CN217675460U - A device is got to portable clamp for production of microelectronic material - Google Patents
A device is got to portable clamp for production of microelectronic material Download PDFInfo
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- CN217675460U CN217675460U CN202222004534.4U CN202222004534U CN217675460U CN 217675460 U CN217675460 U CN 217675460U CN 202222004534 U CN202222004534 U CN 202222004534U CN 217675460 U CN217675460 U CN 217675460U
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- threaded rod
- clamping
- driving motor
- portable
- fixing
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- 239000000463 material Substances 0.000 title claims abstract description 33
- 238000004377 microelectronic Methods 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 230000006978 adaptation Effects 0.000 claims abstract description 6
- 230000017525 heat dissipation Effects 0.000 claims description 3
- 230000003028 elevating effect Effects 0.000 abstract description 5
- 230000009471 action Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
The utility model relates to a microelectronic material technical field just discloses a device is got to portable clamp for microelectronic material production, get the device including roof, mobile device, elevating gear and clamp, the mobile device is installed inside the roof, and elevating gear installs in the mobile device below, and the clamp is got the device and is installed in the elevating gear bottom. This a device is got to portable clamp for production of microelectronic material sets up the screw hole with second threaded rod looks adaptation through set up a plurality of clamping pieces in bottom plate mounting groove, set up on the clamping piece, and the accessible is installed and is rotated the second threaded rod at the second driving motor of bottom plate lateral wall during the use, drives the removal of clamping piece, because the crisscross opposite setting of external screw thread on the second threaded rod for first clamping piece and second clamping piece can press from both sides when the threaded rod rotates and get or loosen the operation.
Description
Technical Field
The utility model relates to a microelectronic material technical field specifically is a device is got to portable clamp for microelectronic material production.
Background
The microelectronic material mainly includes large diameter (400 mm) silicon single crystal and sheet material technology, large diameter (200 mm) silicon chip epitaxial technology, 150mm GaAs and 100mm I nP chip and their III-V group semiconductor super crystal lattice and quantum well hetero structure material preparation technology, geSi alloy and wide band gap semiconductor material.
In the production of microelectronic material, the device is got to clamp on the existing market mostly single clamping piece, can only get single microelectronic material by the clamp at every turn, leads to low in production efficiency, and the device is got to clamp can only provide the clamp of suggestion and get the lift operation, can not realize horizontal displacement, and is inconvenient in utilization.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
To prior art's not enough among the above-mentioned background art, the utility model aims to provide a device is got to portable clamp for microelectronic material production to some clamps on the existing market that propose in solving above-mentioned background art get the device, exist and mostly are single clamping piece, can only press from both sides at every turn and get single microelectronic material, lead to production efficiency low, and most press from both sides and get the device and can only provide the clamp of suggestion and get lift operation, can not realize horizontal displacement, awkward problem.
(II) technical scheme
In order to achieve the above purpose, the utility model discloses a following technical scheme realizes:
a portable clamping device for microelectronic material production comprises a top plate, a moving device, a lifting device and a clamping device, wherein the moving device is installed inside the top plate, the lifting device is installed below the moving device, and the clamping device is installed at the bottom of the lifting device;
a T-shaped groove is horizontally formed in the top plate, and the bottom of the T-shaped groove penetrates through the bottom wall of the top plate;
the moving device comprises a first fixing device, a first driving motor, a first threaded rod and a T-shaped block matched with the T-shaped groove, the first fixing device is installed at one end of the top plate, the first driving motor is installed inside the first fixing device, the output end of the first driving motor is fixedly provided with the first threaded rod through a coupler, the T-shaped block is provided with a first threaded hole matched with the first threaded rod, and one end, far away from the first driving motor, of the first threaded rod penetrates through the first threaded hole and is rotatably connected with the side wall of the T-shaped groove through a bearing;
the lifting device comprises a hydraulic cylinder and a hydraulic telescopic rod, a connecting plate is fixed at the bottom of the T-shaped block, the hydraulic cylinder is fixed at the bottom of the connecting plate, and the hydraulic telescopic rod is installed at the output end of the bottom of the hydraulic cylinder;
the clamping device comprises a bottom plate, a second fixing device, a second driving motor, a second threaded rod and a plurality of clamping pieces, wherein the bottom of the bottom plate is provided with a mounting groove, the side wall of the bottom plate is provided with the second fixing device, the second driving motor is mounted inside the second fixing device, the output end of the second driving motor is fixedly provided with the second threaded rod through a coupler, and one end, far away from the second driving motor, of the second threaded rod penetrates through the mounting groove and is rotatably connected with the side wall of the mounting groove through a bearing;
the second threaded rod is provided with a plurality of first external threads and a plurality of second external threads in a staggered manner, the first external threads are opposite to the second external threads in direction, the clamping pieces comprise a plurality of first clamping pieces and a plurality of second clamping pieces, the first threaded holes matched with the first external threads are formed in the tops of the side walls of the first clamping pieces, the second threaded holes matched with the second external threads are formed in the tops of the side walls of the second clamping pieces, and the first clamping pieces and the second external threads are connected on the second threaded rod in a staggered manner.
Preferably, first fixing device includes casing and extension board, and the extension board is equipped with two, and two extension board symmetric welding all have seted up a plurality of first fixed screw holes in the both sides of casing one end on two extension boards, and the motor fixed slot has been seted up to casing one side wall, and a plurality of radiating grooves have all been seted up to casing symmetry both sides wall.
Preferably, the second fixing device has the same structure as the first fixing device, and the plurality of heat dissipation grooves are communicated with the motor fixing groove.
Preferably, mounting groove internal fixation has two guide bars that all parallel with the second threaded rod, and the both ends of two guide bars are fixed mutually with the both sides wall of mounting groove respectively, all set up on a plurality of clamps with the guiding hole of guide bar looks adaptation, clamping piece and guide bar sliding connection.
Furthermore, rubber pads are bonded on the side walls of the clamping pieces.
Furthermore, a plurality of clamping pieces are all installed inside the installation groove.
Furthermore, a plurality of second fixing threaded holes are formed in the top of the top plate.
(III) advantageous effects
Compared with the prior art, the beneficial effects of the utility model are that: this a device is got to portable clamp for production of microelectronic material:
(1) Through set up a plurality of clamping pieces in bottom plate mounting groove, set up the screw hole with second threaded rod looks adaptation on the clamping piece, the accessible is installed at the second driving motor rotation second threaded rod of bottom plate lateral wall during the use, drive the removal of clamping piece, because the crisscross opposite setting of external screw thread on the second threaded rod, make first clamping piece and second clamping piece can go on pressing from both sides when the threaded rod rotates and get or loosen the operation, through add the roof at the elevating gear top, set up the mobile device inside the roof, can realize elevating gear and press from both sides the horizontal migration operation of getting the device, and the use is convenient.
(2) The rubber pad is bonded on the side wall of the clamping piece, so that the clamping piece is prevented from damaging the microelectronic material due to overlarge clamping force; the top of the top plate is provided with a plurality of second fixing threaded holes, so that the top plate can be conveniently dismounted; through set up first fixing device and second fixing device respectively in first driving motor and second driving motor outside, when playing fixing device to driving motor, the dismouting of the first fixed screw hole on the extension board made things convenient for fixing device.
Drawings
Fig. 1 is a schematic structural view of a main body of the portable clamping device for microelectronic material production of the present invention;
fig. 2 is a schematic view of the portable clamping device for microelectronic material production according to the present invention in partial cross-section;
fig. 3 is a schematic front sectional view of the portable clamping device for microelectronic material production according to the present invention;
fig. 4 is a schematic structural view of the portable clamping device for microelectronic material production according to the present invention;
fig. 5 is a schematic structural view of the first fixing device of the portable clamping device for microelectronic material production according to the present invention.
In the figure: the hydraulic support comprises a top plate 1,T-shaped groove 2,T-shaped block 3, a first threaded hole 4, a first threaded rod 5, a first fixing device 6, a first driving motor 7, a connecting plate 8, a hydraulic cylinder 9, a hydraulic telescopic rod 10, a bottom plate 11, a second fixing device 12, a second driving motor 13, a mounting groove 14, a plurality of clamping pieces 15, a first clamping piece 1501, a second clamping piece 1502, a second threaded rod 16, a first external thread 17, a second external thread 18, a guide rod 19, a rubber pad 20, an extension plate 21, a first fixing threaded hole 22, a motor fixing groove 23, a heat dissipation groove 24, a second fixing threaded hole 25 and a shell 26.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-5, the present invention provides a portable clamping device for microelectronic material production; the clamping device comprises a top plate 1, a moving device, a lifting device and a clamping device, wherein the moving device is installed inside the top plate 1, the lifting device is installed below the moving device, and the clamping device is installed at the bottom of the lifting device;
a T-shaped groove 2,T is horizontally arranged in the top plate 1, and the bottom of the groove 2 penetrates through the bottom wall of the top plate 1;
the moving device comprises a first fixing device 6, a first driving motor 7, a first threaded rod 5 and a T-shaped block 3 matched with the T-shaped groove 2, the first fixing device 6 is installed at one end of the top plate 1, the first driving motor 7 is installed inside the first fixing device 6, a first threaded hole 4 matched with the first threaded rod 5 is formed in the first threaded rod 5,T fixed to the output end of the first driving motor 7 through a coupler, and one end, far away from the first driving motor 7, of the first threaded rod 5 penetrates through the first threaded hole 4 and is rotatably connected with the side wall of the T-shaped groove 2 through a bearing;
the lifting device comprises a hydraulic cylinder 9 and a hydraulic telescopic rod 10, a connecting plate 8 is fixed at the bottom of the T-shaped block 3, the hydraulic cylinder 9 is fixed at the bottom of the connecting plate 8, and the hydraulic telescopic rod 10 is installed at the output end of the bottom of the hydraulic cylinder 9;
the clamping device comprises a bottom plate 11, a second fixing device 12, a second driving motor 13, a second threaded rod 16 and a plurality of clamping pieces 15, wherein the bottom of the bottom plate 11 is provided with a mounting groove 14, the side wall of the bottom plate 11 is provided with the second fixing device 12, the second driving motor 13 is mounted inside the second fixing device 12, the output end of the second driving motor 13 is fixed with the second threaded rod 16 through a coupler, and one end, far away from the second driving motor 13, of the second threaded rod 16 penetrates through the mounting groove 14 and is rotatably connected with the side wall of the mounting groove 14 through a bearing;
a plurality of first external threads 17 and a plurality of second external threads 18 are arranged on the second threaded rod 16 in a staggered mode, the thread directions of the first external threads 17 are opposite to those of the second external threads 18, the clamping pieces 15 comprise a plurality of first clamping pieces 1501 and a plurality of second clamping pieces 1502, first threaded holes matched with the first external threads 17 are formed in the tops of the side walls of the first clamping pieces 1501, second threaded holes matched with the second external threads 18 are formed in the tops of the side walls of the second clamping pieces 1502, and the first clamping pieces 1501 and the second external threads 18 are connected to the second threaded rod 16 in a staggered mode;
as an optimal technical solution of the utility model: the first fixing device 6 comprises a shell 26 and two extending plates 21, the two extending plates 21 are symmetrically welded on two sides of one end of the shell 26, a plurality of first fixing threaded holes 22 are formed in the two extending plates 21, a motor fixing groove 23 is formed in one side wall of the shell 26, and a plurality of radiating grooves 24 are formed in two symmetrical side walls of the shell 26;
as an optimal technical solution of the utility model: the second fixing device 12 has the same structure as the first fixing device 6, and a plurality of radiating grooves 24 are communicated with the motor fixing groove 23;
as an optimal technical solution of the utility model: two guide rods 19 which are parallel to the second threaded rod 16 are fixed inside the mounting groove 14, two ends of the two guide rods 19 are respectively fixed with two side walls of the mounting groove 14, a plurality of clamping pieces 15 are respectively provided with a guide hole matched with the guide rods 19, and the clamping pieces 15 are connected with the guide rods 19 in a sliding manner;
as an optimal technical solution of the utility model: rubber pads 20 are bonded on the side walls of the clamping pieces 15;
as an optimal technical solution of the utility model: a plurality of clips 15 are installed inside the installation groove 14;
as an optimal technical solution of the utility model: the top of the top plate 1 is provided with a plurality of second fixing threaded holes 25.
The working principle of the embodiment is as follows: when the portable clamping device for microelectronic material production is used, as shown in fig. 1 and fig. 2-5, the whole device consists of a top plate 1, a moving device, a lifting device and a clamping device, when the portable clamping device is used, a hydraulic telescopic rod 10 is driven by a hydraulic cylinder 9 to stretch and retract, a bottom plate 11 of the clamping device is lifted to a proper position, then a second driving motor 13 rotates, the second driving motor 13 drives a second threaded rod 16 to rotate, as a first external thread 17 and a second external thread 18 with opposite thread directions are formed on the second threaded rod 16, and a first clamping piece 1501 and a second clamping piece 1502 which are matched with the first external thread 18 are matched with the second external thread, the first clamping piece 1501 and the second clamping piece 1502 move oppositely at the same time, so that the purpose of clamping a microelectronic material is achieved, after clamping, the first driving motor 7 rotates to drive the first threaded rod 5 to rotate, and a first threaded hole 4 which is matched with the first threaded rod 5 and is formed in a T-shaped block 3, so that the T-shaped block 3 moves horizontally in a T-shaped groove 2;
the above is the working process of the whole device, and the content not described in detail in this specification is the prior art well known to those skilled in the art.
Although the present invention has been described in detail with reference to the foregoing embodiments, it should be noted that, in the present invention, unless otherwise explicitly specified or limited, the terms "set", "mounted", "connected", "fixed", and the like are to be interpreted broadly, and may be, for example, either fixedly connected or detachably connected; or indirectly through an intermediary.
The electrical components presented in the document are all electrically connected with an external master controller and 220V mains, and the master controller can be a conventional known device controlled by a computer or the like.
In the description of the present invention, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. As used herein, "plurality" means two or more unless specifically limited otherwise.
The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art; it will be appreciated by those skilled in the art that modifications may be made to the above-described embodiments, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and the like which fall within the spirit and scope of the present invention may be resorted to.
Claims (7)
1. A portable clamping device for microelectronic material production comprises a top plate (1), a moving device, a lifting device and a clamping device, and is characterized in that the moving device is installed inside the top plate (1), the lifting device is installed below the moving device, and the clamping device is installed at the bottom of the lifting device;
a T-shaped groove (2) is horizontally formed in the top plate (1), and the bottom of the T-shaped groove (2) penetrates through the bottom wall of the top plate (1);
the moving device comprises a first fixing device (6), a first driving motor (7), a first threaded rod (5) and a T-shaped block (3) matched with the T-shaped groove (2), the first fixing device (6) is installed at one end of the top plate (1), the first driving motor (7) is installed inside the first fixing device (6), the first threaded rod (5) is fixed at the output end of the first driving motor (7) through a coupler, a first threaded hole (4) matched with the first threaded rod (5) is formed in the T-shaped block (3), one end, far away from the first driving motor (7), of the first threaded rod (5) penetrates through the first threaded hole (4) and is rotatably connected with the side wall of the T-shaped groove (2) through a bearing;
the lifting device comprises a hydraulic cylinder (9) and a hydraulic telescopic rod (10), a connecting plate (8) is fixed at the bottom of the T-shaped block (3), the hydraulic cylinder (9) is fixed at the bottom of the connecting plate (8), and the hydraulic telescopic rod (10) is installed at the output end of the bottom of the hydraulic cylinder (9);
the clamping device comprises a bottom plate (11), a second fixing device (12), a second driving motor (13), a second threaded rod (16) and a plurality of clamping pieces (15), a mounting groove (14) is formed in the bottom of the bottom plate (11), the second fixing device (12) is mounted on the side wall of the bottom plate (11), the second driving motor (13) is mounted inside the second fixing device (12), the second threaded rod (16) is fixed to the output end of the second driving motor (13) through a coupler, and one end, far away from the second driving motor (13), of the second threaded rod (16) penetrates through the mounting groove (14) and is rotatably connected with the side wall of the mounting groove (14) through a bearing;
second threaded rod (16) are gone up and are staggered and be equipped with a plurality of first external screw threads (17) and a plurality of second external screw thread (18), a plurality of first external screw threads (17) all are opposite with a plurality of second external screw thread (18) screw thread direction, a plurality of clamping pieces (15) include a plurality of first clamping pieces (1501) and a plurality of second clamping piece (1502), a plurality of first clamping pieces (1501) lateral wall top all offer with the first screw hole of first external screw thread (17) looks adaptation, a plurality of second clamping pieces (1502) lateral wall top all offer with the second screw hole of second external screw thread (18) looks adaptation, a plurality of first clamping pieces (1501) and second external screw thread (18) crisscross threaded connection are on second threaded rod (16).
2. The portable clamping device for microelectronic material production as claimed in claim 1, wherein the first fixing device (6) includes a housing (26) and two extension plates (21), two extension plates (21) are provided, and the two extension plates (21) are symmetrically welded on two sides of one end of the housing (26), a plurality of first fixing threaded holes (22) are formed on each of the two extension plates (21), a motor fixing groove (23) is formed on one side wall of the housing (26), and a plurality of heat dissipation grooves (24) are formed on two symmetrical side walls of the housing (26).
3. The portable gripper for microelectronic material production as claimed in claim 2, characterized in that the second fixture (12) is identical in structure to the first fixture (6) and the plurality of heat sinks (24) are connected to the motor fixing groove (23).
4. The portable gripper device for the production of microelectronic materials according to claim 1, characterized in that two guide rods (19), both parallel to the second threaded rod (16), are fixed inside the mounting groove (14); the both ends of two guide bars (19) are fixed with the both sides wall of mounting groove (14) respectively mutually, all set up the guiding hole with guide bar (19) looks adaptation on a plurality of clamping pieces (15), clamping piece (15) and guide bar (19) sliding connection.
5. The portable gripper device for microelectronic material production as claimed in claim 1, wherein the rubber pads (20) are bonded to the sidewalls of the jaws (15).
6. The portable gripper device for the production of microelectronic materials according to claim 1, characterized in that a plurality of jaws (15) are mounted inside the mounting groove (14).
7. The portable clamping device for microelectronic material production as claimed in claim 1, wherein the top plate (1) defines a plurality of second fixing threaded holes (25) at the top thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222004534.4U CN217675460U (en) | 2022-08-01 | 2022-08-01 | A device is got to portable clamp for production of microelectronic material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222004534.4U CN217675460U (en) | 2022-08-01 | 2022-08-01 | A device is got to portable clamp for production of microelectronic material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217675460U true CN217675460U (en) | 2022-10-28 |
Family
ID=83720321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222004534.4U Active CN217675460U (en) | 2022-08-01 | 2022-08-01 | A device is got to portable clamp for production of microelectronic material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217675460U (en) |
-
2022
- 2022-08-01 CN CN202222004534.4U patent/CN217675460U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240222 Address after: Room 8203-290, building 5, Jiangcheng R & D Park, No. 1088, Jiangcheng Road, suxitong science and Technology Industrial Park, Nantong City, Jiangsu Province, 226000 (ZS) Patentee after: Spock Electronics (Nantong) Co.,Ltd. Country or region after: China Address before: Building 1, No. 21, Sanya Road, Yushan High-tech Industrial Park, Changshu City, Suzhou City, Jiangsu Province, 215500 Patentee before: Spark Electronics (Suzhou) Co.,Ltd. Country or region before: China |
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| TR01 | Transfer of patent right |