CN217587340U - Vertical probe card - Google Patents
Vertical probe card Download PDFInfo
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- CN217587340U CN217587340U CN202220916584.7U CN202220916584U CN217587340U CN 217587340 U CN217587340 U CN 217587340U CN 202220916584 U CN202220916584 U CN 202220916584U CN 217587340 U CN217587340 U CN 217587340U
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- clamping
- adjusting
- face
- probe card
- limiting hole
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Abstract
The utility model discloses a rectilinear probe card, including the loading board, still include: the conductive contact is arranged on the upper end face of the bearing plate; the detection shell is connected to the middle position of the upper end face of the bearing plate; the chip placing groove is arranged on the upper end face of the detection shell; the first limiting hole is formed in the inner bottom surface of the chip placing groove; the second limiting hole is arranged on the lower end face of the detection shell; and two ends of the conductive probe are movably nested and connected with the inner parts of the first limiting hole and the second limiting hole. This rectilinear probe card can be convenient for carry out quick dismantlement and installation to detecting the casing through the cooperation that compresses tightly adjustment mechanism and centre gripping adjustment mechanism to can be convenient for change detecting the casing according to the detection demand of different chips, improved this rectilinear probe card's suitability.
Description
Technical Field
The utility model relates to a probe card technical field specifically is a rectilinear probe card.
Background
The probe card is applied in the integrated circuit manufacturing process, and is a clamp for performing electrical test on chips on a wafer during the wafer testing process, the probe card is butted on a wafer conductive prober to be used as a connector between chip electrodes and a testing instrument, and the conductive probes on the probe card are contacted with the chip electrodes to perform electrical test to judge whether the chips are normal, but the existing vertical probe card has the following defects:
the detection shell on the conventional vertical probe card is fixed on the bearing plate in a bolt or adhesive manner, the connection manner limits that the probe card can only detect one type of chip, and when different chips need to be detected, the whole probe card needs to be detached and replaced, so that the operation is complex, and the applicability of the conventional vertical probe card is poor;
therefore, a vertical probe card is needed to solve the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a vertical probe card to it is not convenient for carry out the problem that detects to different model chips to propose current vertical probe card in the above-mentioned background art to solve.
In order to achieve the above object, the utility model provides a following technical scheme:
a vertical probe card includes a carrier plate, and further includes:
the conductive contact is arranged on the upper end face of the bearing plate;
the detection shell is connected to the middle position of the upper end face of the bearing plate;
the chip placing groove is arranged on the upper end face of the detection shell;
the first limiting hole is formed in the inner bottom surface of the chip placing groove;
the second limiting hole is arranged on the lower end face of the detection shell;
the two ends of the conductive probe are movably connected with the inside of the first limiting hole and the second limiting hole in a nested manner;
the fixing grooves are arranged at the left side and the right side of the upper end of the detection shell;
the mounting grooves penetrate through the left side and the right side of the surface of the bearing plate;
the pressing adjusting mechanism is connected to the middle position of the lower end face of the bearing plate;
and the clamping adjusting mechanism is arranged in the inner position of the pressing adjusting mechanism.
By adopting the technical scheme, the detection shell can be conveniently and rapidly disassembled and assembled through the matching of the pressing adjusting mechanism and the clamping adjusting mechanism, so that the detection shell can be conveniently replaced according to the detection requirements of different chips, and the applicability of the vertical probe card is improved.
Preferably, the pressing adjustment mechanism includes:
the fixing frame is fixedly connected to the bottom surface of the bearing plate;
the compression adjusting screw is in threaded connection with the middle position of the lower end face of the fixed frame;
and the pressing adjusting knob is fixedly connected to the lower end face of the pressing adjusting screw rod.
By adopting the technical scheme, the pressing adjusting knob can be rotated to drive the pressing adjusting screw rod, so that the pressing adjusting screw rod drives the clamping adjusting plate to move up and down, and the clamping block can be used for fixedly pressing the detection shell.
Preferably, the grip adjusting mechanism includes:
the clamping adjusting plate is connected to the inside of the fixed frame in a sliding manner;
the adjusting sliding groove is arranged on the upper end face of the clamping adjusting plate;
the lower end of the clamping block is connected to the left side and the right side of the adjusting chute in a sliding mode, and the clamping block penetrates through the mounting groove and extends to the upper end of the bearing plate;
the clamping adjusting screw rod is connected to the inside of the adjusting sliding groove through a bearing;
and the clamping adjusting knob is fixedly connected to one end of the clamping adjusting screw rod.
By adopting the technical scheme, the clamping adjusting knob can be conveniently rotated to drive the clamping adjusting screw rod to rotate, the clamping adjusting screw rod drives the clamping blocks on the two sides of the clamping adjusting screw rod to clamp or loosen the detection shell, and therefore the detection shell can be rapidly and conveniently replaced.
Preferably, the clamping adjusting screw is in threaded connection with the lower end of the clamping block, and the thread turning directions on the side faces of the left end and the right end of the clamping adjusting screw are opposite.
By adopting the technical scheme, the clamping blocks which are connected with the two sides of the clamping adjusting screw rod can be driven to move close to or away from each other when the clamping adjusting screw rod rotates due to the fact that the rotating directions of the threads on the side surfaces of the left end and the right end of the clamping adjusting screw rod are opposite, and therefore clamping or loosening of the detection shell is achieved.
Preferably, the structure shape of the clamping block is set to be L-shaped.
Adopt above-mentioned technical scheme, can be convenient for set up to "L" shape through the structural shape of grip block and make in the grip block can block the fixed slot on the detection casing to make the fixed more stable of detection casing, prevent that it from producing offset.
Preferably, the upper end of the pressing adjusting screw is in bearing connection with the bottom surface of the clamping adjusting plate.
By adopting the technical scheme, the clamping adjusting plate can be conveniently driven to move up and down when the pressing adjusting screw rotates through the bearing connection between the upper end of the pressing adjusting screw and the bottom surface of the clamping adjusting plate.
Compared with the prior art, the beneficial effects of the utility model are that: this rectilinear probe card can be convenient for carry out quick dismantlement and installation to detecting the casing through the cooperation that compresses tightly adjustment mechanism and centre gripping adjustment mechanism to can be convenient for change the detection casing according to the detection demand of different chips, improved this rectilinear probe card's suitability:
compress tightly adjust knob through rotating and make it drive to compress tightly adjusting screw and rotate, it drives the centre gripping regulating plate upward movement to compress tightly adjusting screw under the effect of screw thread, make the centre gripping regulating plate drive grip block upward movement, rethread rotates centre gripping adjusting knob and makes it drive centre gripping adjusting screw and rotate, centre gripping adjusting screw rotates the grip block that drives its both sides and keeps away from the motion each other, make the grip block break away from the fixed slot and will detect the casing and loosen, can accomplish the dismantlement to detecting the casing, the middle part position of loading board is placed to the detection casing that will need to use, fix the detection casing through reverse rotation centre gripping adjusting knob and compression adjusting knob respectively, realize the quick replacement to detecting the casing, thereby can be convenient for change the detection casing according to the detection demand of different chips, the suitability of this vertical probe card has been improved.
Drawings
FIG. 1 is a front perspective view of the present invention;
FIG. 2 is a schematic view of the bottom perspective structure of the present invention;
FIG. 3 is a schematic view of the structure of the clamping and adjusting mechanism of the present invention;
FIG. 4 is a schematic view of the three-dimensional structure of the detecting housing of the present invention;
fig. 5 is a schematic view of the sectional structure of the detection housing of the present invention.
In the figure: 1. a carrier plate; 2. a conductive contact; 3. detecting the shell; 4. a chip placing groove; 5. a first limiting hole; 6. a second limiting hole; 7. a conductive probe; 8. a fixing groove; 9. mounting grooves; 10. a pressing adjustment mechanism; 1001. a fixing frame; 1002. compressing the adjusting screw rod; 1003. pressing the adjusting knob; 11. a clamping adjustment mechanism; 1101. clamping the adjusting plate; 1102. adjusting the chute; 1103. a clamping block; 1104. clamping an adjusting screw rod; 1105. the adjusting knob is clamped.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
Referring to fig. 1-5, the present invention provides a technical solution:
a vertical probe card comprises a loading plate 1, and further comprises:
the conductive contact 2 is arranged on the upper end face of the bearing plate 1; the detection shell 3 is connected to the middle position of the upper end face of the bearing plate 1; the chip placing groove 4 is formed in the upper end face of the detection shell 3; the first limiting hole 5 is formed in the inner bottom surface of the chip placing groove 4, and the first limiting hole 5 is formed in the inner bottom surface of the chip placing groove 4; the second limiting hole 6 is formed in the lower end face of the detection shell 3, and the second limiting hole 6 is formed in the lower end face of the detection shell; the two ends of the conductive probe 7 are movably connected with the inside of the first limiting hole 5 and the second limiting hole 6 in a nested manner; when the chip is required to be detected, the vertical probe card is connected to a detection instrument, the chip is placed in the chip placing groove 4 at the upper end of the detection shell 3, so that the contact of the bottom surface of the chip is contacted with the conductive probe 7, the conductive probe 7 is pressed downwards, the lower end of the conductive probe 7 is contacted with the conductive contact 2 on the bearing plate 1, the chip is electrically communicated with the detection instrument, and the chip is detected.
The fixing grooves 8 are formed in the left side and the right side of the upper end of the detection shell 3, and the fixing grooves 8 are formed in the left side and the right side of the upper end of the detection shell 3; the mounting grooves 9 are arranged at the left side and the right side of the surface of the bearing plate 1 in a penetrating manner; the pressing adjusting mechanism 10 is connected to the middle position of the lower end face of the bearing plate 1, and the pressing adjusting mechanism 10 is connected to the middle position of the lower end face of the bearing plate 1; the pressing adjustment mechanism 10 includes: a fixing frame 1001, wherein the fixing frame 1001 is fixedly connected to the bottom surface of the bearing plate 1; the pressing adjusting screw 1002 is in threaded connection with the middle of the lower end face of the fixing frame 1001; the pressing adjusting knob 1003 is fixedly connected to the lower end face of the pressing adjusting screw 1002; the upper end of the pressing adjusting screw 1002 is connected with the bottom surface of the clamping adjusting plate 1101 through a bearing; the clamping adjusting mechanism 11 is arranged at the inner position of the pressing adjusting mechanism 10, and the clamping adjusting mechanism 11 is arranged at the inner position of the pressing adjusting mechanism 10; the grip adjusting mechanism 11 includes: a clamping adjustment plate 1101, wherein the clamping adjustment plate 1101 is connected to the inside of the fixing frame 1001 in a sliding manner; an adjusting chute 1102, wherein the adjusting chute 1102 is arranged on the upper end surface of the clamping adjusting plate 1101; the lower end of the clamping block 1103 is slidably connected to the left side and the right side of the adjusting chute 1102, and the clamping block 1103 passes through the mounting groove 9 and extends to the upper end of the bearing plate 1; a clamping adjusting screw 1104, wherein the clamping adjusting screw 1104 is connected to the inside of the adjusting chute 1102 through a bearing; a clamping adjusting knob 1105, the clamping adjusting knob 1105 being fixedly connected to one end of the clamping adjusting screw 1104; the clamping adjusting screw 1104 is in threaded connection with the lower end of the clamping block 1103, and the thread turning directions of the side faces of the left end and the right end of the clamping adjusting screw 1104 are opposite; the structure of the clamping block 1103 is set to be "L" shaped; when chips with different models and sizes are required to be detected, the pressing adjusting knob 1003 is rotated to enable the pressing adjusting knob 1003 to drive the pressing adjusting screw 1002 to rotate, the pressing adjusting screw 1002 drives the clamping adjusting plate 1101 to move upwards under the action of threads, the clamping adjusting plate 1101 drives the clamping blocks 1103 to move upwards, then the clamping adjusting knob 1105 is rotated to enable the clamping adjusting knob 1105 to drive the clamping adjusting screw 1104 to rotate, the clamping adjusting screw 1104 rotates to drive the clamping blocks 1103 on the two sides of the clamping adjusting screw to move away from each other, the clamping blocks 1103 are separated from the fixing grooves 8 to loosen the detection shell 3, the detection shell 3 can be detached, the detection shell 3 to be used is placed at the middle position of the bearing plate 1, the detection shell 3 is fixed through reversely rotating the clamping adjusting knob 1105 and the pressing adjusting knob 1003, the detection shell 3 can be rapidly replaced, the applicability of the vertical probe card is improved, and the content which is not described in detail in the description belongs to the prior art known by professionals in the field.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. A vertical probe card comprises a bearing plate (1), and is characterized by further comprising:
the conductive contact (2) is arranged on the upper end face of the bearing plate (1);
the detection shell (3) is connected to the middle position of the upper end face of the bearing plate (1);
the chip placing groove (4), the chip placing groove (4) is arranged on the upper end face of the detection shell (3);
the first limiting hole (5), the first limiting hole (5) is arranged on the inner bottom surface of the chip placing groove (4);
the second limiting hole (6) is formed in the lower end face of the detection shell (3), and the second limiting hole (6) is formed in the lower end face of the detection shell;
the two ends of the conductive probe (7) are movably connected with the inner parts of the first limiting hole (5) and the second limiting hole (6) in a nested manner;
the fixing grooves (8) are formed in the left side and the right side of the upper end of the detection shell (3);
the mounting grooves (9) are arranged at the left side and the right side of the surface of the bearing plate (1) in a penetrating manner;
the pressing adjusting mechanism (10), the pressing adjusting mechanism (10) is connected to the middle position of the lower end face of the bearing plate (1);
and the clamping adjusting mechanism (11), wherein the clamping adjusting mechanism (11) is arranged at the inner position of the pressing adjusting mechanism (10).
2. A vertical probe card according to claim 1, characterized in that the pressure adjustment mechanism (10) comprises:
the fixing frame (1001) is fixedly connected to the bottom surface of the bearing plate (1);
the compression adjusting screw rod (1002), the compression adjusting screw rod (1002) is in threaded connection with the middle position of the lower end face of the fixing frame (1001);
and the pressing adjusting knob (1003) is fixedly connected to the lower end face of the pressing adjusting screw rod (1002).
3. A vertical probe card according to claim 2, characterized in that the clamping adjustment mechanism (11) comprises:
a clamping adjusting plate (1101), wherein the clamping adjusting plate (1101) is connected to the inside of the fixing frame (1001) in a sliding manner;
the adjusting sliding groove (1102), the adjusting sliding groove (1102) is arranged on the upper end face of the clamping adjusting plate (1101);
the lower end of the clamping block (1103) is connected to the left side and the right side of the adjusting sliding groove (1102) in a sliding mode, and the clamping block (1103) penetrates through the mounting groove (9) to extend to the upper end of the bearing plate (1);
the clamping adjusting screw (1104) is connected to the inner part of the adjusting chute (1102) through a bearing;
a clamping adjustment knob (1105), the clamping adjustment knob (1105) being fixedly connected to one end of the clamping adjustment screw (1104).
4. A vertical probe card according to claim 3, wherein: the clamping adjusting screw (1104) is in threaded connection with the lower end of the clamping block (1103), and the thread turning directions on the side faces of the left end and the right end of the clamping adjusting screw (1104) are opposite.
5. A vertical probe card according to claim 4, wherein: the structure shape of the clamping block (1103) is set to be L-shaped.
6. A vertical probe card according to claim 3, wherein: the upper end of the pressing adjusting screw rod (1002) is in bearing connection with the bottom surface of the clamping adjusting plate (1101).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220916584.7U CN217587340U (en) | 2022-04-20 | 2022-04-20 | Vertical probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220916584.7U CN217587340U (en) | 2022-04-20 | 2022-04-20 | Vertical probe card |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217587340U true CN217587340U (en) | 2022-10-14 |
Family
ID=83542939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220916584.7U Active CN217587340U (en) | 2022-04-20 | 2022-04-20 | Vertical probe card |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217587340U (en) |
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2022
- 2022-04-20 CN CN202220916584.7U patent/CN217587340U/en active Active
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