CN217561542U - Detection equipment for semiconductor processing - Google Patents

Abstract

The utility model discloses a check out test set is used in semiconductor processing, including the under casing, the first motor of right side fixedly connected with of under casing inner chamber bottom, the output fixedly connected with transfer line of first motor, the fixed surface of transfer line is connected with the driving gear, and there is the bull stick bottom the under casing inner chamber through bearing swing joint. The utility model discloses a bottom case, first motor, the transfer line, the driving gear, the bull stick, driven gear, examine test table, a spring, first stopper, the installation piece, electric putter, the second stopper, the curb plate, the box, the second motor, the threaded rod, the cooperation of thread bush and connecting block is used, can effectually solve traditional check out test set for semiconductor processing at the in-process that uses, the locate mode efficiency of adoption is comparatively low, can't be quick carry out spacing problem to the semiconductor, the device can conveniently carry on spacingly to the semiconductor, stability in the semiconductor processing has been guaranteed, use effect is improved.

Description

Detection equipment for semiconductor processing

Technical Field

The utility model relates to a semiconductor processing technology field specifically is a check out test set for semiconductor processing.

Background

In the production process of semiconductor device products, from a semiconductor single chip to a final finished product, a plurality of procedures are needed, in order to ensure that the product performance is qualified, stable and reliable, and the semiconductor device has high yield, all the process steps are strictly required according to the production conditions of different semiconductor products, therefore, in the production process, a semiconductor process detection procedure is indispensable, in the semiconductor detection procedure, semiconductor detection equipment needs to position a workpiece firstly, then assemble, test and sort the workpiece, and in the current semiconductor detection process, the adopted positioning mode has low efficiency, and meanwhile, the semiconductor cannot be quickly limited, so that the use effect is reduced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a check out test set is used in semiconductor processing possesses the advantage of convenient location, has solved and has carried out the testing process to the semiconductor at present, and when the locate mode efficiency of adoption was comparatively low, can't be quick carry on spacingly to the semiconductor to the result of use's problem has been reduced.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a check out test set for semiconductor processing, includes the under casing, the first motor of right side fixedly connected with of under casing inner chamber bottom, the output fixedly connected with transfer line of first motor, the fixed surface of transfer line is connected with the driving gear, the bottom of under casing inner chamber has the bull stick through bearing swing joint, the fixed surface of bull stick is connected with driven gear, driven gear and driving gear meshing, the top of bull stick runs through the inner chamber of under casing and extends to the outside of under casing, the top fixedly connected with of bull stick detects the platform, detect the left side fixedly connected with spring of platform inner chamber, the first stopper of right side fixedly connected with of spring, detect the right side fixedly connected with installation piece of platform inner chamber, the left side fixedly connected with electric putter of installation piece, the left side fixedly connected with second stopper of electric putter, the equal fixedly connected with curb plate in both sides of under casing, the top fixedly connected with box of one side relatively of two curb plates, the right side fixedly connected with second motor of box inner chamber, the output fixedly connected with of second motor, the left side of threaded rod passes through the bearing and the inner wall swing joint of box, the surface thread bush of threaded rod, the fixed connection piece the bottom of box is connected with of box and the connecting block.

Preferably, the top of the opposite side of the side plate is fixedly connected with a first sliding rod below the box body, the surface of the first sliding rod is slidably connected with a first sliding sleeve, and the front end of the first sliding sleeve is fixedly connected with the connecting block.

Preferably, the inner cavity of the box body is fixedly connected with a second sliding rod, the surface of the second sliding rod is connected with a second sliding sleeve in a sliding mode, and the bottom of the second sliding sleeve is fixedly connected with the threaded sleeve.

Preferably, both sides of the bottom box are fixedly connected with supporting tables, and the bottom of each supporting table is provided with anti-skidding threads.

Preferably, the surface of the bottom case is hinged with a cover plate through a hinge, and the right side of the surface of the cover plate is fixedly connected with a handle.

Preferably, the right side of the surface of the box body is fixedly connected with a controller, and the controller is electrically connected with the first motor and the second motor respectively through leads.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the utility model discloses a bottom case, first motor, the transfer line, the driving gear, the bull stick, driven gear, examine test table, a spring, first stopper, the installation piece, electric putter, the second stopper, the curb plate, the box, the second motor, the threaded rod, the cooperation of thread bush and connecting block is used, can effectually solve traditional check out test set for semiconductor processing at the in-process that uses, the locate mode efficiency of adoption is comparatively low, can't be quick carry out spacing problem to the semiconductor, the device can conveniently carry on spacingly to the semiconductor, stability in the semiconductor processing has been guaranteed, use effect is improved.

2. The utility model discloses a set up first slide bar and first sliding sleeve, can carry on spacingly to the connecting block, the stability of connecting block removal in-process has been guaranteed, through setting up second slide bar and second sliding sleeve, can carry on spacingly to the thread bush, the stability of thread bush removal in-process has been guaranteed, through setting up a supporting bench, can support the device, the holistic stability of device has been guaranteed, through setting up apron and handle, can conveniently overhaul the inner structure of under casing, reach convenient closed purpose, through setting up the controller, can open and stop first motor and second motor and control, reach the purpose of conveniently controlling.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic sectional view of the internal structure of the case of the present invention;

fig. 3 is a schematic front view of the structure of the present invention.

In the figure: 1. a bottom box; 2. a first motor; 3. a transmission rod; 4. a driving gear; 5. a rotating rod; 6. a driven gear; 7. a detection table; 8. a spring; 9. a first stopper; 10. mounting blocks; 11. an electric push rod; 12. a second limiting block; 13. a side plate; 14. a box body; 15. a second motor; 16. a threaded rod; 17. a threaded sleeve; 18. connecting blocks; 19. a first slide bar; 20. a first sliding sleeve; 21. a second slide bar; 22. a second sliding sleeve; 23. a support table; 24. a cover plate; 25. and a controller.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

Referring to fig. 1-3, a detecting apparatus for semiconductor processing includes a bottom case 1, a supporting table 23 is fixedly connected to both sides of the bottom case 1, anti-slip patterns are disposed at the bottom of the supporting table 23, a cover plate 24 is hinged to the surface of the bottom case 1 through a hinge, a handle is fixedly connected to the right side of the surface of the cover plate 24, a first motor 2 is fixedly connected to the right side of the bottom of the inner cavity of the bottom case 1, a driving gear 3 is fixedly connected to the output end of the first motor 2, a driving gear 4 is fixedly connected to the surface of the driving gear 3, a rotating rod 5 is movably connected to the bottom of the inner cavity of the bottom case 1 through a bearing, a driven gear 6 is fixedly connected to the surface of the rotating rod 5, the driven gear 6 is engaged with the driving gear 4, the top of the rotating rod 5 penetrates through the inner cavity of the bottom case 1 and extends to the outside of the bottom case 1, a detecting table 7 is fixedly connected to the top of the inner cavity of the rotating rod 5, a spring 8 is fixedly connected to the left side of the inner cavity of the detecting table 7, a first stopper 9 is fixedly connected to the right side of the spring 8, a right side fixedly connected to the inner cavity of the detecting table 7 is fixedly connected to the inner cavity, a mounting block 10 is fixedly connected to the left side of the inner cavity of the mounting block 10, a second slider 14 is connected to the sliding rod 14, a sliding sleeve, a sliding rod 14, a sliding block is connected to the sliding sleeve 14, a sliding rod 14, a sliding sleeve connected to the sliding rod 14, a sliding sleeve is connected to the sliding sleeve 14, a sliding rod 14, a sliding sleeve for controlling slide bar 14, the controller 25 is respectively electrically connected with the first motor 2 and the second motor 15 through wires, the right side of the inner cavity of the box body 14 is fixedly connected with the second motor 15, the output end of the second motor 15 is fixedly connected with a threaded rod 16, the left side of the threaded rod 16 is movably connected with the inner wall of the box body 14 through a bearing, the surface of the threaded rod 16 is in threaded connection with a threaded sleeve 17, the bottom of the threaded sleeve 17 is fixedly connected with a connecting block 18, the bottom of the connecting block 18 penetrates through the inner cavity of the box body 14 and extends to the outside of the box body 14, the connecting block 18 can be limited by arranging a first sliding rod 19 and a first sliding sleeve 20, the stability of the connecting block 18 in the moving process is ensured, the threaded sleeve 17 can be limited by arranging a second sliding rod 21 and a second sliding sleeve 22, the stability of the threaded sleeve 17 in the moving process is ensured, and the device can be supported by arranging a supporting platform 23, the stability of the whole device is ensured, the internal structure of the bottom box 1 can be conveniently overhauled by arranging the cover plate 24 and the handle, the aim of convenient closing is achieved, the starting and stopping of the first motor 2 and the second motor 15 can be controlled by arranging the controller 25, the aim of convenient control is achieved, the bottom box 1, the first motor 2, the transmission rod 3, the driving gear 4, the rotating rod 5, the driven gear 6, the detection table 7, the spring 8, the first limit block 9, the installation block 10, the electric push rod 11, the second limit block 12, the side plate 13, the box body 14, the second motor 15, the threaded rod 16, the threaded sleeve 17 and the connecting block 18 are matched for use, the problems that the traditional detection equipment for semiconductor processing has low efficiency in the use process, the adopted positioning mode cannot quickly limit the semiconductor, and the device can conveniently limit the semiconductor, the stability of the semiconductor processing process is guaranteed, and the using effect is improved.

During the use, the staff places the semiconductor product in the inside of examining test table 7, through starting electric putter 11, electric putter 11 drives second stopper 12 and removes, second stopper 12 cooperates first stopper 9 to carry out the centre gripping fixed to the semiconductor, the spacing stability of product has been guaranteed, start first motor 2 through controller 25, first motor 2 drives transfer line 3 and rotates, transfer line 3 drives driving gear 4 and rotates, driving gear 4 drives driven gear 6 and rotates, driven gear 6 drives bull stick 5 and rotates, bull stick 5 drives examines test table 7 and rotates, thereby can rotate the semiconductor product according to the user demand, reach the purpose of being convenient for detect, connecting block 18 is used for installing the check out test set who detects the semiconductor product, when needing to adjust the position of check out test set, start second motor 15 through controller 25, second motor 15 drives threaded rod 16 and rotates, threaded rod 16 drives threaded bush 17 and removes, threaded bush 17 drives connecting block 18 and removes, thereby can adjust the position of check out test set.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a check out test set for semiconductor processing, includes under casing (1), its characterized in that: the right side of the bottom box (1) inner cavity bottom is fixedly connected with a first motor (2), the output end of the first motor (2) is fixedly connected with a transmission rod (3), the surface of the transmission rod (3) is fixedly connected with a driving gear (4), the bottom of the bottom box (1) inner cavity is movably connected with a rotating rod (5) through a bearing, the surface of the rotating rod (5) is fixedly connected with a driven gear (6), the driven gear (6) is meshed with the driving gear (4), the top of the rotating rod (5) penetrates through the inner cavity of the bottom box (1) and extends to the outside of the bottom box (1), the top of the rotating rod (5) is fixedly connected with a detection table (7), the left side of the inner cavity of the detection table (7) is fixedly connected with a spring (8), the right side of the spring (8) is fixedly connected with a first limit block (9), the right side of the inner cavity of the detection table (7) is fixedly connected with a mounting block (10), the left side of the mounting block (10) is fixedly connected with an electric push rod (11), the left side of the electric push rod (11) is fixedly connected with a second limit block (12), the left side of the bottom box (1) is fixedly connected with two side plates (13), and the top of the inner cavity of the bottom box (14) is fixedly connected with a second limit block (14), the output fixedly connected with threaded rod (16) of second motor (15), the inner wall swing joint of bearing and box (14) is passed through to the left side of threaded rod (16), the surperficial threaded connection of threaded rod (16) has thread bush (17), the bottom fixedly connected with connecting block (18) of thread bush (17), the bottom of connecting block (18) runs through the inner chamber of box (14) and extends to the outside of box (14).

2. The inspection apparatus for semiconductor processing according to claim 1, wherein: the top of the opposite side of the side plate (13) is fixedly connected with a first sliding rod (19) below the box body (14), the surface of the first sliding rod (19) is connected with a first sliding sleeve (20) in a sliding mode, and the front end of the first sliding sleeve (20) is fixedly connected with the connecting block (18).

3. The inspection apparatus for semiconductor processing according to claim 1, wherein: the inner cavity of the box body (14) is fixedly connected with a second sliding rod (21), the surface of the second sliding rod (21) is connected with a second sliding sleeve (22) in a sliding mode, and the bottom of the second sliding sleeve (22) is fixedly connected with the threaded sleeve (17).

4. The inspection apparatus for semiconductor processing according to claim 1, wherein: the anti-skidding bottom-box structure is characterized in that supporting tables (23) are fixedly connected to two sides of the bottom box (1), and anti-skidding lines are arranged at the bottoms of the supporting tables (23).

5. The inspection apparatus for semiconductor processing according to claim 1, wherein: the surface of the bottom box (1) is hinged with a cover plate (24) through a hinge, and the right side of the surface of the cover plate (24) is fixedly connected with a handle.

6. The inspection apparatus for semiconductor processing according to claim 1, wherein: the right side fixedly connected with controller (25) on box (14) surface, controller (25) pass through the wire respectively with first motor (2) and second motor (15) electric connection.

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