CN217550238U - Bi-component glue sprayer - Google Patents

Abstract

The application discloses two-component glue sprayer relates to micro-nano processing technology field, including a supporting table device and a glue spraying device. The glue spraying device is designed to comprise an ultrasonic glue sprayer and is connected with the first glue material feeder and the second glue material feeder. The first sizing material supplied by the first sizing material feeder and the second sizing material supplied by the second sizing material feeder are mixed by the ultrasonic glue sprayer and sprayed to a product to be sprayed in an atomized state, the first sizing material and the second sizing material can be fully mixed in a short time by an ultrasonic spraying mode, air bubbles can be rapidly removed, the problem of cross-linking and curing caused by long stirring and defoaming time can be effectively avoided, and the template glue coating with uniform thickness can be efficiently prepared.

Description

Bi-component glue sprayer

Technical Field

The application relates to the technical field of micro-nano processing, in particular to a bi-component glue sprayer for nanoimprint.

Background

The nano-imprinting technology is considered to be one of the most promising micro-nano manufacturing technologies, can break through the limitation of optical exposure diffraction effect, can process a nano structure, is most likely to become a main technology of the future micro-nano photonics and electronics industries, can be applied to low-cost and large-scale production of micro-nano structure functional devices, particularly has unique technical advantages in the preparation of optical devices, and is also the most widely applied field at present.

The basic process of the nano-imprinting technology comprises three stages of pattern imprinting, pattern transmission and imprinting template demoulding, wherein two modes of hot imprinting and ultraviolet imprinting are mainly adopted according to a pattern transfer mode, and no matter which imprinting mode is adopted, the imprinting technology is used for faithfully copying the micro-nano patterns on the template onto a substrate. The commonly used template materials of the nano-imprinting master template mainly comprise silicon and quartz, and have the characteristics of long processing time, high cost and high price.

The polymer template (soft template) comprises a plurality of double-component template glues, the A component and the B component of the template glue need to be fully stirred to be uniformly mixed in the using process, and the template glue is coated on the template in a spinning mode after defoaming treatment, so that the process is complex. The maximum film thickness which can be prepared by the spin coating process is not more than 2.5 mu m, when a film with the film thickness of more than 2.5 mu m is prepared, the spin coating process is not suitable, the spin coating process is only suitable for liquid with the viscosity of 50cps and below, and the viscosity range of the common template glue in the nano imprinting process is usually 400-800cps, so that the spin coating can not form a template glue coating with uniform thickness due to the high viscosity of the template glue in the spin coating process, the error range of the film thickness exceeds 10%, and the subsequent transfer printing process is greatly influenced.

SUMMERY OF THE UTILITY MODEL

In view of the above, an object of the present application is to provide a two-component glue sprayer, which can efficiently prepare a template glue coating layer with a uniform thickness.

In order to achieve the technical purpose, the application provides a bi-component glue sprayer which comprises a support table device and a glue spraying device;

the support table device is used for supporting and fixing a product to be sprayed with glue;

the glue spraying device comprises an ultrasonic glue sprayer;

the ultrasonic glue sprayer is connected with the first glue feeder and the second glue feeder;

the first glue stock feeder is used for conveying first glue stock to the ultrasonic glue sprayer;

the second glue material feeder is used for conveying a second glue material to the ultrasonic glue sprayer;

the ultrasonic glue sprayer is used for mixing the first glue material and the second glue material and spraying the mixed glue material and the second glue material onto a product to be sprayed in an atomized state.

Further, the device also comprises a mobile device;

the moving device is connected with the support table device and/or the ultrasonic glue sprayer and is used for driving the support table device and/or the ultrasonic glue sprayer to move.

Further, the ultrasonic glue sprayer comprises a first atomizer, a second atomizer and a nozzle;

the feeding end of the first atomizer is connected with the first sizing material feeder, and the discharging end of the first atomizer is connected with the nozzle;

the feeding end of the second atomizer is connected with the second sizing feeder, and the discharging end of the second atomizer is connected with the nozzle.

Further, the ultrasonic glue sprayer also comprises a mixing chamber;

the discharge end of the first atomizer is connected with the first feed end of the mixing chamber;

the discharge end of the second atomizer is connected with the second feed end of the mixing chamber;

the discharge end of the mixing chamber is connected with the nozzle.

Furthermore, the feeding direction of the first atomized material fed into the mixing chamber through the first atomizer is intersected with the feeding direction of the second atomized material fed into the mixing chamber through the second atomizer at a certain included angle.

Furthermore, first atomizer with be certain angle slope setting between the second atomizer, so that the warp first atomizer is sent into the pan feeding direction of the first atomizing material in the mixing chamber is crossing with the warp the pan feeding direction of the second atomizing material that the second atomizer sent into in the mixing chamber is certain contained angle.

Further, a first control valve is arranged at the discharge end of the first atomizer;

and a second control valve is arranged at the discharge end of the second atomizer.

Further, the device also comprises a rack;

the rack comprises a base and a mounting bracket;

the mounting bracket is vertically mounted on the base;

the supporting platform device is arranged on the base;

the glue spraying device is arranged on the mounting bracket.

Further, the glue overflow collecting tank is also included;

the overflow glue collecting groove frame is arranged on the outer peripheral surface of the supporting platform device or arranged on the rack and positioned below the supporting platform device and used for recovering glue materials.

Further, a vision detector is also included;

the vision detector is connected with the mounting bracket in a sliding manner and used for acquiring the position information of the product to be sprayed with glue.

According to the technical scheme, the bi-component glue sprayer comprises a supporting table device and a glue spraying device. The glue spraying device is designed to comprise an ultrasonic glue sprayer and is connected with the first glue material feeder and the second glue material feeder. The first sizing material that will first sizing material feed device supply and the second sizing material that the second sizing material feed device supplies are mixed and are spouted to waiting to spout gluey product with the atomizing state through the ultrasonic wave glue sprayer, and the intensive mixing between first sizing material and the second sizing material can be accomplished in the short time to the mode of ultrasonic spraying, can get rid of the bubble fast simultaneously to effectively avoid the cross-linking solidification problem because of stirring defoaming time overlength produces, and then can prepare the even template coating of thickness high-efficiently.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise.

Fig. 1 is a schematic view of the overall structure of a two-component glue sprayer provided in the present application;

fig. 2 is a schematic structural view of an ultrasonic glue sprayer of a two-component glue sprayer provided in the present application;

in the figure: 1. a frame; 11. a base; 12. mounting a bracket; 13. a shield; 14. an operation panel; 2. a first moving mechanism; 21. a first screw base; 211. a first guide rail; 22. a first slider; 23. a first lead screw; 24. a first motor; 3. a second moving mechanism; 31. a second screw base; 32. a second slider; 33. a second lead screw; 34. a second motor; 35. a fixed bracket; 4. a third moving mechanism; 5. a vision detector; 6. ultrasonic glue sprayer; 61. a first atomizer; 611. a first control valve; 62. a second atomizer; 621. a second control valve; 63. a mixing chamber; 631. a first support frame; 632. a second support frame; 64. a housing; 641. a first communication port; 642. a second communication port; 643. a support flange; 65. a shell cover; 651. a first limit bracket; 652. a second limiting frame; 66. a nozzle; 71. a first size feeder; 72. a second size feeder; 73. a glue storage tank; 74. a material pumping device; 8. a support table device; 81. a vacuum nozzle; 9. and (4) overflowing glue collecting tank.

Detailed Description

The technical solutions of the embodiments of the present application will be described clearly and completely with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making creative efforts belong to the protection scope of the embodiments in the present application.

In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings, and are only for convenience of description of the embodiments of the present application and for simplicity of description, but do not indicate or imply that the devices or elements referred to must have specific orientations, be configured in specific orientations, and operate, and thus, should not be construed as limiting the embodiments of the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the embodiments of the present application, it should be noted that the terms "mounted," "connected," and "connected" are used broadly and are defined as, for example, a fixed connection, an exchangeable connection, an integrated connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection through an intermediate medium, and a communication between two elements, unless otherwise explicitly stated or limited. Specific meanings of the above terms in the embodiments of the present application can be understood as specific cases by those of ordinary skill in the art.

In the spin coating process of the existing spin coating process, the A component and the B component of the template glue are fully stirred to be uniformly mixed, and are subjected to defoaming treatment and then are spin-coated on the template. The applicant finds that the method still has some defects through research: 1. the mechanical stirring and mixing has a problem of efficiency, and the stirring process takes much time. 2. The defoaming treatment is carried out in the stirring process, and because the stirring and mixing needs more time, the defoaming process is easy to cause the A component and the B component of the template adhesive to be crosslinked and solidified, and the subsequent spin coating needs to pay larger acting force to spin the adhesive on the template, so that the preparation efficiency of the template adhesive is further reduced. 3. Due to the high viscosity of the template glue, the spin coating is difficult to form a template glue coating with uniform thickness.

In order to solve the problems, the embodiment of the application discloses a double-component glue sprayer.

Referring to fig. 1, a two-component glue sprayer provided in an embodiment of the present application includes:

a support table device 8 and a glue spraying device.

Wherein, the support table device 8 is used for supporting and fixing a product such as a wafer waiting for glue spraying.

The glue spraying device comprises an ultrasonic glue sprayer 6, and the ultrasonic glue sprayer 6 is connected with a first glue material feeder 71 and a second glue material feeder 72. The first glue feeder 71 is used to feed the ultrasonic glue gun 6 with a first glue and the second glue feeder 72 is used to feed the ultrasonic glue gun 6 with a second glue.

The ultrasonic glue sprayer 6 is used for mixing the first glue material and the second glue material and spraying the mixed glue material and the atomized glue material onto a product to be sprayed, namely the first glue material and the second glue material fed into the ultrasonic glue sprayer 6 are mixed and finally sprayed out in an atomized state.

The glue spraying process comprises the following steps: the first glue feeder 71 and the second glue feeder 72 feed the first glue and the second glue to the ultrasonic glue sprayer 6, and the ultrasonic glue sprayer 6 mixes the first glue and the second glue and finally sprays the mixed glue onto the wafer in an atomized state. Compare in traditional spin coating technology, the intensive mixing between first sizing material and the second sizing material can be accomplished in the short time to the mode of ultrasonic wave spraying, can get rid of the bubble fast simultaneously to effectively avoid because of stirring the long cross-linking solidification problem that produces of deaeration time, and then can prepare the even template coating of thickness high-efficiently.

Referring to fig. 1 to fig. 2, as an alternative embodiment, the two-component glue sprayer of the present application further includes a frame 1, which serves as a main bearing structure and plays a role of bearing. As for the structural composition of the frame 1, the frame may specifically include a base 11 and a mounting bracket 12, the mounting bracket 12 is vertically installed on the base 11, the supporting platform device 8 is installed on the base 11, and the glue spraying device is installed on the mounting bracket 12.

Wherein, spout mucilage binding and put and include that the ultrasonic wave spouts gluey ware 6, the ultrasonic wave spouts gluey ware 6 to be installed on installing support 12, and is located a supporting bench device 8's top to make the ultrasonic wave spout gluey ware 6 can realize spouting the operation to placing the spraying of waiting to spout gluey product on a supporting bench device 8.

Further, the ultrasonic glue sprayer 6 comprises a first atomizer 61, a second atomizer 62 and a nozzle 66, wherein the feeding end of the first atomizer 61 is connected with a first glue stock feeder 71, and the discharging end of the first atomizer 61 is connected with the nozzle 66; the feed end of the second atomizer 62 is connected to a second size feeder 72 and the discharge end of the second atomizer 62 is connected to the nozzle 66. Specifically, first, the first glue material feeder 71 and the second glue material feeder 72 respectively supply the first glue material and the second glue material to the first atomizer 61 and the second atomizer 62, then the first atomizer 61 and the second atomizer 62 respectively perform ultrasonic atomization on the first glue material and the second glue material to atomize the first glue material and the second glue material with certain viscosity into fine and uniform fine mist droplets, and finally, the atomized first glue material and the atomized second glue material respectively flow into the nozzle 66 from the discharge ends of the first atomizer 61 and the second atomizer 62 and are sprayed out from the nozzle 66 onto the surface of a product to be sprayed, so that the spraying operation is completed. It should be noted that, the first atomizer 61 and the second atomizer 62 may refer to the existing design of the ultrasonic atomizing head, and as an alternative, ultrasonic transducers may be disposed in the first atomizer 61 and the second atomizer 62, and when in operation, firstly, the high-frequency sound waves are converted into mechanical energy, and then the mechanical energy is transferred to the first rubber compound and the second rubber compound, so as to atomize the first rubber compound and the second rubber compound. In practical application, in order to achieve a better atomization glue spraying effect, the frequency range of the ultrasonic wave can be set to be 20 kHz-130 kHz, the diameter of the atomized liquid drop can be set to be 10 μm-40 μm, and the flow rate of the first atomized material and the second atomized material flowing into the mixing cavity can be set to be 160 ml/min-20 ml/min.

Furthermore, to achieve better mixing, the ultrasonic glue sprayer 6 is designed to include a mixing chamber 63. Specifically, the discharge end of the first atomizer 61 is connected with the first feed end of the mixing chamber 63; the discharge end of the second atomizer 62 is connected with the second feed end of the mixing chamber 63; the discharge end of the mixing chamber 63 is connected to a nozzle 66. Therefore, the first atomized material coming out of the first atomizer 61 and the second atomized material coming out of the second atomizer 62 enter the mixing chamber 63 to be mixed, and are then sprayed out through the nozzle 66. By adopting the design, the mixing uniformity of the two components can be effectively ensured, and further, the required substances can be obtained on the surface of the product to be sprayed with the glue. It should be noted that, in order to enable better output of the mixed materials, the mixing cavity in the mixing chamber 63 may be designed to be an inverted cone as shown in the figure, so that the mixed materials can be more concentrated at the connection position of the mixing chamber 63 and the nozzle 66, and then can be conveniently sprayed out from the nozzle. Of course, other means for facilitating the flow of mix towards the nozzle 66 are possible, such as by using a negative pressure, to cause the mix in the mixing chamber 63 to flow towards the nozzle 66. And is not particularly limited herein.

In addition, in order to make the first atomized material and the second atomized material in the mixing chamber 63 mix more fully, and further improve the mixing effect of the two, the inflow direction of the first atomized material and the inflow direction of the second atomized material can be designed to form a certain included angle, so that the first atomized material and the second atomized material can be crossed and mixed in the air of the mixing chamber 63, and the two atomized materials are mixed more fully. As an alternative, the first atomizer 61 and the second atomizer 62 may be designed to be disposed obliquely at an angle as shown in fig. 2. Because first atomizer 61 and second atomizer 62 are whole to be the slope setting, therefore, first atomizer 61 is the slope setting with the connector of mixing chamber 63 (being the discharge gate of first atomizer 61), second atomizer 62 also is the slope setting with the connector of mixing chamber 63 (being the discharge gate of second atomizer 62), thereby make the first atomized material that flows from the discharge gate of first atomizer 61 flow into mixing chamber 63 according to certain angle, and is the same, the second atomized material that flows from the discharge gate of second atomizer 62 also flows into mixing chamber 63 according to certain angle, and then realize the cross mixture.

Of course, it is also possible to directly set the discharge port of the first atomizer 61 and the discharge port of the second atomizer 62 to be inclined, and the first atomizer 61 and the second atomizer 62 are not inclined as a whole, or directly control the first atomized material to be emitted to the mixing chamber 63 at a certain angle from the first atomizer 61 and the second atomized material to be emitted to the mixing chamber 63 at a certain angle from the second atomizer 62 in a control manner, so that the two materials meet in space. There is no particular limitation as long as the effect can be achieved.

In addition, because the substances sprayed on the surface of the product to be sprayed are two components, and the two components are mixed according to a certain proportion and then sprayed, in order to control the flow rate, the flow velocity and the like of the two components, a first control valve 611 is arranged at the discharge end of the first atomizer 61, and a second control valve 621 is arranged at the discharge end of the second atomizer 62. When the spraying device is used, the first control valve 611 and the second control valve 621 are used for respectively controlling the amount of the first atomized material flowing into the mixing chamber 63 from the first atomizer 61 and the amount of the second atomized material flowing into the mixing chamber 63 from the second atomizer 62 according to the required proportion, so that the first sizing material and the second sizing material are accurately proportioned, and a good spraying effect is achieved. The first control valve 611 and the second control valve 621 may be conventional electronic flow valves or electromagnetic valves, and are not limited herein.

Of course, the control of the ratio of the first and second rubber compounds may be controlled by the first and second rubber compound feeders 71 and 72. That is, the first glue feeder 71 and the second glue feeder 72 may be designed to feed glue in a fixed amount, that is, a fixed amount of glue may be fed by controlling as needed.

Specifically, for the purpose of satisfying the controllable feeding capability, the first glue material feeder 71 and the second glue material feeder 72 may be designed to each include a glue storage tank 73 and a pump 74 disposed on the glue storage tank 73 for providing conveying power, the glue storage tank 73 is used to store the corresponding glue material components, and the output end thereof may be connected to the ultrasonic glue sprayer 6 through a retractable feed pipe or through a hose; the material pumping device 74 may be an air compressor, and the air compressor is controlled by a pressure controller, so as to control the output amount of the glue storage tank 73, and realize that the first glue material and the second glue material are delivered to the ultrasonic glue spraying device 6 in a certain proportion. Of course, other structures capable of realizing the feeding function can be adopted, and the structure is not limited in particular.

As an alternative embodiment, the ultrasonic glue sprayer 6 further comprises a housing 64 and a housing cover 65.

Specifically, a mounting cavity is provided in the housing 64; the first atomizer 61, the second atomizer 62 and the mixing chamber 63 are all mounted in a housing 64; the first atomizer 61 and the second atomizer 62 are installed on the top of the mixing chamber 63; the nozzle 66 is arranged at the bottom of the mixing chamber 63 and extends out of the bottom of the shell 64; the case cover 65 is openably and closably mounted on the top of the case 64; the housing 64 is provided with a first communication port 641 for communicating the first atomizer 61 with the first stock feeder 71, and a second communication port 642 for communicating the second atomizer 62 with the second stock feeder 72. The design of the shell 64 and the shell cover 65 ensures that the integrity of the ultrasonic glue sprayer 6 is better, and the maintenance is convenient.

Further, a support flange 643 for supporting and fixing the mixing chamber 63 may be provided on the inner wall of the housing 64, and when the mixing chamber 63 is attached, the mixing chamber 63 is directly placed in the housing 64 and brought into contact with the support flange 643, thereby achieving attachment and fixation.

In addition, a first support frame 631 for supporting the first atomizer 61 and a second support frame 632 for supporting the second atomizer 62 are provided at the top of the mixing chamber 63; a first limiting frame 651 abutted with the first atomizer 61 and a second limiting frame 652 abutted with the second atomizer 62 are arranged at the bottom of the shell cover 65; when the case cover 65 is in a closed state, the first position-limiting frame 651 and the first support frame 631 clamp and fix the first atomizer 61, and the second position-limiting frame 652 and the second support frame 632 clamp and fix the second atomizer 62. The glue spraying device can be assembled as follows: the nozzle 66 is connected with the bottom of the mixing chamber 63, the mixing chamber 63 is placed in the housing 64, the mixing chamber 63 is abutted to the supporting flange 643, the first atomizer 61 and the second atomizer 62 are respectively placed on the first supporting frame 631 and the second supporting frame 632 at the top of the mixing chamber 63 and are connected, the housing cover 65 is covered, the first atomizer 61 and the second atomizer 62 are fixed by the first limiting frame 651 and the second limiting frame 652, the mixing chamber 63 is fixed, and the ultrasonic glue sprayer 6 is more convenient to assemble and disassemble due to the design.

As an optional implementation manner, in order to avoid pollution caused by the fact that the glue material is splashed outside the glue spraying machine when the glue is sprayed and increase the difficulty of subsequent cleaning work, the rack 1 may further be designed with a shield 13 based on the consideration of improving the use safety; the shield 13 is mounted on the base 11, and forms a shield space with the base 11, and the support table device 8 is mounted in the shield space. Of course, the whole rack 1 may be directly wrapped with a transparent protective cover, and the like, which is not limited in particular.

In addition, should spout the machine of glue and still can include overflow and glue collecting vat 9, overflow and glue collecting vat 9 frame locate on the 8 outer peripheral faces of brace table device or install in frame 1 and be located brace table device 8 below for retrieve the sizing material that overflows brace table device 8, avoid increasing the follow-up clearance degree of difficulty, it is more convenient to use. The installation of excessive glue collecting vat 9 adopts detachable installation, for example buckle formula installation to the convenient sizing material to in the excessive glue collecting vat 9 clears up, does not specifically do the restriction.

As an alternative embodiment, the support table device 8 may be a vacuum adsorption plate. The vacuum nozzle 81 on the vacuum adsorption plate is connected with a vacuum pump (not shown in the figure), and the wafer is fixed in a vacuum adsorption mode, so that the fixing mode is simple and quick.

As an optional embodiment, the two-component glue sprayer further comprises a moving device (not shown), and the moving device is connected to the support table device 8 and/or the ultrasonic glue sprayer 6, and is used for driving the support table device 8 and/or the ultrasonic glue sprayer 6 to move. The purpose of the design is to enable the ultrasonic glue sprayer 6 to move to a proper position above the wafer placed on the support table device 8 during spraying, so that the whole wafer can obtain a good spraying effect through single spraying; secondly, in order to realize the large-area glue spraying work, namely, the support table device 8 and the ultrasonic glue sprayer 6 can move in a mutually matched mode, so that the glue spraying in multiple regions is realized, and the large-area glue spraying is further realized.

Specifically, the moving device may include a first moving mechanism 2 and a second moving mechanism 3, as shown in fig. 1, the first moving mechanism 2 is connected to the supporting table device 8 for driving the supporting table device 8 to move along a first direction, and the second moving mechanism 3 is connected to the ultrasonic glue sprayer 6 for driving the ultrasonic glue sprayer 6 to move along a second direction. The first direction and the second direction may be perpendicular to each other, or opposite to each other, and are not limited in particular. When glue is sprayed under the structure, the first moving mechanism 2 and the second moving mechanism 3 can respectively drive the supporting table device 8 and the ultrasonic glue sprayer 6 to move along the corresponding directions according to specific signal requirements, for example, the ultrasonic glue sprayer 6 can be controlled to spray the surfaces of the ultrasonic glue sprayer 6 along the leftward direction relative to the wafer, after the leftward spraying is finished, the supporting table device 8 is controlled to move along the downward direction relative to the wafer (i.e. the ultrasonic glue sprayer 6 is located in the region where the wafer is not sprayed), then the ultrasonic glue sprayer 6 is continuously controlled to spray the second region on the surface of the wafer along the rightward direction relative to the wafer, and the reciprocating is carried out in such a way, so that the mutually matched movement of the supporting table device and the ultrasonic glue sprayer is realized, and further, the spraying of a large-area glue product to be sprayed is realized.

Further, the moving device can also comprise a third moving mechanism 4, and the third moving mechanism 4 is connected with the ultrasonic glue sprayer 6 and is used for driving the ultrasonic glue sprayer 6 to move towards or away from the support table device 8; the second moving mechanism 3 is connected with the third moving mechanism 4 and is used for driving the third moving mechanism 4 to move so as to drive the ultrasonic glue sprayer 6 to move along the second direction. The distance between the ultrasonic glue sprayer 6 and the wafer can be adjusted according to needs through the third moving mechanism 4, and therefore a better glue spraying effect is achieved. Of course, as an alternative embodiment, the first moving mechanism 2, the second moving mechanism 3, and the third moving mechanism 4 are all used to control the movement of the ultrasonic glue sprayer 6, that is, the ultrasonic glue sprayer 6 itself realizes the movement in multiple directions, such that the glue spraying in a large area is realized by controlling the movement of the ultrasonic glue sprayer 6. In addition, the first moving mechanism 2 and the second moving mechanism 3 may be used to control the movement of the supporting table device 8, or both may be used to control the movement of the ultrasonic glue sprayer 6, which is not limited specifically.

Optionally, to the scheme of waiting to spout gluey product surface and spouting gluey completely through the single completion, the mobile device can only for including third moving mechanism 4, and third moving mechanism 4 spouts gluey ware 6 with the ultrasonic wave and is connected for drive the ultrasonic wave and spout gluey ware 6 and toward being close to or keeping away from a direction motion of a supporting bench device 8, promptly, the ultrasonic wave spouts gluey ware 6 and a supporting bench device 8 and has corresponding position, spouts gluey ware 6 distance for the wafer surface through the adjustment ultrasonic wave, can realize the whole regional spraying of wafer surface. Or the moving device also comprises a first moving mechanism 2 and a second moving mechanism 3, the first moving mechanism 2 can be connected with a support table device 8, the second moving mechanism 3 can be connected with the ultrasonic glue sprayer 6, the relative positions of the ultrasonic glue sprayer 6 and the support table device 8 are adjusted through the first moving mechanism 2 and the second moving mechanism 3, the spraying area of the ultrasonic glue sprayer 6 at least can completely contain the whole area of the surface of the wafer, and then the third moving mechanism 4 drives the ultrasonic glue sprayer 6 to move towards the direction far away from or close to the surface of the wafer, so that a good and uniform spraying effect is obtained. Of course, the first moving mechanism 2 and the second moving mechanism 3 may be used to control the movement of the supporting platform device 8 or the movement of the ultrasonic glue sprayer 6, and are not limited in this respect.

In addition, in the present application, the first moving mechanism 2 and/or the second moving mechanism 3 may be a screw sliding table mechanism, and may also be other linear moving mechanisms, which is not limited specifically. The third moving mechanism 4 may be a telescopic cylinder mechanism, or may be another telescopic mechanism, which is not limited specifically. The first moving mechanism 2, the second moving mechanism 3, and the third moving mechanism 4 may be a completely different combination of moving mechanism types, or a completely same combination of moving mechanism types, or a partially same combination of moving mechanism types, and are not limited in particular.

Taking the first moving mechanism 2 as a screw sliding table mechanism as an example, the first moving mechanism specifically includes a first screw seat 21, a first slider 22, a first motor 24, and a first screw 23.

The first screw rod seat 21 is installed on the frame 1, specifically installed on the base 11 and provided with a first guide rail 211; the first slider 22 is slidably mounted on the first guide rail 211; the first screw 23 is pivoted on the first screw seat 21, passes through the first slide block 22 and is in threaded connection with the first slide block 22; the first motor 24 is connected with the first screw 23 for driving the first screw 23 to rotate, and the support table device 8 is installed on the first slide block 22. The first motor 24 may be a conventional stepping motor, and is connected to the first lead screw 23 through, for example, a gear assembly, etc., to drive the first lead screw 23 to rotate, so as to drive the first slide block 22 to slide, and finally drive the support table device 8 to move. The gear transmission assembly may include a gear and a ring, the gear is fixed on the output shaft of the first motor 24 and is in transmission fit with the ring, and the ring is fixed on the first lead screw 23.

Taking the second moving mechanism 3 as a screw sliding table mechanism as an example, the second moving mechanism specifically includes a second screw seat 31, a second slider 32, a second motor 34, and a second screw 33.

The second screw rod seat 31 is mounted on the frame 1, specifically on the mounting bracket 12, and is provided with a second guide rail (not shown); the second slider 32 is slidably mounted on the second guide rail; the second screw 33 is pivoted on the second screw seat 31, passes through the second slide block 32 and is in threaded connection with the second slide block 32; the second motor 34 is connected to the second lead screw 33 for driving the second lead screw 33 to rotate. For the specific working principle of the second moving mechanism 3, reference may be made to the first moving mechanism 2, which is not described herein again.

In order to facilitate the installation of the third moving mechanism 4, a fixed bracket 35 is installed on the second sliding block 32; the third moving mechanism 4 is arranged on the fixed bracket 35, and the telescopic end of the third moving mechanism is connected with the ultrasonic glue sprayer 6; the first glue feeder 71 and the second glue feeder 72 may be mounted on the fixed bracket 35 or the frame 1, and are not limited in particular.

Further, in order to realize automatic operation and further improve the glue spraying efficiency, the dual-component glue spraying machine further comprises a control device, the control device comprises a controller (not shown) and an operation panel 14, the controller is electrically connected with the moving device and the glue spraying device, and the moving device and the glue spraying device are controlled by the controller to realize corresponding operation of the moving device and the glue spraying device. The controller may be a plc controller, a microprocessor, etc., without limitation. In addition, an operation panel 14 is mounted on the base 11 and electrically connected to the controller, so as to facilitate operation control by an operator.

As an alternative embodiment, the two-component glue sprayer further comprises a visual detector 5, and the visual detector 5 is slidably connected to the mounting bracket 12, and the visual detector 5 is used for acquiring the position information of the product to be sprayed. Specifically, the visual detector 6 can detect the position of the wafer, and the ultrasonic glue sprayer 6 can perform corresponding position adjustment according to the wafer position information detected by the visual detector 5, so that the optimal glue spraying position is achieved, and a good glue spraying effect is achieved. Optionally, a fixing bracket 35 is slidably connected to the mounting bracket 12, the vision detector 5 is disposed on the fixing bracket 35, and the vision detector 5 is moved by the movement of the fixing bracket 35 relative to the mounting bracket 12. Alternatively, the visual detector 5 may be disposed on the second moving mechanism 3, specifically, the visual detector 5 is disposed on the second lead screw 33 and spaced from the second slider 32. Through the setting of vision detector 5, for the automation mechanized operation provides position or angle information etc. thereby the controller of being convenient for can obtain relevant information and control the mobile device or spout the motion of mucilage binding, and then realize accurate gluey operation of spouting. More preferably, for the large-area product of waiting to spout glue that has different glue spraying area, can realize spouting the glue to the accuracy in different areas. Further, the vision detector 5 may be a CCD detector, and is not particularly limited.

The automatic glue spraying process comprises the following steps: the wafer with the glue spraying function is placed on the supporting table device 8, and the vacuum pump of the supporting table device 8 is started to realize adsorption and fixation.

And starting the visual detector 5 to acquire the position information of the wafer, and controlling the first moving mechanism 2, the second moving mechanism 3 and the third moving mechanism 4 to operate by the controller based on the acquired position information of the wafer so that the wafer and the ultrasonic glue sprayer 6 meet a preset initial position relationship.

And starting the first glue material feeder 71, the second glue material feeder 72 and the ultrasonic glue sprayer 6, controlling the ultrasonic glue sprayer 6 to spray glue to the wafer, and simultaneously controlling the first moving mechanism 2 or the second moving mechanism 3 to enable the ultrasonic glue sprayer 6 to generate position change according to a preset glue spraying path until glue spraying operation is completed.

While the foregoing has described the details of the two-component glue sprayer provided in the present application, those skilled in the art will readily appreciate that the concepts of the embodiments of the present application may be modified in the specific embodiments and applications, and in view of the above, the disclosure should not be construed as limiting the present application.

Claims (10)

1. A bi-component glue sprayer is characterized by comprising a support table device and a glue spraying device;

the support table device is used for supporting and fixing a product to be sprayed with glue;

the glue spraying device comprises an ultrasonic glue sprayer;

the ultrasonic glue sprayer is connected with the first glue feeder and the second glue feeder;

the first glue stock feeder is used for conveying first glue stock to the ultrasonic glue sprayer;

the second glue material feeder is used for conveying a second glue material to the ultrasonic glue sprayer;

the ultrasonic glue sprayer is used for mixing the first glue material and the second glue material and spraying the mixed glue material and the second glue material onto the product to be sprayed in an atomized state.

2. The two-component glue sprayer according to claim 1, further comprising a moving device;

the moving device is connected with the support table device and/or the ultrasonic glue sprayer and is used for driving the support table device and/or the ultrasonic glue sprayer to move.

3. The two-component glue sprayer according to claim 1, wherein the ultrasonic glue sprayer comprises a first atomizer, a second atomizer and a nozzle;

the feeding end of the first atomizer is connected with the first sizing feeder, and the discharging end of the first atomizer is connected with the nozzle;

the feeding end of the second atomizer is connected with the second sizing feeder, and the discharging end of the second atomizer is connected with the nozzle.

4. The two-component glue sprayer according to claim 3, wherein the ultrasonic glue sprayer further comprises a mixing chamber;

the discharge end of the first atomizer is connected with the first feed end of the mixing chamber;

the discharge end of the second atomizer is connected with the second feed end of the mixing chamber;

the discharge end of the mixing chamber is connected with the nozzle.

5. A two-component glue sprayer according to claim 4, wherein the direction of the feed of the first atomized material fed into the mixing chamber by the first atomizer intersects the direction of the feed of the second atomized material fed into the mixing chamber by the second atomizer at an angle.

6. The two-component glue sprayer according to claim 5, wherein the first atomizer and the second atomizer are disposed in an inclined manner at an angle such that a feeding direction of a first atomized material fed into the mixing chamber through the first atomizer intersects with a feeding direction of a second atomized material fed into the mixing chamber through the second atomizer at an included angle.

7. The two-component glue sprayer according to any one of claims 3 to 6, wherein the discharge end of the first atomizer is provided with a first control valve;

and a second control valve is arranged at the discharge end of the second atomizer.

8. The two-component glue sprayer according to claim 1, further comprising a frame;

the rack comprises a base and a mounting bracket;

the mounting bracket is vertically mounted on the base;

the supporting platform device is arranged on the base;

the glue spraying device is arranged on the mounting bracket.

9. The two-component glue sprayer according to claim 8, further comprising a glue overflow collection tank;

the overflow glue collecting groove frame is arranged on the outer peripheral surface of the supporting platform device or arranged on the rack and positioned below the supporting platform device and used for recovering glue materials.

10. The two-component glue sprayer according to claim 8, further comprising a vision detector;

the visual detector is connected to the mounting bracket in a sliding manner and used for acquiring the position information of the product to be sprayed with glue.

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