CN217647111U - Air draft structure of cleaning equipment - Google Patents

Air draft structure of cleaning equipment Download PDF

Info

Publication number
CN217647111U
CN217647111U CN202221898501.2U CN202221898501U CN217647111U CN 217647111 U CN217647111 U CN 217647111U CN 202221898501 U CN202221898501 U CN 202221898501U CN 217647111 U CN217647111 U CN 217647111U
Authority
CN
China
Prior art keywords
air draft
cleaning
side plate
channel
cleaning tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202221898501.2U
Other languages
Chinese (zh)
Inventor
任海洋
裴文龙
龚庆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Qiweixing Equipment Technology Co ltd
Original Assignee
Jiangsu Qiweixing Equipment Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Qiweixing Equipment Technology Co ltd filed Critical Jiangsu Qiweixing Equipment Technology Co ltd
Priority to CN202221898501.2U priority Critical patent/CN217647111U/en
Application granted granted Critical
Publication of CN217647111U publication Critical patent/CN217647111U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Abstract

The application discloses cleaning equipment's convulsions structure belongs to photovoltaic and equips technical field. An air draft structure of cleaning equipment comprises a machine table and a cleaning tank, wherein the machine table is provided with an accommodating cavity, the cleaning tank is arranged in the accommodating cavity, and the cleaning tank is provided with a first accommodating space for accommodating cleaning liquid; the air draft structure comprises a first air draft channel and a second air draft channel, the first air draft channel is communicated with the containing cavity, the second air draft channel is communicated with the first containing space, and the inlet position of the second air draft channel is higher than the liquid level of the cleaning liquid contained in the cleaning tank. This application can in time extract the harmful gas in the cleaning machine inslot effectively, can solve the problem that current convulsions mode is difficult to reach the convulsions effect of ideal.

Description

Air draft structure of cleaning equipment
Technical Field
This application belongs to photovoltaic and equips technical field, concretely relates to cleaning equipment's convulsions structure.
Background
Photovoltaic cleaning equipment contains a plurality of cell bodies, there is a large amount of acid liquid medicine in the different cell bodies, alkaline liquid medicine, or the temperature reaches 85 ℃ hot liquid medicine groove, thus, can lead to inside a large amount of acid gas of formation of photovoltaic cleaning equipment's board, alkali gas, hot steam, hydrogen (combustible gas), gas mixture such as oxygen (combustion-supporting gas), long this past, can be to the manipulator in the equipment, other metal parts such as guide rail lead to the fact the corruption, and high concentration oxygen still can accelerated corrosion speed, a large amount of hydrogen gathering meets static and can burn and cause the conflagration, in addition, this part gas mixture leaks the board outside, still can cause harmful effects to staff and other relevant facilities near the board, can cause great harm to human body and environment. In order to carry out the suction to mist, some photovoltaic cleaning equipment's board is inside all to be equipped with exhaust system.
Some photovoltaic cleaning equipment adopt the mode of convulsions on the groove basically at present, and the convulsions mode on the groove is that each inslot acid gas, hot steam, hydrogen and other gas mixtures leak the board everywhere from the capping and carry out convulsions again. Therefore, the overall air draft mode on the existing groove can lead to overlarge air draft space volume, is difficult to timely draw away harmful gas and achieve ideal air draft effect.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned problems, the present application aims to solve at least one of the technical problems in the related art to some extent. The purpose of this application embodiment is to provide a cleaning equipment's convulsions structure, can in time extract the harmful gas in the cleaning machine inslot effectively, can solve the problem that current convulsions mode is difficult to reach the convulsions effect of ideal.
In order to solve the technical problem, the present application is implemented as follows:
the embodiment of the application provides an air draft structure of cleaning equipment, the cleaning equipment comprises a machine table and a cleaning tank, the machine table is provided with an accommodating cavity, the cleaning tank is arranged in the accommodating cavity, and the cleaning tank is provided with a first accommodating space for accommodating cleaning liquid;
the air draft structure comprises a first air draft channel and a second air draft channel, the first air draft channel is communicated with the containing cavity, the second air draft channel is communicated with the first containing space, and the inlet position of the second air draft channel is higher than the liquid level of the cleaning liquid contained in the cleaning tank.
In some embodiments, the machine comprises a first side plate and a second side plate; the first side plate is positioned on one side of the accommodating cavity, the second side plate is arranged on one side of the first side plate, which is far away from the cleaning tank, and the first side plate and the second side plate are mutually spaced and enclose into the first air draft channel; the ventilation hole has been seted up to first curb plate, the ventilation hole intercommunication hold the cavity with first convulsions passageway.
In some embodiments, an openable and closable cover is provided at the vent, and the cover is slidably connected to the first side plate.
In some embodiments, a surrounding plate assembly is arranged around the cleaning tank, a second accommodating space is formed between the surrounding plate assembly and the cleaning tank, and the first air draft channel is communicated with the second accommodating space.
In some of these embodiments, the enclosure assembly comprises a third side panel and a bottom panel; the third side plate surrounds the side portion of the cleaning tank, the bottom plate surrounds the bottom of the cleaning tank, and the third side plate, the bottom plate, the side wall of the cleaning tank and the bottom wall of the cleaning tank jointly surround the second accommodating space.
In some embodiments, an openable and closable tank cover is disposed at the tank opening of the cleaning tank, and a gap is formed between the tank cover and the tank opening, and the gap communicates with the second accommodating space.
In some embodiments, a side of the first side plate facing the cleaning tank is provided with a concave part, and the concave part of the concave part faces the first side plate, so that the second air draft channel is enclosed between the concave part and the first side plate; the area of the cleaning groove, which is close to the top, is provided with a vent, and the vent is communicated with the second air draft channel.
In some of them embodiments, the top surface of washing tank just is located vent department is equipped with the adapter sleeve, the concave part connect in deviating from of adapter sleeve the one end of vent, just the adapter sleeve intercommunication the vent with second convulsions passageway.
In some embodiments, the cleaning apparatus comprises a plurality of the cleaning tanks, the plurality of the cleaning tanks are arranged at intervals in the accommodating cavity; the air draft structure comprises a plurality of second air draft channels, a plurality of the second air draft channels are in one-to-one correspondence with the plurality of the cleaning grooves, and the first containing spaces are respectively communicated.
In some of these embodiments, the first and second extraction channels are each configured to connect to an extraction device; or the first air draft channel is communicated with the second air draft channel, and at least one of the first air draft channel and the second air draft channel is used for being connected with the air draft device.
Implement the technical scheme of the utility model, following beneficial effect has at least:
in the embodiment of the application, the air draft structure of the cleaning equipment comprises a first air draft channel and a second air draft channel, wherein the first air draft channel is communicated with the accommodating cavity of the machine table, and the second air draft channel is communicated with the first accommodating space of the cleaning groove; from this, can realize carrying out convulsions to board inside through first convulsions passageway, can realize carrying out convulsions to washing tank inside through second convulsions passageway, the omnidirectional exhaust effect has been formed, can make gaseous like sour gas, mixed gas such as hot steam is taken away in that second convulsions passageway is timely, and the part is not taken away sour gas, mixed gas such as hot steam can be taken away once more via first convulsions passageway, thereby can make equipment form good exhaust effect, can improve convulsions efficiency, can prevent effectively that gaseous parts in to the cleaning equipment from causing the corruption, the life of the components and parts of extension equipment, and can prevent effectively that gas leakage from and to the surrounding environment, human etc. from causing harmful effects. The air draft effect of the air draft structure of the cleaning equipment is better, and the cleaning equipment is safer, more reliable and more environment-friendly.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
FIG. 1 is a schematic view of a cleaning apparatus disclosed in an embodiment of the present application from a first perspective;
FIG. 2 is a schematic view of a cleaning apparatus disclosed in an embodiment of the present application from a second perspective;
FIG. 3 is a schematic view of a machine and a plurality of cleaning tanks according to an embodiment of the disclosure;
FIG. 4 is a partial schematic view of FIG. 3 at A;
fig. 5 is a schematic structural view of the cleaning tank disclosed in the embodiment of the present application.
Description of the reference numerals:
100-a machine platform; 110-a receiving cavity; 120-a first side panel; 121-vent; 130-a second side plate; 140-a cover plate; 150-a coaming assembly; 151-a third side plate; 152-a base plate; 160-a female member; 170-connecting sleeve;
200-a cleaning tank; 210-a first accommodation space; 220-a slot cover; 230-a vent;
300-air draft structure; 310-a first air draft channel; 320-second draft channel.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The terms first, second and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that embodiments of the application may be practiced in sequences other than those illustrated or described herein, and that the terms "first," "second," and the like are generally used herein in a generic sense and do not limit the number of terms, e.g., the first term can be one or more than one.
The wearable device provided by the embodiment of the present application is described in detail below with reference to the accompanying drawings through specific embodiments and application scenarios thereof.
Referring to fig. 1 to 5, in some embodiments of the present application, an air draft structure 300 of a cleaning device is provided, which can be applied to an etching and cleaning device for photovoltaic cells, and is used for operations such as etching and cleaning of photovoltaic cells. Besides, the cleaning device may also be applied to other devices, scenes, and working conditions, which is not limited in this embodiment.
As shown in fig. 1 to 5, in some embodiments, the cleaning apparatus includes a machine 100 and at least one cleaning tank 200, wherein the machine 100 is provided with a receiving cavity 110, the cleaning tank 200 is disposed in the receiving cavity 110, and the cleaning tank 200 is provided with a first receiving space 210 for receiving a cleaning solution. The machine 100 can be used for supporting, mounting or accommodating a cleaning tank 200, and the cleaning tank 200 has a first accommodating space 210 for accommodating a cleaning solution therein, so that the cleaning solution can be loaded into the cleaning tank 200 to clean a silicon wafer in the cleaning tank 200.
The cleaning equipment further comprises an air draft structure 300, and the air draft structure 300 can be used for removing corrosive gases or harmful gases such as acid gas and water vapor in the cleaning equipment. Specifically, the air draft structure 300 includes a first air draft channel 310 and a second air draft channel 320, the first air draft channel 310 is communicated with the accommodating cavity 110 of the machine 100, the second air draft channel 320 is communicated with the first accommodating space 210, and an inlet position of the second air draft channel 320 is higher than a liquid level of the cleaning solution accommodated in the cleaning tank 200. The cleaning tank 200 has a first accommodating space 210 therein, and a portion of the first accommodating space 210 can be used for accommodating a cleaning solution, that is, the cleaning tank 200 may not be filled with the cleaning solution, and the upper portion of the cleaning tank 200 has a certain remaining space, for example, the liquid level of the cleaning solution can be located at the middle or middle upper portion of the cleaning tank 200, so that the cleaning operation is facilitated, and the waste of the cleaning solution is reduced. The inlet position through making second convulsions passageway 320 is higher than the liquid level height of the washing liquid that holds in the washing tank 200, can avoid convulsions to form the air current to produce the disturbing action and influence the cleaning performance to the liquid level, can guarantee the cleaning performance when doing benefit to the gas of effective extraction inslot promptly.
Optionally, outlets of the first air draft channel 310 and the second air draft channel 320 are connected to an air draft device, and an internal and external pressure difference inside the cleaning tank 200 or inside the machine table is formed by the air draft device, so that corrosive gases such as acid gas, water vapor and the like in the equipment are drawn away through the first air draft channel 310 and the second air draft channel 320. This embodiment makes the inside of board or the inside of washing tank 200 be in the negative pressure state through convulsions, can effectively take away harmful gas in time like this.
When treating the cleaning member like the silicon chip and carrying out the cleaning operation in certain washing tank 200 of board 100, can produce certain corrosive gas or harmful gas such as sour gas, vapor, this embodiment is through the second convulsions passageway 320 that makes convulsions structure 300 and the first accommodation space 210 intercommunication of washing tank 200, can realize the inslot convulsions, can take away the mist such as sour gas, hot steam that newly produce with the very first time, reduce the mist to the damage such as the corruption, destruction, the pollution of relevant spare part of equipment. Simultaneously, because when carrying out the cleaning operation, washing tank 200 is not totally sealed, at least partial mist can be excessive to the outside of the groove (the cell body is peripheral), if flow in the chamber 110 that holds of board 100, this embodiment is through the chamber 110 intercommunication that holds that makes the first convulsions passageway 310 of convulsions structure 300 and board 100, can realize carrying out convulsions to board 100 inside, can be in order to realize the extra-tank convulsions, can be with following the sour gas that the inslot convulsions were not totally taken away, mist such as hot steam is taken away once more, strengthen the convulsions effect, can reduce sour gas, hot steam is to the relevant spare part in the equipment if the corruption to manipulator and other metalworks.
From this, based on the aforesaid sets up, cleaning device's that this application embodiment provided convulsions structure 300, can realize carrying out convulsions to board 100 inside through first convulsions passageway 310, can realize carrying out convulsions to cleaning tank 200 inside through second convulsions passageway 320, the omnidirectional convulsions effect has been formed, can make gas such as sour gas, mixed gas such as steam is taken away in time through second convulsions passageway 320, and the part is not taken away by sour gas, mixed gas such as steam can be taken away once more via first convulsions passageway 310, thereby can make equipment form good convulsions effect, can improve convulsions efficiency, can prevent effectively that gas from causing the corruption to the spare part in the cleaning device, the life of the components and parts of extension equipment, and can effectively prevent gas leakage and to the surrounding environment, human etc. cause harmful effects. The air draft structure 300 of the cleaning equipment has a better air draft effect, and is safer, more reliable and more environment-friendly.
As shown in fig. 1 to 4, in some embodiments, the machine 100 includes a first side plate 120 and a second side plate 130; the first side plate 120 is located at one side of the accommodating cavity 110, the second side plate 130 is disposed at one side of the first side plate 120 away from the cleaning tank 200, and the first side plate 120 and the second side plate 130 are spaced from each other and enclose a first ventilation channel 310; the first side plate 120 is provided with a vent 121, and the vent 121 communicates with the accommodating cavity 110 and the first ventilation channel 310.
The first side plate 120 and the second side plate 130 are spaced apart from each other, and the first side plate 120 is relatively closer to the cleaning tank 200, the first side plate 120 and the second side plate 130 are spaced apart from each other and enclose a first ventilation channel 310, and the first ventilation channel 310 is communicated with the accommodating cavity 110 inside the machine table 100 through the ventilation hole 121 on the first side plate 120. Thus, when the cleaning operation is performed, the mixed gas, such as sour gas and hot steam, flowing into the accommodating cavity 110 of the machine 100 can enter the first ventilation channel 310 formed by the first side plate 120 and the second side plate 130 through the ventilation hole 121 on the first side plate 120, and then is pumped out to the outside of the device through the first ventilation channel 310. Therefore, mixed gas such as acid gas, hot steam and the like which is not completely pumped out from the air draft in the tank can be pumped out again, the air draft effect is enhanced, and the corrosion of the acid gas and the hot steam to relevant parts in equipment, such as a mechanical arm and other metal pieces, can be reduced.
Optionally, a first side plate 120 and a second side plate 130 which are arranged at intervals are sequentially arranged on one side of the cleaning tank 200, such as the front side or the rear side; alternatively, the first side plate 120 and the second side plate 130 are sequentially disposed at intervals on both sides of the cleaning tank 200, such as the front side and the rear side.
Optionally, a plurality of ventilation holes 121 are provided, and the ventilation holes 121 are disposed at intervals in the middle or middle lower portion of the first side plate 120. Alternatively, the cross-sectional shape of the vent holes 121 may be square, circular, oval, or other regular or irregular shapes, etc. Therefore, the structure is simple, and the processing and manufacturing are convenient.
As shown in fig. 4, in some embodiments, an openable and closable cover plate 140 is disposed at the vent hole 121, and the cover plate 140 is slidably connected to the first side plate 120. Optionally, when a plurality of vent holes 121 are adopted, a removable cover plate 140 is disposed at each vent hole 121. The cover plate 140 is disposed at the vent 121, and the cover plate 140 can be opened or closed, for example, when the cover plate 140 is closed, the accommodating cavity 110 of the machine 100 is not communicated with the first exhaust channel 310, and when the cover plate 140 is opened, the accommodating cavity 110 of the machine 100 is communicated with the first exhaust channel 310. In order to simplify the structure and facilitate the operation, the cover plate 140 may be slidably connected to the first side plate 120, which facilitates the movement of the cover plate 140 and facilitates the opening or closing of the cover plate 140. The cover plate 140 and the first side plate 120 may be connected in a sliding manner, such as a conventional sliding block, a sliding rail fit, and the like, which is not limited in this embodiment.
In this embodiment, the movable cover plate 140 is disposed at the vent 121, so that the vent 121 becomes an adjustable vent, that is, the area of the vent 121 covered by the cover plate 140 is changed by adjusting the position of the cover plate 140, and thus the air outlet area of the vent 121 can be adjusted, and the air suction volume can be adjusted by the movable cover plate 140. In addition, when a plurality of ventilation holes 121 are used, the amount of the suction air can be adjusted by opening a part of the cover plate 140 and closing a part of the cover plate 140.
As shown in FIG. 4, in some embodiments, a baffle assembly 150 is disposed around the sink 200, a second receiving space is defined between the baffle assembly 150 and the sink 200, and the first exhaust duct 310 is communicated with the second receiving space. Alternatively, the apron assembly 150 may be provided at the bottom and outside of the wash tank 200, and the wash tank may be wrapped or surrounded from the bottom and outside of the wash tank 200 using the apron assembly 150.
In order to avoid diffusing the mixed gas such as the acid gas, the hot steam that overflow in the washing tank 200 to the inside everywhere of board 100, conveniently concentrate the extraction mixed gas, set up bounding wall subassembly 150 around the washing tank 200, this bounding wall subassembly 150 sets up with washing tank 200 interval, make and to enclose between the outside of washing tank 200 and the bounding wall subassembly 150 and establish formation second accommodation space, thereby can make the mixed gas such as the acid gas, hot steam that overflow in the washing tank 200 concentrate on this second accommodation space, and make this second accommodation space and first convulsions passageway 310 intercommunication.
As shown in fig. 4, in some embodiments, the enclosure assembly 150 includes a third side panel 151 and a bottom panel 152; the third panel 151 surrounds the side portion of the cleaning tank 200, a gap may be provided between the third panel 151 and the side wall of the cleaning tank 200, the bottom panel 152 surrounds the bottom portion of the cleaning tank 200, a gap may be provided between the bottom panel 152 and the bottom wall of the cleaning tank 200, and a second accommodating space is defined by the third panel 151, the bottom panel 152, the side wall of the cleaning tank 200 and the bottom wall of the cleaning tank 200. The second receiving space is communicated with the first suction channel 310 through the ventilation holes 121 of the first side plate 120.
Therefore, when cleaning operation is performed, because the cleaning tank 200 is not completely sealed, at least part of mixed gas can overflow to the outside of the tank (the periphery of the tank body), the third side plate 151 is arranged in the embodiment through the matching of the bottom plate 152 and the like, the overflow mixed gas can be concentrated in the second accommodating space formed by the third side plate 151, the bottom plate 152, the side wall of the cleaning tank 200 and the bottom wall of the cleaning tank 200, the second accommodating space is communicated with the first ventilation channel 310 through the ventilation hole 121 of the first side plate 120, the first ventilation channel 310 is connected with the ventilation device, negative pressure is formed in the second accommodating space, the mixed gas can enter the first ventilation channel 310 through the ventilation hole 121, and then the mixed gas is pumped away by the ventilation device. Therefore, the out-of-tank air draft is realized, the mixed gas such as acid gas and hot steam which is not completely drawn away from the in-tank air draft can be drawn away again, the air draft effect is enhanced, and the corrosion of the acid gas and the hot steam to relevant parts in equipment, such as a manipulator and other metal parts, can be reduced.
As shown in fig. 5, in some embodiments, an openable and closable slot cover 220 is disposed at the slot opening of the wash slot 200, and a gap is formed between the slot cover 220 and the slot opening, and the gap is communicated with the second receiving space. The top end of the cleaning tank 200 is provided with a notch (opening), a notch cover 220 is covered at the notch of the cleaning tank 200, the notch cover 220 can be opened or closed, when the notch cover 220 is covered on the notch, a smaller gap is left between the notch cover 220 and the notch, and the gap is communicated with the second accommodating space.
Like this, establish the notch department at washing tank 200 through the lid that makes the slot lid 220 non-leakproofness, the gaseous mixture of inslot can be through the excessive second accommodation space to the cell body bottom in this clearance, again via the ventilation hole 121 entering first convulsions passageway 310 of first curb plate 120, then is taken away by updraft ventilator.
In other embodiments, the mixed gas in the tank may be overflowed in other manners, such as providing an opening at a partial position of the tank cover 220, which is not limited in this embodiment.
As shown in fig. 4, in some embodiments, the side of the first side plate 120 facing the sink 200 is provided with a concave member 160, and the concave member 160 is recessed toward the first side plate 120, so that a second draft channel 320 is defined between the concave member 160 and the first side plate 120; the area of the wash tank 200 adjacent to the top is provided with a vent 230, the vent 230 is communicated with the first receiving space 210 inside the wash tank 200, and the vent 230 is communicated with the second exhausting passage 320.
Optionally, the cross-section of the concave member 160 is U-shaped or U-like. This concave member 160 adopts the plate structure of U type or type U, can make its inside convulsions passageway that forms, simple structure, easy implementation helps gaseous fluid.
Optionally, the number of the concave pieces 160 is multiple, multiple concave pieces 160 are arranged at intervals on the first side plate 120, and the concave pieces 160 are located between two adjacent vent holes 121. Optionally, the concave member 160 is detachably connected to the first side plate 120, for example, the concave member 160 may be connected to a side of the first side plate 120 by a screw or a snap.
In this way, by providing the ventilation opening 230 in the area adjacent to the top of the sink 200, the ventilation opening 230 is communicated with the first receiving space 210 inside the sink 200, and the ventilation opening 230 is communicated with the second air draft channel 320 formed by the enclosure between the concave member 160 and the first side plate 120, so that the mixed air in the first receiving space 210 in the sink can enter the second air draft channel 320 through the ventilation opening 230, and then be drawn away by the air draft device connected to the second air draft channel 320. From this, realized the inslot convulsions, can take away the mist such as sour gas, hot steam that newly produce the very first time, also mixed gas such as sour gas and steam can be in time taken away, can reduce the damage such as the corruption, destruction, the pollution of mixed gas to relevant spare part of equipment.
As shown in FIG. 4, in some embodiments, a connection sleeve 170 is provided on the top surface of the sink 200 at the vent 230, the concave member 160 is connected to an end of the connection sleeve 170 away from the vent 230, and the connection sleeve 170 connects the vent 230 and the second pumping channel 320. The connection sleeve 170 may have an upper end and a lower end, the lower end of the connection sleeve 170 being connected to the vent 230, and the upper end of the connection sleeve 170 being connected to the concave member 160. The connection sleeve 170 may be fitted with the female member 160 at an upper end and with the vent 230 at a lower end.
In order to facilitate the connection of the concave member 160 to the ventilation opening 230, a connection sleeve 170 having an upper end fitted to the concave member 160 is provided at the ventilation opening 230, and the concave member 160 is connected to the ventilation opening 230 by the connection sleeve 170 while the ventilation opening 230 is communicated with the second draft passage 320. Therefore, the concave part 160 is convenient to mount and dismount, and the connection is reliable.
As shown in fig. 3, in some embodiments, the cleaning apparatus includes a plurality of cleaning tanks 200, the plurality of cleaning tanks 200 are arranged at intervals in the accommodating chamber 110; the ventilation structure 300 includes a plurality of second ventilation channels 320, and the second ventilation channels 320 are respectively communicated with the respective first accommodating spaces 210 of the washing tubs 200 in a one-to-one correspondence. That is, a plurality of the concaves 160 are provided, and a plurality of the second pumping passages 320 defined between the concaves 160 and the first side plate 120 are respectively communicated with the first receiving spaces 210 of the plurality of the washing tubs 200 in a one-to-one correspondence.
In some embodiments, both the first and second drafts channels 310, 320 are used to connect with drafts; alternatively, the first exhaust channel 310 is in communication with the second exhaust channel 320, and at least one of the two is adapted to be connected to an exhaust. Optionally, the air extraction means comprises one or more air extraction fans. The number and the specific type of the exhaust fans are not limited in the embodiment.
Optionally, a mechanical arm or a silicon wafer conveying device and other structures may be further disposed inside the machine platform of the cleaning apparatus, wherein the mechanical arm may be disposed above the cleaning tank 200. Optionally, the inner shell of the cleaning tank 200 is provided with a basket, and the basket can be used for bearing silicon wafers. It should be understood that the structure or connection arrangement of the rest of the structures in the cleaning device, such as the manipulator, the flower basket, etc., is not limited in this application, and reference may be made to the prior art, and the structure and connection method commonly used in the prior art may be adopted, as long as the purpose of the present application is not limited, and will not be described in detail herein.
In some specific embodiments, the air draft structure 300 of the cleaning apparatus provided in this embodiment may be applied to the field of cleaning operation of silicon wafers, for example, when a silicon wafer is cleaned in a certain cleaning tank 200 of the cleaning apparatus, the tank cover 220 is in a closed state, so as to reduce corrosive gases such as acid gas and hot steam from entering the internal space of the machine 100; a first receiving space 210 can be formed between the interior of the cleaning tank 200 and the tank cover 220, a portion of the first receiving space 210 can be used for receiving the cleaning solution, and a remaining portion of the first receiving space 210 can collect a certain amount of corrosive gas, that is, a certain amount of corrosive gas can collect between the tank cover 220 and the liquid level of the cleaning solution in the cleaning tank 200; meanwhile, the non-sealing cover of the tub cover 220 is disposed at the opening of the washing tub 200, for example, a gap is formed between the tub cover 220 and the opening, and the corrosive gas in the tub can overflow to the periphery of the tub body through the gap, for example, overflow to the second receiving space defined between the surrounding plate assembly 150 and the washing tub 200.
The third side plate 151 and the bottom plate 152 are adopted to wrap the cleaning tank 200 from the bottom and the outer side of the tank body, so that a second accommodating space is defined by the third side plate 151, the bottom plate 152, the side wall of the cleaning tank 200 and the bottom wall of the cleaning tank 200; meanwhile, the first side plate 120 is disposed on two sides of the cleaning tank 200, such that a substantially closed machine interior space is formed inside the machine 100, the second side plate 130 is disposed outside the first side plate 120 on one side of the machine, the first side plate 120 and the second side plate 130 are spaced from each other and enclose a first air draft channel 310, and the first air draft channel 310 is communicated with the second accommodating space. Meanwhile, a plurality of adjustable ventilation holes 121 are formed in the first side plate 120, the first ventilation channel 310 is communicated with the second accommodating space through the adjustable ventilation holes 121, an openable and closable and movable cover plate 140 is arranged at the ventilation holes 121, the cover plate 140 is connected to the first side plate 120 in a sliding mode, the size of the adjustable ventilation holes 121 is adjusted by enabling the cover plate 140 to move up and down, and therefore ventilation intensity can be adjusted according to actual working conditions. Further, a vent 230 is provided in a region adjacent to the top of the washing tub 200, and for example, the vent 230 is provided in an upper cover plate of the tub body in the same layer as the tub cover 220, and the vent 230 communicates with the first receiving space 210. A connecting sleeve 170 is provided at the vent 230, the concave member 160 is connected to the vent 230 by the connecting sleeve 170, and a second draft channel 320 is enclosed between the concave member 160 and the first side plate 120, and the second draft channel 320 is communicated with the first accommodating space 210 through the vent 230. The first ventilation channel 310 and the second ventilation channel 320 are both connected to the ventilation device of the system, so that negative pressure is formed inside the first ventilation channel 310 and the second ventilation channel 320, and therefore corrosive gases such as acid gas, hot steam and the like in the first accommodating space 210, the second accommodating space and the internal space of the machine table 100 can be pumped away.
From this, this embodiment has formed all-round convulsions effect through above setting, can solve the problem that current convulsions mode is difficult to reach the convulsions effect of ideal, can improve convulsions efficiency and convulsions effect, effectively prevents that the gas in the cleaning equipment from causing the corruption to spare part to can prevent that gas leakage from causing harmful effects to surrounding environment or human body.
Details which are not described in the present specification are known to the person skilled in the art.
In this application, the terms "one embodiment," "some embodiments," "an example," "a specific example" or "some examples" and the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Moreover, various embodiments or examples and features of various embodiments or examples described in this specification can be combined and combined by one skilled in the art without being mutually inconsistent.
While the present embodiments have been described with reference to the accompanying drawings, it is to be understood that the present embodiments are not limited to those precise embodiments, which are intended to be illustrative rather than restrictive, and that various changes and modifications may be effected therein by one skilled in the art without departing from the scope of the appended claims.

Claims (10)

1. The air draft structure of the cleaning equipment is characterized in that the cleaning equipment comprises a machine table and a cleaning tank, wherein the machine table is provided with an accommodating cavity, the cleaning tank is arranged in the accommodating cavity, and the cleaning tank is provided with a first accommodating space for accommodating cleaning liquid;
the air draft structure comprises a first air draft channel and a second air draft channel, the first air draft channel is communicated with the containing cavity, the second air draft channel is communicated with the first containing space, and the inlet position of the second air draft channel is higher than the liquid level of the cleaning liquid contained in the cleaning tank.
2. The air draft structure of the cleaning equipment according to claim 1, wherein the machine platform includes a first side plate and a second side plate;
the first side plate is positioned on one side of the accommodating cavity, the second side plate is arranged on one side of the first side plate, which is far away from the cleaning tank, and the first side plate and the second side plate are mutually spaced and enclose into the first air draft channel;
the ventilation hole has been seted up to first curb plate, the ventilation hole intercommunication hold the cavity with first convulsions passageway.
3. The draft structure of a washing apparatus, according to claim 2, wherein a cover plate is provided at the ventilation hole, and the cover plate is slidably connected to the first side plate.
4. The air draft structure of the cleaning equipment according to claim 1, wherein a surrounding plate assembly is arranged around the cleaning tank, a second accommodating space is formed between the surrounding plate assembly and the cleaning tank, and the first air draft channel is communicated with the second accommodating space.
5. The extraction structure for cleaning equipment according to claim 4, wherein the shroud assembly includes a third side panel and a bottom panel;
the third side plate surrounds the side portion of the cleaning tank, the bottom plate surrounds the bottom of the cleaning tank, and the second accommodating space is defined by the third side plate, the bottom plate, the side wall of the cleaning tank and the bottom wall of the cleaning tank.
6. The air draft structure of the cleaning equipment according to claim 5, wherein a slot cover which can be opened and closed is arranged at the slot opening of the cleaning slot, a gap is formed between the slot cover and the slot opening, and the gap is communicated with the second accommodating space.
7. The air draft structure of the cleaning equipment according to claim 2, wherein a concave part is arranged on one side of the first side plate facing the cleaning tank, and a notch of the concave part faces the first side plate, so that the second air draft channel is enclosed between the concave part and the first side plate;
the area of the cleaning groove, which is close to the top, is provided with a vent, and the vent is communicated with the second air draft channel.
8. The air draft structure of the cleaning equipment according to claim 7, wherein a connecting sleeve is arranged at the position of the vent, the concave part is connected to one end of the connecting sleeve deviating from the vent, and the connecting sleeve is communicated with the vent and the second air draft channel.
9. The air draft structure of the cleaning equipment according to any one of claims 1 to 8, wherein the cleaning equipment comprises a plurality of the cleaning grooves which are arranged at intervals in the accommodating cavity;
the air draft structure comprises a plurality of second air draft channels, a plurality of the second air draft channels are in one-to-one correspondence with the plurality of the cleaning grooves, and the first containing spaces are respectively communicated.
10. The draft structure of the washing device according to any one of claims 1 to 8, wherein the first draft channel and the second draft channel are both used for connecting with a draft device;
or the first air draft channel is communicated with the second air draft channel, and at least one of the first air draft channel and the second air draft channel is used for being connected with the air draft device.
CN202221898501.2U 2022-07-22 2022-07-22 Air draft structure of cleaning equipment Active CN217647111U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221898501.2U CN217647111U (en) 2022-07-22 2022-07-22 Air draft structure of cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221898501.2U CN217647111U (en) 2022-07-22 2022-07-22 Air draft structure of cleaning equipment

Publications (1)

Publication Number Publication Date
CN217647111U true CN217647111U (en) 2022-10-25

Family

ID=83686794

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221898501.2U Active CN217647111U (en) 2022-07-22 2022-07-22 Air draft structure of cleaning equipment

Country Status (1)

Country Link
CN (1) CN217647111U (en)

Similar Documents

Publication Publication Date Title
CN217647111U (en) Air draft structure of cleaning equipment
CN109084937B (en) Water-cooled machine shell detection device
CN215466927U (en) Air supplement type ventilation cabinet
CN216454871U (en) Breathing structure of dish washing machine
CN212253753U (en) Heat energy recycling device
CN220160853U (en) Groove type cleaning equipment exhaust system
CN207605874U (en) A kind of wet electrical dust precipitator anode chamber of the continuous liquid film protection of band
CN209672855U (en) The fume treatment mechanism of the automatic cellar furnace of lithium battery saggar production
CN208738195U (en) A kind of solar energy etching machine bench reconstruction structure
CN217051705U (en) Separator for efficiently and quickly removing ammonia nitrogen components in water
CN220194472U (en) Exhaust treatment device suitable for laboratory
CN208617902U (en) A kind of biotechnology cell culture apparatus
CN217686749U (en) High-efficient heat exchanger with self-cleaning function
CN218424695U (en) Hydrolysis tank does not have closing cap waste gas collection device
CN211328819U (en) Trimethoxy hydrogen-containing silane filling loss tail gas treatment device
CN218610804U (en) Vacuum plasma cleaning machine
CN218821851U (en) Hot gas cooler
CN210522534U (en) Pipeline connection type biological safety cabinet
CN210662882U (en) Catalytic combustion waste gas equipment
CN213570764U (en) Hydrogen and oxygen generating equipment
CN210772642U (en) Energy-saving type centralized air cabinet
CN214036050U (en) Condensed water non-return device for vacuum pipeline
CN218901357U (en) Exhaust gas treatment device
CN219233372U (en) PE-poly graphite boat nitric acid cleaning equipment capable of prolonging service life
CN218292133U (en) Totally enclosed water supply compensator

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant