bracket at intervals in the vertical direction, and the support brackets are recessed towards the direction close to the bracket so as to define a groove suitable for supporting the crystal bar.

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