CN217628738U - Cooling water channel of vacuum furnace body - Google Patents

Cooling water channel of vacuum furnace body Download PDF

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Publication number
CN217628738U
CN217628738U CN202221495455.1U CN202221495455U CN217628738U CN 217628738 U CN217628738 U CN 217628738U CN 202221495455 U CN202221495455 U CN 202221495455U CN 217628738 U CN217628738 U CN 217628738U
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China
Prior art keywords
cooling water
furnace body
inner ring
pipe
outer ring
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CN202221495455.1U
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Chinese (zh)
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钱广旭
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Wuhu Zhongpu Intelligent Equipment Co ltd
Wuhu Dongxu Optoelectronic Equipment Technology Co ltd
Beijing Yuanda Xinda Technology Co Ltd
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Wuhu Zhongpu Intelligent Equipment Co ltd
Wuhu Dongxu Optoelectronic Equipment Technology Co ltd
Beijing Yuanda Xinda Technology Co Ltd
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Abstract

A vacuum furnace body cooling water channel comprises an inner ring, a cooling water pipe, an outer ring and a furnace body base, wherein the lower end of the inner ring is fixedly connected with the furnace body base, the cooling water pipe is wound on the inner ring and is fixed with the inner ring, the outer ring is sleeved outside the cooling water pipe, and the lower end of the outer ring is fixedly connected with the furnace body base. The utility model discloses a vacuum furnace body cooling water course adopts the winding of copper pipe to replace stainless steel sheet spiral winding's form, and the water course leakproofness obtains guaranteeing, has avoided the condition of leaking between the water course.

Description

Cooling water channel of vacuum furnace body
Technical Field
The utility model relates to a vacuum furnace field especially relates to a vacuum furnace body cooling water course.
Background
In the operation process of crystal growth vacuum furnace equipment, the temperature in the furnace body is up to more than 2000 ℃, in order to ensure the normal operation of the equipment and reduce the temperature of the furnace body, a layer of cooling water channel is generally required to be added between the inner ring and the outer ring of the furnace body, the existing cooling water channel basically adopts a stainless steel edge spiral winding mode, the water channels cannot be completely sealed, the processing and the manufacturing are complex, and the heat dissipation effect is not ideal.
SUMMERY OF THE UTILITY MODEL
To the not enough of existence among the prior art, the utility model aims to provide a vacuum furnace body cooling water course adopts the copper pipe winding on vacuum furnace body, improves the leakproofness of water course and avoids the condition of leaking between the water course.
In order to realize the purpose, the utility model provides a technical scheme is:
a vacuum furnace body cooling water channel comprises an inner ring, a cooling water pipe, an outer ring and a furnace body base, wherein the lower end of the inner ring is fixedly connected with the furnace body base, the cooling water pipe is wound on the inner ring and is fixed with the inner ring, the outer ring is sleeved outside the cooling water pipe, and the lower end of the outer ring is fixedly connected with the furnace body base.
Further, the cooling water pipe has a first surface attached to the outer portion of the inner ring.
Further, the cooling water pipe has a semicircular cross section, and a diameter side of the semicircular cross section forms the first surface.
Further, the cooling water pipe is fixed on the inner ring through argon arc welding spot welding.
Further, the cooling water pipes are wound and fixed on the inner ring in an equally spaced manner.
Further, the lower end of the inner ring is fixed on the furnace body base through argon arc welding and full welding, and the lower end of the outer ring is fixed on the furnace body base through argon arc welding and full welding.
Furthermore, the furnace cover installation flange is further included, the upper end of the inner ring is fixedly connected with the furnace cover installation flange, and the upper end of the outer ring is fixedly connected with the furnace cover installation flange.
Furthermore, the upper end of the inner ring is fixed on the furnace cover mounting flange through argon arc welding, and the upper end of the outer ring is fixed on the furnace cover mounting flange through argon arc welding.
Furthermore, the furnace cover mounting flange is provided with a sealing groove, and a sealing ring is arranged in the sealing groove.
Furthermore, the cooling water pipe is formed by a copper pipe, a water inlet pipe and a water outlet pipe are respectively arranged at two ends of the cooling water pipe, and an inlet and an outlet which respectively correspond to the water inlet pipe and the water outlet pipe are arranged on the outer ring.
The utility model has the advantages that:
the utility model discloses a vacuum furnace body cooling water course adopts the winding of copper pipe to replace stainless steel sheet spiral winding's form, and the water course leakproofness obtains guaranteeing, has avoided the condition of leaking between the water course. The copper pipe is superior in heat conduction and heat dissipation, so that the cooling water channel has good heat dissipation, and the temperature of the furnace body is reduced better. The winding of the copper pipe is simpler than that of the stainless steel sheet, and the manufacturing and processing efficiency is improved.
Drawings
FIG. 1 shows a schematic view of a cooling water channel of a vacuum furnace body of the present invention with the outer ring removed;
fig. 2 shows a cross-sectional view of the cooling water channel of the vacuum furnace body of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail with reference to the following embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
The utility model provides a pair of vacuum furnace body cooling water course, as shown in fig. 1 and 2, including inner circle 2, condenser tube 3, outer lane 4 and furnace body base 5, wherein the lower extreme and the 5 fixed connection of furnace body base of inner circle 2, the winding of condenser tube 3 is gone up and is fixed with inner circle 2 at inner circle 2, and outer lane 4 cover is in condenser tube 3 outside and the lower extreme and the 5 fixed connection of furnace body base of outer lane 4.
In one embodiment, the lower end of the inner ring 2 is fixed on the furnace body base 5 by argon arc welding full welding. The cooling water pipe 3 is formed of a copper pipe and wound around the inner ring 2 outside the inner ring 2, while the cooling water pipe 3 is fixed to the inner ring 2 by argon arc welding spot welding. The form that the copper pipe is wound to replace the stainless steel sheet to be spirally wound is adopted, so that the water leakage condition between the water channels is avoided, and the tightness of the water channels is improved. Meanwhile, the temperature of the furnace body is effectively reduced; the copper coil pipe is simple in structure, more convenient to manufacture and process and capable of improving production efficiency. The cooling water pipe 3 has a first surface which is attached to the outside of the inner ring 2. In a preferred embodiment, the cross section of the cooling water pipe 3 is semicircular, and the diameter side of the semicircular forms the first surface, so that the contact area between the cooling water pipe 3 and the inner ring 2 is ensured, and the heat exchange efficiency is further ensured. The cross section of the cooling water pipe 3 may be circular, and the cross section of the cooling water pipe 3 may be square. The outer ring 4 is sleeved outside the cooling water pipe 3, and the lower end of the outer ring 4 is fixed on the furnace body base 5 through argon arc welding full-length welding. Preferably, the cooling water pipe 3 has a cross-sectional dimension equal to or less than the distance between the inner ring 2 and the outer ring 4.
In an embodiment, the cooling water pipe 3 is wound and fixed on the inner ring 2 at equal intervals, and two ends of the cooling water pipe 3 are respectively provided with a water inlet pipe 31 and a water outlet pipe 32, wherein the water inlet pipe 31 and the water outlet pipe 32 may be integrated with the cooling water pipe 3, or may be fixedly connected with a water inlet (not shown) and a water outlet (not shown) of the cooling water pipe 3 by welding or the like. An inlet (not shown) and an outlet (not shown) corresponding to the water inlet pipe 31 and the water outlet pipe 32 are arranged on the outer ring 4, and the water inlet pipe 31 and the water outlet pipe 32 are led out of the outer ring 4 through the inlet and the outlet on the outer ring 4 respectively. The vacuum furnace body is wholly sealed, and cooling water circulates through the water inlet and the water outlet of the cooling water pipe 3, so that the effect of reducing the temperature of the vacuum furnace body is achieved.
In another embodiment, the utility model discloses a vacuum furnace body cooling water course still includes bell mounting flange 1, the upper end and the bell mounting flange 1 fixed connection of inner circle 2, the upper end and the bell mounting flange 1 fixed connection of outer lane 4. Wherein, the upper end of the inner ring 2 is fixed on the furnace cover mounting flange 1 by argon arc welding, and the upper end of the outer ring 4 is fixed on the furnace cover mounting flange 1 by argon arc welding. The furnace lid mounting flange 1 is provided with a sealing groove (not shown) in which a sealing ring 6 is mounted. When the furnace cover mounting flange 1 is fixed with the upper ends of the inner ring 2 and the outer ring 4, the position of the sealing groove of the furnace cover mounting flange 1 corresponds to the gap between the inner ring 2 and the outer ring 4. Preferably, the width of the sealing groove is greater than or equal to the distance between the inner ring 2 and the outer ring 4, that is, the sealing ring 6 installed in the sealing groove corresponds to the gap between the inner ring 2 and the outer ring 4, and the sealing ring 6 can seal the cooling water pipe 3 installed between the inner ring 2 and the outer ring 4.
In one embodiment, as shown in fig. 2, the cooling water introduced into the cooling water pipes 3 flows in a downward and upward manner, in which case the water inlet pipes 31 of the cooling water pipes 3 are positioned above the furnace body base 5 and adjacent to the furnace body base 5, and the water outlet pipes 32 of the cooling water pipes 3 are positioned below the furnace lid mounting flange 1 and adjacent to the furnace lid mounting flange 1. In other embodiments, the cooling water introduced into the cooling water pipe 3 may also flow in an up-and-down manner.
In one embodiment, the cooling water pipe 3 is formed of a copper pipe and an oxidation preventing layer is provided outside the copper pipe to extend the life span of the cooling water pipe 3.
Example one
The vacuum furnace body cooling water channel comprises an inner ring 2, a cooling water pipe 3, an outer ring 4, a furnace body base 5 and a furnace cover mounting flange 1, wherein the cooling water pipe 3 is formed by a copper pipe, the cross section of the cooling water pipe 3 is circular, the outer diameter of the cooling water pipe 3 is 12mm, and the wall thickness of the cooling water pipe 3 is 2mm. The outer diameter of the inner ring 2 is 692mm, the wall thickness of the inner ring 2 is 6mm, the upper end and the lower end of the inner ring 2 are respectively fixed on the furnace cover mounting flange 1 and the furnace body base 5 through argon arc welding and full welding, the cooling water pipes 3 are wound on the inner ring 2 at equal intervals outside the inner ring 2, and the winding interval of the cooling water pipes 3 is 60mm. The outer diameter of the outer ring 4 is 720mm and the wall thickness of the outer ring 4 is 2mm, the outer ring 4 is sleeved outside the cooling water pipe 3, the upper end and the lower end of the outer ring 4 are respectively fixed on the furnace cover mounting flange 1 and the furnace body base 5 through argon arc welding full-weld, and the distance between the outer ring 4 and the inner ring 2 is 12mm.
Example two
Vacuum furnace body cooling water course includes inner circle 2, condenser tube 3, outer lane 4, furnace body base 5 and bell mounting flange 1, and condenser tube 3 is formed by the copper pipe, and condenser tube 3's cross-section is semicircular and condenser tube 3's cross-section radius is 12mm, and semicircular diameter side forms condenser tube 3 and the outside first surface of laminating mutually of inner circle 2, and condenser tube 3's wall thickness is 2mm. The outer diameter of the inner ring 2 is 692mm, the wall thickness of the inner ring 2 is 6mm, the upper end and the lower end of the inner ring 2 are respectively fixed on the furnace cover mounting flange 1 and the furnace body base 5 through argon arc welding and full welding, the cooling water pipes 3 are wound on the inner ring 2 at equal intervals outside the inner ring 2, and the winding interval of the cooling water pipes 3 is 60mm. The outer diameter of the outer ring 4 is 720mm and the wall thickness of the outer ring 4 is 2mm, the outer ring 4 is sleeved outside the cooling water pipe 3, the upper end and the lower end of the outer ring 4 are respectively fixed on the furnace cover mounting flange 1 and the furnace body base 5 through argon arc welding full-weld, and the distance between the outer ring 4 and the inner ring 2 is 12mm.
In the present invention, in the variant of the vacuum furnace cooling water channel, a pipe (not shown) is respectively sleeved outside the inlet pipe 31 and outside the outlet pipe 32 of the cooling water pipe 3 located outside the outer ring 4, the pipe sleeved outside the inlet pipe 31 corresponds to the inlet on the outer ring 4 and is fixedly connected outside the outer ring 4, and the pipe sleeved outside the outlet pipe 32 corresponds to the outlet on the outer ring 4 and is fixedly connected outside the outer ring 4. The cooling air or air can be introduced into the gap between the inner ring 2 and the outer ring 4 through the pipeline sleeved outside the water inlet pipe 31 and then discharged through the pipeline sleeved outside the water outlet pipe 32, so that the cooling efficiency of the vacuum furnace body is increased.
The main structure of the vacuum furnace body cooling water channel of the utility model adopts argon arc welding, has simple integral structure and convenient matching and installation; an inner ring 2 and an outer ring 4 are welded on a furnace body base 5, a cooling water pipe 3 is wound on the inner ring 2, a furnace cover mounting flange 1 is welded at the upper end, a sealing groove is formed in the furnace cover mounting flange 1, and a sealing ring 6 is mounted; the furnace body is integrally sealed, and the cooling water channel can better reduce the self temperature of the vacuum furnace body.
The above-mentioned embodiments only express the embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention.

Claims (6)

1. A vacuum furnace body cooling water channel is characterized by comprising an inner ring, a cooling water pipe, an outer ring and a furnace body base, wherein the lower end of the inner ring is fixedly connected with the furnace body base;
the cooling water pipe is provided with a first surface attached to the outer part of the inner ring, the section of the cooling water pipe is semicircular, and the diameter side of the semicircle forms the first surface;
the furnace cover mounting flange is characterized by further comprising a furnace cover mounting flange, wherein the upper end of the inner ring is fixedly connected with the furnace cover mounting flange, the upper end of the outer ring is fixedly connected with the furnace cover mounting flange, the furnace cover mounting flange is provided with a sealing groove, a sealing ring is arranged in the sealing groove, and the position of the sealing groove of the furnace cover mounting flange corresponds to a gap between the inner ring and the outer ring;
the cooling water pipe is characterized in that a water inlet pipe and a water outlet pipe are respectively arranged at two ends of the cooling water pipe, an inlet and an outlet which respectively correspond to the water inlet pipe and the water outlet pipe are arranged on the outer ring, and cooling air or air is introduced into a gap between the inner ring and the outer ring through a pipeline sleeved outside the water inlet pipe and then is discharged through the pipeline sleeved outside the water outlet pipe.
2. The vacuum furnace body cooling water channel according to claim 1, wherein the cooling water pipe is fixed on the inner ring by argon arc welding spot welding.
3. The cooling water channel of the vacuum furnace body according to claim 1, wherein the cooling water pipe is wound and fixed on the inner ring in an equally spaced manner.
4. The vacuum furnace body cooling water channel according to claim 1, wherein the lower end of the inner ring is fixed on the furnace body base by argon arc welding and full welding, and the lower end of the outer ring is fixed on the furnace body base by argon arc welding and full welding.
5. The cooling water channel of the vacuum furnace body according to claim 1, wherein the upper end of the inner ring is fixed on the furnace cover mounting flange by argon arc welding and full welding, and the upper end of the outer ring is fixed on the furnace cover mounting flange by argon arc welding and full welding.
6. The vacuum furnace body cooling water channel according to claim 1, wherein the cooling water pipe is formed of a copper pipe.
CN202221495455.1U 2022-06-13 2022-06-13 Cooling water channel of vacuum furnace body Active CN217628738U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221495455.1U CN217628738U (en) 2022-06-13 2022-06-13 Cooling water channel of vacuum furnace body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221495455.1U CN217628738U (en) 2022-06-13 2022-06-13 Cooling water channel of vacuum furnace body

Publications (1)

Publication Number Publication Date
CN217628738U true CN217628738U (en) 2022-10-21

Family

ID=83626933

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221495455.1U Active CN217628738U (en) 2022-06-13 2022-06-13 Cooling water channel of vacuum furnace body

Country Status (1)

Country Link
CN (1) CN217628738U (en)

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