CN217636747U

CN217636747U - Air exhaust device of vertical diffusion furnace

Info

Publication number: CN217636747U
Application number: CN202221311042.3U
Authority: CN
Inventors: 刘明利
Original assignee: Qingdao Saier Technology Co ltd
Current assignee: Qingdao Saier Technology Co ltd
Priority date: 2022-05-30
Filing date: 2022-05-30
Publication date: 2022-10-21
Anticipated expiration: 2032-05-30

Abstract

The utility model discloses an exhaust device of vertical diffusion furnace, including rearmounted exhaust pipe, the one end of rearmounted exhaust pipe is equipped with leading exhaust pipe, common fixedly connected with casing between leading exhaust pipe and the rearmounted exhaust pipe, surface one side fixed mounting of casing has the motor, and the internally mounted of the casing that protects has drive assembly, and is connected between the drive shaft of drive assembly and motor, the internally mounted of casing has the removal subassembly, and is connected between removal subassembly and the drive assembly, the deep bead is all installed to a plurality of expansion ends of removal subassembly, and the deep bead runs through the inside of casing perpendicularly and extends to the internal surface. The utility model discloses in, through motor, drive assembly, removal subassembly and the deep bead that sets up, through adjusting the length that the deep bead stretches out to reach the purpose of adjusting the amount of wind, need not to adjust the fan rotational speed, can guarantee the wind pressure, avoid appearing the terminal not enough problem of amount of wind in wind channel.

Description

Air exhaust device of vertical diffusion furnace

Technical Field

The utility model relates to a vertical diffusion furnace technical field especially relates to an exhaust device of vertical diffusion furnace.

Background

The diffusion furnace consists of a control system, a boat inlet and outlet system, a furnace body heating system, a gas control system and the like. The quartz boat of the vertical diffusion furnace is vertical to the horizontal plane, so that the silicon wafer can be more conveniently conveyed by a manipulator, and the consistency of the in-chip technological parameters is better;

the air exhaust device of the current vertical diffusion furnace basically adjusts the air volume by changing the rotating speed of the fan, although the air exhaust device has a certain energy-saving effect, the purchase cost of the fan is higher, and when the rotating speed of the fan is lower, the air pressure of the fan can be reduced, the air flow range can be influenced, and the air volume at the tail end of an air channel is not enough.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing an exhaust device of a vertical diffusion furnace.

In order to realize the purpose, the utility model adopts the following technical scheme: the utility model provides an exhaust device of vertical diffusion furnace, includes rearmounted exhaust pipe, the one end of rearmounted exhaust pipe is equipped with leading exhaust pipe, common fixedly connected with casing between leading exhaust pipe and the rearmounted exhaust pipe, surface one side fixed mounting of casing has the motor, and the internally mounted of the casing that protects has transmission assembly, and is connected between the drive shaft of transmission assembly and motor, the internally mounted of casing has the removal subassembly, and removes and be connected between subassembly and the transmission assembly, the deep bead is all installed to a plurality of expansion ends of removal subassembly, and the deep bead runs through the inside of casing perpendicularly and extends to the internal surface.

Further, the transmission assembly comprises a ring gear, the outer surface of the ring gear is fixedly connected with an installation ring, the inner surface of the ring gear is meshed with a transmission gear, the transmission gear is close to a rotating shaft of the motor, the rotating shaft and the shell are rotatably connected and fixedly connected with a driving shaft of the motor, the motor drives the rotating shaft to rotate, the transmission gear is driven to rotate through the rotating shaft, the transmission gear drives the ring gear to rotate, and the movable assembly is driven to operate through the installation ring.

Furthermore, install first bearing jointly between pivot and the casing, and fixed connection between the inner circle of first bearing and the pivot, and fixed connection between the outer lane of first bearing and the casing, first bearing has the supporting role to the pivot, reduces the frictional force when the pivot rotates simultaneously.

Further, the removal subassembly includes the annular slab, and rotate between annular slab and the casing be connected and with the collar between fixed connection, one side fixedly connected with annular thread board that ring gear was kept away from to the annular slab, the surface threaded connection of annular thread board has a plurality of slides, and fixed connection between slide and the adjacent deep bead, and the annular slab drives the thread board and rotates to drive a plurality of slides synchronous motion, thereby drive the deep bead and remove.

It is further, a plurality of the equal sliding connection of slide has the gag lever post, and is a plurality of the equal fixedly connected with mounting panel of one end of gag lever post, and fixed connection between mounting panel and the casing, the cross section of gag lever post is square or polygon, can carry on spacingly to the slide, guarantees the steady operation of slide.

Furthermore, a second bearing is installed between the annular plate and the shell, the inner ring of the second bearing is fixedly connected with the shell, the outer ring of the second bearing is fixedly connected with the annular plate, the second bearing has a supporting function, installation of the annular plate is facilitated, and meanwhile friction force generated when the annular plate rotates is reduced.

Furthermore, the bolt is connected between the motor and the shell, so that the motor can be mounted and dismounted conveniently, and the motor can be maintained.

The utility model has the advantages that:

the utility model discloses when using, this exhaust device of vertical diffusion furnace, through motor, drive assembly, removal subassembly and the deep bead that sets up, through adjusting the length that the deep bead stretches out to reach the purpose of adjusting the amount of wind, need not to adjust the fan rotational speed, can guarantee the wind pressure, avoid appearing the terminal not enough problem of amount of wind in wind channel.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a front view of the present invention;

fig. 3 is a schematic partial sectional view of the present invention.

Illustration of the drawings:

1. a rear exhaust duct; 2. a housing; 3. a front exhaust duct; 4. a motor; 5. a wind deflector; 61. a mounting ring; 62. a transmission gear; 63. a rotating shaft; 64. a ring gear; 71. mounting a plate; 72. a thread plate; 73. a slide base; 74. a limiting rod; 75. an annular plate.

Detailed Description

Fig. 1 to fig. 3 show, relate to an exhaust device of vertical diffusion furnace, including rearmounted exhaust pipe 1, the one end of rearmounted exhaust pipe 1 is equipped with leading exhaust pipe 3, common fixedly connected with casing 2 between leading exhaust pipe 3 and the rearmounted exhaust pipe 1, surface one side fixed mounting of casing 2 has motor 4, the internally mounted of casing 2 that protects has drive assembly, and be connected between drive assembly and motor 4's the drive shaft, the internally mounted of casing 2 has the removal subassembly, and be connected between removal subassembly and the drive assembly, the deep bead 5 is all installed to a plurality of expansion ends of removal subassembly, and deep bead 5 runs through the inside of casing 2 perpendicularly and extends to the internal surface.

The motor 4 and the shell 2 are connected together by bolts.

As shown in fig. 3, the transmission assembly includes a ring gear 64, a mounting ring 61 is fixedly connected to an outer surface of the ring gear 64, a transmission gear 62 is engaged with an inner surface of the ring gear 64, a rotating shaft 63 is fixedly connected to a side of the transmission gear 62 close to the motor 4, and the rotating shaft 63 is rotatably connected to the housing 2 and fixedly connected to a driving shaft of the motor 4.

A first bearing is installed between the rotating shaft 63 and the housing 2, an inner ring of the first bearing is fixedly connected with the rotating shaft 63, and an outer ring of the first bearing is fixedly connected with the housing 2.

The moving assembly comprises an annular plate 75, the annular plate 75 is rotatably connected with the shell 2 and fixedly connected with the mounting ring 61, an annular thread plate 72 is fixedly connected to one side, away from the ring gear 64, of the annular plate 75, a plurality of sliding seats 73 are in threaded connection with the outer surface of the annular thread plate 72, and the sliding seats 73 are fixedly connected with the adjacent wind deflector 5.

The sliding bases 73 are connected with limit rods 74 in a sliding mode, one ends of the limit rods 74 are fixedly connected with mounting plates 71, and the mounting plates 71 are fixedly connected with the shell 2.

A second bearing is installed between the annular plate 75 and the housing 2, an inner ring of the second bearing is fixedly connected with the housing 2, and an outer ring of the second bearing is fixedly connected with the annular plate 75.

When using the exhaust device of vertical diffusion furnace, starter motor 4, motor 4 drive pivot 63 and rotate to drive gear 62 and rotate, drive gear 62 drives ring gear 64 and rotates, thereby drives ring plate 75 through collar 61 and rotates, and ring plate 75 drives the flighting 72 and rotates, thereby drives a plurality of slides 73 synchronous motion, thereby changes the length that a plurality of deep beads 5 stretched out in step, thereby reaches the purpose of adjusting the amount of wind.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. The utility model provides an exhaust device of vertical diffusion furnace, includes rearmounted exhaust pipe (1), its characterized in that: the one end of rearmounted exhaust pipe (1) is equipped with leading exhaust pipe (3), common fixedly connected with casing (2) between leading exhaust pipe (3) and rearmounted exhaust pipe (1), surface one side fixed mounting of casing (2) has motor (4), and the internally mounted of the casing (2) that protects has drive assembly, and is connected between the drive shaft of drive assembly and motor (4), the internally mounted of casing (2) has the removal subassembly, and is connected between removal subassembly and the drive assembly, deep bead (5) are all installed to a plurality of expansion ends of removal subassembly, and deep bead (5) run through the inside of casing (2) perpendicularly and extend to the internal surface.

2. An exhaust device of a vertical diffusion furnace according to claim 1, wherein: the transmission assembly comprises a ring gear (64), the outer surface of the ring gear (64) is fixedly connected with a mounting ring (61), the inner surface of the ring gear (64) is meshed with a transmission gear (62), the transmission gear (62) is close to one side of a motor (4) and is fixedly connected with a rotating shaft (63), and the rotating shaft (63) and the shell (2) are rotatably connected and are fixedly connected with a driving shaft of the motor (4).

3. An exhaust device of a vertical diffusion furnace according to claim 2, wherein: a first bearing is installed between the rotating shaft (63) and the shell (2) together, an inner ring of the first bearing is fixedly connected with the rotating shaft (63), and an outer ring of the first bearing is fixedly connected with the shell (2).

4. An exhaust device of a vertical diffusion furnace according to claim 2, wherein: the movable assembly comprises an annular plate (75), the annular plate (75) and the shell (2) are rotatably connected and fixedly connected with the mounting ring (61), one side of the annular plate (75) away from the ring gear (64) is fixedly connected with an annular threaded plate (72), the outer surface of the annular threaded plate (72) is in threaded connection with a plurality of sliding seats (73), and the sliding seats (73) are fixedly connected with the adjacent wind shields (5).

5. The exhaust device of the vertical diffusion furnace according to claim 4, wherein: it is a plurality of slide (73) all sliding connection has gag lever post (74), and is a plurality of the equal fixedly connected with mounting panel (71) of one end of gag lever post (74), and fixed connection between mounting panel (71) and casing (2).

6. The exhaust device of the vertical diffusion furnace according to claim 4, wherein: and a second bearing is installed between the annular plate (75) and the shell (2) together, the inner ring of the second bearing is fixedly connected with the shell (2), and the outer ring of the second bearing is fixedly connected with the annular plate (75).

7. The exhaust device of the vertical diffusion furnace according to claim 1, wherein: and a bolt is connected between the motor (4) and the shell (2) together.