CN217588881U

CN217588881U - Wafer carrier FOUP handle

Info

Publication number: CN217588881U
Application number: CN202221445205.7U
Authority: CN
Inventors: 童明; 李闯
Original assignee: Zhejiang Saijin Semiconductor Technology Co ltd
Current assignee: Zhejiang Saijin Semiconductor Technology Co ltd
Priority date: 2022-06-09
Filing date: 2022-06-09
Publication date: 2022-10-14
Anticipated expiration: 2032-06-09

Abstract

The utility model discloses a wafer carrier FOUP handle, including handle, FOUP box, cap buckle, top pin, overhead traveling crane dish, bottom pin and transfer dish, the handle is equipped with a set ofly, a set ofly the handle is installed in the left and right sides of FOUP box in a symmetrical mode, overhead traveling crane dish is installed at the top of FOUP box, the transfer dish is installed at the bottom of FOUP box; the bottom at both ends all is equipped with the boss about the handle, the cap knot joint is in the boss bottom, the cap is detained and is square column structure, the cap is detained the bottom and is equipped with the buckle, through integrative injection moulding between cap knot and the buckle, the top pin is installed between handle top and FOUP box top, the bottom pin is fixed between handle bottom and delivery tray top. The handle can be installed conveniently and quickly through the clamping mode, the handle is simple and clean to install, pins are added to prevent loosening, and the handle is safe, convenient, fast and reliable.

Description

Wafer carrier FOUP handle

Technical Field

The utility model relates to the field of semiconductor technology, specifically be a wafer carrier FOUP handle.

Background

A Front Opening Unified Pod (FOUP), which is a container used for protecting, transporting and storing wafers in semiconductor manufacturing process, can accommodate 25 wafers with a thickness of 300mm, and the main components of the FOUP are a Front Opening container capable of accommodating 25 wafers and having a Front Opening door frame dedicated container for Opening and closing, which is an important transfer container of an automated transfer system dedicated to a 12-inch (300 mm) wafer factory.

The existing wafer carrier has the following defects:

the current mainstream wafer carrier FOUP on the market is provided with a handle on each of the left side and the right side so as to be convenient for manual carrying; the two ends of the handle are connected and fixed with the box body through screws, fine metal dust is easily generated when the screws are screwed in the process of fixing the screws, the metal screws are easy to rust in the processes of cleaning and the like, and the two factors easily pollute a field machine table and the environment.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model provides a not enough to prior art, the utility model provides a medical science is kept apart and is observed facility has solved current wafer carrier handle and has all passed through the screw fixation, nevertheless produces slight metal cuttings easily when twisting the screw, and the metal screw rusts easily appearing in clean abluent processes such as moreover, and the problem of on-the-spot board and environment is all polluted easily to these two factors.

(II) technical scheme

In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: a FOUP handle of a wafer carrier comprises a handle, a FOUP box body, a cap buckle, a top pin, an overhead traveling crane tray, a bottom pin and a conveying tray, wherein the handle is provided with a group, the group of handles are symmetrically arranged on the left side and the right side of the FOUP box body, the overhead traveling crane tray is arranged on the top of the FOUP box body, and the conveying tray is arranged on the bottom of the FOUP box body;

preferably, the bottoms at the upper end and the lower end of the handle are respectively provided with a boss, the cap buckle is clamped at the bottom of the boss, the cap buckle is of a square structure, the bottom of the cap buckle is provided with a buckle, the cap buckle and the buckle are integrally formed through injection molding, the top pin is installed between the top of the handle and the top of the FOUP box, and the bottom pin is fixed between the bottom of the handle and the top of the conveying disc.

Preferably, a group of clamping grooves are formed in the left side and the right side of the FOUP box body, the clamping grooves are of a structure like a Chinese character '20886', and the insides of the clamping grooves are of a through structure.

Preferably, three groups of large clamping holes distributed in a symmetrical mode are formed in the outer side of the top of the conveying disc, and a group of small clamping holes distributed in a symmetrical mode are formed in the outer side of the top of the conveying disc.

Preferably, the handle is of a radian-shaped structure, a plurality of groups of anti-skidding blocks are arranged on the surface of the handle, and the anti-skidding blocks are connected through reinforcing ribs.

Preferably, the bottom pin is an inverted T-shaped structure, and a group of small bosses which are distributed in a symmetrical mode is arranged on the surface of the bottom pin.

(III) advantageous effects

The utility model provides a wafer carrier FOUP handle. The method has the following beneficial effects:

the plastic buckle connecting handle is designed, the stress surface of the plastic buckle connecting handle is large, screws are not needed in installation, the handle is simple and clean in installation, pins are added to prevent loosening, safety, convenience, rapidness and reliability are achieved, when the plastic buckle connecting handle is installed, workers push bosses above and below the handle to the bottom along upper and lower clamping grooves of an FOUP box body, then buckle cap buckles are buckled into the upper and lower parts, the buckles of the cap buckles buckle the handle to mutually lock and position the handle, a top pin is pressed into the handle from the top, the top pin is pressed fixedly and does not slip out by depending on a crown block plate arranged behind the top pin, after the conveying plate is arranged on the bottom pin, the bottom pin penetrates through the conveying plate to be pressed in, small bosses on the bottom pin do not slip out, after the left handle and the right handle are arranged, double protection of the cap buckles and the upper pin and the lower pin is achieved, and the situation of slipping out can not occur when the FOUP box body is lifted by holding the handle.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic structural view of the present invention with the integral components separated;

FIG. 3 is a schematic structural view of the handle of the present invention;

FIG. 4 is a schematic structural view of the cap buckle of the present invention;

fig. 5 is a schematic structural view of the bottom pin of the present invention.

In the figure, 1, a handle; A. a boss; 2. a FOUP box; B. a card slot; 3. a cap buckle; C. buckling; 4. a top pin; 5. an overhead travelling crane pan; 6. a bottom pin; D. a small boss; 7. a conveying tray; 8. a large clamp hole; 9. a small clamp hole; 10. and (4) anti-skid blocks.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

Referring to fig. 1-5, an embodiment of the present invention provides a technical solution: a FOUP handle of a wafer carrier comprises a handle 1, a FOUP box body 2, a cap buckle 3, a top pin 4, an overhead traveling crane disk 5, a bottom pin 6 and a conveying disk 7, wherein the handle 1 is provided with a group, the group of handles 1 are symmetrically arranged on the left side and the right side of the FOUP box body 2, the overhead traveling crane disk 5 is arranged on the top of the FOUP box body 2, and the conveying disk 7 is arranged on the bottom of the FOUP box body 2;

the bottom at both ends all is equipped with boss A about

handle

1, 3 joints are detained to the cap in boss A bottom, the cap is detained 3 and is square column structure, the cap is detained 3 bottoms and is equipped with buckle C, the cap is detained between 3 and the buckle C through integrative injection moulding, top pin 4 is installed between handle 1 top and FOUP box 2 top, bottom pin 6 is fixed between handle 1 bottom and delivery tray 7 top, this kind of handle 1, the stress surface is bigger, the installation does not need the screw, and just as long as the joint divides the mode just can install handle 1, and this kind of handle 1 installation is clean simple to increase top pin 4 and bottom pin and prevent not hard up, thereby reached safe convenient and fast reliable benefit.

The left side and the right side of the FOUP box body 2 are respectively provided with a group of clamping grooves B, the clamping grooves B are in a structure like a letter '20886', the inner parts of the clamping grooves B are in a through structure, the clamping grooves B on the left side and the right side of the FOUP box body 2 are convenient for clamping connection of the handle 1, so that the handle 1 can be installed without screws, and the clamping grooves B are in a structure like a letter '20886', so that the stability of the structure of the clamping grooves B is improved, and the situation that the clamping grooves B collapse is prevented.

The outside of 7 tops of transfer dish is equipped with three big card holes 8 of group that are the symmetric mode and distribute, and the 7 tops of transfer dish outside is equipped with a set of little card hole 9 that is the symmetric mode and distributes, and the big card hole 8 of three groups at 7 tops of transfer dish is for the convenience of carrying out the joint with 2 bottoms of FOUP box and is connected, and little card hole 9 is for the convenience of inserting bottom pin 4 bottoms to bottom pin 4 carries out fixed connection to transfer dish 7 and handle 1, further makes things convenient for the staff to carry wholly.

Handle 1 is radian column structure, 1 surface of handle is equipped with a plurality of sets of non slipping spur 10, be connected through the strengthening rib between the non slipping spur 10, handle 1 is radian column structure and is for the convenience of staff to grab handle 1, and the non slipping spur 10 on the handle 1 is for when the staff grabs handle 1, improves anti-skidding efficiency, prevents that the condition that the hand skidded from taking place.

Bottom pin 6 is the font structure of falling T, 6 surfaces of bottom pin are equipped with a set of little boss D that is the symmetric mode and distributes, 6 tops of bottom pin carry out the joint to 1 bottom of handle, thereby improve the stability that handle 1 is fixed, and in the little calorie of hole 9 on the delivery tray 7 can be gone into to bottom pin 6, thereby be in the same place delivery tray 7 and handle 1 are fixed, further make its staff of being convenient for carry work to its whole, and the little boss D on 6 surfaces of bottom pin can improve the inseparable type of being connected little calorie of hole 9, thereby the condition that prevents to drop takes place.

The working principle is as follows: during operation, the worker pushes the bosses A above and below the handle 1 to the bottom along the upper and lower clamping grooves B of the FOUP box body 2, then the cap buckle 3 is buckled up and down, the cap buckle 3 is buckled with the buckle C to buckle the handle 1 and is mutually locked and positioned with the handle 1, the worker presses the top pin 4 into the handle 1 from the top, the top pin 4 is pressed and fixed to prevent slipping out by relying on the overhead traveling crane plate 5 arranged behind, the worker presses the bottom pin 6 into the conveying plate 7 after the conveying plate 7 is arranged, the small bosses D on the bottom pin 7 prevent backing and slipping out, after the left handle 1 and the right handle 1 are arranged, the cap buckle 3, the top pin 4 and the bottom pin 6 are in double protection, and therefore the situation of disengagement cannot occur when the handle 1 is held to lift the FOUP box body 2.

The utility model 1, a handle; A. a boss; 2. a FOUP box body; B. a card slot; 3. a cap buckle; C. buckling; 4. a top pin; 5. a head-up plate; 6. a bottom pin; D. a small boss; 7. a conveying tray; 8. a large clamping hole; 9. a small clamping hole; 10. non slipping spur, part are the part that general standard spare or technical staff in the field know, and its structure and principle all are this technical staff all can learn or learn through conventional experimental method through the technical manual, the utility model provides a problem be solved current wafer carrier handle all through the screw fixation, nevertheless produce slight metal dust easily when twisting the screw, and the metal screw appears rustting easily in clean abluent processes such as, the problem of on-the-spot board and environment is all polluted easily to these two factors, the utility model discloses a combination of each other of above-mentioned part, can be very convenient just can carry out the installation work to the handle through the joint mode, and this kind of handle installation is clean simple to it prevents not hard up to increase the pin, safe convenient and fast is reliable.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above, it will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, but that the invention may be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. A wafer carrier FOUP handle is characterized in that: the novel FOUP conveying device comprises handles (1), a FOUP box body (2), a cap buckle (3), a top pin (4), a crown block plate (5), a bottom pin (6) and a conveying plate (7), wherein the handles (1) are arranged in a group, the group of handles (1) are symmetrically arranged on the left side and the right side of the FOUP box body (2), the crown block plate (5) is arranged on the top of the FOUP box body (2), and the conveying plate (7) is arranged at the bottom of the FOUP box body (2);

bosses (A) are arranged at the bottoms of the upper end and the lower end of the handle (1), the cap buckle (3) is clamped at the bottoms of the bosses (A), the cap buckle (3) is of a square structure, a buckle (C) is arranged at the bottom of the cap buckle (3), the novel FOUP packaging structure is characterized in that the cap buckle (3) and the buckle (C) are integrally formed through injection molding, the top pin (4) is installed between the top of the handle (1) and the top of the FOUP box body (2), and the bottom pin (6) is fixed between the bottom of the handle (1) and the top of the conveying disc (7).

2. The wafer carrier FOUP handle of claim 1, wherein: the FOUP box body (2) is provided with a group of clamping grooves (B) on the left side and the right side, the clamping grooves (B) are of a structure like a Chinese character '20886', and the insides of the clamping grooves (B) are of a through structure.

3. The handle of claim 1, wherein: the outer side of the top of the conveying disc (7) is provided with three groups of large clamping holes (8) which are distributed in a symmetrical mode, and the outer side of the top of the conveying disc (7) is provided with a group of small clamping holes (9) which are distributed in a symmetrical mode.

4. The wafer carrier FOUP handle of claim 1, wherein: the handle (1) is of a radian-shaped structure, a plurality of groups of anti-skidding blocks (10) are arranged on the surface of the handle (1), and the anti-skidding blocks (10) are connected through reinforcing ribs.

5. The handle of claim 1, wherein: bottom pin (6) are the structure of falling T word form, bottom pin (6) surface is equipped with a set of little boss (D) that are the symmetric mode and distribute.