CN217688641U - Tube mirror device for panel detection - Google Patents
Tube mirror device for panel detection Download PDFInfo
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- CN217688641U CN217688641U CN202222387409.6U CN202222387409U CN217688641U CN 217688641 U CN217688641 U CN 217688641U CN 202222387409 U CN202222387409 U CN 202222387409U CN 217688641 U CN217688641 U CN 217688641U
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Abstract
The utility model discloses a tube lens device for detecting a panel, which comprises an illumination unit, a light source and a control unit, wherein the illumination unit is used for guiding an illumination light beam emitted by the illumination light source to an object to be detected; the microscopic imaging unit is used for splitting the illumination light beam reflected by the object to be measured into a plurality of sub-beams and guiding each sub-beam to an imaging camera; and the optical filter assembly is used for filtering the illumination light beam reflected by the object to be measured so that the imaging camera acquires the light beam of the target wave band. The utility model discloses can enough guarantee the uniformity of camera formation of image, can effectively promote microscopic detecting system's imaging quality simultaneously.
Description
Technical Field
The utility model discloses a pipe mirror device belongs to display panel and detects technical field, specifically discloses a panel detects uses pipe mirror device.
Background
With the development of semiconductor technology and the continued improvement of semiconductor wafer fabrication technology, the lithographic processes employed in semiconductor wafer fabrication have become more sophisticated such that increasing numbers of features are incorporated on smaller surface areas of the semiconductor wafer, ensuring higher performance of the semiconductor wafer. Thus, the size of potential defects on semiconductor wafers is also typically embodied in the micron to submicron range.
Manufacturers of semiconductor wafers are increasingly demanding improvements in semiconductor wafer quality control and inspection procedures to ensure consistently high quality semiconductor wafers are produced. Therefore, it is important to exclude or locate defective semiconductor wafers in their production. The indispensable ring of the current system for realizing semiconductor wafer detection is a microscopic detection system with a tube lens structure, and the tube lens structure of the microscopic detection system in the prior art has the defects of simplicity, small target surface, stray light of collected light and the like, so that the system can not meet the actual industrial requirements gradually.
SUMMERY OF THE UTILITY MODEL
To the technical problem who exists among the prior art, the utility model provides a panel detects uses tub mirror device, its formation of image uniformity that can enough guarantee many cameras can effectively promote microscopic detection system's imaging quality simultaneously.
The utility model discloses a tube lens device for detecting a panel, which comprises an illumination unit, a light source and a control unit, wherein the illumination unit is used for guiding an illumination light beam emitted by the illumination light source to an object to be detected; the microscopic imaging unit is used for splitting the illumination light beam reflected by the object to be measured into a plurality of sub-light beams and guiding each sub-light beam to one imaging camera; and the optical filter assembly is used for filtering the illumination light beam reflected by the object to be measured so that the imaging camera acquires the light beam with the target wave band.
The utility model discloses an in a preferred embodiment, the microscopic imaging unit includes first pipe mirror and second pipe mirror, first pipe mirror and second pipe mirror are through third pipe mirror intercommunication, the one end of first pipe mirror is connected with first camera, the other end is connected with objective, the one end of second pipe mirror is connected with the second camera, first pipe mirror with the juncture of third pipe mirror is provided with second beam splitter, the second pipe mirror with the juncture of third pipe mirror is provided with the plane mirror, the second beam splitter with be provided with first light filter between the objective.
The utility model discloses an in a preferred embodiment, the normal line of second beam splitter with the normal line of plane mirror is parallel to each other, the normal line of second beam splitter with contained angle between the axis of first pipe mirror is 45, the axis of first light filter with the axis collineation of first pipe mirror.
In a preferred embodiment of the present invention, a second optical filter is disposed in the first tube mirror.
In a preferred embodiment of the present invention, a third optical filter is disposed in the second tube lens.
In a preferred embodiment of the present invention, a lens set is disposed in the first tube lens and the second tube lens.
The utility model discloses an in a preferred embodiment, the second beam splitter with be provided with between the objective with the fourth tube mirror of first tube mirror intercommunication, the fourth tube mirror with the juncture of first tube mirror is provided with first beam splitter, first beam splitter the second beam splitter for first light filter mirror symmetry arranges.
The utility model discloses an in a preferred embodiment, be provided with the fifth tube mirror rather than the intercommunication on the fourth tube mirror, the one end of fifth tube mirror is connected with lighting source, the fifth tube mirror with the juncture of fourth tube mirror is provided with the third beam splitter, the normal line of third beam splitter with the normal line of first beam splitter is parallel to each other.
In a preferred embodiment of the present invention, a concave-convex mirror assembly is disposed in the fifth tube mirror.
In a preferred embodiment of the present invention, the illumination source and the fifth tube mirror are provided with a diaphragm therebetween, or a diaphragm is disposed in the fifth tube mirror.
The utility model has the advantages that: the utility model overcomes the defects of small target surface and low detection precision of the microscope mirror in the prior art, and provides a microscope mirror structure which realizes the filtration of stray light through the matching of a microscope imaging unit and a light filter component, thereby improving the detection speed and the detection precision of a semiconductor wafer;
furthermore, the utility model discloses a microscopic imaging unit of double-barrelled mirror structure can carry on two the same or different big target surface cameras simultaneously, and it can enough satisfy the detection demand of different model semiconductor wafer, can show again to promote the detection speed and the detection precision to semiconductor wafer;
furthermore, the utility model discloses a set up second light filter or third light filter and cooperate first light filter in first tube mirror and/or second tube mirror and form multiple filtering effect, make the imaging camera can more accurately acquire the light beam of target wave band, thereby promoted the imaging effect;
furthermore, the utility model can effectively ensure the imaging consistency of the first camera and the second camera and avoid misjudgment by arranging the lens group in the first tube lens and the second tube lens;
furthermore, the lens group of the utility model adopts a common spherical double-cemented lens group, the structure is simple, the processing and the assembly and adjustment are easy, and the processing and manufacturing cost can be obviously reduced;
furthermore, the concave-convex lens assembly is added, so that the divergent light of the light source can be changed into parallel light, and the illumination effect on the object to be measured is improved;
further, the utility model discloses an increase the diaphragm and realized the regulation of illumination light source light path size.
Drawings
Fig. 1 is a schematic view of a tube lens device for panel inspection according to the present invention;
in the figure: 1-a first tube mirror; 2-a second tube mirror; 3-a third tube mirror; 4-a first camera; 5-an objective lens; 6-a second camera; 7-a second beam splitter; 8-a plane mirror; 9-a lens group; 10-a fourth tube mirror; 11-a first beam splitter; 12-a fifth tube lens; 13-a third beam splitter; 14-a third optical filter; 15-a first optical filter; 16-a concave-convex mirror assembly; 17-a diaphragm; 18-a second optical filter; 19-illumination source or fiber.
Detailed Description
The technical solutions of the present invention (including the preferred technical solutions) are further described in detail below by means of the attached drawings and some optional embodiments of the present invention. It is obvious that the described embodiments are only some of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1, the utility model discloses a tube lens device for panel detection, which comprises an illumination unit for guiding the illumination beam emitted by an illumination light source to an object to be detected; the microscopic imaging unit is used for splitting the illumination light beam reflected by the object to be measured into a plurality of sub-beams and guiding each sub-beam to an imaging camera; and the optical filter assembly is used for filtering the illumination light beam reflected by the object to be measured so that the imaging camera acquires the light beam of the target wave band.
Preferably, the microscopic imaging unit comprises a first tube mirror 1 and a second tube mirror 2, the first tube mirror 1 and the second tube mirror 2 are communicated through a third tube mirror 3, one end of the first tube mirror 1 is connected with a first camera 4, the other end of the first tube mirror is connected with an objective lens 5, one end of the second tube mirror 2 is connected with a second camera 6, a second beam splitter 7 is arranged at the junction of the first tube mirror 1 and the third tube mirror 3, a plane reflector 8 is arranged at the junction of the second tube mirror 2 and the third tube mirror 3, and a first optical filter 15 is arranged between the second beam splitter 7 and the objective lens 5.
Preferably, the normal of the second beam splitter 7 is parallel to the normal of the plane mirror 8, an included angle between the normal of the second beam splitter 7 and the central axis of the first tube mirror 1 is 45 °, and the central axis of the first optical filter 15 is collinear with the central axis of the first tube mirror 1.
Preferably, a second filter 18 is arranged inside the first tube mirror 1.
Preferably, a third filter 14 is disposed in each of the second tube mirrors 2.
It should be noted that the first filter 15 can filter the wavelength λ 1 The second filter 18 can filter light with a wavelength λ 2 The third filter 14 can filter the light with the wavelength lambda 3 Of light of, wherein λ 1 、λ 2 、λ 3 Can be three specific values or a wavelength interval, and simultaneously lambda 1 、λ 2 、λ 3 The three may be equal or unequal.
Preferably, a fourth tube mirror 10 communicated with the first tube mirror 1 is arranged between the second beam splitter 7 and the objective lens 5, a first beam splitter 11 is arranged at the junction of the fourth tube mirror 10 and the first tube mirror 1, and the first beam splitter 11 and the second beam splitter 7 are arranged in a mirror symmetry manner relative to the first optical filter 15.
Preferably, a fifth tube mirror 12 communicated with the fourth tube mirror 10 is arranged on the fourth tube mirror 10, one end of the fifth tube mirror 12 is connected with an illumination light source, a third beam splitter 13 is arranged at the junction of the fifth tube mirror 12 and the fourth tube mirror 10, and the normal of the third beam splitter 13 is parallel to the normal of the first beam splitter 11.
Preferably, a concave-convex mirror assembly 16 is arranged in the fifth tube mirror 12, and the concave-convex mirror assembly 16 can change the divergent light of the illumination light source into parallel light.
Preferably, a diaphragm 17 is arranged between the illumination light source and the fifth tube mirror 12, or a diaphragm 17 is arranged in the fifth tube mirror 12, and the diaphragm 17 can adjust the size of the light path.
The utility model discloses a light beam path as follows: an illumination light beam emitted by an illumination light source or an optical fiber 19 firstly passes through a diaphragm 17 to be adjusted in size and then enters a fifth tube mirror 12, a concave-convex mirror assembly 16 in the fifth tube mirror 12 can change a divergent light beam of the light source into a parallel light beam, the parallel light beam enters a fourth tube mirror 10, enters a first tube mirror 1 after being refracted by a third beam splitter 13, enters an objective lens 5 after being refracted by a first beam splitter 11 positioned in the first tube mirror 1 to illuminate an object to be measured, the illumination light beam reflected by the object to be measured firstly passes through the first beam splitter 11 after returning along an original path to realize first filtering through a first optical filter 15, then is divided into two paths under the action of a second beam splitter 7, one path passes through a lens group 9 and a second optical filter 18 along an extension line of the original exit path and then reaches a first camera 4, the other path rotates 45 degrees and then passes through the lens group 9 and a third optical filter 14 again through a plane reflector 8 to reach a second camera 6, and technicians in the technical field can select different optical filters reasonably and select different optical filters for multiple times according to imaging needs of the first camera 4 and the second camera 6.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the scope of the invention, and that any modifications, combinations, substitutions, improvements, etc. made in the spirit and principles of the invention are included within the scope of the invention.
Claims (10)
1. The utility model provides a panel detects uses tub mirror device which characterized in that: comprises that
The illumination unit is used for guiding the illumination light beams emitted by the illumination light source to the object to be measured;
the microscopic imaging unit is used for splitting the illumination light beam reflected by the object to be measured into a plurality of sub-beams and guiding each sub-beam to an imaging camera;
and the optical filter assembly is used for filtering the illumination light beam reflected by the object to be measured so that the imaging camera acquires the light beam with the target wave band.
2. The tube lens device for detecting a panel according to claim 1, wherein: the microscopic imaging unit comprises a first tube lens (1) and a second tube lens (2), the first tube lens (1) and the second tube lens (2) are communicated through a third tube lens (3), one end of the first tube lens (1) is connected with a first camera (4), the other end of the first tube lens is connected with an objective lens (5), one end of the second tube lens (2) is connected with a second camera (6), a second beam splitter (7) is arranged at the junction of the first tube lens (1) and the third tube lens (3), a plane reflector (8) is arranged at the junction of the second tube lens (2) and the third tube lens (3), and a first optical filter (15) is arranged between the second beam splitter (7) and the objective lens (5).
3. The tube lens device for detecting a panel according to claim 2, wherein: the normal of second beam splitter (7) with the normal of plane mirror (8) is parallel to each other, the normal of second beam splitter (7) with contained angle between the axis of first pipe mirror (1) is 45, the axis of first light filter (15) with the axis collineation of first pipe mirror (1).
4. The tube lens device for detecting a panel according to claim 2, wherein: a second optical filter (18) is arranged in the first tube mirror (1).
5. The tube lens device for detecting a panel according to claim 2, wherein: and third optical filters (14) are arranged in the second tube mirrors (2).
6. The tube lens device for detecting a panel according to claim 2, wherein: and lens groups (9) are arranged in the first tube mirror (1) and the second tube mirror (2).
7. The tube lens device for detecting a panel according to claim 2, wherein: the second beam splitter (7) with be provided with between objective (5) with fourth tube mirror (10) of first tube mirror (1) intercommunication, fourth tube mirror (10) with the juncture of first tube mirror (1) is provided with first beam splitter (11), first branch Shu Jing (11) second beam splitter (7) for first light filter (15) mirror symmetry arranges.
8. The tube mirror device for panel inspection according to claim 7, wherein: be provided with fifth tube mirror (12) rather than the intercommunication on fourth tube mirror (10), the one end of fifth tube mirror (12) is connected with light source, fifth tube mirror (12) with the juncture of fourth tube mirror (10) is provided with third beam splitter (13), the normal line of third branch Shu Jing (13) with the normal line of first branch Shu Jing (11) is parallel to each other.
9. The tube mirror device for panel inspection according to claim 8, wherein: a concave-convex mirror assembly (16) is arranged in the fifth tube mirror (12).
10. The tube mirror device for panel inspection according to claim 8, wherein: a diaphragm (17) is arranged between the illumination light source and the fifth tube mirror (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222387409.6U CN217688641U (en) | 2022-09-08 | 2022-09-08 | Tube mirror device for panel detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222387409.6U CN217688641U (en) | 2022-09-08 | 2022-09-08 | Tube mirror device for panel detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217688641U true CN217688641U (en) | 2022-10-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222387409.6U Active CN217688641U (en) | 2022-09-08 | 2022-09-08 | Tube mirror device for panel detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217688641U (en) |
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2022
- 2022-09-08 CN CN202222387409.6U patent/CN217688641U/en active Active
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