CN217641272U - Vacuum chuck - Google Patents

Abstract

The utility model discloses a vacuum chuck relates to semiconductor device technical field, vacuum chuck includes: the vacuum suction plate and set up in a plurality of adsorption zones of vacuum suction plate upper surface, it is a plurality of the adsorption zone distributes from inside to outside, and is a plurality of the adsorption zone respectively with set up in a plurality of negative pressure channels of vacuum suction plate link up mutually, it is a plurality of negative pressure channel is connected with corresponding outside evacuating device respectively. The utility model discloses a negative pressure passageway link up adsorption zone and outside evacuating device, realizes the independent adsorption control to single adsorption zone to select one or more adsorption zones to adsorb according to the area size by the adsorption piece, practice thrift adsorption resources.

Description

Vacuum chuck

Technical Field

The utility model relates to a semiconductor equipment technical field especially relates to a vacuum chuck.

Background

In the nanoimprint process, the micro-nano workbench adsorbs and positions the adsorbed piece through the vacuum chuck. When being fixed a position by the absorption piece, if by the area of absorption piece when being less than vacuum chuck's actual adsorption area, will cause vacuum chuck to adsorb the area extravagant, it is adsorbable that the adsorption plane of the peripheral vacuum chuck of absorption piece does not have the adsorbate promptly, consequently causes the wasting of resources very easily.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model aims at providing a vacuum chuck can realize the independent absorption control to each adsorption zone to select one or more adsorption zones to adsorb according to the area size by the absorption piece, practice thrift adsorption resources.

(II) technical scheme

In order to solve the technical problem, the utility model provides a vacuum chuck, include: the vacuum suction plate and set up in a plurality of adsorption zones of vacuum suction plate upper surface, it is a plurality of the adsorption zone distributes from inside to outside, and is a plurality of the adsorption zone respectively with set up in a plurality of negative pressure channels of vacuum suction plate link up mutually, it is a plurality of negative pressure channel is connected with corresponding outside evacuating device respectively.

According to the utility model relates to a preferred embodiment, the vacuum suction plate upper surface is equipped with a plurality of closed wind channels, every a plurality of in the adsorption zone closed wind channel all link up each other.

According to the utility model relates to a preferred embodiment, every adsorption zone is equipped with and corresponds the suction hole that negative pressure passageway link up mutually.

According to the utility model relates to a preferred embodiment, it is a plurality of negative pressure passageway hide set up in between the last face of vacuum suction disc and the lower face.

According to the utility model relates to a preferred embodiment, the suction opening set up in seal in the wind channel, the negative pressure passageway includes: the vertical channel is communicated with the air suction hole, and the horizontal channel radially extends to the side wall of the vacuum suction plate along the closed air channel.

According to the utility model relates to a preferred embodiment, vacuum suction plate below is equipped with the mounting panel, the mounting panel with be equipped with heating member between the vacuum suction plate.

According to the utility model discloses a preferred embodiment, the mounting panel with still be equipped with the heat insulating board between the heating member.

According to the utility model discloses a preferred embodiment, the heat insulating board outwards extends all around the back cladding in around the vacuum suction board.

According to the utility model discloses a preferred embodiment still includes: and the quick connector is arranged on the side wall of the heat insulation plate and communicated with the horizontal channel.

According to the utility model discloses a preferred embodiment still includes: and the measuring pieces are arranged on the periphery of the vacuum suction plate.

(III) advantageous effects

The utility model provides a vacuum chuck, through set up a plurality of adsorption zones that distribute from inside to outside at vacuum suction plate upper surface, a plurality of adsorption zones respectively with set up in a plurality of negative pressure passageways of vacuum suction plate link up mutually, and are a plurality of negative pressure passageway is connected with outside evacuating device respectively, link up adsorption zone and outside evacuating device through negative pressure passageway to form the negative pressure in the adsorption zone, realize the independent absorption control to each adsorption zone, thereby select one or more adsorption zones according to the area size by the absorption piece and adsorb, practice thrift adsorption resources.

Drawings

FIG. 1 is a front view of the vacuum chuck of the present invention;

FIG. 2 is an enlarged view of a portion of FIG. 1 at A;

FIG. 3 is a cross-sectional view of section B-B of FIG. 1;

wherein: 1-mounting plate, 2-heat insulation plate, 3-vacuum suction plate, 31-closed air channel, 32-negative pressure channel, 33-air suction hole, 4-heating element, 5-measuring element and 6-quick connector.

Detailed Description

In describing particular embodiments, specific details of structures, properties, effects, or other features are set forth in order to provide a thorough understanding of the embodiments by one skilled in the art. However, it is not excluded that a person skilled in the art may implement the invention in a specific case in a solution that does not contain the above-described structures, properties, effects or other features.

The block diagrams in the figures generally represent functional entities and do not necessarily correspond to physically separate entities. I.e. these functional entities may be implemented in the form of software, or in one or more hardware modules or integrated circuits, or in different network and/or processing unit devices and/or microcontroller devices.

The same reference numerals denote the same or similar elements, components, or parts throughout the drawings, and thus, a repetitive description thereof may be omitted hereinafter. It will be further understood that, although the terms first, second, third, etc. may be used herein to describe various elements, components, or sections, these elements, components, or sections should not be limited by these terms. That is, these phrases are used only to distinguish one from another. For example, a first device may also be referred to as a second device without departing from the spirit of the present invention. Furthermore, the term "and/or", "and/or" is intended to include all combinations of any one or more of the listed items.

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings.

Fig. 1 is the utility model provides a vacuum chuck, this vacuum chuck can be applied to the location and the heating of base plate in the nanoimprint equipment, can set up different adsorption zones to the size of different base plates to this avoids causing the wasting of resources. Simultaneously, when laying heating member 4, can effectively guarantee heating member 4's integrality to make heating member 4 and vacuum chuck 3 lower bottom surface closely laminate, make vacuum chuck generate heat more evenly then.

As shown in fig. 1 to 3, the vacuum chuck includes: the vacuum suction plate 3 and set up in a plurality of adsorption zones of vacuum suction plate 3 upper surface, it is a plurality of the adsorption zone distributes from inside to outside, and is a plurality of the adsorption zone respectively with set up in a plurality of negative pressure passageway 32 of vacuum suction plate 3 link up mutually, it is a plurality of negative pressure passageway 32 is connected with the outside evacuating device that corresponds respectively.

In one embodiment, the upper surface of the vacuum suction plate 3 is provided with a plurality of closed air ducts 31, a plurality of closed air ducts 31 may be provided in each adsorption area, and the plurality of closed air ducts 31 in each adsorption area are communicated with each other. Wherein: the shape of the closed air duct 31 may be a ring shape as shown in fig. 1, and may also be a closed shape such as a triangle, a square, an irregular shape, etc.; the shapes of the closed air ducts 31 can be the same or different, and only need to be closed; the center of the closed air duct 31 may coincide with the center of the vacuum suction plate 3, or may not coincide; the shape of the vacuum suction plate 3 may be arbitrarily set. For example, in a specific example, as shown in fig. 1, the vacuum suction plate 3 may be set to be square, the closed air duct 31 may be set to be a concentric annular air duct, a center of the annular air duct may overlap with a center of the vacuum suction plate 3, a plurality of annular closed air ducts 31 with sequentially increasing radii are distributed on the upper surface of the vacuum suction plate 3 from the center to the periphery, the plurality of closed air ducts 31 in each adsorption zone are all communicated with each other, and adjacent adsorption zones are independently set, that is, the closed air ducts 31 of adjacent adsorption zones are not communicated with each other. Wherein: each adsorption region may be provided with a suction hole 33 communicating with the corresponding negative pressure channel 32, and communicating with the negative pressure channel 32 through the suction hole 33. In order to make the vacuum chuck more compact, the plurality of negative pressure channels 32 are hidden between the upper plate surface and the lower plate surface of the vacuum suction plate 3.

In a preferred embodiment, as shown in fig. 2 and 3, the suction hole 33 opens in the closed air duct 31, and the negative pressure passage 32 includes: a vertical passage communicated with the suction holes 33 and a horizontal passage radially extending to the side wall of the vacuum suction plate 3 along the closed duct 31.

Further, the horizontal passages of the respective negative pressure passages 32 may be located on the same plane. Because a plurality of negative pressure channels 32 hide and set up between the last face of vacuum suction plate 3 and lower face, and be in the coplanar, consequently can make the lower bottom surface structure of vacuum suction plate 3 comparatively complete, mounting panel 1 with when setting up heating member 4 between the vacuum suction plate 3, can make heating member 4 closely laminate for the lower bottom surface with vacuum suction plate 3, to vacuum suction plate even heating, and effective heating area increases, then can effectively promote vacuum suction plate 3's heating efficiency.

Furthermore, in order to avoid heat loss, a heat insulation plate 2 can be arranged between the mounting plate 1 and the heating element 4 to avoid heat conduction outwards through the mounting plate 1. In order to enable the heat insulation plate 2 to have a better heat insulation effect, the periphery of the heat insulation plate 2 extends outwards and then covers the periphery of the vacuum suction plate 3. In order to prevent heat from being conducted outward through the quick coupling 6, a vertical passage may be connected to a horizontal passage of the negative pressure passage 32, which extends downward to the heat-insulating plate 2 and is communicated with the quick coupling 6 of the side wall of the heat-insulating plate 2. Is connected with an external vacuum-pumping device through a quick connector 6.

Further, in order to be able to more intuitively identify the size of the adsorbed piece placed on the vacuum suction plate 3, the vacuum suction plate 3 can conveniently select the adsorption area with the corresponding size, and the vacuum suction plate 3 can be provided with the measuring piece 5 all around, and the size of the adsorbed piece is measured through the measuring piece 5. Wherein: the measuring member 5 may be a scale.

The utility model provides a vacuum chuck through set up a plurality of adsorption zones that distribute from inside to outside at 3 upper surfaces of vacuum suction plate, a plurality of adsorption zones respectively with set up in a plurality of negative pressure channel 32 of vacuum suction plate 3 link up mutually, and are a plurality of negative pressure channel 32 is connected with outside evacuating device respectively, link up adsorption zone and outside evacuating device through negative pressure channel to form the negative pressure in the adsorption zone, realize the independent adsorption control to each adsorption zone, thereby select corresponding adsorption zone to adsorb according to the area size of being adsorbed, practice thrift resources for adsorption. Furthermore, the utility model discloses can set up between mounting panel and vacuum suction plate and add heat-insulating material 4 and to 3 even heating of vacuum suction plate to further set up heat insulating board 2 between mounting panel 1 and add heat-insulating material 4, prevent that the heat from running off.

The above-described embodiments are further illustrative and it is to be understood that the present invention is not inherently related to any particular computer, virtual device or electronic device, and various general-purpose devices may also be implemented. The above description is only exemplary of the present invention and should not be construed as limiting the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A vacuum chuck, comprising: the vacuum suction plate and set up in a plurality of adsorption zones of vacuum suction plate upper surface, it is a plurality of the adsorption zone distributes from inside to outside, and is a plurality of the adsorption zone respectively with set up in a plurality of negative pressure channels of vacuum suction plate link up mutually, it is a plurality of negative pressure channel is connected with corresponding outside evacuating device respectively.

2. The vacuum chuck as claimed in claim 1, wherein the vacuum chuck has a plurality of closed air channels on the upper surface thereof, and the plurality of closed air channels in each of the suction zones are communicated with each other.

3. The vacuum chuck as claimed in claim 2, wherein each of said suction regions is provided with a suction hole communicating with the corresponding negative pressure passage.

4. The vacuum chuck as claimed in claim 1, wherein the plurality of negative pressure channels are hidden between the upper plate surface and the lower plate surface of the vacuum chuck.

5. The vacuum chuck as claimed in claim 3, wherein said suction hole is opened in said closed air passage, and said negative pressure passage comprises: the vertical channel is communicated with the air suction hole, and the horizontal channel radially extends to the side wall of the vacuum suction plate along the closed air channel.

6. The vacuum chuck as claimed in claim 5, wherein a mounting plate is provided under the vacuum chuck, and a heating member is provided between the mounting plate and the vacuum chuck.

7. The vacuum chuck as claimed in claim 6, wherein a heat insulating plate is further provided between said mounting plate and said heating member.

8. The vacuum chuck as claimed in claim 7, wherein the heat shield extends outwardly around the periphery of the vacuum chuck to cover the periphery of the vacuum chuck.

9. The vacuum chuck as set forth in claim 7, further comprising: and the quick connector is arranged on the side wall of the heat insulation plate and communicated with the horizontal channel.

10. The vacuum chuck as set forth in claim 1, further comprising: and the measuring pieces are arranged on the periphery of the vacuum suction plate.

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