CN217726453U

CN217726453U - Glass cleaning device suitable for evaporation table

Info

Publication number: CN217726453U
Application number: CN202220834678.XU
Authority: CN
Inventors: 汪嘉; 常俊; 王常猛; 徐虎; 顾凯琰; 陈兆萍; 陈亮
Original assignee: Jiangsu Xinshun Microelectronics Co ltd
Current assignee: Jiangsu Xinshun Microelectronics Co ltd
Priority date: 2022-04-12
Filing date: 2022-04-12
Publication date: 2022-11-04
Anticipated expiration: 2032-04-12

Abstract

The utility model relates to a glass cleaning device suitable for evaporation table belongs to chip manufacturing technical field. The glass basket comprises a split type basket body, wherein a plurality of pieces of glass are arranged in the split type basket body and are uniformly arranged at intervals; the chemical agent tank is arranged below the split type lifting basket and is driven to move up and down to drive the split type lifting basket to move synchronously, so that the split type lifting basket is immersed in or kept away from the chemical agent tank. The split type lifting basket comprises a lifting basket body, wherein a base is arranged at the bottom of the lifting basket body and is detachably connected with the lifting basket body; the base is provided with a plurality of storage grooves which are uniformly arranged at intervals. This application carries out chemical treatment and physical treatment to the metal level on the glass, can effectually get rid of the metal level on glass surface, has guaranteed the constant temperature effect of evaporation bench, the control of the evaporation process of being convenient for.

Description

Glass cleaning device suitable for evaporation table

Technical Field

The utility model relates to a glass cleaning device suitable for evaporation table belongs to chip manufacturing technical field.

Background

The evaporating station equipment is provided with heating lamp glass and an observation window glass. As the evaporation proceeds, metal is gradually deposited on the glass of the heating lamp and the glass of the observation window to form a metal layer; the metal layer affects the thermostatic effect of the device and hinders the monitoring of the evaporation process, so that the metal on the glass must be cleaned. At present, glass on evaporation table equipment is cleaned by putting glass into a reagent tank for chemical reaction, but the glass is stacked, so that the cleaning of the glass overlapping area is incomplete, and metal remains on the glass.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that a glass cleaning device suitable for evaporation station is provided to above-mentioned prior art, can effectively get rid of the metal level on glass surface, guarantees the constant temperature effect of evaporation station, the control of the evaporation process of being convenient for.

The utility model provides a technical scheme that above-mentioned problem adopted does: a glass cleaning device suitable for an evaporation table comprises a split type lifting basket, wherein a plurality of pieces of glass which are vertically arranged are arranged in the split type lifting basket and are uniformly arranged at intervals; split type hand-basket top is equipped with the lifter, split type hand-basket and lifter detachable connection, split type hand-basket below is equipped with the chemical agent groove, drives the lifter up-and-down motion drives split type hand-basket synchronous motion for split type hand-basket soaks the chemical agent of locating in the chemical agent inslot and gets rid of or keep away from the chemical agent groove to the metal level on the glass.

The split type lifting basket comprises a lifting basket body, wherein a base is arranged at the bottom of the lifting basket body and is detachably connected with the lifting basket body; the base is provided with a plurality of storage grooves which are uniformly arranged at intervals, and the glass is respectively clamped in the corresponding storage grooves; the lifting hanging rod is arranged at the top of the basket body, the hook is arranged at the bottom of the lifting rod, the hook is hooked on the lifting hanging rod, and the lifting rod is driven to move up and down to drive the basket body to move up and down.

The bottom of the lifting hanging rod is provided with a clamping groove, and a hook is clamped in the clamping groove.

The two sides of the storage groove are respectively provided with a brush, and the brushes are fixed on the basket body.

A plurality of liquid inlet holes are formed in the side face of the lifting basket body.

The reagent groove is arranged in the seal box, the lifting rod penetrates through the top end of the seal box, so that the bottom of the lifting rod is arranged in the seal box, the top of the seal box is provided with a viewing port, and a top cover capable of being opened and closed is arranged on the viewing port.

The lifting driving device comprises a motor, the motor is fixed on a motor mounting plate, a vertically-arranged screw rod is arranged on an output shaft of the motor, a connecting block is arranged at the top of the lifting rod, the screw rod penetrates through the connecting block, and the screw rod and the connecting block are in threaded connection; the motor mounting plate is characterized in that an induction sheet is arranged on the side face of the connecting block, two limiting optocouplers and two protection switches are arranged on the motor mounting plate, the two limiting optocouplers are arranged in an up-down symmetrical mode, the two protection switches are arranged in an up-down symmetrical mode, and the protection switches are arranged outside the limiting optocouplers.

Compared with the prior art, the utility model has the advantages of: a glass cleaning device suitable for an evaporation table is characterized in that a split type lifting basket is acid-resistant and high-temperature-resistant, so that glass is vertically placed, and the split type lifting basket is arranged in a chemical agent tank, so that the glass is soaked in the chemical agent tank; the lifting basket body can move up and down, so that the brush can wash the glass soaked in the agent tank. This application carries out chemical treatment and physical treatment to the metal level on the glass, can effectually get rid of the metal level on glass surface, has guaranteed the constant temperature effect of evaporation bench, the control of the evaporation process of being convenient for.

Drawings

FIG. 1 is a schematic view of a glass cleaning apparatus suitable for use in an evaporation station according to an embodiment of the present invention;

FIG. 2 is a schematic view of the split lift basket of FIG. 1;

FIG. 3 is a top view of FIG. 2;

FIG. 4 is a side view of FIG. 2;

in the figure, 1 sealing box, 2 agent grooves, 3 split type lifting baskets, 3.1 bases, 3.2 lifting basket bodies, 3.3 threaded holes, 3.4 object placing grooves, 3.5 brushes, 3.6 lifting hanging rods, 3.7 liquid inlet holes, 4 hooks, 5 lifting rods, 6 connecting blocks, 7 lead screws, 8 motors, 9 induction sheets, 10 limiting optocouplers, 11 protection switches and 12 motor mounting plates are arranged.

Detailed Description

The present invention will be described in further detail with reference to the following embodiments.

As shown in FIG. 1, the glass cleaning device suitable for the evaporation table in the embodiment comprises a split type lifting basket 3, wherein a plurality of vertically arranged glasses are arranged in the split type lifting basket 3, and the glasses are uniformly arranged at intervals to prevent the glasses from being stacked together. The lifting rod 5 of vertical arrangement is arranged above the split type lifting basket 3, the hook 4 is arranged at the bottom of the lifting rod 5, the split type lifting basket 3 is hooked by the hook 4, and the hook 4 and the split type lifting basket 3 are convenient to connect and break away from. 3 below of split type hand-basket are equipped with

chemical agent groove

2, and 5 bottoms of lifter set up connecting block 6, and vertical lead screw 7 of wearing to establish in the connecting block 6,

lead screw

7 and 6 threaded connection of connecting block. The side of the screw 7 is provided with a motor mounting plate 12, a vertically arranged motor 8 is fixed on the motor mounting plate 12, and an output shaft of the motor 8 is fixedly connected with the screw 7. When the motor 8 rotates, the lead screw 7 is driven to rotate, the connecting block 6 and the lifting rod 5 are driven to move up and down, and the split type lifting basket 3 is driven to move synchronously, so that the split type lifting basket 3 is immersed in the chemical agent tank 2, and the metal layer on the glass is removed or kept away from the chemical agent tank.

As shown in fig. 2, 3 and 4, the split type basket 3 comprises a basket body 3.2 made of teflon, a base 3.1 is arranged at the bottom of the basket body 3.2, a plurality of storage grooves 3.4 which are uniformly arranged at intervals are formed in the base 3.1, the glass is clamped in the corresponding storage grooves 3.4 respectively, the storage grooves 3.4 are used for positioning the glass, and the glass is prevented from toppling over. The top of the lifting basket body 3.2 is provided with a lifting hanging rod 3.6, the bottom of the lifting hanging rod 3.6 is provided with two clamping grooves, and the hook 4 is hooked in the two clamping grooves. When couple 4 colludes in the draw-in groove, connect lifter 5 and split type hand-basket 3, when couple 4 breaks away from the draw-in groove, separate lifter 5 and split type hand-basket 3 of hanging. Two sides of the storage groove 3.4 are respectively provided with a brush 3.5 made of polytetrafluoroethylene, and the brush 3.5 is fixed on the basket body 3.2. Threaded holes 3.3 are symmetrically formed in the basket body 3.2 and the base 3.1 respectively, bolts are arranged in the threaded holes 3.3 in a penetrating mode respectively, and the bolts are screwed up or unscrewed to disassemble and assemble the basket body 3.2 and the base 3.1. When the bolts are screwed, the basket body 3.2 is fixedly connected with the base 3.1, the split type basket 3 filled with glass is hooked on the lifting rod 5 through the hook 4, and the motor 8 drives the screw rod 7 to rotate, so that the lifting rod 5 moves downwards, and the split type basket 3 is placed in the agent tank 2; the bolt is loosened through screwing, so that the basket body 3.2 and the base 3.1 are free of connection relation, at the moment, the control motor 8 works to drive the screw rod 7 to rotate, further drive the lifting rod 5 to move up and down, drive the basket body 3.2 to move up and down, the corresponding glass is brushed up and down by the hairbrush 3.5, removal of metal substances is accelerated, and the cleaning effect is improved.

The side surface of the basket body 3.2 is provided with a plurality of liquid inlet holes 3.7. When the basket body 3.2 is immersed in the reagent tank 2, the reagent enters the inside of the basket body 3.2 through the liquid inlet hole 3.7, so that the reagent removes the metal layer on the glass.

The side of the connecting block 6 is provided with an induction sheet 9, the motor mounting plate 12 is provided with two limit optocouplers 10 and two protection switches 11, and the two limit optocouplers 10 are symmetrically arranged up and down to realize the control of the up-and-down stroke of the basket body 3.2. The two protection switches 11 are symmetrically arranged up and down, and the protection switches 11 are arranged outside the limit optocoupler 10. When the equipment is in an abnormal condition, the protection switch 11 can be triggered to perform cutoff protection, so that mechanical damage is avoided.

The chemical agent groove 2 is arranged in the seal box 1, and the bottom of the lifting rod 5 penetrates through the top of the seal box 1. The viewing aperture is seted up at 1 top of seal box, is equipped with the closing cap that can open and shut on the viewing aperture, and split type hand-basket is hung on the couple through the closing cap department of opening, has effectively prevented that acid atmosphere from causing the corruption to motor and other mechanical transmission parts, has improved life.

The split type lifting basket is acid-resistant and high-temperature-resistant, and realizes that glass is vertically placed, and the split type lifting basket is arranged in a chemical agent tank, so that the glass is soaked in the chemical agent tank; the lifting basket body can move up and down, so that the brush can wash the glass soaked in the agent tank. This application carries out chemical treatment and physical treatment to the metal level on the glass, can effectually get rid of the metal level on glass surface, has guaranteed the constant temperature effect of evaporation bench, the control of the evaporation process of being convenient for.

In addition to the above embodiments, the present invention also includes other embodiments, and all technical solutions formed by equivalent transformation or equivalent replacement should fall within the protection scope of the claims of the present invention.

Claims

1. The utility model provides a glass belt cleaning device suitable for evaporation station which characterized in that: the glass basket comprises a split type basket body, wherein a plurality of pieces of glass which are vertically arranged are arranged in the split type basket body, and are uniformly arranged at intervals; split type hand-basket top is equipped with the lifter, split type hand-basket and lifter detachable connection, split type hand-basket below is equipped with the chemical agent groove, drives the lifter up-and-down motion drives split type hand-basket synchronous motion for split type hand-basket soaks the chemical agent of locating in the chemical agent inslot and gets rid of or keep away from the chemical agent groove to the metal level on the glass.

2. A glass cleaning device adapted for use in an evaporation station as claimed in claim 1, wherein: the split type lifting basket comprises a lifting basket body, wherein a base is arranged at the bottom of the lifting basket body and is detachably connected with the lifting basket body; the base is provided with a plurality of storage grooves which are uniformly arranged at intervals, and the glass is respectively clamped in the corresponding storage grooves; the lifting hanging rod is arranged at the top of the basket body, the hook is arranged at the bottom of the lifting rod, the hook is hooked on the lifting hanging rod, and the lifting rod is driven to move up and down to drive the basket body to move up and down.

3. A glass cleaning device suitable for use in an evaporation station as claimed in claim 2, wherein: the bottom of the lifting hanging rod is provided with a clamping groove, and a hook is clamped in the clamping groove.

4. A glass cleaning device adapted for use in an evaporation station as claimed in claim 2, wherein: the two sides of the storage groove are respectively provided with a brush, and the brushes are fixed on the basket body.

5. A glass cleaning device suitable for use in an evaporation station as claimed in claim 2, wherein: a plurality of liquid inlet holes are formed in the side face of the lifting basket body.

6. A glass cleaning device suitable for use in an evaporation station as claimed in claim 1, wherein: the reagent groove is arranged in the seal box, the lifting rod penetrates through the top end of the seal box, so that the bottom of the lifting rod is arranged in the seal box, the top of the seal box is provided with a viewing port, and a top cover capable of being opened and closed is arranged on the viewing port.

7. A glass cleaning device adapted for use in an evaporation station as claimed in claim 1, wherein: the lifting driving device comprises a motor, the motor is fixed on a motor mounting plate, a vertically-arranged screw rod is arranged on an output shaft of the motor, a connecting block is arranged at the top of the lifting rod, the screw rod penetrates through the connecting block, and the screw rod and the connecting block are in threaded connection; the motor mounting plate is characterized in that an induction sheet is arranged on the side face of the connecting block, two limiting optocouplers and two protection switches are arranged on the motor mounting plate, the two limiting optocouplers are arranged in an up-down symmetrical mode, the two protection switches are arranged in an up-down symmetrical mode, and the protection switches are arranged outside the limiting optocouplers.