CN217583617U

CN217583617U - Vacuum explosion-proof pipeline for crystal growth red phosphorus process

Info

Publication number: CN217583617U
Application number: CN202221062766.9U
Authority: CN
Inventors: 陈志刚; 王俊仁; 万军召; 张超立
Original assignee: Zhengzhou Hejing Silicon Materials Co ltd
Current assignee: Zhengzhou Hejing Silicon Materials Co ltd
Priority date: 2022-05-06
Filing date: 2022-05-06
Publication date: 2022-10-14
Anticipated expiration: 2032-05-06

Abstract

The application belongs to the technical field of semiconductor production equipment, and particularly relates to a vacuum explosion-proof pipeline for a crystal growth red phosphorus process. The vacuum explosion-proof pipeline comprises: a tee joint connected with the vacuum pipeline and a connecting pipeline connected with two interfaces at two sides of the tee joint; two connectors on two sides and corresponding connecting pipelines of the tee joint are connected with the existing base station pipeline, and an upper connector is sealed by a blind plate matched with a sealing ring; meanwhile, the circumference of the blind plate is provided with a stroke limiting bolt; the tee joint is made of stainless steel 316, and each interface is a DN100 standard interface. In this application, the inventor sets out from the effective release angle thinking of guide inflation gas, through adopting with tee bend top interface as pressure release mouth design and correspond the pipeline design, through keeping specific pressure release mouth, can effectively reduce the impact risk that the dirt explodes to whole pipeline and relevant valve control device, also can effectively improve operational environment's security simultaneously.

Description

Vacuum explosion-proof pipeline for crystal growth red phosphorus process

Technical Field

The application belongs to the technical field of semiconductor production equipment, and particularly relates to a vacuum explosion-proof pipeline used in a crystal growth red phosphorus process.

Background

In the preparation of semiconductor wafers, high-purity silicon raw materials are firstly required to grow into crystal bars in a crystal growing machine. In the growing process, red phosphorus (doping for short) is often required to be doped in the growing process to adjust the final process parameters such as the resistivity of the semiconductor according to the difference of the wafer application, the process and the like.

In actual production, red phosphorus needs to be doped by a single machine under a vacuum condition, but due to the characteristics of relatively high activity, easy oxidation and the like of red phosphorus, red phosphorus or red phosphorus oxide is easy to accumulate and even block a vacuum pipeline and a large butterfly valve along with the increase of operation time and the growth of crystal bars, and therefore, the vacuum pipeline and related butterfly valve devices need to be shut down and cleaned regularly based on the requirement of safe production. However, during actual shutdown maintenance, at the moment of closing the vacuum system, due to the active property of red phosphorus oxide, the risk of dust storm is very easy to occur at the moment of closing, and once the dust storm occurs, severe explosion impact can be generated on devices such as a corrugated pipe, a butterfly valve and a ball valve of a vacuum pipeline, and meanwhile, great danger can be caused on the personal safety of related production operators. Therefore, the method has positive technical significance for further optimizing the design of related pipelines and improving the safety of production operation.

Disclosure of Invention

Aiming at the dust explosion risk during shutdown maintenance in the existing crystal red phosphorus production process, the application aims to provide a targeted vacuum explosion-proof pipeline, thereby laying a certain technical foundation for the safety production of related operations.

The technical scheme adopted by the application is briefly described as follows.

A vacuum explosion-proof pipeline for crystal growth red phosphorus process comprises: a tee joint connected with the vacuum pipeline and a connecting pipeline connected with two interfaces at two sides of the tee joint; two connectors on two sides and corresponding connecting pipelines of the tee joint are connected with the existing base station pipeline, and an upper connector is sealed by a blind plate (flange cover) matched with a sealing ring; meanwhile, the circumference of the blind plate is provided with a stroke limiting bolt (for example, 2 bolts with the size of M8 multiplied by 60mm are adopted to limit the flying degree of the blind plate after dust explosion);

the tee joint is made of stainless steel 316 which is the same as the existing vacuum pipeline material; each interface of the three-way interface is a DN100 standard interface;

in the preferred design, the blind plate is connected with a disassembling rod, so that the disassembling operation of the blind plate is facilitated;

in a further preferred design, a blind plate protective cover is arranged above the blind plate, so that the damage range of the air flow ejected after the blind plate is jacked up is limited.

In the concrete operation and production, depending on the gravity of the blind plate and the pressure difference between the vacuum environment in the vacuum pipeline and the external environment, the blind plate arranged on the upper part of the three-way interface does not need to be fixed too much, and the vacuum degree in the vacuum pipeline can be well maintained. Ensure the crystal growth host computer platform vacuum condition, do not influence under the crystal bar growth condition circumstances, when facing and needing to overhaul doping vacuum line, this application is through addding the design of pressure release mouth on the vacuum line, can effectively guide inside oxide in time release through specific pressure release mouth after taking place the combustion explosion, and the design of cooperation protection casing, can ensure to the at utmost that the blast impact air current does not constitute the security threat to the operating personnel.

The inventor thinks that because the existing vacuum pipeline is a straight-through pipeline structure, when red phosphorus rapidly expands or red phosphorus oxide explodes, and a large amount of rapidly expanding gas can not be effectively released, valve devices such as a vacuum corrugated pipe and a butterfly valve can be impacted, and the whole pipeline is damaged.

In this application, the inventor sets out from the effective release angle thinking of guide inflation gas, through adopting with tee bend top interface as pressure release mouth design and correspond the pipeline design, through keeping specific pressure release mouth, can effectively reduce the impact risk that the dirt explodes to whole pipeline and relevant valve control device, also can effectively improve operation environment's security simultaneously, consequently, has better practical value.

Drawings

FIG. 1 is a diagram of the damage caused by dust explosion in the prior art; the lower graph is a bellows before dust explosion, the upper graph is a bellows after dust explosion, and the comparison shows that the bellows after dust explosion has nearly doubled length and has serious potential safety hazard;

fig. 2 is a schematic structural diagram of a vacuum explosion-proof pipeline provided by the present application.

Detailed Description

The present application is further illustrated by the following examples.

Examples

In the current operation production, mix the phosphorus operation and need the vacuum environment to realize, based on factors such as board shock attenuation and installation convenience simultaneously, relevant pipeline is mostly the direct closed pipeline structure by bellows connection. In the production operation, a crystal growth doping worker needs to maintain a negative pressure condition for growth, and when a pump is stopped (vacuum) for maintenance, the rapid change of the pressure condition under the condition of a sealed space can cause the instant expansion of thermal red phosphorus, so that the problem of dust explosion occurs at a large probability (partial dust explosion consequences are shown in figure 1, and it can be seen that the dust explosion causes great substantial damage to a corrugated pipeline), and further the problem of production safety is caused.

To above-mentioned reason to and combine current pipeline condition, this application has carried out further transformation. The specific outline is as follows.

As shown in fig. 2, the vacuum explosion-proof pipeline for growing red phosphorus provided by the present application comprises: a tee joint 3 connected with the vacuum pipeline and a connecting pipeline connected with two connectors at two sides; two connectors and corresponding connecting pipelines on two sides of the tee joint are connected with the existing base station pipeline, and an upper connector is sealed by a blind plate 2 (a flange cover) matched with a sealing ring; meanwhile, the circumference of the blind plate is provided with a stroke limiting bolt (for example, 2 bolts with the size of M8 multiplied by 60mm are adopted to limit the flying degree of the blind plate after dust explosion);

the tee joint is made of stainless steel 304 which is the same as the existing vacuum pipeline; each interface of the tee joint is a DN100 standard interface;

in the preferred design, the blind plate 2 is connected with a disassembling rod 4, so that the disassembling operation of the blind plate is convenient;

in a further optimized design, a blind plate protective cover 1 is arranged above the blind plate, so that the damage range of the air flow ejected after the blind plate is jacked up is limited.

In the concrete operation and production, depending on the gravity of the blind plate and the pressure difference between the vacuum environment in the vacuum pipeline and the external environment, the blind plate arranged on the upper part of the tee joint does not need to be fixed too much, and the vacuum degree in the vacuum pipeline can be well maintained. Ensure crystal growth host computer platform vacuum condition, do not influence under the crystal bar growth condition circumstances, when facing and needing to overhaul doping vacuum line, this application is through addding the design of pressure release mouth (tee bend 3 upper portion interface promptly) on the vacuum line, can effectively guide inside red phosphorus inflation or red phosphorus oxide in time release through specific pressure release mouth after taking place the combustion explosion, and cooperation protection casing design, but furthest ensures that the explosion impact air current does not constitute the security threat to the operating personnel, and then reaches the purpose of improvement operation production security.

Claims

1. A vacuum explosion-proof pipeline for crystal growth red phosphorus manufacturing process is characterized by comprising: a tee joint connected with the vacuum pipeline and a connecting pipeline connected with two interfaces at two sides of the tee joint;

two connectors on two sides and corresponding connecting pipelines of the tee joint are connected with the existing base station pipeline, and an upper connector is sealed by a blind plate matched with a sealing ring; meanwhile, the circumference of the blind plate is provided with a stroke limiting bolt;

the tee joint is made of stainless steel 316, and each interface is a DN100 standard interface.

2. The vacuum explosion-proof pipeline for crystal growth red phosphorus process of claim 1, wherein the stroke limiting bolt is a bolt with a specification of M8 x 60 mm.

3. The vacuum explosion-proof pipe for the crystal growth red phosphorus process of claim 1, wherein a disassembling rod is connected to the blind plate, thereby facilitating the disassembling of the blind plate.

4. The vacuum explosion-proof pipe for the crystal growth red phosphorus process of claim 1, wherein a blind plate shield is disposed above the blind plate, so as to limit the damage range of the air flow ejected after the blind plate is lifted.