CN217639396U - Silicon carbide testing ignition prevention device - Google Patents
Silicon carbide testing ignition prevention device Download PDFInfo
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- CN217639396U CN217639396U CN202220933278.4U CN202220933278U CN217639396U CN 217639396 U CN217639396 U CN 217639396U CN 202220933278 U CN202220933278 U CN 202220933278U CN 217639396 U CN217639396 U CN 217639396U
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Abstract
The utility model discloses a carborundum test prevention device that strikes sparks, including test probe station, wafer boat box, vacuum cavity, probe card, vacuum apparatus and the wafer that awaits measuring, vacuum apparatus includes the first vacuum apparatus, second vacuum apparatus and the third vacuum apparatus that the structure is the same, first vacuum apparatus includes vacuum cavity, vacuum pump, exhaust tube, vacuum valve, vacuum release valve, pipeline vacuum gauge and cavity vacuum gauge, vacuum cavity passes through exhaust tube and communicates with the vacuum pump; the wafer boat comprises a first wafer boat and a second wafer boat which have the same structure, wherein a first wafer boat feeding device and a first wafer conveying mechanical arm are arranged in the first wafer boat, and a second wafer boat feeding device and a second wafer conveying mechanical arm are arranged in the second wafer boat; the utility model discloses utilize the vacuum cavity to wrap up test environment, form airtight space, guarantee that the phenomenon of striking sparks thoroughly eliminates, solved the technical problem that prior art exists.
Description
Technical Field
The utility model relates to a carborundum test technical field specifically indicates carborundum test prevention device that strikes sparks.
Background
CP is an abbreviation of Chip Probe, and refers to that a Chip is pricked on a Chip pin by a Probe card to perform performance and function tests on the Chip at the Wafer stage, sometimes this procedure is also called WS, i.e. Wafer Sort, and the tools required for CP testing include a Probe card and an automatic tester box Probe station.
When testing a power device of silicon carbide, in a clean room environment of a semiconductor, about 4-5% of the devices can generate an ignition phenomenon during CP testing because the two stages of the power device of silicon carbide are relatively close to each other, and an electric field is very high under high voltage, so that air is broken down to form an ionization phenomenon, abnormal damage of the device is caused, and the yield of products is influenced.
The same test equipment is used, air around the test equipment is pumped out to form vacuum, and the test equipment finds that the breakdown voltage of the air is very high and is not easy to ignite, but the breakdown voltage becomes very low under low air pressure or low vacuum; when the air pressure is increased to form high voltage, the breakdown voltage is increased again, and the minimum value of the breakdown voltage meeting the ignition exists.
The existing probe card for avoiding sparking adopts a small closed plastic interval, dry air or nitrogen is introduced, so that the gas density is increased, the atmospheric pressure rises, and the right side of a Barshen curve is met.
Therefore, a silicon carbide test sparking prevention device which uses a vacuum chamber to enclose a test environment to form a closed space and can completely eliminate the sparking phenomenon is a problem to be solved urgently.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is current probe card of avoiding striking sparks, what adopt utilizes little closed plastics interval, leads to dry air or nitrogen gas, makes gas density increase, and atmospheric pressure rises, accords with ba shen curve the right, but the shortcoming is that CP testing process need constantly remove the probe card, and the contact surface of air vent and wafer and probe card all inevitable has the gap, and is incomplete airtight, hardly detects the actual value that atmospheric pressure rises, and the phenomenon of striking sparks can't restrain completely.
In order to solve the technical problem, the utility model provides a technical scheme does: the silicon carbide testing sparking prevention device comprises a testing probe station, a wafer cassette, a vacuum cavity, a probe card, a vacuum device and a wafer to be tested, wherein the vacuum device comprises a first vacuum device, a second vacuum device and a third vacuum device which are identical in structure, the first vacuum device comprises a vacuum cavity, a vacuum pump, a suction pipeline, a vacuum valve, a vacuum release valve, a pipeline vacuum gauge and a cavity vacuum gauge, the vacuum cavity is communicated with the vacuum pump through the suction pipeline, the vacuum valve and the pipeline vacuum gauge are arranged on the suction pipeline, and the vacuum release valve and the cavity vacuum gauge are arranged on the vacuum cavity;
the wafer boat box comprises a first wafer boat box and a second wafer boat box which are identical in structure, a first wafer boat box goods feeding device and a first wafer conveying mechanical arm are arranged in the first wafer boat box, a second wafer boat box goods feeding device and a second wafer conveying mechanical arm are arranged in the second wafer boat box, the first wafer boat box goods feeding device is communicated with a first vacuum device through a first connecting pipe, the second wafer boat box goods feeding device is communicated with a second vacuum device through a second connecting pipe, and the vacuum cavity is communicated with a third vacuum device through a third connecting pipe.
Furthermore, the probe card and the wafer to be tested are arranged in the vacuum cavity, and the probe card is arranged above the wafer to be tested.
Further, the vacuum pump is a dry vacuum pump.
Further, the first wafer cassette loading device is arranged on the left side of the first wafer conveying mechanical arm, and the second wafer cassette loading device is arranged on the right side of the second wafer conveying mechanical arm.
Further, the third vacuum device is arranged in the test probe station.
Compared with the prior art, the utility model the advantage lie in: the utility model discloses a test probe station, the wafer boat box, vacuum cavity, probe card, vacuum apparatus and the cooperation structure of the wafer of awaiting measuring utilize the vacuum cavity to wrap up test environment, form airtight space, guarantee that the phenomenon of striking sparks thoroughly eliminates, solved the technical problem that prior art exists, prior art only encloses into a not too airtight space on the probe card, through increasing the air flow make atmospheric pressure rise, the effect can't be guaranteed, and too big air flow can cause the shake of needle, influence the test; the arrangement of the two wafer boat boxes is beneficial to increasing the throughput; the utility model relates to a rationally, be worth wideling popularize.
Drawings
Fig. 1 is a schematic structural view of the inventive silicon carbide testing and sparking prevention device.
FIG. 2 is a schematic structural view of a vacuum apparatus in the silicon carbide test sparking prevention apparatus of the present invention.
As shown in the figure: 1. the wafer testing device comprises a testing probe station, 2, a wafer boat box, 3, a vacuum cavity, 4, a probe card, 5, a vacuum device, 6, a wafer to be tested, 7, a first vacuum device, 8, a second vacuum device, 9, a third vacuum device, 10, a vacuum cavity, 11, a vacuum pump, 12, an air pumping pipeline, 13, a vacuum valve, 14, a vacuum release valve, 15, a pipeline vacuum gauge, 16, a cavity vacuum gauge, 17, a first wafer boat box, 18, a second wafer boat box, 19, a first wafer boat box cargo feeding device, 20, a first wafer conveying mechanical arm, 21, a second wafer boat box cargo feeding device, 22, a second wafer conveying mechanical arm, 23, a first connecting pipe, 24, a second connecting pipe, 25 and a third connecting pipe.
Detailed Description
The silicon carbide testing and sparking prevention device of the present invention will be described in further detail with reference to the accompanying drawings.
The present invention will be described in detail with reference to the accompanying drawings 1-2.
The silicon carbide testing sparking prevention device comprises a testing probe station 1, a wafer boat box 2, a vacuum cavity 3, a probe card 4, a vacuum device 5 and a wafer 6 to be tested, wherein the vacuum device 5 comprises a first vacuum device 7, a second vacuum device 8 and a third vacuum device 9 which are identical in structure, the first vacuum device 7 comprises a vacuum cavity 10, a vacuum pump 11, an air suction pipeline 12, a vacuum valve 13, a vacuum release valve 14, a pipeline vacuum gauge 15 and a cavity vacuum gauge 16, the vacuum cavity 10 is communicated with the vacuum pump 11 through the air suction pipeline 12, the vacuum valve 13 and the pipeline vacuum gauge 15 are both arranged on the air suction pipeline 12, and the vacuum release valve 14 and the cavity vacuum gauge 16 are both arranged on the vacuum cavity 10;
the wafer boat 2 comprises a first wafer boat 17 and a second wafer boat 18 which have the same structure, a first wafer boat feeding device 19 and a first wafer conveying mechanical arm 20 are arranged in the first wafer boat 17, a second wafer boat feeding device 21 and a second wafer conveying mechanical arm 22 are arranged in the second wafer boat 18, the first wafer boat feeding device 19 is communicated with the first vacuum device 7 through a first connecting pipe 23, the second wafer boat feeding device 21 is communicated with the second vacuum device 8 through a second connecting pipe 24, and the vacuum chamber 3 is communicated with the third vacuum device 9 through a third connecting pipe 25.
The probe card 4 and the wafer 6 to be tested are both arranged in the vacuum chamber 3, and the probe card 4 is arranged above the wafer 6 to be tested.
The vacuum pump 11 is a dry vacuum pump.
The first cassette stocker 19 is disposed at the left side of the first wafer transfer robot 20, and the second cassette stocker 21 is disposed at the right side of the second wafer transfer robot 22.
The third vacuum device 9 is arranged in the test probe station 1.
The utility model discloses carborundum test prevention device that strikes sparks's concrete implementation process as follows: firstly, a wafer boat 2 enters a transition place with high vacuum degree from the outside, and wafers pass through the wafer boat 2 and then enter and exit a vacuum cavity 3 of a test probe station 1; when the wafer is sent from the outside, the wafer is firstly isolated in the vacuum cavity 3, and then isolated from the outside after entering, vacuumizing is started, after the vacuum degree of the vacuum cavity 3 is reached, the vacuum cavity 3 and the wafer boat 2 are isolated by the baffle, the test wafer is started to be transmitted, after the test is finished, the baffle between the vacuum cavity 3 and the wafer boat 2 is closed, then the vacuum is broken, and the wafer boat 2 can be taken out.
The utility model discloses a test probe platform 1, the wafer boat box 2, the vacuum cavity 3, the probe card 4, vacuum apparatus 5 and the cooperation structure of the wafer 6 that awaits measuring utilize the vacuum cavity to wrap up the test environment, form airtight space, guarantee that the phenomenon of striking sparks thoroughly eliminates, solved the technical problem that prior art exists, prior art just encloses into a not too airtight space on the probe card, through increasing the airflow make atmospheric pressure rise, the effect can't be guaranteed, and too big air current can cause the shake of needle, influence the test; the arrangement of the two wafer boat boxes is beneficial to increasing the throughput; the utility model relates to a rationally, be worth wideling popularize.
The present invention and the embodiments thereof have been described above, but the description is not limited thereto, and the embodiment shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. In summary, those skilled in the art should understand that they should not be limited to the embodiments described above, and that they can design the similar structure and embodiments without departing from the spirit of the invention.
Claims (5)
1. Carborundum test prevention device that strikes sparks, including test probe platform (1), crystal boat box (2), vacuum cavity (3), probe card (4), vacuum apparatus (5) and examination wafer (6), its characterized in that: the vacuum device (5) comprises a first vacuum device (7), a second vacuum device (8) and a third vacuum device (9) which are identical in structure, the first vacuum device (7) comprises a vacuum cavity (10), a vacuum pump (11), an air suction pipeline (12), a vacuum valve (13), a vacuum release valve (14), a pipeline vacuum gauge (15) and a cavity vacuum gauge (16), the vacuum cavity (10) is communicated with the vacuum pump (11) through the air suction pipeline (12), the vacuum valve (13) and the pipeline vacuum gauge (15) are both arranged on the air suction pipeline (12), and the vacuum release valve (14) and the cavity vacuum gauge (16) are both arranged on the vacuum cavity (10);
the wafer boat box (2) comprises a first wafer boat box (17) and a second wafer boat box (18) which are identical in structure, a first wafer boat box goods feeding device (19) and a first wafer conveying mechanical arm (20) are arranged in the first wafer boat box (17), a second wafer boat box goods feeding device (21) and a second wafer conveying mechanical arm (22) are arranged in the second wafer boat box (18), the first wafer boat box goods feeding device (19) is communicated with a first vacuum device (7) through a first connecting pipe (23), the second wafer boat box goods feeding device (21) is communicated with a second vacuum device (8) through a second connecting pipe (24), and the vacuum cavity (3) is communicated with a third vacuum device (9) through a third connecting pipe (25).
2. A silicon carbide test sparking prevention apparatus as set forth in claim 1, wherein: the probe card (4) and the wafer (6) to be tested are both arranged in the vacuum cavity (3), and the probe card (4) is arranged above the wafer (6) to be tested.
3. A silicon carbide test sparking prevention apparatus as set forth in claim 1, wherein: the vacuum pump (11) adopts a dry vacuum pump.
4. A silicon carbide test sparking prevention apparatus as set forth in claim 1, wherein: the first wafer boat box loading device (19) is arranged on the left side of the first wafer conveying mechanical arm (20), and the second wafer boat box loading device (21) is arranged on the right side of the second wafer conveying mechanical arm (22).
5. A silicon carbide test sparking prevention apparatus as set forth in claim 1, wherein: the third vacuum device (9) is arranged in the test probe station (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220933278.4U CN217639396U (en) | 2022-04-21 | 2022-04-21 | Silicon carbide testing ignition prevention device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220933278.4U CN217639396U (en) | 2022-04-21 | 2022-04-21 | Silicon carbide testing ignition prevention device |
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| Publication Number | Publication Date |
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| CN217639396U true CN217639396U (en) | 2022-10-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202220933278.4U Active CN217639396U (en) | 2022-04-21 | 2022-04-21 | Silicon carbide testing ignition prevention device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115792557A (en) * | 2023-02-03 | 2023-03-14 | 苏州联讯仪器股份有限公司 | Probe installation structure for wafer-level reliability test and reliability test system |
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2022
- 2022-04-21 CN CN202220933278.4U patent/CN217639396U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115792557A (en) * | 2023-02-03 | 2023-03-14 | 苏州联讯仪器股份有限公司 | Probe installation structure for wafer-level reliability test and reliability test system |
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