CN217704121U

CN217704121U - Cutting saw hanging rail beam for monocrystalline silicon cutting machine

Info

Publication number: CN217704121U
Application number: CN202221981586.0U
Authority: CN
Inventors: 陈曦
Original assignee: Qingdao Xinguanhua Mechanical Equipment Co ltd
Current assignee: Qingdao Xinguanhua Mechanical Equipment Co ltd
Priority date: 2022-07-29
Filing date: 2022-07-29
Publication date: 2022-11-01
Anticipated expiration: 2032-07-29

Abstract

The utility model discloses a monocrystalline silicon cuts machine slitting saw hanger rail roof beam, including device body, entablature, adjustment mechanism and coupling mechanism, the entablature lower extreme is equipped with cutting assembly and both sides and is equipped with the guide bar, adjustment mechanism sets up in the entablature and connects cutting assembly, and this mechanism can effectively connect fixedly to two sets of or multiunit entablature, can control two sets of or multiunit entablature and cut many monocrystalline silicon in step, has increased the work efficiency of device by a wide margin, has solved the problem of cutting monocrystalline silicon inefficiency one by one, has increased the practicality and the high efficiency of device body, coupling mechanism sets up in the middle of two sets of entablatures, and this mechanism can effectively connect fixedly to two sets of or multiunit entablatures, can control two sets of or multiunit entablatures and cut many monocrystalline silicon in step, has increased the work efficiency of device by a wide margin, has solved the problem of cutting monocrystalline silicon inefficiency one by one, has increased the practicality and the high efficiency of device body.

Description

Cutting saw hanging rail beam for monocrystalline silicon cut-off machine

Technical Field

The utility model belongs to the technical field of monocrystalline silicon cuts, concretely relates to monocrystalline silicon cuts machine slitting saw hangs rail roof beam.

Background

In order to meet the requirements of the appearance and the size of a silicon wafer in the production process, a silicon single crystal rod needs to be cut, the cutting of the silicon single crystal rod is an indispensable step in the early process of producing a semiconductor device, and currently, a single crystal cutting machine which is special equipment for cutting the silicon single crystal rod is used for cutting the silicon single crystal.

However, the dicing saw of the conventional single crystal silicon cutting machine is fixed in structure, and the upper cross beam (hanger rail beam) at the upper end cannot flexibly operate, so that the cutting efficiency is low and the cutting size is single, as disclosed in the specification: the invention patent of CN 112976378B provides a single crystal silicon rod cutting machine, which is characterized in that a take-up pulley and a pay-off pulley are matched, a cutting line rotates in the direction of a guide pulley to cut off single crystal silicon, but the guide pulley cannot adjust the position distance, so that the length for cutting the single crystal silicon cannot be changed, various kinds of work cannot be required, and a plurality of groups of guide pulleys cannot be connected in parallel for use, so that only one single crystal silicon rod can be cut at each time, and the working efficiency of the device is lowered, and the practicability is poor.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a monocrystalline silicon cuts machine slitting saw hangs rail roof beam can carry out the interval between two sets of cutting knives and adjust, is convenient for adapt to the cutting work of different length demands, can connect the multiunit entablature simultaneously and use, has increased the work efficiency of device.

In order to achieve the above object, the utility model provides a following technical scheme: a cutting saw hanging rail beam for a monocrystalline silicon truncation machine comprises a device body, an upper cross beam, an adjusting mechanism and a connecting mechanism, wherein a cutting assembly is arranged at the lower end of the upper cross beam, guide rods are arranged on two sides of the upper cross beam, the adjusting mechanism is arranged in the upper cross beam and connected with the cutting assembly, and the connecting mechanism is arranged between the two groups of upper cross beams;

the adjusting mechanism comprises an electric motor, a sliding block and a first sliding groove, the driving end of the electric motor is connected with a bidirectional screw, the sliding block is in threaded connection with the bidirectional screw, the first sliding groove is formed in the upper cross beam, and the sliding block is located in the first sliding groove in a sliding mode.

As a further aspect of the present invention: coupling mechanism includes connecting rod and jack, the connecting rod both sides are provided with the side strip, second spout and inboard being equipped with the bolt have been seted up in the side strip outside, the second spout slides and is located the guide bar, can connect the use to two sets of or multiunit entablature, and the work demand that the adaptation multiunit monocrystalline silicon of being convenient for cut simultaneously increases work efficiency.

As a further aspect of the present invention: the cutting assembly comprises a cutting knife and a blade holder, and the upper end of the blade holder is fixedly connected with the bottom of the sliding block, so that the monocrystalline silicon can be cut conveniently.

As a further aspect of the present invention: the middle section of the bidirectional screw is provided with a central joint, and the two groups of sliding blocks are respectively positioned at the left side and the right side of the central joint, so that the two sliding blocks can be controlled to move oppositely.

As a further aspect of the present invention: be equipped with the limiting plate on the slider, first spout upper end is equipped with spacing groove and corresponds with the limiting plate, avoids slider and spout to break away from.

As a further aspect of the present invention: be equipped with the mount pad on the motor, the mount pad is fixed in entablature one side, is convenient for fix the motor, increases stability.

As a further aspect of the present invention: the jack is arranged on the guide rod, and the bolt is screwed to penetrate through the side edge strip to be inserted into the jack, so that the upper cross beam and the connecting rod are fixed conveniently.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses be equipped with adjustment mechanism in the device body, through motor control two-way screw rod rotation, two sets of sliders opposite direction motion on two-way screw rod and move at first spout, can effectively connect fixedly two sets of or multiunit entablature, can control two sets of or multiunit entablature to cut many monocrystalline silicon in step, increased substantially the work efficiency of device, solved the problem that the monocrystalline silicon efficiency of cutting one by one is low, increased the practicality and the high efficiency of device body;

2. the utility model discloses at this internal coupling mechanism that is equipped with of device, through guide bar and side strake sliding connection, the bolt is pegged graft in the jack, can effectively connect fixedly to two sets of or multiunit entablature, can control two sets of or multiunit entablature and cut many monocrystalline silicon in step, has increased substantially the work efficiency of device, has solved the problem that cutting monocrystalline silicon inefficiency one by one, has increased the practicality and the high efficiency of device body.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the principles of the invention. In the drawings:

FIG. 1 is a perspective view of the overall structure of the present invention;

fig. 2 is an exploded view of the upper cross beam structure of the present invention;

fig. 3 is a cross-sectional view of the upper cross beam structure of the present invention;

fig. 4 is a perspective view of the connection mechanism of the present invention.

In the figure: 1. a device body; 2. an upper cross beam; 3. a cutting assembly; 31. a cutting knife; 32. a blade holder; 4. an adjustment mechanism; 41. an electric motor; 42. a bidirectional screw; 43. a central section; 44. a slider; 45. a limiting plate; 46. a first chute; 47. a limiting groove; 48. a mounting base; 5. a guide bar; 6. a connecting mechanism; 61. a connecting rod; 62. a side bar; 63. a second chute; 64. a bolt; 65. and (4) inserting the jack.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: a cutting saw rail hanging beam for a monocrystalline silicon cut-off machine comprises a device body 1, upper cross beams 2, an adjusting mechanism 4 and a connecting mechanism 6, wherein a cutting assembly 3 is arranged at the lower end of each upper cross beam 2, guide rods 5 are arranged on two sides of each upper cross beam, each cutting assembly 3 comprises a cutting knife 31 and a blade holder 32, the adjusting mechanism 4 is arranged in each upper cross beam 2 and connected with the cutting assembly 3, and the connecting mechanism 6 is arranged between the two groups of upper cross beams 2;

adjustment mechanism 4 includes motor 41, slider 44 and first spout 46, motor 41 drive end is connected with two-way screw rod 42, slider 44 spiro union is on two-way screw rod 42, two-way screw rod 42 interlude is equipped with the centre festival 43, slider 44 is equipped with two sets ofly and is located the centre festival 43 left and right sides respectively, first spout 46 is seted up in entablature 2, slider 44 slides and is located first spout 46, blade frame 32 upper end and slider 44 bottom fixed connection, be equipped with limiting plate 45 on the slider 44, first spout 46 upper end is equipped with spacing groove 47 and corresponds with limiting plate 45, be equipped with mount pad 48 on the motor 41, mount pad 48 is fixed in 2 one side of entablature, and this mechanism can effectively adjust the distance between two sets of cutting knives 31 that parallel, can carry out the work of cuting of different length to monocrystalline silicon, need change equipment when having avoided needing the monocrystalline silicon rod of different length to cut, has satisfied more production demands, labour saving and time saving and simple operation, has increased the practicality of device.

Coupling mechanism 6 includes connecting rod 61 and jack 65, connecting rod 61 both sides are provided with side strake 62, second spout 63 and inboard are equipped with bolt 64 have been seted up in the side strake 62 outside, second spout 63 slides and is located guide bar 5, jack 65 is seted up on guide bar 5, bolt 64 spiro union passes side strake 62 and pegs graft in jack 65, and this mechanism can effectively be connected fixedly to two sets of or multiunit entablature 2, can control two sets of or multiunit entablature 2 and cut many monocrystalline silicon in step, has increased the work efficiency of device by a wide margin, has solved the problem that cutting monocrystalline silicon inefficiency one by one, has increased the practicality and the high efficiency of device body 1.

The utility model discloses a theory of operation: the device is when using, at first work through external power source control motor 41, it drives one side two-way screw rod 42 and rotates, slider 44 of spiro union on two-way screw rod 42 removes in first spout 46, it drives lower extreme cutting assembly 3 synchronous motion, position begins to change between two sets of cutting assembly 3, the mechanism can effectively adjust the distance between two sets of cutting knife 31 that parallel, can carry out the work of cutting of different length to monocrystalline silicon, need change equipment and cut when having avoided the monocrystalline silicon rod of different length to need, more production demands have been satisfied, time saving and labor saving and easy operation, the practicality of device has been increased, can install connecting rod 61 in entablature 2 side through side strake 62 on connecting rod 61, move on guide bar 5 through second spout 63, when moving appointed position, with bolt 64 impel to in jack 65 in, with another group of entablature 2 in the second spout 63 of connecting rod 61 opposite side and fixed can this moment, the mechanism can effectively connect fixedly two sets of or multiunit entablature 2, can control two sets of entablature 2 or multiunit synchronous cutting, the many monocrystalline silicon cutting efficiency of cutting device has improved by a wide margin, high efficiency cutting device's 1 problem and practicality have been solved low efficiency one by one-by one.

It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described above, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a monocrystalline silicon cuts machine slitting saw hangs rail beam, includes device body (1), entablature (2), adjustment mechanism (4) and coupling mechanism (6), its characterized in that: the lower end of the upper cross beam (2) is provided with a cutting assembly (3), guide rods (5) are arranged on two sides of the upper cross beam, the adjusting mechanism (4) is arranged in the upper cross beam (2) and connected with the cutting assembly (3), and the connecting mechanism (6) is arranged between the two groups of upper cross beams (2);

adjustment mechanism (4) include motor (41), slider (44) and first spout (46), motor (41) drive end is connected with two-way screw rod (42), slider (44) spiro union is on two-way screw rod (42), first spout (46) are seted up in entablature (2), slider (44) slide and are located first spout (46).

2. The dicing saw hanging rail beam for the single crystal silicon cutting machine according to claim 1, characterized in that: coupling mechanism (6) are including connecting rod (61) and jack (65), connecting rod (61) both sides are provided with side strake (62), second spout (63) and inboard are equipped with bolt (64) have been seted up in the side strake (62) outside, second spout (63) slide and are located guide bar (5).

3. The dicing saw hanging rail beam for the single crystal silicon cutting machine according to claim 1, characterized in that: the cutting assembly (3) comprises a cutting knife (31) and a blade holder (32), and the upper end of the blade holder (32) is fixedly connected with the bottom of the sliding block (44).

4. The cutting saw rail beam for the monocrystalline silicon truncating machine of claim 1, wherein: two-way screw rod (42) interlude is equipped with central festival (43), slider (44) are equipped with two sets ofly and are located central festival (43) left and right sides respectively.

5. The cutting saw rail beam for the monocrystalline silicon truncating machine of claim 1, wherein: be equipped with limiting plate (45) on slider (44), first spout (46) upper end is equipped with spacing groove (47) and spacing groove (47) correspond with limiting plate (45).

6. The cutting saw rail beam for the monocrystalline silicon truncating machine of claim 1, wherein: and the motor (41) is provided with a mounting seat (48), and the mounting seat (48) is fixed on one side of the upper cross beam (2).

7. The dicing saw hanging rail beam for the single crystal silicon cutting machine according to claim 2, characterized in that: the insertion hole (65) is formed in the guide rod (5), and the bolt (64) penetrates through the side edge strip (62) in a threaded mode and is inserted into the insertion hole (65).