CN217561702U - Vacuum magnetron sputtering coating film target measuring device - Google Patents
Vacuum magnetron sputtering coating film target measuring device Download PDFInfo
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- CN217561702U CN217561702U CN202220736635.8U CN202220736635U CN217561702U CN 217561702 U CN217561702 U CN 217561702U CN 202220736635 U CN202220736635 U CN 202220736635U CN 217561702 U CN217561702 U CN 217561702U
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Abstract
The utility model relates to a vacuum magnetron sputtering coating target measuring device, the measuring device comprises a supporting component, a measuring component and an adjusting component, the supporting component comprises two supporting frames, a guide rail arranged between the two supporting frames and a guide piece which can be arranged on the guide rail in a sliding way, a placing table is arranged on the supporting frames, and a target to be measured is arranged on the placing table; the measuring assembly comprises a clamp and a support, the support is connected to the guide, the clamp is connected to the support, the setting height of the clamp is lower than that of the placing table, and a plurality of accommodating holes for accommodating the measuring probes are formed in the clamp; the adjusting component is connected with the magnet seat and is used for adjusting the magnet seat to move in the direction vertical to the magnet seat. The utility model provides a measuring device, through setting up supporting component, measuring component, adjusting part, can ensure measuring position's accuracy and precision, can guarantee that the measured data deviation is little, and the degree of accuracy is high, can the accurate magnetic induction intensity who measures the target surface.
Description
Technical Field
The utility model relates to a vacuum magnetron sputtering coating film target measuring device.
Background
The vacuum coating comprises optical coating and magnetron sputtering coating, wherein the magnetron sputtering coating is characterized in that under the vacuum condition, the arc discharge technology with low voltage and large current is adopted, the target material is evaporated by utilizing gas discharge, the evaporated material and the gas are ionized, and the evaporated material and the reaction product thereof are deposited on the workpiece by utilizing the acceleration action of an electric field. The method is widely applied in the fields of industrial production or scientific research of optical films, microelectronics, material surface treatment and the like, and is particularly applied to the process of plating a metal monolayer film, an alloy film or a metal compound film on the surface of large-area flat glass, wherein the uniformity of the thickness of the plated film is an important index for detecting the film forming quality, the distribution of a magnetic field plays a role in determining the thickness of the film, and the magnetic field distribution is influenced because certain mechanical vibration exists in the film plating equipment during working and the position of a magnet in magnetic steel can be deviated due to long-time mechanical vibration, so that the magnetic steel and a target material need to be regularly detected.
When the existing magnetic steel and target material are detected, the following problems exist:
1. the handheld gaussmeter is used for measurement, a probe of the gaussmeter is required to be in contact with a target material during measurement, multi-point detection is carried out, and the measurement data error is large due to the fact that the measurement position of each point of the handheld gaussmeter is inaccurate;
2. the detection can be completed by cooperation of multiple persons, so that the detection efficiency is influenced;
3. when the magnetic steel is detected: the magnetic steel is fixedly placed on the frame, the magnetic field faces upwards, then the magnetic field is measured and recorded, the corresponding adjusting point position of the magnetic steel is adjusted according to the value of the magnetic field intensity, the magnetic steel is installed in the rotating target after being adjusted by the magnetic field, and the uniformity is not improved when the magnetic steel is used.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a vacuum magnetron sputtering coating film target measuring device to solve the inaccurate, great problem of measured data error in current measuring position.
In order to achieve the above purpose, the utility model adopts the technical scheme that:
the utility model provides a vacuum magnetron sputtering coating film target measuring device, is provided with the magnet steel in the volume of awaiting measuring target, is provided with magnet seat and base in the magnet steel, offers the trompil that has the internal thread on the base, measuring device include:
the target measuring device comprises a support assembly, a measuring device and a control device, wherein the support assembly comprises two support frames, a guide rail arranged between the two support frames and a guide piece arranged on the guide rail in a sliding manner, a placing table is arranged on the support frames, and a target to be measured is arranged on the placing table;
the measuring assembly comprises a clamp and a support, the support is connected to the guide, the clamp is connected to the support, the setting height of the clamp is lower than that of the placing table, and a plurality of accommodating holes for accommodating measuring probes are formed in the clamp;
and the adjusting assembly is connected with the magnet seat and is used for adjusting the magnet seat to move in the direction vertical to the magnet seat.
Preferably, the adjusting assembly comprises an adjusting shaft, an adjusting nut and a limiting piece, the adjusting shaft comprises a body arranged along the vertical direction, the body is provided with a first end and a second end which are arranged oppositely, and the first end of the body is connected with the magnet seat; the locating part include cylindricality portion and with the spacing portion that cylindricality portion connects, cylindricality portion detachably connect be in the second end of regulating spindle, adjusting nut cover establish cylindricality portion on, spacing portion be used for the restriction adjusting nut break away from the regulating spindle, adjusting nut outer have with the internal thread matched with external screw thread of base trompil, under sealing state, adjusting nut be located the base trompil in, just adjusting nut's one end with the terminal surface of the second end of body offset.
Preferably, the device further comprises a gasket, a through hole for the limiting part to pass through is formed in the gasket, and the other end of the adjusting nut is abutted against the gasket in a sealing state.
Preferably, the second end of the body is provided with a connecting part, the diameter of the connecting part is smaller than the diameter of the body and the inner bore diameter of the adjusting nut, the connecting part and the body are both provided with through holes, and the cylindrical part is partially connected in the through holes.
Preferably, the limiting member is a countersunk head screw.
Preferably, the device further comprises a sealing cover, the sealing cover comprises a cover body and a protruding portion protruding out of the cover body, a containing groove used for containing the limiting portion is formed in the protruding portion, external threads matched with the internal threads of the opening of the base are arranged outside the protruding portion, and the gasket is located between the adjusting nut and the sealing cover in a sealing state.
Preferably, the clamp is detachably arranged on the support.
Preferably, the support is provided with a plurality of adjusting holes arranged along the height direction of the support, the clamp is provided with a plurality of adjusting holes arranged along the height direction of the clamp, and connecting columns are arranged in the adjusting holes on the support and the corresponding adjusting holes on the clamp.
Preferably, the support is in a straight U shape; the clamp is cuboid.
Preferably, a fixing part for fixing the target material is arranged on the placing table.
Because of the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
the utility model provides a vacuum magnetron sputtering coating film target measuring device, through setting up supporting component, measuring component, adjusting part, can guarantee the accuracy and the precision of measuring position, can guarantee that measured data deviation is little, the degree of accuracy is high, can accurately measure the magnetic induction intensity on target surface, the magnetic induction intensity on target surface when really restoring operational environment to improve product homogeneity; the magnetic steel stress intensity on the surfaces of a plurality of targets can be measured simultaneously, the method is suitable for adjusting the magnetic induction intensity of different target intervals, the data accuracy is ensured, and the superposition interference of a magnetic field is reduced.
Drawings
FIG. 1 is an overall structure diagram of the vacuum magnetron sputtering coating target material measuring device provided by the utility model;
FIG. 2 is an exploded view of the vacuum magnetron sputtering coating target material provided by the present invention;
FIG. 3 is an enlarged view of FIG. 2;
FIG. 4 is a cross-sectional view of the vacuum magnetron sputtering coating target provided by the present invention;
FIG. 5 is an enlarged view of FIG. 4;
FIG. 6 is an overall structure diagram of a fixture of the vacuum magnetron sputtering coating target measuring device provided by the utility model;
FIG. 7 is a structural diagram of an adjusting shaft of the vacuum magnetron sputtering coating target material measuring device provided by the utility model;
fig. 8 is a front view of an adjusting shaft of the vacuum magnetron sputtering coating target measuring device provided by the utility model;
FIG. 9 isbase:Sub>A cross-sectional view taken along line A-A of FIG. 8;
fig. 10 is a perspective view of a first viewing angle of a sealing cover of the vacuum magnetron sputtering coating target measuring device provided by the present invention;
fig. 11 is a perspective view of a second viewing angle of a sealing cover of the vacuum magnetron sputtering coating target measuring device provided by the present invention;
fig. 12 is a cross-sectional view of a sealing cover of the vacuum magnetron sputtering coating target measuring device provided by the present invention;
fig. 13 is a perspective view of a gasket of the vacuum magnetron sputtering coating target measuring device provided by the present invention;
fig. 14 is a cross-sectional view of a gasket of the vacuum magnetron sputtering coating target measuring device provided by the present invention.
In the above drawings: 1-support frame, 2-guide rail, 3-guide piece, 4-placing table, 5-fixing piece, 6-clamp, 61-accommodating hole, 62-adjusting hole, 7-support, 8-adjusting shaft, 81-concave surface, 82-connecting part, 83-through hole, 84-end surface of second end, 9-adjusting nut, 10-limiting part, 11-gasket, 12-sealing cover, 13-target material, 14-magnetic steel, 15-magnetic steel base, 16-base, 17-measuring probe, 18-sealing pad, 19-magnet and 20-magnetic steel end cover.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1 to 14, the vacuum magnetron sputtering coating target measuring device includes a supporting component and a measuring component, the magnetic steel 14 is located in the target 13, the magnetic steel 14 is a hollow cylinder, the magnet base 15 is located in the cylinder, the extending direction of the magnet base 15 is consistent with the axial direction of the cylinder, the magnet base 15 can move in the radial direction of the cylinder, a base 16 is further arranged in the cylinder, the magnet base 15 and the base 16 are oppositely arranged, an opening is formed in the base 16, and the opening is provided with an internal thread.
The supporting component comprises supporting frames 1, guide rails 2 and guide pieces 3, the supporting frames 1 are provided with two supporting frames 1, the two supporting frames 1 extend along the vertical direction, a placing table 4 is arranged on the supporting frames 1, the target material 13 to be measured is installed on the placing table 4, a fixing piece 5 used for fixing the target material 13 is arranged on the placing table 4, the fixing piece 5 can be a triangular support or a square clamping component, one end of the fixing piece 5 used for fixing the target material 13 on the placing table 4 is arranged, and the other end of the fixing piece 5 used for fixing the target material 13 on the placing table 4 is arranged. The guided way 2 sets up between two support frames 1, and guide 3 slidable ground sets up on guided way 2, and guide 3 can be the slider bearing, and guided way 2 has relative both ends, and these both ends are connected with two stands respectively.
The support frame 1 has various structures, such as a base 16 and a column connected to the base 16, and the standing platform 4 is connected to the column.
During testing, the targets 13 are fixedly mounted on the fixing piece 5, the length direction of the targets 13 is consistent with that of the guide rail 2, two targets 13 can be placed on the placing table 4, the two targets 13 are placed in parallel, the two targets 13 work together during actual film coating, the two targets 13 can be placed to simulate a real working environment, the distance between the two targets 13 is changed by adjusting the position of the fixing piece 5, and the distance between the two targets 13 is also the same as that between the two targets 13 during actual working.
The measuring assembly comprises a clamp 6 and a support 7, the support 7 is connected to the guide part 3, the clamp 6 is connected to the support 7, the setting height of the clamp 6 is lower than that of the placing table 4, and after the target 13 is placed on the placing table 4, the clamp 6 is located below the target 13.
Set up a plurality of accommodation holes 61 that are used for holding measuring probe 17 on anchor clamps 6, the purpose that sets up anchor clamps 6 is convenient for detect a plurality of targets 13 simultaneously, detect simultaneously when detecting a plurality of targets 13, need set up a plurality of probes, and need a plurality of probes to remove simultaneously, ensure measuring position's accuracy and precision, it is little to guarantee the measured data deviation, the degree of accuracy is high, and can adjust the probe position according to the position of waiting to detect 13 position control anchor clamps 6 of target, be applicable to different targets 13 and detect, the commonality is strong.
As shown in fig. 6, the clamp 6 is rectangular, the support 7 is straight U-shaped, and the clamp 6 is located in the U-shaped space of the support 7, so as to adjust the height of the clamp 6 relative to the support 7. The upper surface of the clamp 6 and the front side surface or the back side surface adjacent to the upper surface are provided with through containing holes 61, one end of the measuring probe 17 extends out of the containing hole 61 on the upper surface of the clamp 6, and the other end of the measuring probe extends out of the hole on the front side surface or the back side surface of the clamp 6 to be connected with a measuring instrument.
The measuring probe 17 used in the application is a Hall probe, the measuring probe 17 is connected with a measuring instrument, the measuring instrument is provided with a display screen, and data measured by the measuring probe 17 are displayed on the display screen.
When measuring target 13, the probe needs to offset with target 13, and in order to adjust the probe, accessible removes anchor clamps 6 and adjusts, and anchor clamps 6 detachably sets up on support 7 to adjust anchor clamps 6's height, the realization mode is: offer a plurality of regulation holes 62 that set up along its direction of height on the support 7, set up a plurality of regulation holes 62 that set up along its direction of height on anchor clamps 6, be provided with the spliced pole in regulation hole 62 that correspond on regulation hole 62 on support 7 and anchor clamps 6, these two regulation holes 62 are located same horizontal plane, but take out anchor clamps 6 with the spliced pole when dismantling anchor clamps 6 and break away from, select suitable regulation hole 62 again, the erection joint post is connected anchor clamps 6 and support 7, when anchor clamps 6 shown in figure 6 are the cuboid, the left surface of anchor clamps 6, regulation hole 62 has all been seted up to the right flank, on the support 7 respectively with the left surface of anchor clamps 6, regulation hole 62 has all been seted up on the relative both sides face of right flank.
Or the clamp 6 is provided with a connecting column matched with the adjusting hole 62 of the support 7, and the connecting column can extend into and out of the adjusting hole 62 on the support 7.
After the target 13 is measured, if the magnetic induction intensity deviation on the surface of the target 13 is large, the magnet seat 15 of the magnet steel 14 in the target 13 needs to be adjusted, and the device further comprises an adjusting assembly, wherein the adjusting assembly is connected with the magnet seat 15 of the magnet steel 14 in the target 13 and used for adjusting the magnet seat 15 to move in the direction perpendicular to the magnet seat 15.
Specifically, the adjusting part includes regulating spindle 8, adjusting nut 9, locating part, and regulating spindle 8 includes the body that sets up along upper and lower direction, and the diameter of body is unanimous, and the body has relative first end and the second end that sets up, and the first end of body is connected with magnet seat 15 (accessible joint spare is connected), and the body sets up with magnet seat 15 is perpendicular, and upper and lower direction is perpendicular with magnet seat 15 extending direction.
Further, the body is provided with a concave surface 81 on the outer surface close to the second end, and the diameter of the part of the body provided with the concave surface 81 is smaller than the diameter of the other part of the body, so that the clamping wrench can clamp the concave surface 81 to disassemble the adjusting shaft 8 conveniently.
The locating part includes cylindricality portion and spacing portion 10, and cylindricality portion diameter is unanimous, and the diameter of body is greater than the diameter of the cylindricality portion of locating part, and cylindricality portion detachably connects at the second end of regulating spindle 8, and adjusting nut 9 cover is established in cylindricality portion, and spacing portion 10 is used for restricting adjusting nut 9 and breaks away from regulating spindle 8, and when the locating part does not break away from regulating spindle 8, adjusting nut 9 also can not break away from regulating spindle 8. The outer surface of the adjusting nut 9 is provided with an external thread, a central hole is formed in the adjusting nut 9, the internal thread of the central hole is a smooth structure, the diameter of the central hole in the adjusting nut 9 is smaller than that of the cylindrical part, the bottom of the magnetic steel 14 is provided with an opening with an internal thread, the external thread of the adjusting nut 9 is matched with the internal thread of the opening of the base 16 of the magnetic steel 14, the internal thread of the opening of the base 16 is provided with a certain height, and the position of the magnet base 15 is adjusted by adjusting the position of the adjusting nut 9 in the opening of the base 16. In the sealed state, the adjusting nut 9 is located in the opening of the base 16, and one end of the adjusting nut 9 abuts against the end surface 84 of the second end of the body.
The concrete structure that the cylindricality portion detachably of locating part is connected at the second end of regulating spindle 8 does: the second end of body is provided with connecting portion 82, perforated hole 83 has been seted up on connecting portion 82, the part that the body is close to connecting portion 82 also sets up perforated hole 83, two perforated holes 83 link up and extending direction is unanimous, screw thread has in the perforated hole 83, cylindricality portion part is connected in perforated hole 83, the locating part can be the countersunk screw, the screw includes the screw rod and installs the nut in screw rod one end, the screw rod other end is connected in perforated hole 83, the screw rod part can be screwed into the perforated hole 83 of screwing out connecting portion 82, the diameter of connecting portion 82 is less than the diameter of body, the diameter of screw rod is less than the diameter of connecting portion 82, adjusting nut 9 internal aperture (centre bore diameter) is greater than the diameter of connecting portion 82 and is less than the diameter of body. The connecting part 82 is arranged, so that the limiting part can be conveniently installed, the connecting part 82 has a certain length, the magnet base 15 can be adjusted in a large range, the screw rod part is positioned outside the through hole 83 in a sealing state (namely, the magnet base and the base are both sealed in the magnetic steel), and other parts are positioned in the through hole 83.
The adjusting nut 9 is further provided with a hole, the hole extends in the thickness direction, and the hole is arranged so that the operating part can penetrate the hole to adjust the position of the adjusting nut 9 in the hole of the base 16, and the adjusting nut 9 can be moved conveniently.
The device still includes gasket 11, sets up the through-hole that supplies spacing portion 10 to pass on the gasket 11, and under encapsulated situation, adjusting nut 9's the other end offsets with gasket 11, and the diameter of through-hole narrows gradually from the first end of body to its second end, if be the toper, and the nut is hemispherical, can sink the nut cooperation of head screw better, and is more stable after whole sealing.
The device still includes sealed lid 12, sealed lid 12 includes lid and protrusion in the bulge of lid, offer the storage tank that is used for holding spacing portion 10 on the bulge, bulge cross section diameter is less than lid cross section diameter, the bulge is provided with the external screw thread with the internal thread matched with of the trompil of magnet steel 14 base 16 outward, the lid is kept away from bulge one side and is seted up to the recess that is close to the bulge concave yield, the cross section of recess is pentagon or hexagon, can with interior pentagon spanner or interior hexagonal spanner phase-match, dismantle the lid from magnet steel 14's base 16 through the spanner. The protrusion can be screwed into an opening in the base 16 of the magnet 14, and when screwed in, the position of the sealing cover 12 is fixed.
The maximum diameter of the through hole of the gasket 11 is slightly smaller than or equal to the diameter of the convex part containing groove of the sealing cover 12, under the sealing state, at least part of the gasket 11 is positioned in the containing groove, one end of the adjusting nut 9 abuts against the end face 84 of the second end of the body, the other end of the adjusting nut 9 abuts against the end face 84 of the second end of the body, and the gasket 11 is positioned between the adjusting nut and the sealing cover 12.
Further, the device also comprises a sealing gasket 18, and the sealing gasket 18 is sleeved on the convex part of the sealing cover 12 to improve the sealing performance of the sealing cover 12.
The embodiment of adjusting the position of the magnet holder 15 using the adjustment assembly is as follows: the sealing cover 12 is taken down firstly, the limiting piece is unscrewed, the adjusting nut 9 is moved by penetrating the operating piece into the opening of the adjusting nut 9 so as to adjust the position of the adjusting nut 9 in the opening of the base 16, after the position of the adjusting nut 9 is adjusted, the limiting piece is screwed, and finally the sealing cover 12 is placed. When the spacer 11 is provided, the depth of the spacer 11 into the sealing cover 12 varies depending on the position of the adjusting nut 9 in the opening of the base 16.
Taking two targets as an example, the implementation process of measuring the targets by the measuring device of the present application is as follows:
1. inserting the magnetic steel into the target material, and installing and fixing the magnetic steel on a fixing piece of a placing table on the supporting frame;
2. fixing the fixture and the probe on the support;
3. measuring the center distance of the target cylinder, and adjusting the position of the fixture to enable the measuring probe to aim at the center of the target material;
4. adjusting the height of the fixture in the direction vertical to the target material to enable the measuring probe to be attached to the target material;
5. the target material is detected from one end, the fixture is moved to measure the magnetic induction intensity of the surface of the target material, and data are recorded, so that post-processing analysis is facilitated.
After the measurement is finished, if the magnetic induction intensity deviation of the surface of the target material is large, the position of the magnet base is adjusted through the adjusting assembly to increase or reduce the magnetic induction intensity of the surface of the target material, and the magnetic steel and the target material are installed in vacuum magnetron sputtering coating equipment until all the adjustments meet the requirements, so that the problems of large magnetic induction intensity measurement error and poor uniformity of the target magnetic steel can be effectively solved, and the problem of product uniformity is solved; the magnetic induction intensity on the surface of the target can be accurately measured through the measuring device, the magnetic induction intensity on the surface of the target in the working environment is really reduced, the direction is indicated for later-stage adjustment of the magnetic induction intensity, and therefore the uniformity of products is improved.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose of the embodiments is to enable people skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered in the protection scope of the present invention.
Claims (10)
1. The utility model provides a vacuum magnetron sputtering coating film target measuring device, is provided with the magnet steel in the volume target of awaiting measuring, is provided with magnet base and base in the magnet steel, sets up on the base and has the internal screw thread trompil, its characterized in that, measuring device include:
the target material measuring device comprises a support assembly, a measuring device and a measuring device, wherein the support assembly comprises two support frames, a guide rail arranged between the two support frames and a guide piece arranged on the guide rail in a sliding manner, a placing table is arranged on the support frames, and a target material to be measured is arranged on the placing table;
the measuring assembly comprises a clamp and a support, the support is connected to the guide, the clamp is connected to the support, the setting height of the clamp is lower than that of the placing table, and a plurality of accommodating holes for accommodating measuring probes are formed in the clamp;
and the adjusting assembly is connected with the magnet seat and is used for adjusting the magnet seat to move in the direction vertical to the magnet seat.
2. The vacuum magnetron sputtering coating target measuring device of claim 1, wherein the adjusting assembly comprises an adjusting shaft, an adjusting nut and a limiting member, the adjusting shaft comprises a body arranged along the vertical direction, the body is provided with a first end and a second end which are oppositely arranged, and the first end of the body is connected with the magnet seat; the locating part include cylindricality portion and with the spacing portion that cylindricality portion connects, cylindricality portion detachably connect be in the second end of regulating spindle, adjusting nut cover establish cylindricality portion on, spacing portion be used for the restriction adjusting nut break away from the regulating spindle, adjusting nut outer have with the internal thread matched with external screw thread of base trompil, under sealing state, adjusting nut be located the base trompil in, just adjusting nut's one end with the terminal surface of the second end of body offset.
3. The vacuum magnetron sputtering coating target measuring device of claim 2, wherein the device further comprises a gasket, a through hole for the limiting part to pass through is formed in the gasket, and the other end of the adjusting nut is abutted against the gasket in a sealed state.
4. The vacuum magnetron sputtering coating target material measuring device according to claim 2, wherein the second end of the body is provided with a connecting portion, the diameters of the connecting portion are smaller than the diameter of the body and the inner diameter of the adjusting nut, the connecting portion and the body are both provided with through holes, and the cylindrical portion is partially connected in the through holes.
5. The vacuum magnetron sputtering coating target material measuring device according to claim 2 or 4, wherein the limiting member is a countersunk screw.
6. The vacuum magnetron sputtering coating target material measuring device according to claim 3, wherein the device further comprises a sealing cover, the sealing cover comprises a cover body and a protruding portion protruding from the cover body, a containing groove for containing the limiting portion is formed in the protruding portion, an external thread matched with the internal thread of the opening of the base is arranged outside the protruding portion, and the gasket is located between the adjusting nut and the sealing cover in a sealing state.
7. The vacuum magnetron sputtering coating target material measuring device according to claim 1, wherein the clamp is detachably arranged on the support.
8. The vacuum magnetron sputtering coating target measuring device of claim 7, wherein the support is provided with a plurality of adjusting holes arranged along the height direction of the support, the clamp is provided with a plurality of adjusting holes arranged along the height direction of the clamp, and connecting columns are arranged in the adjusting holes on the support and the corresponding adjusting holes on the clamp.
9. The vacuum magnetron sputtering coating target material measuring device according to claim 1, wherein the support is in a straight U shape; the clamp is cuboid.
10. The vacuum magnetron sputtering coating target measuring device of claim 1, wherein a fixing piece for fixing the target is arranged on the placing table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220736635.8U CN217561702U (en) | 2022-03-30 | 2022-03-30 | Vacuum magnetron sputtering coating film target measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220736635.8U CN217561702U (en) | 2022-03-30 | 2022-03-30 | Vacuum magnetron sputtering coating film target measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217561702U true CN217561702U (en) | 2022-10-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220736635.8U Active CN217561702U (en) | 2022-03-30 | 2022-03-30 | Vacuum magnetron sputtering coating film target measuring device |
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| Country | Link |
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| CN (1) | CN217561702U (en) |
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- 2022-03-30 CN CN202220736635.8U patent/CN217561702U/en active Active
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