CN217562586U

CN217562586U - Solar silicon wafer wet process quantitative adding device

Info

Publication number: CN217562586U
Application number: CN202220789206.7U
Authority: CN
Inventors: 孙刘竹; 李冰; 朱泽宇; 代昊天
Original assignee: Suzhou Krservice Automation Equipment Co ltd
Current assignee: Suzhou Krservice Automation Equipment Co ltd
Priority date: 2022-04-07
Filing date: 2022-04-07
Publication date: 2022-10-11
Anticipated expiration: 2032-04-07

Abstract

The utility model discloses a solar wafer wet process processing procedure ration adds device uses in solar wafer makes the field, and its technical scheme main points are: a quantitative adding device for a solar silicon wafer wet process comprises a vertically placed barrel body for containing a medium to be added, wherein the top of the barrel body is fixedly connected with an upper cover, and the bottom of the barrel body is fixedly connected with a lower cover; the device also comprises a sensor fixing seat fixedly connected to the equipment installation position and a sensor assembly, one end of the sensor assembly is fixedly connected to the sensor fixing seat and used for calculating the quality of a medium in the barrel body, and the lower cover is fixedly connected with an adding pneumatic valve for controlling the addition of the medium; has the technical effects that: simple structure and low use cost.

Description

Solar silicon wafer wet process quantitative adding device

Technical Field

The utility model relates to a solar wafer makes the field, in particular to solar wafer wet process ration adds device.

Background

The manufacturing process of the solar cell needs to go through a plurality of processes, each process needs different mediums to react with the silicon wafer, and the medium quality and the concentration are attenuated in the reaction process, so that a certain amount of mediums need to be added at regular time to ensure the process requirements.

The existing adding metering meters are mostly in the magnetic expansion type, although the accuracy of the metering mode is high, the metering mode has high requirements on the stability of the liquid level of a medium in an adding barrel, errors and alarms can be generated due to slight fluctuation, so that equipment stops working and certain damage is generated to the equipment, the flow of the medium needs to be controlled to prevent the fluctuation of the liquid level when liquid is supplemented and added, the adding and liquid supplementing efficiency is relatively low, and the improved space is provided.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a solar energy silicon chip wet process ration adds device, its advantage is simple structure, and use cost is low.

The above technical purpose of the present invention can be achieved by the following technical solutions: a quantitative adding device for a solar silicon wafer wet process comprises a vertically placed barrel body for containing a medium to be added, wherein the top of the barrel body is fixedly connected with an upper cover, and the bottom of the barrel body is fixedly connected with a lower cover; the device comprises a sensor fixing seat fixedly connected to the equipment installation position and a sensor assembly, wherein one end of the sensor fixing seat is fixedly connected to the sensor fixing seat and used for calculating the mass of a medium in the barrel body, and the lower cover is fixedly connected with an adding pneumatic valve for controlling the addition of the medium.

Through the technical scheme, sensor fixing base fixed connection is used for fixed sensor subassembly in equipment fixing department, sensor subassembly calculates the medium quality in the measurement ladle body through gravity sensor, when equipment needs the medium to add, sensor subassembly receives the signal and calculates the quality of ladle body and carries out the automatic interpolation of medium, when the medium weight in the ladle body reaches the setting value, the system goes out liquid signal for the addition pneumatic valve of fixed connection on the lower cover, add the pneumatic valve and become to add the medium in the ladle body inside from the off-state into the on-state into silicon chip preparation raw materials, when the quality in the ladle body reduces to the value of settlement, thereby system control adds the pneumatic valve and closes and stop adding the medium, moreover, simple structure, and because the metering mode adopts gravity measurement's mode, consequently need not to consider like prior art whether the liquid level is undulant, simultaneously the utility model discloses only used gravity sensor to carry out gravity measurement compared with prior art, use cost is lower, but the effect that reaches is the same with the effect that prior art reached.

The utility model discloses further set up to: the upper cover is provided with an automatic liquid inlet assembly fixedly connected with, the automatic liquid inlet assembly comprises a liquid inlet bent pipe fixedly connected to the upper cover and a liquid inlet pneumatic valve fixedly connected to the liquid inlet bent pipe on the upper cover and used for automatically controlling the liquid inlet pneumatic valve for feeding liquid into the barrel body.

Through above-mentioned technical scheme, when equipment need carry out the medium and add, the automatic feed liquor subassembly of system control carries out the medium interpolation in to the ladle body automatically, and the feed liquor pneumatic valve becomes the on-state by the off-state this moment, and control medium passes through both ends fixed connection in feed liquor return bend inflow ladle body on feed liquor pneumatic valve and the upper cover, accomplishes the process of adding of medium.

The utility model discloses further set up to: the sensor assembly comprises a cantilever beam single-point weighing sensor and a top hanging cover, the cantilever beam single-point weighing sensor is fixedly connected to the sensor fixing seat and used for detecting the mass of the medium in the barrel body, the top hanging cover is fixedly connected to a cantilever of the cantilever beam single-point weighing sensor in a clamped mode, and the cantilever is fixedly connected to the top hanging cover.

Through above-mentioned technical scheme, the sensor fixing base is with cantilever beam single-point weighing sensor one end fixed connection on the sensor fixing base, at upper cover top end fixed connection top hanging cover and on the cantilever of fixed connection and cantilever beam single-point load-bearing sensor joint, the gravity of ladle body passes through the top hanging cover and transmits on the cantilever that links to each other with it, thereby the cantilever changes the weight of ladle body down the function that the real-time weighing was accomplished to the transmission of pressure on the cantilever beam single-point weighing sensor.

The utility model discloses further set up to: the cantilever comprises a clamping part and a pressing part, wherein one end of the clamping part is clamped on the cantilever beam single-point weighing sensor, the clamping part is fixedly connected to one end of the clamping part and is attached to the cantilever beam single-point weighing sensor, and the pressing part is used for pressing the unfixed end of the cantilever beam single-point weighing sensor.

Through the technical scheme, the joint portion joint of cantilever is on cantilever beam single-point weighing sensor, fixed connection is at the unfixed end of cantilever beam single-point weighing sensor at the underpressure terminal surface subsides of joint portion one end, be used for pressing the mass transmission of ladle body on cantilever beam single-point weighing sensor for the underpressure, thereby the quality of real-time measurement ladle body, and adopt one end joint, the weighing mode that one end was pushed down compares in whole laminating on weighing sensor, on the one hand, adopt lever mechanism to weigh, joint portion is the fulcrum, the underpressure is the underpressure point, be favorable to increasing the underpressure, thereby reduce measuring error, on the other hand, the underpressure portion can be pasted all the time on cantilever beam single-point weighing sensor, avoid appearing the phenomenon of not pasting mutually, reduce measuring error.

The utility model discloses further set up to: the clamping portion comprises a clamping portion body, the end face of the cantilever beam single-point weighing sensor is clamped in a clamping groove between the end face of the cantilever beam single-point weighing sensor and the sensor fixing seat, and the clamping portion body is used for clamping a clamping block and a fixing block of the cantilever beam single-point weighing sensor and is connected to the clamping block in a connecting mode.

Through above-mentioned technical scheme, joint piece joint is at the joint inslot between cantilever beam single-point weighing sensor's terminal surface and the sensor fixing base for joint cantilever beam single-point weighing sensor's stiff end, connecting block fixed connection keep away from the tip of joint end at the joint piece for with joint piece fixed connection under on the splenium, thereby support the joint that makes the one end of cantilever can be stable at cantilever beam single-point weighing sensor's stiff end.

The utility model discloses further set up to: offer on the sensor fixing base and be used for the fixed holding cantilever beam single-point weighing sensor's holding tank, the sensor fixing base includes first sensor fixing base and second sensor fixing base, first sensor fixing base with holding tank on the second sensor fixing base sets up relatively and is connected, is used for fixing cantilever beam single-point weighing sensor one end.

Through the technical scheme, the holding tank is seted up to the sensor fixing base, first sensor fixing base sets up fixed connection with the second sensor fixing base relatively along the position that holds the groove, the holding tank combination of the holding tank of first sensor fixing base and the holding tank of second sensor fixing base forms the big holding tank that is used for fixed holding cantilever beam single-point weighing sensor, when needing to be changed cantilever beam single-point weighing sensor after long-term the use, only need loosen first sensor fixing base and second sensor fixing base and the cantilever beam single-point weighing sensor who renews again can.

The utility model discloses further set up to: the lower cover is fixedly connected with a safety overflow pipe which penetrates into the barrel body and is away from the end face of the lower cover by a certain height.

Through above-mentioned technical scheme, then can't give correct signal control feed liquor pneumatic valve and add the pneumatic valve when cantilever beam single-point weighing sensor trouble or miscalculation, then the medium constantly adds towards the ladle body in when feed liquor pneumatic valve can't normally close and forms the potential safety hazard, consequently welds a pipe and links to each other with the fluid-discharge pipeline at the ladle body internal take the altitude other end, in the direct inflow drain pipe of messenger's more medium, can not spill over or cause the damage to the ladle body and form the potential safety hazard.

To sum up, the utility model discloses following beneficial effect has:

1. because the metering mode adopts a gravity measurement mode, whether the liquid level fluctuates or not does not need to be considered like the prior art;

2. compared with the prior art, the gravity measurement is carried out only by using the gravity sensor, the use cost is lower, and the achieved effect is the same as that achieved by the prior art.

Drawings

FIG. 1 is a schematic view of the overall structure of the present embodiment;

FIG. 2 is an enlarged schematic view of the structure of portion A of FIG. 1;

FIG. 3 is a schematic view of a half-section structure of the present embodiment;

fig. 4 is a schematic structural diagram of the sensor holder of the present embodiment.

Reference numerals: 1. a barrel body; 2. an upper cover; 3. a lower cover; 4. a sensor holder; 41. a first sensor holder; 42. a second sensor holder; 43. accommodating grooves; 44. a stopper; 45. a clamping groove; 5. a sensor assembly; 51. a top hanging cover; 52. a cantilever; 521. a clamping part; 5211. a clamping block; 5212. connecting blocks; 522. a pressing part; 53. a cantilever beam single-point weighing sensor; 6. an automatic liquid inlet assembly; 61. liquid inlet elbow pipe; 62. a liquid inlet pneumatic valve; 7. adding a pneumatic valve; 8. a safe overflow pipe.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Example (b):

referring to fig. 1, a solar silicon wafer wet process quantitative adding device, including the vertical ladle body 1 that is used for holding the medium that needs to add of placing, top fixedly connected with upper cover 2 at ladle body 1, the bottom fixedly connected with lower cover 3 of ladle body 1, at the installation fixedly connected with sensor fixing base 4 of equipment, thereby sensor assembly 5 of medium quality in the ladle body 1 is calculated to fixedly connected with upper cover 2 on sensor fixing base 4, the automatic feed liquor subassembly 6 of fixed connection on upper cover 2, fixed connection is used for the interpolation pneumatic valve 7 of control medium interpolation on lower cover 3, fixed connection safety overflow pipe 8 on lower cover 3.

Specifically, refer to fig. 1 and fig. 2, automatic feed liquor subassembly 6 includes the feed liquor return bend 61 of fixed connection on upper cover 2, it is used for communicateing feed liquor return bend 61 to have seted up the feed liquor hole on upper cover 2, the junction sets up the sealing washer and is used for avoiding the medium to spill, the end fixed connection who keeps away from with upper cover 2 hookup location at feed liquor return bend 61 is used for the air inlet pneumatic valve of automatic control to feed liquor in ladle body 1, feed liquor pneumatic valve 62 is in the closed state when not using, when control system control feed liquor, feed liquor pneumatic valve 62 control truns into the open state by the closed state, the medium is accomplished automatic feed liquor in feed liquor is accomplished in feed liquor pneumatic valve 62 flows into ladle body 1 through feed liquor return bend 61.

Specifically, referring to fig. 2 and 3, the sensor assembly 5 includes a cantilever single-point weighing sensor 53 fixedly connected to the sensor fixing base 4 for detecting the weight of the medium in the tub 1, and a top hanging cover 51 fixedly connected to the top middle position of the upper cover 2, and a cantilever 52 fixedly connected to the top hanging cover 51 in a screw connection manner and clamped to the cantilever single-point weighing sensor 53 and pressing down an unfixed end of the cantilever single-point weighing sensor 53. In the present embodiment, the top hanging cover 51 is fixedly connected to the upper cover 2 by welding, but is not limited to being fixed by welding, and may also be fixed by screws, glue, or the like. In this embodiment, the cantilever single-point load cell 53 is essentially a shear type pressure sensor, and is used to equivalently convert the pressure applied by the cantilever 52 on the cantilever single-point load cell 53 into the weight of the medium to be measured, and transmit the data to the system for analysis.

Specifically, the cantilever 52 includes a clamping portion 521, one end of which is used for clamping the fixed end of the cantilever single-point weighing sensor 53, and a pressing portion 522, which is fixedly connected to the clamping portion 521 and away from the clamping end, and the side of which is attached to the surface of the unfixed end of the cantilever single-point weighing sensor 53, and is used for pressing the unfixed end of the cantilever single-point weighing sensor 53. The clamping portion 521 includes a clamping block 5211 and a fixed connection on the clamping block 5211 in the clamping groove 45 formed between the end face of the fixed end of the cantilever beam single-point weighing sensor 53 and the stop block 44 of the sensor fixing seat 4, and is used for connecting the connecting block 5212 of the pressing portion 522, and the surface of the connecting block 5212 is not attached to the surface of the cantilever beam single-point weighing sensor 53.

Referring to fig. 1 and 4, the sensor holder 4 includes a first sensor holder 41 and a second sensor holder 42, and the first sensor holder 41 and the second sensor holder 42 are in a mirror configuration. Sensor fixing base 4 one end is seted up and is used for holding cantilever beam single point weighing sensor 53's holding tank 43, and the width of holding tank 43 equals the half of cantilever beam single point weighing sensor 53 width, and when first sensor fixing base 41 was connected with second sensor fixing base 42, two holding tanks 43 merge into the big holding tank 43 that the width is the same with cantilever beam single point weighing sensor 53 width to realize cantilever beam single point weighing sensor 53's end fixing. When a new cantilever single-point weighing sensor 53 needs to be replaced, the sensor can be easily replaced only by loosening the first sensor fixing seat 41 and the second sensor fixing seat 42.

Referring to fig. 1 and 3, in particular, two through holes are arranged on the lower cover 3 at intervals, wherein one through hole is fixedly connected with an adding pneumatic valve 7 for controlling the addition of the medium, when the weight of the medium in the barrel body 1 reaches a set value, the system sends a liquid outlet signal to the adding pneumatic valve 7 fixedly connected on the lower cover 3, the adding pneumatic valve 7 changes from a closed state to an open state to add the medium in the barrel body 1 into the silicon chip manufacturing raw material, and when the mass in the barrel body 1 is reduced to the set value, the system controls the adding pneumatic valve 7 to be closed so as to stop adding the medium.

Another through-hole through connection on the lower cover 3 has safe overflow pipe 8, safe overflow pipe 8 penetrates in the ladle body 1 and the mouth of pipe of safe overflow pipe 8 is apart from one section distance of 3 terminal surfaces of lower cover, then can't give correct signal control feed liquor pneumatic valve 62 and add pneumatic valve 7 when cantilever beam single-point weighing sensor 53 trouble or when calculating the error, when the unable normal close of feed liquor pneumatic valve 62, exceed safe overflow pipe 8's mouth of pipe height, then the part that exceeds can flow into in the safe overflow pipe 8 finally flow into the place that equipment specially retrieved unnecessary medium and get into the pipeline circulation, finally add again in the ladle body 1, avoid the medium extravagant.

Brief description of the use process: when the device needs medium addition, the sensor assembly 5 receives a signal and calculates the mass of the barrel body 1 and automatically adds the medium, when the weight of the medium in the barrel body 1 reaches a set value, the system outputs a liquid signal to the adding pneumatic valve 7 fixedly connected to the lower cover 3, the adding pneumatic valve 7 is changed from a closed state to an open state to add the medium in the barrel body 1 into the silicon wafer manufacturing raw material, and when the mass in the barrel body 1 is reduced to the set value, the system controls the adding pneumatic valve 7 to be closed so as to stop adding the medium.

The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications to the present embodiment without inventive contribution as required after reading the present specification, but all of them are protected by patent laws within the scope of the claims of the present invention.

Claims

1. A quantitative adding device for a solar silicon wafer wet process comprises a vertically placed barrel body (1) used for containing a medium to be added, wherein the top of the barrel body (1) is fixedly connected with an upper cover (2), and the bottom of the barrel body is fixedly connected with a lower cover (3); the device is characterized by further comprising a sensor fixing seat (4) fixedly connected to the equipment installation position, a sensor assembly (5) with one end fixedly connected to the sensor fixing seat (4) and used for calculating the quality of a medium in the barrel body (1), and an adding pneumatic valve (7) for controlling the addition of the medium is fixedly connected to the lower cover (3).

2. The quantitative adding device for the wet process of the solar silicon wafer according to claim 1, wherein an automatic liquid inlet assembly (6) is fixedly connected to the upper cover (2), the automatic liquid inlet assembly (6) comprises a liquid inlet bent pipe (61) fixedly connected to the upper cover (2) and a liquid inlet pneumatic valve (62) for automatically controlling liquid inlet to the barrel body (1), the liquid inlet pneumatic valve (62) is connected with one end of the liquid inlet bent pipe (61), and the end is far away from the other end of the liquid inlet bent pipe (61) connected with the upper cover (2).

3. The quantitative adding device for the wet process of the solar silicon wafer according to claim 1, wherein the sensor assembly (5) comprises a cantilever beam single-point weighing sensor (53) fixedly connected to the sensor fixing seat (4) and used for detecting the mass of a medium in the barrel body (1) and a top hanging cover (51) fixedly connected to the top end surface of the upper cover (2), and a cantilever (52) clamped with the cantilever beam single-point weighing sensor (53) is fixedly connected to the top hanging cover (51).

4. The quantitative adding device for the wet process of the solar silicon wafer according to claim 3, wherein the cantilever (52) comprises a clamping portion (521) one end of which is clamped on the cantilever beam single-point weighing sensor (53), and a pressing portion (522) which is fixedly connected to one end of the clamping portion (521), is attached to the cantilever beam single-point weighing sensor (53) and is used for pressing the unfixed end of the cantilever beam single-point weighing sensor (53).

5. The quantitative adding device for the wet process of the solar silicon wafer according to claim 4, wherein the clamping portion (521) comprises a clamping block (5211) clamped in the clamping groove (45) and used for clamping the cantilever beam single-point weighing sensor (53) and a connecting block (5212) fixedly connected to the clamping block (5211) and used for connecting the pressing portion (522), and the clamping groove (45) is located between the end surface of the cantilever beam single-point weighing sensor (53) and the sensor fixing seat (4).

6. The quantitative adding device for the wet process of the solar silicon wafer according to claim 3, wherein the sensor holder (4) is provided with an accommodating groove (43) for fixedly accommodating the cantilever beam single-point weighing sensor (53), the sensor holder (4) comprises a first sensor holder (41) and a second sensor holder (42), and the first sensor holder (41) and the accommodating groove (43) on the second sensor holder (42) are oppositely connected and are used for fixing one end of the cantilever beam single-point weighing sensor (53).

7. The quantitative adding device for the wet process of the solar silicon wafer according to claim 1, wherein a safety overflow pipe (8) is fixedly connected to the lower cover (3), and the safety overflow pipe (8) penetrates into the barrel body (1) and is at a certain height from the end surface of the lower cover (3).