CN217639724U - Dark field microscope - Google Patents
Dark field microscope Download PDFInfo
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- CN217639724U CN217639724U CN202222005730.3U CN202222005730U CN217639724U CN 217639724 U CN217639724 U CN 217639724U CN 202222005730 U CN202222005730 U CN 202222005730U CN 217639724 U CN217639724 U CN 217639724U
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Abstract
The utility model provides a dark field microscope, include: the device comprises a light source, a first collimating lens, a converging super lens, a sample carrying table and a microscope system; the light source is used for emitting an illumination light beam to the first collimating lens; the converging super lens is used for converging the illumination light beam collimated by the first collimating lens into a Bessel light beam; the sample carrying platform is positioned at the convergence position of the Bessel light beam and is used for placing a sample to be detected, and the sample to be detected can emit a diffraction light beam under the action of the Bessel light beam; the microscope system is positioned on the light-emitting side of the sample carrying table for emitting the diffracted light beams and is used for collecting the diffracted light beams and forming an image of a sample to be measured. Through the embodiment of the utility model provides a dark field microscope, the light energy utilization rate is high, and need not extra device and produce annular beam, and overall structure is simple, is favorable to dark field microscope's miniaturization, lightweight development. The converging super lens is simple to prepare, is easy to realize mass production, has the characteristic of lightness and thinness, and can further reduce the volume and weight of the dark field microscope.
Description
Technical Field
The utility model relates to a microscopic imaging technology field particularly, relates to a dark field microscope.
Background
The dark field microscope prevents the illuminating light source from entering the imaging system, so that the background of the visual field observed in the ocular lens is black, and only the edge of the object is bright; the dark field microscope can well retain high frequency information of the sample, and captured pictures have high signal to noise ratio. Compared with a bright field microscope, the dark field microscope can observe more tiny sample outline information, and is widely applied to observation experiments of cells, bacteria and tiny aquatic organisms.
In a traditional dark field microscope, a light blocking sheet with the diameter smaller than that of an illumination spot is arranged at a light source to generate an annular illumination light beam, so that conical illumination is realized. But the method has complex structure and large volume, and simultaneously, the light energy utilization rate is not high, and most of energy is lost.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problem, an object of the embodiments of the present invention is to provide a dark field microscope.
The embodiment of the utility model provides a dark field microscope, include: the device comprises a light source, a first collimating lens, a converging super lens, a sample carrying table and a microscope system;
the light source is used for emitting an illumination light beam;
the first collimating lens is positioned on the light-emitting side of the light source and is used for collimating the illuminating light beam emitted by the light source;
the converging super lens is positioned on the light-emitting side of the first collimating lens and is used for converging the illumination light beams collimated by the first collimating lens into Bessel light beams;
the sample carrying table is positioned at the converging position of the Bessel beam and is used for placing a sample to be tested, and the sample to be tested can emit a diffracted beam under the action of the Bessel beam;
the microscope system is positioned on the light emergent side of the sample carrying platform for emitting the diffracted light beams and is used for collecting the diffracted light beams and forming an image of the sample to be detected.
In one possible implementation, the phase of the nanostructure in the convergent superlens is positively correlated to the radial distance of the nanostructure on the convergent superlens.
In one possible implementation, the phase distribution Φ of the converging superlens B Satisfies the following conditions:
wherein R represents a radial distance of the nano structure on the converging super lens, k represents a wave vector, R represents a maximum aperture of the converging super lens, and f represents a corresponding focal length at the maximum aperture R of the converging super lens.
In a possible implementation manner, the focal length of the first collimating lens is the same as the focal length corresponding to the maximum aperture of the converging super lens.
In one possible implementation, the first collimating lens is a superlens.
In one possible implementation, the first collimating lens is common to the converging superlens;
the nano structures of the first collimating lens are periodically arranged on one side, close to the light source, of the substrate, and the nano structures of the converging super lens are periodically arranged on one side, far away from the light source, of the substrate.
In one possible implementation manner, the sample carrying table is located in an image space focal plane of the converging super lens;
the microscope system is positioned on one side of the sample carrying platform, which is far away from the converging super lens.
In one possible implementation, the dark-field microscope further includes: a diaphragm;
the diaphragm is positioned between the sample loading platform and the microscope system; the diaphragm is coaxial with the Bezier beam and is used for blocking an annular beam formed by the Bezier beam after a focus.
In one possible implementation, the microscopy system comprises: the device comprises a first objective lens, a first ocular and a first detector;
the diffracted light beams sequentially pass through the first objective lens and the first ocular lens and then reach the first detector.
In one possible implementation, the microscopy system comprises: the system comprises a spectroscope, a second objective lens, a second ocular lens and a second detector;
the spectroscope is positioned on one side of the converging super lens far away from the light source, and the distance between the spectroscope and the converging super lens is greater than the focal length of the converging super lens;
the second objective lens and the second eyepiece are respectively positioned at two sides of the spectroscope; the sample carrying table is positioned on one side of the second objective lens, which is far away from the spectroscope, and the second detector is positioned on one side of the second eyepiece lens, which is far away from the spectroscope;
the beam splitter is used for adjusting at least part of an annular light beam formed by the Bessel light beam after the focal point to be directed to the second objective lens;
the second objective is used for converging the annular light beam to the sample carrying table and converging the diffracted light beam emitted by the sample carrying table to the spectroscope;
the spectroscope is also used for adjusting at least part of the diffracted light beam transmitted through the second objective lens to be emitted to the second eyepiece;
the second ocular is used for converging the diffracted light beams emitted by the spectroscope to the second detector.
In one possible implementation, the dark-field microscope further includes: a second collimating lens;
the second collimating lens is positioned between the converging super lens and the spectroscope, and the distance between the second collimating lens and the converging super lens is greater than the focal length of the converging super lens;
the second collimating lens is used for collimating the annular light beam formed by the Bessel light beam after the focal point and emitting the annular light beam to the spectroscope.
In one possible implementation, the second collimating lens is a superlens.
The embodiment of the utility model provides an in the scheme, use and assemble super lens and produce the Bessel light beam, regard the Bessel light beam as the illuminating beam of the sample that awaits measuring to with the sample setting that awaits measuring in the position that assembles of Bessel light beam, utilize the Bessel light beam for the characteristics of ring beam behind the focus, can all convert most illuminating beam that the light source sent into ring beam, realize the toper illumination of hi-lite, and ring beam can also not influence the formation of image. The dark field microscope has high light energy utilization rate, does not need an additional device to generate annular light beams, has a simple overall structure, and is beneficial to the miniaturization and light weight development of the dark field microscope. The converging super lens is simple to prepare, is easy to realize mass production, has the characteristic of lightness and thinness, and can further reduce the volume and weight of the dark field microscope.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 shows a first structural schematic diagram of a dark field microscope provided by an embodiment of the present invention;
FIG. 2 is a schematic diagram of a converging superlens provided by an embodiment of the present invention;
fig. 3 shows a second schematic structural diagram of a dark field microscope provided by an embodiment of the present invention;
fig. 4 shows a third structural schematic diagram of a dark field microscope provided by an embodiment of the present invention;
fig. 5 shows a fourth schematic structural diagram of a dark field microscope provided in an embodiment of the present invention;
fig. 6A shows a light intensity distribution diagram of an annular light beam formed by the converging superlens according to an embodiment of the present invention after the focus;
fig. 6B shows an illuminated spot sequence of the ring-shaped light beam formed by the converging super lens according to the embodiment of the present invention after the focus.
An icon:
10-light source, 20-first collimating lens, 30-converging super lens, 40-sample carrying table, 50-microscope system, 60-diaphragm, 70-second collimating lens, 201-nanostructure of first collimating lens, 301-nanostructure of converging super lens, 21-substrate, 51-first objective lens, 52-first eyepiece, 53-first detector, 54-spectroscope, 55-second objective lens, 56-second eyepiece, 57-second detector, 101-annular beam and 102-diffracted beam.
Detailed Description
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
The embodiment of the utility model provides a dark field microscope, it is shown with reference to fig. 1, this dark field microscope includes: the microscope comprises a light source 10, a first collimating lens 20, a converging super lens 30, a sample loading platform 40 and a microscope system 50. The light source 10 is used for emitting an illumination light beam; the first collimating lens 20 is located at the light emitting side of the light source 10 and is used for collimating the illumination light beam emitted by the light source 10; the converging super lens 30 is located on the light-emitting side of the first collimating lens 20 and is used for converging the illumination light beam collimated by the first collimating lens 20 into a Bessel light beam; the sample carrying table 40 is positioned at the converging position of the Bessel beam and is used for placing a sample to be detected, and the sample to be detected can emit a diffraction beam under the action of the Bessel beam; the microscope system 50 is located at the light-emitting side of the sample-carrying stage 40 for emitting the diffracted light beams, and is used for collecting the diffracted light beams and forming an image of the sample to be measured.
In the embodiment of the present invention, the light source 10 emits a light beam to the first collimating lens 20 located at the light emitting side thereof, and the light beam is referred to as an illumination light beam. The first collimating lens 20 can collimate the light beam emitted from the light source 10, for example, adjust the light beam emitted from the light source 10 into parallel light, so that the converging super lens 30 at the light emitting side of the first collimating lens 20 can better converge to form a bessel light beam.
The bessel beam can form an annular beam after being focused, and the sample carrying platform 40 is arranged at the convergence position of the bessel beam in the embodiment; as shown in fig. 1, the sample stage 40 may be disposed at an image focal plane of the converging super lens 30, such that the converging super lens 30 can converge the illumination beam on the sample to be measured on the surface of the sample stage 40 in the form of a bessel beam, and the bessel beam passes through the sample to be measured to form an annular beam therebehind. Meanwhile, under the action of the Bessel beam, the sample to be detected can emit a diffraction beam, and the diffraction beam has information of the sample to be detected. For example, the bessel beam generates a diffraction effect on the edge and the profile of the sample to be measured, and a diffracted beam is excited at the edge, the profile and the like of the sample to be measured, wherein at least a part of the sample diffracted beam carries information of the sample to be measured, and the diffracted beam can be incident to the microscope system 50, so that the beam collected by the microscope system 50 at least comprises the diffracted beam. Typically, the diffracted beam is coaxial with the annular beam.
As shown in fig. 1, the upper side of fig. 1 shows a schematic diagram of a bessel beam after passing through a sample to be measured. The bessel beam can form an annular beam 101 after being focused; and the Bessel beam generates diffraction effect on the edge and the profile of the sample to be measured to generate a diffraction beam 102, the annular beam 101 and the diffraction beam 102 are coaxial, and the diffraction beam 102 is positioned inside the annular beam 101. The diffracted beam 102 may be collected by the microscope system 50 at the light exit side of the stage 40 to form an image, such as a profile image, of the sample under test. The microscope system 50 is spaced from the sample stage 40 by a certain distance, so that the microscope system 50 can extract the diffracted light beam 102, and the annular light beam 101 for illumination is prevented from influencing the imaging effect.
The embodiment of the utility model provides a pair of dark field microscope uses and assembles super lens 30 and produce the Bessel light beam, regard the Bessel light beam as the illuminating beam of the sample that awaits measuring to the sample that will await measuring sets up the position that assembles at the Bessel light beam, utilizes the Bessel light beam for the characteristics of ring beam behind the focus, can all convert the most illuminating beam that light source 10 sent into ring beam, realizes the toper illumination of hi-lite, and ring beam can also not influence the formation of image. The dark field microscope has high light energy utilization rate, does not need an additional device to generate annular light beams, has a simple overall structure, and is beneficial to the miniaturization and light weight development of the dark field microscope. The converging super lens 30 is simple to manufacture, mass production is easy to achieve, and the converging super lens has the advantages of being light and thin, and can further reduce the size and weight of a dark field microscope.
Optionally, the phase of the nanostructure in the converging superlens 30 is in a positive correlation with the radial distance of the nanostructure on the converging superlens 30.
The embodiment of the utility model provides an in, the light field distribution of Bessel light beam cross-section remains unchanged on different propagation distances, satisfies the light beam and does not have the nature of diffraction. The Bessel beam is essentially an interference field in physics, the amplitudes of planar wavelets participating in interference are equal, and the planar wavelets and a main shaft in a space have the same included angle; as shown in fig. 2, the principal axis of the bessel beam is the z-axis, and the angle between the planar wavelet participating in the interference and the z-axis is β. In the embodiment of the present invention, a plurality of nanostructures are periodically arranged on the surface of the converging super lens 30, and the phases of the plurality of nanostructures form the phase distribution of the converging super lens 30; in this embodiment, the phase of the nanostructure is in positive correlation with the radial distance r of the nanostructure on the converging super lens 30, that is, the larger the radial distance r is, the larger the phase thereof is; wherein the radial distance may specifically be the distance of the nanostructure to the central position of the converging superlens 30. The phase distribution of the converging super lens 30 satisfies a conical surface shape so that wavelets of the light beam transmitted through the converging super lens 30 are distributed on one conical surface, thereby enabling to generate a bessel light beam.
Optionally, the phase distribution Φ of the converging superlens 30 B Satisfies the following conditions:
wherein R represents a radial distance of the nanostructure on the converging superlens 30, k represents a wave vector, R represents a maximum aperture of the converging superlens 30, and f represents a corresponding focal length at the maximum aperture R of the converging superlens 30.
In the embodiment of the present invention, the phase distribution phi on the surface of the converging super lens 30 B And the radial distance r from the center of any point on the same is in positive correlation. Strictly speaking, the converging superlens 30 is not fixedWhen plane waves enter the converging super lens 30, light fields with different apertures are converged at different propagation distances, so that the focal spot focused by the converging super lens 30 is very long. The embodiment of the utility model provides a focus that focus position that will assemble super lens 30 maximum bore R department corresponds is as this focus f who assembles super lens 30. As shown in fig. 2, the included angle β satisfies
That is, the phase distribution of the converging superlens 30 is:
wherein, k represents a wave vector,
λ represents a wavelength of light, such as the wavelength of the illumination beam emitted by the light source 10. The present embodiment can generate a relatively standard bessel beam using the converging superlens 30.
Optionally, the first collimating lens 20 is a superlens. In this embodiment, the first collimating lens 20 and the converging super lens 30 are both super lenses, so that the overall volume and weight of the dark field microscope can be further reduced.
Further alternatively, referring to fig. 3, the first collimating lens 20 and the converging superlens 30 share a common substrate, i.e. share a common substrate 21; the nanostructures 201 of the first collimating lens 20 are periodically arranged on the side of the substrate 21 close to the light source 10, and the nanostructures 301 of the converging superlens 30 are periodically arranged on the side of the substrate 21 far from the light source 10.
In the embodiment of the present invention, the nanostructure of the first collimating lens 20 is represented by 201, and the nanostructure of the converging super lens 30 is represented by 301, as shown in fig. 3, the nanostructures 201 and 301 are respectively located at two sides of the same substrate 21, the nanostructure 201 and the substrate 21 can form the first collimating lens 20, and the nanostructure 301 and the substrate 21 can form the converging super lens 30. In this embodiment, the first collimating lens 20 and the converging super lens 30 are an integral structure, so as to further reduce the volume of the dark field microscope.
Optionally, the focal length of the first collimating lens 20 is the same as the focal length corresponding to the maximum aperture of the converging superlens 30. For example, the focal length of the first collimating lens 20 is also f in the above formula (1). For example, the phase distribution Φ of the first collimating lens 20 may satisfy the following formula (2):
where γ denotes a radial distance of the nanostructure 201 in the first collimating lens 20, e.g. a distance between the nanostructure 201 and a position of a center of gravity of the first collimating lens 20.
In addition to any of the above embodiments, as shown in fig. 1, the "sample stage 40 is located at the converging position of the bezier beam" may specifically be an image focal plane where the sample stage 40 is located at the converging superlens 30; and, the microscope system 50 is located on the side of the sample stage 40 away from the converging superlens 30. In the embodiment of the present invention, the bessel beam irradiates the sample to be measured on the sample carrying table 40, and the bessel beam can penetrate through the sample carrying table 40 to form the annular beam 101; and the sample under test generates a diffracted beam 102. The microscope system 50 is capable of receiving and imaging the diffracted beam 102.
Optionally, referring to fig. 4, the dark field microscope further comprises: an aperture 60. The diaphragm 60 is positioned between the sample loading platform 40 and the microscope system 50; the diaphragm 60 is coaxial with the bessel beam and is used for blocking the annular beam formed by the bessel beam after the focus.
In the embodiment of the present invention, a diaphragm 60 coaxial with the bessel beam is disposed between the sample stage 40 and the microscope system 50, for example, the diaphragm 60 is coaxial with the converging super lens 30; as shown in fig. 4, the upper side of fig. 4 shows a schematic view when the bessel beam reaches the diaphragm 60. The Bessel beam forms an annular beam 101 behind the sample carrying table 40, the sample to be measured emits a diffracted beam 102, the diffracted beam 102 can pass through the coaxial diaphragm 60 and reach the microscope system 50, the annular beam 101 can be shielded by the diaphragm 60, so that the microscope system 50 does not receive the annular beam 101, only receives the diffracted beam 102, and the microscope system 50 can well retain high-frequency information of the sample to be measured, thereby realizing imaging.
Alternatively, referring to fig. 4, the microscopy system 50 comprises: a first objective lens 51, a first eyepiece 52, and a first detector 53; the diffracted beam passes through the first objective lens 51 and the first ocular lens 52 in sequence and reaches the first detector 53. In this embodiment, the first objective lens 51 and the first eyepiece 52 may perform a converging and magnifying function on the diffracted light beams, so that the first detector 53 may magnify an image of the sample to be measured, and achieve microscopic imaging.
In addition, optionally, the microscope system 50 may also realize the convergence of the bessel beams, and the above-mentioned "the sample carrier 40 is located at the convergence position of the bessel beams" may also be the convergence position of the bessel beams where the sample carrier 40 is located at the microscope system 50. Referring to fig. 5, the microscope system 50 includes: a beam splitter 54, a second objective lens 55, a second eye lens 56, and a second detector 57.
The beam splitter 54 is located on a side of the converging super lens 30 away from the light source 10, and a distance between the beam splitter 54 and the converging super lens 30 is greater than a focal length of the converging super lens 30. The second objective lens 55 and the second eyepiece lens 56 are respectively positioned at two sides of the spectroscope 54; the sample carrying table 40 is positioned on one side of the second objective lens 55 far away from the beam splitter 54, and the second detector 57 is positioned on one side of the second ocular lens 56 far away from the beam splitter 54; the beam splitter 54 is used to direct at least part of the ring beam formed by the bezier beam after the focal point to the second objective lens 55; the second objective lens 55 is used for converging the annular light beam to the sample carrying table 40 and converging the diffracted light beam emitted by the sample carrying table 40 to the spectroscope 54; the beam splitter 54 is also used to direct at least part of the diffracted beam transmitted through the second objective lens 55 towards a second eyepiece 56; the second ocular lens 56 is used for converging the diffracted beam emitted from the beam splitter 54 to a second detector 57.
In the embodiment of the present invention, the microscope system 50 utilizes the spectroscope 54 with a transflective function to realize dark field imaging. Specifically, the distance between the beam splitter 54 and the converging super lens 30 is greater than the focal length of the converging super lens 30, so that the light beam incident on the beam splitter 54 is a light beam after the bessel light beam passes through the focal point, i.e. an annular light beam. Optionally, as shown in fig. 5, the dark field microscope further includes: a second collimating lens 70; the second collimating lens 70 is located between the converging super lens 30 and the beam splitter 54, and the distance between the second collimating lens 70 and the converging super lens 30 is greater than the focal length of the converging super lens 30; the second collimating lens 70 is used for collimating the ring beam formed by the bezier beam after the focal point and directing to the beam splitter 54. The embodiment of the utility model provides an in, utilize second collimating lens 70 to carry out the collimation to annular beam, can make annular beam can make things convenient for microsystem 50 formation of image with less divergence angle incident to microsystem 50.
In the embodiment of the present invention, after the ring-shaped light beam is incident to the beam splitter 54, the beam splitter 54 adjusts at least a part of the ring-shaped light beam to be emitted to the second objective lens 55; as shown in fig. 5, the beam splitter 54 reflects the annular light beam to the second objective lens 55, the second objective lens 55 converges the annular light beam to the sample stage 40, so that the sample to be measured on the surface of the sample stage 40 can emit a diffracted light beam, the diffracted light beam passes through the second objective lens 55 and reaches the beam splitter 54, the beam splitter 54 adjusts at least part of the diffracted light beam to be emitted to the second eyepiece 56, as shown in fig. 5, the beam splitter 54 transmits at least part of the diffracted light beam to the second eyepiece 56, and under the converging and magnifying effect of the second eyepiece 56, the second detector 57 can generate an image of the sample to be measured based on the diffracted light beam. The spot shape on the surface of the beam splitter 54 can be seen in the right partial diagram of fig. 5, and the diffracted beam is located inside the annular beam. Alternatively, the beam splitter 54 may also transmit at least part of the annular beam to the second objective lens 55, and the beam splitter 54 reflects at least part of the diffracted beam to the second eyepiece 56, and the embodiment does not limit which beam is transmitted and reflected by the beam splitter 54.
Further optionally, the second collimating lens 70 can also be a superlens to further reduce the weight and volume of the dark field microscope.
The function of the converging superlens 30, conforming to equation (1) above, is described in detail below, with the converging superlens 30 generating an annular beam of light.
In the embodiment of the invention, the converged superThe phase distribution of the lens 30 meets the formula (1), the nano structure of the converging super lens 30 is a nano cylinder made of silicon nitride, and the diameter of the nano cylinder is 180nm; and a plurality of nano cylinders are arranged in a regular hexagon with a period of 500nm. The converging superlens 30 is 2 x 2mm in size and has a focal length f of 77mm. The wavelength of the illumination beam emitted by the light source 10 is 550nm, the illumination beam passes through the converging super lens 30 after being collimated by the first collimating lens 20, the light intensity distribution after the focus is shown in fig. 6A, and the point alignment of the illumination surface light spots of the annular beam is shown in fig. 6B. Different light intensities are represented in different gray scales in fig. 6A; wherein, the light intensity of the middle area of the inner ring and the peripheral area of the outer ring of the annular light beam is lower and close to zero, the light intensity of the annular light beam is higher, and the light intensity of the central area between the inner ring and the outer ring of the annular light beam can reach 4w/mm 2 . As can be seen from fig. 6A and 6B, the converging super lens 30 can generate a good annular light beam, and satisfy the illumination condition of the dark field microscope; the dark field microscope can better capture the high frequency information of the sample to be detected based on the Bessel light beam generated by the convergent superlens 30, so that a clearer image of the sample to be detected can be generated.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the technical solutions of the changes or replacements within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (12)
1. A dark field microscope, comprising: the device comprises a light source (10), a first collimating lens (20), a converging super lens (30), a sample carrying table (40) and a microscope system (50);
the light source (10) is used for emitting an illumination light beam;
the first collimating lens (20) is positioned on the light-emitting side of the light source (10) and is used for collimating the illuminating light beam emitted by the light source (10);
the converging super lens (30) is positioned on the light-emitting side of the first collimating lens (20) and is used for converging the illumination light beam collimated by the first collimating lens (20) into a Bessel light beam;
the sample carrying table (40) is positioned at the convergence position of the Bessel beam and is used for placing a sample to be detected, and the sample to be detected can emit a diffracted beam under the action of the Bessel beam;
the microscope system (50) is positioned on the light-emitting side of the sample loading platform (40) for emitting the diffracted light beams and is used for collecting the diffracted light beams and forming an image of the sample to be detected.
2. The dark-field microscope according to claim 1, characterized in that the phase of the nanostructures in the converging superlens (30) is positively correlated to the radial distance of the nanostructures on the converging superlens (30).
3. Dark-field microscope according to claim 2, characterized in that the phase distribution Φ of the converging superlens (30) B Satisfies the following conditions:
wherein R represents a radial distance of the nanostructure on the converging superlens (30), k represents a wave vector, R represents a maximum aperture of the converging superlens (30), and f represents a corresponding focal length at the maximum aperture R of the converging superlens (30).
4. A dark-field microscope according to claim 3, characterized in that the focal length of the first collimating lens (20) is the same as the corresponding focal length at the largest aperture of the converging superlens (30).
5. Dark-field microscope according to claim 1, characterized in that the first collimating lens (20) is a superlens.
6. The dark-field microscope according to claim 5, characterized in that the first collimating lens (20) is co-based (21) with the converging superlens (30);
the nanostructure period of the first collimating lens (20) is arranged on one side of the substrate (21) close to the light source (10), and the nanostructure period of the converging super lens (30) is arranged on one side of the substrate (21) far away from the light source (10).
7. A dark-field microscope according to claim 1, characterized in that the sample stage (40) is located in the image-wise focal plane of the converging superlens (30);
the microscope system (50) is positioned on one side of the sample carrying platform (40) far away from the convergent super lens (30).
8. The dark field microscope of claim 7, further comprising: a diaphragm (60);
the diaphragm (60) is positioned between the sample loading platform (40) and the microscope system (50); the diaphragm (60) is coaxial with the Bessel beam and is used for blocking an annular beam formed by the Bessel beam after a focus.
9. The dark-field microscope according to claim 7, characterized in that the microscopy system (50) comprises: a first objective lens (51), a first ocular lens (52) and a first detector (53);
the diffracted light beams sequentially pass through the first objective lens (51) and the first ocular lens (52) and then reach the first detector (53).
10. The dark-field microscope according to claim 1, characterized in that the microscopy system (50) comprises: a spectroscope (54), a second objective lens (55), a second ocular lens (56) and a second detector (57);
the beam splitter (54) is positioned on one side of the converging super lens (30) far away from the light source (10), and the distance between the beam splitter (54) and the converging super lens (30) is greater than the focal length of the converging super lens (30);
the second objective lens (55) and the second ocular lens (56) are respectively positioned at two sides of the spectroscope (54); the sample carrying table (40) is positioned on one side of the second objective lens (55) far away from the spectroscope (54), and the second detector (57) is positioned on one side of the second ocular lens (56) far away from the spectroscope (54);
the beam splitter (54) is used for adjusting at least part of an annular light beam formed by the Bessel light beam after the focal point to be directed to the second objective lens (55);
the second objective lens (55) is used for converging the annular light beam to the sample carrying table (40) and converging the diffracted light beam emitted by the sample carrying table (40) to the spectroscope (54);
said beam splitter (54) further adapted to direct at least a portion of said diffracted beam transmitted through said second objective lens (55) towards said second eyepiece (56);
the second ocular lens (56) is used for converging the diffracted light beams emitted by the beam splitter (54) to the second detector (57).
11. The dark field microscope of claim 10, further comprising: a second collimating lens (70);
the second collimating lens (70) is positioned between the converging super lens (30) and the beam splitter (54), and the distance between the second collimating lens (70) and the converging super lens (30) is greater than the focal length of the converging super lens (30);
the second collimating lens (70) is used for collimating the annular light beam formed by the Bessel light beam after the focal point and directing the annular light beam to the light splitter (54).
12. A dark-field microscope according to claim 11, characterized in that the second collimating lens (70) is a superlens.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11927769B2 (en) | 2022-03-31 | 2024-03-12 | Metalenz, Inc. | Polarization sorting metasurface microlens array device |
| US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
| US11988844B2 (en) | 2017-08-31 | 2024-05-21 | Metalenz, Inc. | Transmissive metasurface lens integration |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11988844B2 (en) | 2017-08-31 | 2024-05-21 | Metalenz, Inc. | Transmissive metasurface lens integration |
| US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
| US11927769B2 (en) | 2022-03-31 | 2024-03-12 | Metalenz, Inc. | Polarization sorting metasurface microlens array device |
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