CN217584034U

CN217584034U - Special gas conveying equipment

Info

Publication number: CN217584034U
Application number: CN202123279382.0U
Authority: CN
Inventors: 李钰国; 张自强
Original assignee: Shenzhen Rongke Technology Co ltd
Current assignee: Jiangsu Rongke Equipment Technology Co ltd
Priority date: 2021-12-24
Filing date: 2021-12-24
Publication date: 2022-10-14
Anticipated expiration: 2031-12-24

Abstract

The utility model relates to a technical field is stored to special air supply source bottle, in particular to special gas conveying equipment, including the cabinet body, be equipped with two air supply source bottles and air supply line in the cabinet body, the air supply line includes TCS pipe of being connected with two air supply source bottles and hydrogen pipe and the argon gas pipe of intercommunication with TCS pipe, is equipped with a plurality of pneumatic diaphragm valves on TCS pipe, hydrogen pipe and the argon gas pipe, is equipped with smoke detector and flame detector in the cabinet body, and smoke detector, flame detector and a plurality of pneumatic diaphragm valves all are connected with the controller electricity. Compared with the prior art, the utility model discloses reduce the risk of manual operation, improve the guarantee of system quality, fine protection components and parts and end of use obtain clean gas, realize the automatic switch-over of two gas source bottles to guarantee incessant supply, when appearing leaking emergence emergencies such as burning because of the accident appears, can emergency treatment, the quick start put out a fire and avoid dangerous expansion, have greatly guaranteed the security, have improved the usability.

Description

Special gas conveying equipment

Technical Field

The utility model relates to a special air supply bottle stores technical field, in particular to special gas conveying equipment.

Background

The TCS (trichlorosilane) gas supply and liquid supply system is used in production workshops of industries such as semiconductor chips, photovoltaic elements and the like. TCS (trichlorosilane) is colorless transparent liquid which has irritant odor, is easy to flow and is easy to volatilize under normal pressure. The material is extremely easy to calcine in air, has the risk of catching fire below-18 ℃, and can be strongly combusted in case of open fire to generate SiO2, HCl and Cl2: siHCl31+ O2 → SiO2+ HCl + Cl2, trichlorosilane vapor can form explosive mixed gas with wide concentration range with air, and the explosive mixed gas causes violent explosion when heated. Decomposition at 900 ℃ produces toxic fumes of chloride (HCl), with the formation of Cl2 and Si. Hydrogen is liberated in alkali liquor, and when the hydrogen contacts with oxidizing substances, an explosive reaction is generated, and the hydrogen reacts with hydrocarbons such as acetylene and hydrocarbon to generate organic chlorosilane. Trichlorosilane does not corrode iron and stainless steel in the anhydrous state, but corrodes most metals in the presence of moisture. Trichlorosilane is also known as trichlorosilane and silachloroform and is used as a raw material of a high molecular organic silicon compound.

The conventional TCS supply device is generally operated in a manual mode, has potential risks on reliability and stability of gas quality in the gas industry, does not automatically modify a gas supply device, cannot reduce the risk of manual operation, is inconvenient to improve the guarantee of system quality, is difficult to prevent particles and pollution sources from entering equipment, cannot well protect components and use ends to obtain clean gas, and is difficult to realize automatic switching of the gas supply device so as to ensure uninterrupted gas supply; when an emergency occurs, emergency treatment cannot be carried out, and the air source is cut off.

SUMMERY OF THE UTILITY MODEL

To the not enough with above-mentioned background art, the utility model provides a special gas conveying equipment.

The utility model adopts the technical scheme as follows: the special gas conveying equipment is characterized in that: the intelligent cabinet temperature adjusting device comprises a cabinet body, be equipped with two air supply bottles and air supply line in the cabinet body, the air supply line include with two the TCS pipe that the air supply bottle is connected and with the hydrogen pipe and the argon gas pipe of TCS pipe intercommunication are equipped with a plurality of pneumatic diaphragm valves on TCS pipe, hydrogen pipe and the argon gas pipe, be equipped with smoke detector and flame detector in the cabinet body, smoke detector, flame detector and a plurality of pneumatic diaphragm valve all is connected with the controller electricity. The scheme has the effects that the controller controls a plurality of pneumatic diaphragm valves, so that the air supply pipeline can realize the automatic switching of two air source bottles, and the uninterrupted air supply is ensured; high-purity hydrogen is input into the hydrogen pipe to be used as filling driving gas, pressure is generated in the gas source cylinder, and therefore TCS liquid is conveyed to a using point; high-purity argon is input through the argon pipe to be used as purging gas, automatic purging can be performed before and after the gas source is replaced, and errors caused by excessive manual operation are prevented; the controller is in communication connection with the terminal, remote monitoring can be carried out, and when an emergency occurs, the air source can be cut off remotely.

Preferably, a manual electric control panel is arranged at the top of the cabinet body. The effect of this scheme is connected with the controller electricity, conveniently controls the internal condition of cabinet.

Preferably, the top of the cabinet body is provided with an indicator lamp. The effect of this scheme is can in time send light alarm, and the staff is informed the gas leakage condition directly perceivedly.

Preferably, an exhaust gas pipe is arranged at the top of the cabinet body and connected with a tail gas treatment device. The effect of this scheme is that directly in time discharges away waste gas after tail gas treatment, avoids the dangerous condition to take place.

Preferably, the air supply pipeline is connected with a vacuum generator, and the vacuum generator is communicated with the exhaust pipe. The effect of this scheme is for producing the vacuum and drawing the waste gas to the exhaust gas treater.

Preferably, the air supply pipeline and the pneumatic diaphragm valve are both made of 3116L stainless steel. The effect of this scheme can guarantee that the material pipeline is not corroded and the raw materials can not remain on the pipeline inner wall, guarantees pipe-line system's cleanliness factor.

Preferably, the cabinet body is connected with an antistatic device. The effect of this scheme is to guarantee the operation safety.

Has the advantages that: compared with the prior art, the utility model provides a pair of special gas conveying equipment reduces the risk of manual operation, improves the guarantee of system quality, fine protection components and parts and end of use obtain clean gas, realize the automatic switch-over of two gas source bottles to guarantee incessant supply, when appearing leaking emergency such as emergence burning because of the accident appears, can emergency treatment, the quick start put out a fire and avoid dangerous expansion, greatly guaranteed the security, improved the usability.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of a gas supply line.

Detailed Description

In order to make the technical solution of the present invention better understood by those skilled in the art, the present invention will be described in detail with reference to the accompanying drawings and the detailed description.

Example 1

As shown in fig. 1, a special gas conveying device includes a cabinet 1, a manual electric control panel 10, an indicator lamp 4 and a waste gas pipe 5 are arranged at the top of the cabinet 1, two gas source bottles 2 and a gas supply pipeline 3 are arranged in the cabinet 1, the waste gas pipe 5 is connected with a vacuum generator 8 between the gas supply pipeline 3 through a pipeline, the gas supply pipeline 3 includes a TCS pipe 31 connected with the two gas source bottles 2 and a hydrogen pipe 32 and an argon pipe 33 communicated with the TCS pipe 31, the gas inlet end of the hydrogen pipe 32 is connected with a high-purity hydrogen source, the gas inlet end of the argon pipe 33 is connected with a high-purity argon source, a plurality of pneumatic diaphragm valves are arranged on the TCS pipe 31, the hydrogen pipe 32 and the argon pipe 33, a smoke detector 6 and a flame detector 7 are arranged in the cabinet 1, the waste gas pipe 5 is connected with a tail gas treatment device through a gas exhaust pipe, the smoke detector 6, the flame detector 7, the pneumatic diaphragm valves, the vacuum generator 8, the manual electric control panel 10 and the indicator lamp 4 are electrically connected with a controller.

Example 2

As shown in fig. 1-2, a special gas conveying apparatus includes a cabinet 1, a manual electric control panel 10, an indicator lamp 4 and a waste gas pipe 5 are arranged at the top of the cabinet 1, two gas source bottles 2 and an air supply pipeline 3 are arranged in the cabinet 1, a vacuum generator 8 is connected between the waste gas pipe 5 and the air supply pipeline 3 through a pipeline, the air supply pipeline 3 includes a TCS pipe 31 connected with the two gas source bottles 2 and a hydrogen pipe 32 and an argon pipe 33 communicated with the TCS pipe 31, the hydrogen pipe 32 and the argon pipe 33 are provided with a plurality of pneumatic diaphragm valves, a smoke detector 6 and a flame detector 7 are arranged in the cabinet 1, the waste gas pipe 5 is connected with a tail gas treatment device through an exhaust pipe, the exhaust pipe is connected with a vacuum generator, and the smoke detector 6, the flame detector 7, the plurality of pneumatic diaphragm valves, the vacuum generator 8, the manual electric control panel 10 and the indicator lamp 4 are all electrically connected with a controller;

the air supply pipeline 3 and the pneumatic diaphragm valve are both made of 3116L stainless steel;

the cabinet body 1 is connected with prevents electrostatic devices, prevent electrostatic devices including ground connection copper nail, earth connection, the earth connection passes through the ground connection nut support connnection to be fixed to the cabinet body on, the earth connection other end passes through screwed connection to ground connection copper nail on.

The working principle is as follows: in the use, control system is through controlling each pneumatic diaphragm valve, realize two air supply bottle automatic switch-overs, and promote air supply bottle internal pressure through inputing high-purity hydrogen, around the source of taking a breath, sweep through inputing high-purity argon gas is automatic, when having high temperature or flame to produce, high temperature detector and flame detector can signals to control system, control system can send control command and close the air supply, prevent that flame from stretching, and send alarm signal, reduce artificial operation, effectively promote gas feeder's degree of automation, reduce manual operation volume and artificial risk by a wide margin, there is better promotion to system air feed quality and reliability.

Finally, it should be noted that the above description is only a preferred embodiment of the present invention, and that those skilled in the art can make various similar representations without departing from the spirit and scope of the present invention.

Claims

1. A special gas delivery apparatus, characterized by: including the cabinet body (1), be equipped with two gas source bottles (2) and air supply line (3) in the cabinet body (1), air supply line (3) include with two TCS pipe (31) that gas source bottle (2) are connected and with hydrogen pipe (32) and argon gas pipe (33) of TCS pipe (31) intercommunication are equipped with a plurality of pneumatic diaphragm valves on TCS pipe (31), hydrogen pipe (32) and argon gas pipe (33), be equipped with smoke detector (6) and flame detector (7) in the cabinet body (1), smoke detector (6), flame detector (7) and a plurality of pneumatic diaphragm valve all is connected with the controller electricity.

2. The special gas delivery device according to claim 1, wherein: the top of the cabinet body (1) is provided with a manual electric control panel (10).

3. The special gas delivery apparatus according to claim 1, wherein: the top of the cabinet body (1) is provided with an indicator lamp (4).

4. The special gas delivery device according to claim 1, wherein: the top of the cabinet body (1) is provided with an exhaust gas pipe (5), and the exhaust gas pipe (5) is connected with a tail gas treatment device.

5. The special gas delivery device according to claim 4, wherein: the air supply pipeline (3) is connected with a vacuum generator (8), and the vacuum generator (8) is communicated with the waste gas pipe (5).

6. The special gas delivery device according to claim 1, wherein: the air supply pipeline (3) and the pneumatic diaphragm valve are both made of 3116L stainless steel materials.

7. The special gas delivery device according to claim 1, wherein: the cabinet body (1) is connected with an antistatic device.