CN217757152U - Ultrapure water machine capable of detecting total organic carbon - Google Patents
Ultrapure water machine capable of detecting total organic carbon Download PDFInfo
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- CN217757152U CN217757152U CN202221932405.5U CN202221932405U CN217757152U CN 217757152 U CN217757152 U CN 217757152U CN 202221932405 U CN202221932405 U CN 202221932405U CN 217757152 U CN217757152 U CN 217757152U
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Abstract
The utility model relates to a super pure water machine of detectable total organic carbon. The ultrapure water machine comprises a water inlet channel, a detection channel, a circulating channel and a water outlet channel; the water inlet channel, the detection channel and the water outlet channel are communicated in sequence; two ends of the circulating channel are respectively communicated with the detection channel, and the circulating channel is provided with a first electromagnetic valve so that water flowing out of the circulating channel can flow back to the detection channel for the second time through the circulating channel; the water inlet channel is provided with a pretreatment device for filtering particles and suspended matters in tap water and softening the tap water; a self-priming pump, a degassing membrane, a preposed carbon dioxide sensor, an ultraviolet disinfection device, an organic matter adsorption column, a super-purification column and a postposition carbon dioxide sensor are sequentially arranged on the detection channel along the flowing direction of water; a vacuum pump is arranged on the degassing membrane; the ultra-pure water machine further comprises a controller, and the controller is in communication connection with the self-priming pump, the front carbon dioxide sensor, the ultraviolet disinfection device, the rear carbon dioxide sensor and the first electromagnetic valve. Therefore, the problem that the total organic carbon is not completely removed is solved.
Description
Technical Field
The utility model relates to an ultrapure water treatment facility technical field, concretely relates to ultrapure water machine of total organic carbon of detectable.
Background
Ultrapure water, a water having a resistivity of 18M Ω · cm (25 ℃), is a water vapor source which is commonly used in the integrated circuit industry for cleaning semiconductor raw materials and utensils used, for producing a photomask plate, for oxidizing a silicon wafer, and the like. In addition, ultrapure water is used in the manufacture of other solid state electronic devices, thick and thin film circuits, printed circuits, vacuum tubes, and the like.
For ultrapure water used in laboratories, the water quality purity is mainly reflected by the resistivity and total organic carbon (TOC for short) in the primary water standard. At present, the purity of liquid is mainly detected by an instrument such as High Performance Liquid Chromatography (HPLC). However, the instrument is only suitable for water with low organic pollution, and if the water sample contains organic pollution, the liquid chromatogram has impurity peaks, the content of total organic carbon is difficult to quantify, and the instrument can be damaged.
In addition, the water quality monitoring of the ultra-pure water machine capable of detecting the total organic carbon in a laboratory mainly adopts resistivity or conductivity to reflect the content of inorganic matters in water, but a corresponding carbon detection device does not exist for the total organic carbon, namely TOC. The existing ultra-pure water machine capable of detecting the total organic carbon generally adopts a pretreatment column, a reverse osmosis membrane column and an ultra-pure column to remove ionic substances in water, but the three filtration systems do not completely remove the total organic carbon, and particularly the filtration systems cannot meet the use requirements for the TOC content at ppb level required by High Performance Liquid Chromatography (HPLC) and the like.
Therefore, aiming at the problem of incomplete removal of total organic carbon in the prior art, a more reasonable technical scheme needs to be provided to solve the technical problem in the prior art.
SUMMERY OF THE UTILITY MODEL
The utility model provides a super pure water machine of detectable total organic carbon to solve among the prior art total organic carbon and get rid of not thorough problem.
In order to realize the above effect, the utility model discloses a technical scheme does:
an ultrapure water machine capable of detecting total organic carbon comprises a water inlet channel, a detection channel, a circulation channel and a water outlet channel; the water inlet channel, the detection channel and the water outlet channel are communicated in sequence;
two ends of the circulating channel are respectively communicated with the detection channel, and a first electromagnetic valve is arranged on the circulating channel so that water flowing out of the circulating channel can flow back to the detection channel through the circulating channel for the second time;
wherein, a pretreatment device is arranged on the water inlet channel and is used for filtering particulate matters and suspended matters in the tap water and softening the tap water; a self-priming pump, a degassing membrane, a front-mounted carbon dioxide sensor, an ultraviolet disinfection device, an organic matter adsorption column, a super-purification column and a rear-mounted carbon dioxide sensor are sequentially arranged on the detection channel along the flowing direction of water; wherein a vacuum pump is arranged on the degassing membrane;
the ultra-pure water machine further comprises a controller, and the controller is in communication connection with the self-priming pump, the front carbon dioxide sensor, the ultraviolet disinfection device, the rear carbon dioxide sensor and the first electromagnetic valve.
In one possible design, the pretreatment device comprises a pretreatment column, a reverse osmosis membrane column and a container which are arranged on the water inlet channel in sequence along the flowing direction of water, wherein an ultraviolet digestion instrument is arranged in the container.
In one possible design, a booster pump is arranged on a water inlet channel between the pretreatment column and the reverse osmosis membrane column.
In one possible design, a dosing tank is arranged on a water inlet channel between the pretreatment column and the reverse osmosis membrane column, and a metering pump is arranged on the dosing tank.
In one possible design, the medicated box is provided with an alkaline agent.
In one possible design, the organic adsorption column is provided with a basic anion exchange resin.
In a possible design, a second electromagnetic valve is arranged on the water outlet channel, and the second electromagnetic valve is in communication connection with the controller.
In one possible embodiment, the controller is provided as a controller, a PLC or an application-specific integrated circuit.
Compared with the prior art, the beneficial effects of the utility model are that:
through above-mentioned technical scheme, can be through the effective detection to total carbon concentration and total inorganic carbon concentration, adsorb many times, soften, disinfect, degasification to the pure water to reduce the total amount of organic carbon, be of value to the purity that improves ultrapure water, thereby be convenient for the laboratory use. And because controller communication connection in the self priming pump leading carbon dioxide sensor ultraviolet ray degassing unit, rearmounted carbon dioxide sensor and first solenoid valve can control self priming pump, ultraviolet ray degassing unit and first solenoid valve according to leading carbon dioxide sensor and rearmounted carbon dioxide sensor's testing result and carry out corresponding action to improve the effect of getting rid of total organic carbon.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic view of the structure of an ultrapure water machine capable of detecting total organic carbon.
In the above drawings, the meaning of each reference numeral is:
11-water inlet channel, 12-detection channel, 13-circulation channel, 14-water outlet channel, 21-first electromagnetic valve, 22-second electromagnetic valve, 3-pretreatment device, 31-pretreatment column, 32-reverse osmosis membrane column, 33-container, 34-ultraviolet digestion instrument, 35-booster pump, 36-dosing tank, 37-metering pump, 41-self-priming pump, 42-degassing membrane, 43-preposed carbon dioxide sensor, 44-ultraviolet disinfection device, 45-organic matter adsorption column, 46-super purification column, 47-postposition carbon dioxide sensor and 48-vacuum pump.
Detailed Description
The present invention will be further explained with reference to the drawings and the embodiments.
According to the utility model discloses a specific embodiment provides a super pure water machine of detectable total organic carbon, can carry out purification treatment to the water of treating, specifically, can carry out initiative oxidative degradation to the total organic carbon of aquatic, through increasing organic matter adsorption column 45 and to CO 2 The degassing membrane 42 apparatus of (1) can be used to make the total organic carbon content of ultrapure water to ppb level (ppb is a dimensionless quantity, and is a concentration expressed by a mass of solute in a solution in a billion ratio of the total solution mass, and is often used in a case where the concentration is very small). One embodiment of which is shown in fig. 1.
Referring to fig. 1, the ultra-pure water machine capable of detecting total organic carbon comprises a water inlet channel 11, a detection channel 12, a circulation channel 13 and a water outlet channel 14; the water inlet channel 11, the detection channel 12 and the water outlet channel 14 are communicated in sequence; both ends of the circulation channel 13 are respectively communicated with the detection channel 12, and the circulation channel 13 is provided with a first electromagnetic valve 21, so that water flowing out of the circulation channel 13 can flow back to the detection channel 12 through the circulation channel 13 for the second time.
Wherein, the water inlet channel 11 is provided with a pretreatment device 3 for filtering particulate matters and suspended matters in the tap water and softening the tap water; a self-priming pump 41, a degassing membrane 42, a front carbon dioxide sensor 43, an ultraviolet disinfection device 44, an organic matter adsorption column 45, an ultra-purification column 46 and a rear carbon dioxide sensor 47 are sequentially arranged on the detection channel 12 along the flow direction of water; wherein, the degassing membrane is provided with a vacuum pump 48.
The ultrapure water machine further comprises a controller, wherein the controller is in communication connection with the self-priming pump 41, the front carbon dioxide sensor 43, the ultraviolet disinfection device 44, the rear carbon dioxide sensor 47, the vacuum pump 48 and the first electromagnetic valve 21, so as to control the self-priming pump 41, the ultraviolet disinfection device 44, the vacuum pump 48 and the first electromagnetic valve 21 to execute corresponding actions according to information transmitted by the front carbon dioxide sensor and the rear carbon dioxide sensor 47.
The working process of the ultra-pure water machine capable of detecting the total organic carbon can be summarized as follows: the tap water is filtered by the pretreatment device 3 and then passes through the pH adjusting device, when the tap water passes through the pretreatment device 3, the flow rate of the tap water is approximately constant and is about 60L-80L/H, and the metering pump 37 sets the frequency to be 5 times/min according to the flow rate, so that the removal capacity of the reverse osmosis membrane column 32 on organic carbon (TOC) is improved, and the load is reduced for rear-end ultraviolet oxidation.
After the tap water is pumped by the self-priming pump 41, the pure water passes through the degassing membrane 42 again, the degassing membrane 42 is a membrane separation product for removing gas in the liquid, such as carbon dioxide, oxygen and ammonia nitrogen, by using the principle of diffusion, a large number of hollow fibers are arranged in the degassing membrane 42, the walls of the fibers are provided with tiny holes, water molecules cannot pass through the tiny holes, and gas molecules can pass through the tiny holes. When the vacuum pump works, water flows through the hollow fibers under certain pressure, and the air is continuously pumped away from the outside of the hollow fibers under the action of the vacuum pump to form certain negative pressure, so that the air in the water continuously overflows from the water through the hollow fibers, and the aim of removing the air in the water is fulfilled. The degassing membrane 42 can effectively remove VOC, namely volatile organic compounds such as chloroform, bromochloromethane and the like, the removal rate of VOC by the degassing membrane 42 device is as high as 80%, and the TOC content of the ultrapure water passing through the degassing membrane 42 device is maintained within 10 ppb.
After passing through the degassing membrane 42, the ultrapure water passes through a pre-carbon dioxide sensor 43 which detects the concentration of carbon dioxide in the unoxidized water, and then passes through the ultraviolet oxidation ultraviolet digestion apparatus 34, i.e., organic compounds are oxidized into carbon dioxide by ultraviolet rays under the action of a titanium dioxide photocatalyst.
After being oxidized by ultraviolet rays, the wastewater flows through the organic matter adsorption column 45 to remove TOC and other organic matters, and the TOC removal rate can be improved to 90% through the adsorption column, so that the load at the rear end is reduced, and the service life of the rear-end ultra-purification column 46 is prolonged.
The water is again passed through a polishing ion ultra-purification column 46, and the ultra-purification column 46 further displaces the carbonate ion substances dissolved in the water after oxidation, thereby further reducing the TOC content and maintaining the organic carbon TOC content at about 3 ppb. The ultrapure water after passing through the ultrapure water purification column 46 passes through the post-positioned carbon dioxide sensor 47 again, and the total carbon dioxide generated after the decomposition of organic matters in the water is detected.
Total Organic Carbon (TOC) is equal to the difference between total carbon concentration (TC) and Total Inorganic Carbon (TIC) concentration, i.e. TOC = TC-TIC. The principle is as follows: detecting the concentration of the current carbon dioxide through a front carbon dioxide sensor 43 to obtain a first concentration; since the organic carbon is dissolved in water and the carbon dioxide concentration at this time changes, in this case, the current carbon dioxide concentration is detected by the rear carbon dioxide sensor 47 to obtain the second concentration. By calculating and analyzing the difference between the second concentration and the first concentration, the concentration of the total organic carbon can be obtained (the calculation formula is prior art). When the TOC value obtained by the controller is more than or equal to 3ppb, the first electromagnetic valve 21 is opened, the ultrapure water flows back to the self-priming pump 41 again, the oxidation degradation process is carried out again until the TOC is less than or equal to 3ppb, and then the first electromagnetic valve 21 is closed, so that the ultrapure water is led out from the water outlet channel 14, and high-quality TOC ultrapure water is obtained.
Through above-mentioned technical scheme, can be through the effective detection to total carbon concentration and total inorganic carbon concentration, adsorb many times, soften, disinfect, degasification to the pure water to reduce the total amount of organic carbon, be of value to the purity that improves ultrapure water, thereby be convenient for the laboratory use. And because the controller is connected to the self-priming pump 41, the front carbon dioxide sensor 43, the ultraviolet disinfection device 44, the rear carbon dioxide sensor 47 and the first electromagnetic valve 21 in a communication manner, the self-priming pump 41, the ultraviolet disinfection device 44 and the first electromagnetic valve 21 can be controlled to perform corresponding actions according to the detection results of the front carbon dioxide sensor 43 and the rear carbon dioxide sensor 47, so that the total organic carbon removal effect is improved.
In one embodiment provided by the present disclosure, the pretreatment device 3 comprises a pretreatment column 31, a reverse osmosis membrane column 32 and a container 33 which are arranged on the water inlet channel 11 in sequence along the flow direction of water, wherein an ultraviolet digestion instrument 34 is arranged in the container 33. Thus, when water is introduced into the finger detecting passage 12, pretreatment of filtering tap water by the pretreatment column 31 can be performedThe mud, sand and rust can adsorb residual chlorine, pigment and peculiar smell, and can adsorb Ca in water 2 +、Mg 2 +, softening the water.
The RO membrane column is a membrane separation and filtration technology using pressure difference as power, and the pore diameter of the RO membrane is as small as nanometer (1 nanometer = 10) -9 Rice), under certain pressure, water molecules can pass through the RO membrane, and impurities such as inorganic salt ions, organic matters, colloid, bacteria, heat source and the like in the source water cannot pass through the RO membrane, so that permeable pure water and impermeable concentrated water are strictly separated. Therefore, a better separation effect is achieved, and accurate detection of the total carbon amount and the total inorganic carbon amount in the detection pipeline is facilitated.
The purified pure water purified by the reverse osmosis membrane column 32 enters a sterile water tank for storage, and an ultraviolet ray digestion instrument 34 capable of emitting 185nm and 254nm ultraviolet rays is arranged in the sterile water tank to carry out photolysis on the water. H 2 O+hγ(185nm)(TiO 2 ) → OH + H + hydroxyl radical (OH) - ) Can completely oxidize organic compounds into carbon dioxide. I.e. organic + OH - →CO 2 +H 2 O, then a portion of CO 2 And the organic matter content in the water is reduced again by removing the water through a respirator.
Further, a booster pump 35 is arranged on the water inlet channel 11 between the pretreatment column 31 and the reverse osmosis membrane column 32. The booster pump 35 may provide sufficient suction to assist in the efficient introduction and removal of tap water, boosting the tap water to 0.5bar-0.8bar, powering the RO membrane (i.e., reverse osmosis membrane).
In the present disclosure, a dosing tank 36 is provided on the water inlet channel 11 between the pretreatment column 31 and the reverse osmosis membrane column 32, and a metering pump 37 is provided on the dosing tank 36. In this way, an appropriate chemical can be introduced into the dosing tank 36 to improve the adsorption efficiency and filtration efficiency of the tap water.
Alternatively, the dosing tank 36 may be provided with an alkaline agent to increase the PH of the tap water and thereby increase the desalination rate of the RO membrane and the removal rate of organic matter. In the present disclosure, the alkaline agent is sodium hydroxide or a sodium hydroxide solution.
In one embodiment provided by the present disclosure, the organic adsorption column 45 is provided with a basic anion exchange resin to specifically remove organic carbon TOC and other organic substances, etc., so that the TOC removal rate can be increased to 90% by passing through the adsorption column, the load on the back end can be reduced, and the service life of the back-end ultra-purification column 46 can be prolonged. Since basic anion exchange resins are known in the art, they are not described herein in detail.
Specifically, the basic anion exchange resin is provided as a basic type I anion exchange resin.
In an embodiment provided by the present disclosure, the second electromagnetic valve 22 is disposed on the water outlet channel 14, and the second electromagnetic valve 22 is communicatively connected to the controller, so that, according to the detection of the total carbon amount by the rear carbon dioxide sensor 47 and the detection of the inorganic carbon by the front carbon dioxide sensor 43, it can be determined whether the TOC content in the current ultrapure water meets the use requirement, so as to control the second electromagnetic valve 22 to be closed or opened.
In the present disclosure, the controller is configured as a Central Processing Unit (CPU). In yet other embodiments, the controller may be one configured as a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), or a Field Programmable Gate Array (FPGA). In addition, the controller may also be a Network Processor (NP), other programmable logic device, discrete gate or transistor logic device, discrete hardware component. In this regard, those skilled in the art can flexibly configure the device according to the actual application environment.
Further, the self-priming pump 41, the degassing membrane 42, the pre-carbon dioxide sensor 43, the ultraviolet disinfection device 44, the organic matter adsorption column 45, the ultra-purification column 46, the post-carbon dioxide sensor 47 and the controller can realize data transmission through various wireless transmission protocols known in the art such as GPRS, wi-Fi, bluetooth and the like, so as to reduce the laying of signal lines. Of course, wired transmission of data may also be achieved through a communication cable or the like, which is not limited by the present disclosure.
The above embodiments are just examples of the present invention, but the present invention is not limited to the above alternative embodiments, and those skilled in the art can obtain other various embodiments by arbitrarily combining the above embodiments, and any one can obtain other various embodiments by the teaching of the present invention.
The above detailed description should not be taken as limiting the scope of the invention, which is defined by the appended claims, which are to be interpreted as illustrative of the scope of the invention.
Claims (8)
1. An ultrapure water machine capable of detecting total organic carbon, which is characterized by comprising a water inlet channel (11), a detection channel (12), a circulating channel (13) and a water outlet channel (14); the water inlet channel (11), the detection channel (12) and the water outlet channel (14) are communicated in sequence;
two ends of the circulating channel (13) are respectively communicated with the detection channel (12), and a first electromagnetic valve (21) is arranged on the circulating channel (13) so that water flowing out of the circulating channel (13) can flow back to the detection channel (12) through the circulating channel (13) for the second time;
wherein, a pretreatment device (3) is arranged on the water inlet channel (11) and is used for filtering particles and suspended matters in the tap water and softening the tap water; a self-priming pump (41), a degassing membrane (42), a front-mounted carbon dioxide sensor (43), an ultraviolet disinfection device (44), an organic matter adsorption column (45), a super-purification column (46) and a rear-mounted carbon dioxide sensor (47) are sequentially arranged on the detection channel (12) along the flow direction of water; wherein a vacuum pump (48) is arranged on the degassing membrane;
the ultrapure water machine further comprises a controller, wherein the controller is in communication connection with the self-sucking pump (41), the front carbon dioxide sensor (43), the ultraviolet disinfection device (44), the rear carbon dioxide sensor (47), the vacuum pump (48) and the first electromagnetic valve (21) so as to control the self-sucking pump (41), the ultraviolet disinfection device (44), the vacuum pump (48) and the first electromagnetic valve (21) to execute corresponding actions according to information transmitted by the front carbon dioxide sensor (43) and the rear carbon dioxide sensor (47).
2. The ultrapure water machine capable of detecting total organic carbon according to claim 1, wherein the pretreatment device (3) comprises a pretreatment column (31), a reverse osmosis membrane column (32) and a container (33) which are arranged on the water inlet channel (11) in the flowing direction of water, wherein the container (33) is provided with an ultraviolet digestion instrument (34).
3. The ultrapure water machine capable of detecting total organic carbon according to claim 2, wherein a booster pump (35) is provided on the water inlet channel (11) between the pretreatment column (31) and the reverse osmosis membrane column (32).
4. The ultrapure water machine capable of detecting total organic carbon according to claim 2, wherein a dosing tank (36) is arranged on the water inlet channel (11) between the pretreatment column (31) and the reverse osmosis membrane column (32), and a metering pump (37) is arranged on the dosing tank (36).
5. The ultra-pure water machine capable of detecting total organic carbon as claimed in claim 4, wherein the dosing tank (36) is provided with an alkaline agent.
6. The ultrapure water machine capable of detecting total organic carbon according to claim 1, wherein a basic anion exchange resin is provided in the organic adsorption column (45).
7. The ultrapure water machine capable of detecting total organic carbon according to claim 1, wherein a second solenoid valve (22) is provided on the water outlet channel (14), and the second solenoid valve (22) is communicatively connected to the controller.
8. The ultrapure water machine capable of detecting total organic carbon of claim 1, wherein the controller is provided as a controller, a PLC programmable logic controller or an application specific integrated circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221932405.5U CN217757152U (en) | 2022-07-25 | 2022-07-25 | Ultrapure water machine capable of detecting total organic carbon |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202221932405.5U CN217757152U (en) | 2022-07-25 | 2022-07-25 | Ultrapure water machine capable of detecting total organic carbon |
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| Publication Number | Publication Date |
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| CN217757152U true CN217757152U (en) | 2022-11-08 |
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| CN202221932405.5U Active CN217757152U (en) | 2022-07-25 | 2022-07-25 | Ultrapure water machine capable of detecting total organic carbon |
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- 2022-07-25 CN CN202221932405.5U patent/CN217757152U/en active Active
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