CN217600833U

CN217600833U - Base material fixing frame for vacuum coating

Info

Publication number: CN217600833U
Application number: CN202220908718.0U
Authority: CN
Inventors: 陈晓东
Original assignee: Changzhou Xinli Ion Technology Co ltd
Current assignee: Changzhou Xinli Ion Technology Co ltd
Priority date: 2022-04-20
Filing date: 2022-04-20
Publication date: 2022-10-18
Anticipated expiration: 2032-04-20

Abstract

The utility model discloses a substrate mount for vacuum coating belongs to substrate mount technical field, including box and fixture, the bottom fixedly connected with supporting leg of box, annular logical groove has been seted up at the top of box, and annular spout has been seted up to the inboard bottom of box, and the medial surface fixedly connected with ring gear of box, the inside of box are provided with driven gear, driven gear and ring gear meshing, driven gear's bottom fixedly connected with removes the axle, driven gear's top fixedly connected with back shaft, and the top of back shaft is provided with fixture. The utility model discloses a through being provided with driving motor, driving gear, driven gear and ring gear, utilize driving motor to drive the driving gear and rotate, and then drive driven gear and rotate, under the effect of ring gear for driven gear carries out the rotation when can drive fixture and be circular motion, thereby can be continuous change everywhere the position of placing of substrate and place the angle, guarantees the homogeneity of substrate coating film.

Description

Base material fixing frame for vacuum coating

Technical Field

The utility model relates to a substrate mount technical field especially relates to a substrate mount for vacuum coating.

Background

Vacuum deposition is a technique for producing a thin film material, in which atoms of a material are extracted from a heating source and hit on the surface of an object to be coated in a vacuum deposition chamber, and simply, a method of evaporating or sputtering a metal, an alloy or a compound (referred to as a target) in a vacuum to solidify and deposit on the object to be coated (referred to as a substrate) is called vacuum deposition.

The existing substrate fixing frame can only realize the function of placing and fixing the substrate generally, after the substrate is placed in the vacuum deposition chamber, the position and the placing angle of the substrate are inconvenient to adjust, and because a plurality of substrates are often placed in the vacuum deposition chamber, the phenomenon that the coating of the substrate at each position is uneven is easy to occur, so that the substrate fixing frame for vacuum coating is provided to solve the problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem that the position of the base material is inconvenient to adjust and the angle is inconvenient to place by the base material fixing frame in the prior art, and providing a base material fixing frame for vacuum coating.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a substrate mount for vacuum coating, includes box and fixture, the bottom fixedly connected with supporting leg of box, annular logical groove has been seted up at the top of box, annular spout has been seted up to the inboard bottom of box, the medial surface fixedly connected with ring gear of box, the inside of box is provided with driven gear, driven gear and ring gear meshing, driven gear's bottom fixedly connected with removes the axle, remove axle and annular spout sliding connection, driven gear's top fixedly connected with back shaft, the top of back shaft is provided with fixture, the centre gripping has the substrate in the fixture, the through hole has been seted up in the bottom center department of box, the bottom of box is located through hole department fixedly connected with motor case.

Preferably, a driving motor is installed inside the motor box, an output end of the driving motor is fixedly connected with an output shaft, the top end of the output shaft penetrates through the through hole, a driving gear is fixedly connected to the top end of the output shaft, and the driving gear is meshed with the driven gear.

Preferably, a fixed rod is fixedly connected to the center of the top end of the driven gear, and the top end of the fixed rod is fixedly connected with the top end of the inner side of the box body.

Preferably, a groove is formed in the end face of the bottom end of the moving shaft, and a ball is arranged in the groove.

Preferably, fixture includes the centre gripping frame of fixed connection on back shaft top, sliding connection is at the magnetic sheet of the medial surface of centre gripping frame, fixed connection is at the guide bar of a side of magnetic sheet and the magnetism clamp splice of sliding connection on the guide bar.

Preferably, the top end of the magnetic clamping block is fixedly connected with a handle, a movable through groove is formed in one side face of the clamping frame, one end of the guide rod penetrates through the movable through groove, and the nut block is fixedly connected to the end of the guide rod.

Preferably, the two sides of the interior of the nut block are provided with internal threads with opposite directions, the interior of the nut block on the two sides is in threaded connection with a bidirectional screw rod together, and one end of the bidirectional screw rod is fixedly connected with a knob.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses a be provided with driving motor, driving gear, driven gear and ring gear, utilize driving motor to drive the driving gear and rotate, and then drive driven gear and rotate, under the effect of ring gear for driven gear carries out the rotation when can drive fixture and be circular motion, thereby can be continuous change everywhere the position of placing of substrate and place the angle, thereby guarantee the homogeneity of substrate coating film everywhere in the vacuum deposition cavity.

2. The utility model discloses a be provided with fixture, utilize fixture can realize the centre gripping fixed function to the substrate, utilize two-way screw rod and nut piece cooperation to realize the distance between the inside magnetism clamp splice of fixture simultaneously, it is fixed that the convenience carries out the centre gripping to the substrate of different specifications.

Drawings

Fig. 1 is a schematic perspective view of a substrate holder for vacuum deposition according to the present invention;

fig. 2 is a schematic view of an internal structure of a substrate holder for vacuum deposition according to the present invention;

fig. 3 is an enlarged schematic structural view of a position a in the substrate fixing frame for vacuum coating according to the present invention;

fig. 4 is an enlarged schematic structural diagram of a position B in a substrate fixing frame for vacuum deposition according to the present invention.

In the figure: 1. a box body; 101. an annular chute; 102. an annular through groove; 2. supporting legs; 3. a driving gear; 4. a motor case; 5. a drive motor; 6. a ball bearing; 7. a toothed ring; 8. a driven gear; 9. a clamping frame; 901. moving the through groove; 10. a magnetic plate; 11. a handle; 12. a magnetic clamp block; 13. a guide bar; 14. a support shaft; 15. a bidirectional screw; 16. a nut block.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, rather than all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative work belong to the protection scope of the present invention based on the embodiments of the present invention.

Referring to fig. 1-4, a substrate mount for vacuum coating, including box 1 and fixture, the bottom fixedly connected with supporting leg 2 of box 1, annular logical groove 102 has been seted up at the top of box 1, annular spout 101 has been seted up to the inboard bottom of box 1, the medial surface fixedly connected with ring gear 7 of box 1, the inside of box 1 is provided with driven gear 8, driven gear 8 meshes with ring gear 7, driven gear 8's bottom fixedly connected with removes the axle, remove axle and annular spout 101 sliding connection, driven gear 8's top fixedly connected with back shaft 14, the top of back shaft 14 is provided with fixture, the centre gripping has the substrate in the fixture, the bottom center department of box 1 has seted up the through hole, the bottom of box 1 is located through hole department fixedly connected with motor case 4.

The internally mounted of motor case 4 has driving motor 5, and driving motor 5's output fixedly connected with output shaft, the top of output shaft pass through hole and this end fixedly connected with driving gear 3, and driving gear 3 and driven gear 8 mesh, and driving motor 5 drives driving gear 3 and rotates, can provide power for driven gear 8's rotation.

The top center department fixedly connected with dead lever of driven gear 8, the top of dead lever and the inboard top fixed connection of box 1, the fixed action on box 1 top can be realized to the dead lever (because the setting of annular through groove 102 for box 1 top and box 1 separation, so need fix it).

The bottom end face of the moving shaft is provided with a groove, a ball 6 is arranged in the groove, and the friction force between the bottom end of the moving shaft and the bottom end of the annular sliding groove 101 can be reduced due to the arrangement of the ball 6.

Fixture includes the centre gripping frame 9 of fixed connection on back shaft 14 top, and sliding connection is at the magnetic sheet 10 of the medial surface of centre gripping frame 9, and fixed connection can realize the centre gripping fixed function to the substrate at the guide bar 13 of the guide bar 13 and the magnetic clamp splice 12 of sliding connection on guide bar 13 of magnetic sheet 10 one side, and the convenience carries out the centre gripping to the substrate of different specifications fixed.

The top fixedly connected with handle 11 of magnetism clamp splice 12, the groove 901 that removes has been seted up to a side of centre gripping frame 9, and the groove 901 that removes and this end fixedly connected with nut piece 16 are passed to the one end of guide bar 13, and magnetism clamp splice 12 cooperation magnetic sheet 10 produces magnetic attraction, can realize the centre gripping fixed function to the substrate.

The opposite internal thread of trend has been seted up to the inside of both sides nut block 16, and the common threaded connection in inside of both sides nut block 16 has two-way screw rod 15, and the one end fixedly connected with knob of two-way screw rod 15, nut block 16 cooperation two-way screw rod 15 can realize the distance between the magnetism clamp splice 12, and the convenience is carried out the centre gripping fixedly to the substrate of different specifications.

The utility model discloses when using, can be according to the specification of substrate, through the rotatory two-way screw rod 15 of knob, make 16 reverse direction movements of nut piece, and then drive magnetic plate 10 and magnetism through guide bar 13 and inhale the board motion, and then can increase the distance between the magnetic clamp splice 12 (reverse above-mentioned operation can reduce the distance between the magnetic clamp splice 12), then through handle 11 pulling magnetic clamp splice 12, make it separate with magnetic plate 10, arrange the bottom of substrate in centre gripping frame 9, loosen handle 11, utilize the magnetic attraction between magnetic clamp splice 12 and the magnetic plate 10 to realize the centre gripping fixed function of substrate.

After the substrate clamping is fixed, the driving motor 5 is started, the substrate fixing frame is arranged in the vacuum deposition chamber, the driving motor 5 drives the driving gear 3 to rotate, and then drives the driven gear 8 to rotate, so that the driven gear 8 rolls along the gear ring 7 to do circular motion, and further the driven gear 8 drives the clamping mechanism to do circular motion through the supporting shaft 14 and simultaneously enables the clamping mechanism to rotate, the clamping mechanism drives the substrate to do circular motion and simultaneously enables the substrate to rotate, and therefore the placing position and the placing angle of each substrate can be continuously changed, and the uniformity of each substrate coating in the vacuum deposition chamber is guaranteed.

The above, only be the embodiment of the preferred of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, which are designed to be replaced or changed equally, all should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a substrate mount for vacuum coating, includes box (1) and fixture, its characterized in that, bottom fixedly connected with supporting leg (2) of box (1), annular logical groove (102) have been seted up at the top of box (1), annular spout (101) have been seted up to the inboard bottom of box (1), medial surface fixedly connected with ring gear (7) of box (1), the inside of box (1) is provided with driven gear (8), driven gear (8) and ring gear (7) meshing, the bottom fixedly connected with of driven gear (8) removes the axle, remove axle and annular spout (101) sliding connection, the top fixedly connected with back shaft (14) of driven gear (8), the top of back shaft (14) is provided with fixture, the fixture inside centre gripping has the substrate, the through hole has been seted up in the bottom center department of box (1), the bottom of box (1) is located through hole department fixedly connected with motor case (4).

2. The substrate holder according to claim 1, wherein: the internal mounting of motor case (4) has driving motor (5), the output fixedly connected with output shaft of driving motor (5), the top of output shaft passes through the through hole and this end fixedly connected with driving gear (3), driving gear (3) and driven gear (8) meshing.

3. The substrate holder according to claim 1, wherein: the top end center of the driven gear (8) is fixedly connected with a fixed rod, and the top end of the fixed rod is fixedly connected with the top end of the inner side of the box body (1).

4. The substrate holder according to claim 1, wherein: the bottom end face of the moving shaft is provided with a groove, and a ball (6) is arranged in the groove.

5. The substrate holder according to claim 1, wherein: the clamping mechanism comprises a clamping frame (9) fixedly connected to the top end of a supporting shaft (14), a magnetic plate (10) slidably connected to the inner side face of the clamping frame (9), a guide rod (13) fixedly connected to one side face of the magnetic plate (10) and a magnetic clamping block (12) slidably connected to the guide rod (13).

6. The substrate holder according to claim 5, wherein: the magnetic clamping block is characterized in that a handle (11) is fixedly connected to the top end of the magnetic clamping block (12), a movable through groove (901) is formed in one side face of the clamping frame (9), one end of the guide rod (13) penetrates through the movable through groove (901), and the nut block (16) is fixedly connected to the end of the guide rod.

7. The substrate holder according to claim 6, wherein: the two sides of the inner portion of the nut block (16) are provided with inner threads with opposite directions, the inner portions of the nut block (16) on the two sides are connected with a bidirectional screw rod (15) through common threads, and one end of the bidirectional screw rod (15) is fixedly connected with a knob.