CN217556330U

CN217556330U - Automatic liquid supplementing device for diamond wire

Info

Publication number: CN217556330U
Application number: CN202221578980.XU
Authority: CN
Inventors: 胡锡锋; 王宁
Original assignee: Wuxi Lainuosi Technology Co ltd
Current assignee: Wuxi Lainuosi Technology Co ltd
Priority date: 2022-06-22
Filing date: 2022-06-22
Publication date: 2022-10-11
Anticipated expiration: 2032-06-22

Abstract

The utility model discloses an automatic liquid supplementing device for diamond wires, which comprises a liquid supplementing groove and a plurality of diamond wire electroplating process grooves; the interior of the liquid supplementing groove is divided into a water supplementing groove and an acid supplementing groove by a partition plate; a top plate is arranged on the opening cover at the top end of the liquid supplementing groove; one side wall of each of the water supplementing tank and the acid supplementing tank is provided with a liquid inlet in a penetrating way, and the top plates of the water supplementing tank and the acid supplementing tank are provided with a plurality of liquid outlets in a penetrating way; a plurality of peristaltic pumps are arranged on each peristaltic pump mounting plate; the bottom wall of the peristaltic pump mounting box body and the sound absorption layer are provided with a plurality of through holes communicated with the plurality of liquid outlets in a penetrating mode, the inlets of the peristaltic pumps are respectively connected with the rubber tubes, the rubber tubes penetrate through the through holes, the liquid outlets extend into the water supplementing groove or the acid supplementing groove, and the outlets of the peristaltic pumps are respectively communicated with the diamond wire electroplating process grooves through liquid supplementing pipelines. The utility model provides a pair of automatic liquid supplementation device of buddha's warrior attendant line can set up and carry out automatic water supply, benefit acid, labour saving and time saving at the time of regulation to buddha's warrior attendant line electroplating process groove.

Description

Automatic liquid supplementing device for diamond wire

Technical Field

The utility model relates to a diamond wire production facility technical field especially relates to an automatic fluid infusion device of buddha's warrior attendant line.

Background

Along with the global expansion of the demand for green solar energy, the high-speed development of the solar silicon wafer industry is driven, and along with the increase of the market demand of silicon wafers, the market share of each large silicon wafer processing factory is determined by the processing cost of the silicon wafers. Electroplating diamond wires is equipment for plating diamond sand on diamond wires, which is developed for improving the cutting efficiency of silicon wafers. The diamond wire electroplating process tank (or diamond wire electroplating tank) is a device which needs to automatically supplement water and acid on line at regular time. The prior art has no automatic water and acid replenishing device, and water and acid consumption has certain influence on the whole process along with the change of time, so that manual and regular replenishment is required.

SUMMERY OF THE UTILITY MODEL

In view of this, the utility model provides an automatic fluid infusion device of buddha's warrior attendant line.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

an automatic liquid supplementing device for diamond wires comprises a liquid supplementing groove and a plurality of diamond wire electroplating process grooves; the interior of the liquid supplementing groove is divided into a water supplementing groove and an acid supplementing groove by a partition plate;

a top plate is arranged on the opening cover at the top end of the liquid supplementing groove; one side wall of each of the water supplementing tank and the acid supplementing tank is provided with a liquid inlet in a penetrating way, and the top plates of the water supplementing tank and the acid supplementing tank are provided with a plurality of liquid outlets in a penetrating way; the peristaltic pump assembly is arranged on the top plate and comprises a peristaltic pump mounting box body, peristaltic pump mounting plates, peristaltic pumps, a first buffer mechanism and a second buffer mechanism, a sound absorbing layer is attached to the inner wall of the peristaltic pump mounting box body, at least one first buffer mechanism is arranged on the inner bottom wall of the peristaltic pump assembly, at least one clamping groove is formed in the inner top wall of the peristaltic pump box body, a second buffer mechanism is embedded into each clamping groove, the bottom end of each peristaltic pump mounting plate is arranged at the upper end of the first buffer mechanism, the top end of each peristaltic pump mounting plate is embedded into the clamping groove, the top end of the peristaltic pump mounting plate is attached to the second buffer mechanism, and a plurality of peristaltic pumps are arranged on each peristaltic pump mounting plate; the bottom wall of the peristaltic pump mounting box body and the sound absorption layer are provided with a plurality of through holes communicated with the liquid outlets in a penetrating mode, the inlet of each peristaltic pump is connected with the rubber tube, the rubber tube penetrates through the through holes, the liquid outlets of the peristaltic pumps extend into the water supplementing groove or the acid supplementing groove, and the outlet of each peristaltic pump is communicated with the diamond wire electroplating process grooves through the liquid supplementing pipeline.

Preferably, two box body through grooves are formed in the side wall, close to the direction of the plurality of diamond wire electroplating process grooves, of the peristaltic pump installation box body in a penetrating mode, two liquid supplementing pipeline installation plates are embedded into the two box body through grooves respectively, and the two liquid supplementing pipeline installation plates and the peristaltic pump installation box body are in threaded connection with each other; a plurality of threaded holes are formed in each fluid infusion pipeline mounting plate, a hollow part and a sealing part are in threaded connection with the threaded holes, and a plurality of fluid infusion pipelines penetrate through a center hole of the hollow part respectively and are communicated with a plurality of diamond wire electroplating process grooves.

Preferably, the first buffer mechanism is a buffer spring; the second buffer mechanism is an elastic buffer rubber layer; an elastic rubber buffer layer is also arranged between the top plate and the liquid supplementing groove; the four corners of the bottom of the liquid supplementing groove are provided with support legs, and buffer springs are arranged between the liquid supplementing groove and the support legs.

Preferably, the sound absorption layer is sound absorption cotton.

Preferably, the other side wall of the water supplementing groove and the other side wall of the acid supplementing groove are both provided with liquid level observation ports in a penetrating way.

Preferably, the bottom walls of the water replenishing tank and the acid replenishing tank are both provided with liquid discharging ports in a penetrating way.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model provides an automatic liquid supplementation device of buddha's warrior attendant line can set up and carry out accurate automatic supply to a plurality of buddha's warrior attendant line electroplating process groove in the time of regulation, and labour saving and time saving does not also have very big noise.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is an overall plan view of the present invention;

FIG. 3 is a sectional view taken along line B-B of FIG. 2;

fig. 4 is an overall left side view of the present invention;

fig. 5 is a schematic view of the internal structure of the present invention;

FIG. 6 is a schematic view of the internal structure of the present invention;

fig. 7 is a schematic view of the internal structure of the present invention;

FIG. 8 is a schematic view of the internal structure of the present invention;

fig. 9 is a schematic view of the internal structure of the present invention.

In the figure: 1. a liquid supplementing tank; 2. electroplating a process groove for the diamond wire; 3. a top plate; 4. an elastic rubber buffer layer; 5. a liquid inlet; 6. a liquid outlet; 101. a water replenishing tank; 102. an acid supplementing tank; 7. a through hole; 8. a liquid level observation port; 9. a tapping hole; 10. the peristaltic pump is provided with a box body; 11. a peristaltic pump mounting plate; 12. a peristaltic pump; 13. a buffer spring; 14. a sound absorbing layer; 15. clamping a groove; 16. a fluid infusion pipeline mounting plate; 17. a hollow member; 18. a seal member; 19. and (5) a support leg.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like indicate orientations or positional relationships that are based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, rather than to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Example (b):

as shown in fig. 1-9, an automatic liquid replenishing device for diamond wires comprises a liquid replenishing tank 1 and a plurality of diamond wire electroplating process tanks 2; the interior of the replenishment tank 1 is divided by a partition into a replenishment tank 101 and an acid replenishment tank 102.

A top plate 3 is arranged at the top opening cover of the liquid supplementing tank 1, and an elastic rubber buffer layer 4 is also arranged between the top plate 3 and the liquid supplementing tank 1; a side wall of the water replenishing groove 101 and the acid replenishing groove 102 is communicated with a liquid inlet 5, and a top plate 3 of the water replenishing groove 101 and the acid replenishing groove 102 is communicated with a plurality of liquid outlets 6. The other side walls of the water supplementing tank 101 and the acid supplementing tank 102 are both provided with liquid level observing ports 8 (the upper end liquid level observing port 8 is in a blocking state when in work). The bottom walls of the water replenishing tank 101 and the acid replenishing tank 102 are both provided with a tapping hole 9 in a through way.

A peristaltic pump assembly is arranged on the top plate 3, and comprises a peristaltic pump mounting box body 10, a peristaltic pump mounting plate 11, a peristaltic pump 12, buffer springs 13 and an elastic rubber buffer layer 4, wherein a sound absorption layer 14 is attached to the inner wall of the peristaltic pump mounting box body 10, the sound absorption layer 14 is made of sound absorption cotton, at least one buffer spring 13 is arranged on the inner bottom wall of the peristaltic pump assembly, at least one clamping groove 15 is formed in the inner top wall of the peristaltic pump 12 box body, the elastic rubber buffer layer 4 is embedded in each clamping groove 15, the bottom end of each peristaltic pump mounting plate 11 is arranged at the upper end of the buffer spring 13, the top end of each peristaltic pump mounting plate 11 is embedded in the clamping groove 15, the top end of the peristaltic pump mounting plate 11 is attached to the elastic rubber buffer layer 4, the buffer springs 13 at the bottom end of the peristaltic pump mounting plate 11 are in a compressed state, and a plurality of peristaltic pumps 12 are arranged on each peristaltic pump mounting plate 11; the bottom wall of the peristaltic pump installation box body 10 and the sound absorption layer 14 are provided with a plurality of through holes 7 communicated with the plurality of liquid outlets 6 in a penetrating way, the inlets of the peristaltic pumps 12 are respectively connected with the rubber tubes, the rubber tubes penetrate through the through holes 7, the liquid outlets 6 extend into the water supplementing groove 101 or the acid supplementing groove 102, and the outlets of the peristaltic pumps 12 are respectively communicated with the plurality of diamond wire electroplating process grooves 2 through liquid supplementing pipelines.

Two box body through grooves are penetratingly formed in the side wall, close to the direction of the plurality of diamond wire electroplating process grooves 2, of the peristaltic pump installation box body 10, two liquid supplementing pipeline installation plates 16 are respectively embedded into the two box body through grooves, and the two liquid supplementing pipeline installation plates 16 are in threaded connection with the peristaltic pump installation box body 10; each fluid infusion pipeline mounting plate 16 is provided with a plurality of threaded holes, the threaded holes are connected with a hollow part 17 and a sealing part 18 in a threaded manner, and a plurality of fluid infusion pipelines are respectively communicated with a plurality of diamond wire electroplating process grooves 2 by penetrating through the central holes of the hollow parts 17.

Supporting legs 19 are arranged at four corners of the bottom of the liquid supplementing tank 1, and a buffer spring 13 is also arranged between the liquid supplementing tank 1 and the supporting legs 19.

The utility model discloses a theory of operation does:

an automatic water and acid supplementing device is not arranged in the prior art, and water and acid consumption has certain influence on the whole process along with the change of time, and manual periodical supplement is needed; the automatic acid and water supplementing device can be set to accurately and automatically supplement a plurality of diamond wire electroplating process tanks in a specified time, so that time and labor are saved;

water and acid are supplemented into the water supplementing groove 101 and the acid supplementing groove 102 through a liquid inlet 5; the peristaltic pumps 12 are provided with 12 peristaltic pumps 12, wherein inlets of 6 peristaltic pumps 12 are respectively connected with a rubber tube, the rubber tube penetrates through the through hole 7, the liquid outlet 6 extends into the water supplementing groove 101, outlets of 6 peristaltic pumps 12 are respectively connected with liquid supplementing pipelines, a plurality of liquid supplementing pipelines penetrate through a central hole of the hollow part 17 and are communicated with the diamond wire electroplating process grooves 2 (the rubber tube and the liquid supplementing pipelines are not shown in the figure, a flow regulating valve can be arranged on the liquid supplementing pipelines, and the connecting mode of the tube and the pumps adopts a conventional technology), so that the 6 peristaltic pumps 12 work to guide water in the water supplementing groove 101 into the 6 diamond wire electroplating process grooves 2, and accurate automatic water supplementing on the 6 diamond wire electroplating process grooves 2 in a set time is realized; in addition, inlets of 6 peristaltic pumps 12 are respectively connected with the rubber tube, the rubber tube penetrates through the through hole 7, and the liquid outlet 6 extends into the acid supplementing groove 102, outlets of the other 6 peristaltic pumps 12 are respectively connected with the liquid supplementing pipeline, and the liquid supplementing pipelines respectively penetrate through the central hole of the hollow part 17 and are communicated with the 6 diamond wire electroplating process grooves 2 (the rubber tube and the liquid supplementing pipelines are not shown in the figure, the liquid supplementing pipelines can be provided with flow regulating valves, and the connecting mode of the tubes and the pumps can be realized by adopting the conventional technology), so that the other 6 peristaltic pumps 12 work to guide acid in the acid supplementing groove 102 into the 6 diamond wire electroplating process grooves 2, and accurate automatic acid supplementing of the 6 diamond wire electroplating process grooves 2 in a specified time is realized;

because a plurality of clamping grooves 15 can be formed in the peristaltic pump installation box body 10, a plurality of peristaltic pump assemblies can be arranged in the peristaltic pump installation box body 10, the sealing element 18 is changed into the hollow element 17, and more liquid supplementing pipelines can pass through the sealing element, so that more diamond wire electroplating process tanks 2 can be automatically supplemented with water and acid;

because 12 peristaltic pumps 12 work simultaneously, the noise is large, the vibration is large, 12 peristaltic pumps 12 are arranged in the peristaltic pump mounting box body 10, and sound absorption cotton is arranged in the peristaltic pump mounting box body 10 to play a role in sound absorption and sound insulation; the top end of the peristaltic pump 12 is buffered by the elastic rubber buffer layer 4 and the bottom end of the peristaltic pump is buffered by the buffer spring 13 in the working process, so that the peristaltic pump has a good buffer function and prevents vibration; buffer springs 13 are arranged at four corners of the bottom of the whole liquid supplementing tank 1, so that the liquid supplementing tank has a good buffer function and is prevented from vibrating.

Above, only be the embodiment of the preferred of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the design of the present invention, equivalent replacement or change should be included in the protection scope of the present invention.

Claims

1. An automatic liquid supplementing device for diamond wires comprises a liquid supplementing groove (1) and a plurality of diamond wire electroplating process grooves (2); the device is characterized in that the interior of the liquid supplementing tank (1) is divided into a water supplementing tank (101) and an acid supplementing tank (102) by a partition plate;

a top plate (3) is arranged at the top opening cover of the liquid supplementing tank (1); a liquid inlet (5) is formed in each of the side walls of the water supplementing tank (101) and the acid supplementing tank (102) in a penetrating manner, and a plurality of liquid outlets (6) are formed in each of the top plates (3) of the water supplementing tank (101) and the acid supplementing tank (102) in a penetrating manner; the top plate (3) is provided with a peristaltic pump (12) assembly, the peristaltic pump (12) assembly comprises a peristaltic pump mounting box body (10), a peristaltic pump mounting plate (11), a peristaltic pump (12), a first buffer mechanism and a second buffer mechanism, the inner wall of the peristaltic pump mounting box body (10) is attached with a sound absorption layer (14), the inner bottom wall of the peristaltic pump (12) assembly is provided with at least one first buffer mechanism, the inner top wall of the peristaltic pump (12) box body is provided with at least one clamping groove (15), the second buffer mechanism is embedded in each clamping groove (15), the bottom end of each peristaltic pump mounting plate (11) is arranged at the upper end of the first buffer mechanism, the top end of each peristaltic pump mounting plate (11) is embedded in the clamping groove (15), the top end of the peristaltic pump mounting plate (11) is attached to the second buffer mechanism, and a plurality of pumps (12) are arranged on each peristaltic pump mounting plate (11); the bottom wall of the peristaltic pump installation box body (10) and the sound absorption layer (14) are provided with a plurality of through holes (7) communicated with the plurality of liquid outlets (6) in a penetrating mode, the inlet of the peristaltic pump (12) is connected with the rubber pipe respectively, the rubber pipe penetrates through the through holes (7), the liquid outlets (6) and extends into the water supplementing groove (101) or the acid supplementing groove (102), and the outlet of the peristaltic pump (12) is communicated with the plurality of diamond wire electroplating process grooves (2) through liquid supplementing pipelines respectively.

2. The automatic liquid supplementing device for the diamond wire according to claim 1, wherein two box body through grooves are formed in the side wall, close to the direction of the plurality of diamond wire electroplating process grooves (2), of the peristaltic pump mounting box body (10), two liquid supplementing pipeline mounting plates (16) are embedded into the two box body through grooves respectively, and the two liquid supplementing pipeline mounting plates (16) are in threaded connection with the peristaltic pump mounting box body (10); a plurality of threaded holes are formed in each fluid infusion pipeline mounting plate (16), a hollow part (17) and a sealing part (18) are in threaded connection with the threaded holes, and a plurality of fluid infusion pipelines penetrate through center holes of the hollow part (17) respectively and are communicated with a plurality of diamond wire electroplating process grooves (2).

3. A diamond wire automatic fluid infusion device according to claim 1, wherein the first buffer mechanism is a buffer spring (13); the second buffer mechanism is an elastic buffer rubber layer; an elastic rubber buffer layer (4) is also arranged between the top plate (3) and the liquid supplementing groove (1); supporting legs (19) are arranged at four corners of the bottom of the liquid supplementing tank (1), and buffer springs (13) are arranged between the liquid supplementing tank (1) and the supporting legs (19).

4. A diamond wire automatic fluid infusion device according to claim 1, wherein the sound absorption layer (14) is sound absorption cotton.

5. The automatic liquid supplementing device for the diamond wire according to claim 1, wherein liquid level observation ports (8) are formed on the other side walls of the water supplementing groove (101) and the acid supplementing groove (102) in a penetrating manner.

6. The automatic liquid supplementing device for the diamond wire according to claim 1, wherein the bottom walls of the water supplementing groove (101) and the acid supplementing groove (102) are provided with liquid discharging ports (9) in a penetrating manner.