CN217536136U - Compact semiconductor evaporation table - Google Patents
Compact semiconductor evaporation table Download PDFInfo
- Publication number
- CN217536136U CN217536136U CN202221554209.9U CN202221554209U CN217536136U CN 217536136 U CN217536136 U CN 217536136U CN 202221554209 U CN202221554209 U CN 202221554209U CN 217536136 U CN217536136 U CN 217536136U
- Authority
- CN
- China
- Prior art keywords
- wire rope
- link joint
- frame
- received
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
The utility model discloses a compact semiconductor evaporation platform, it includes: evaporating station casing, crucible, link joint are received and are unreeled frame and wire rope and receive and unreel the frame, the crucible sets up in the evaporating station casing, link joint is received and unreel the frame and wire rope is received and unreel the frame and set up the both sides at the crucible, be provided with the link joint on the link joint is received and unreels the cylinder, the link joint winding sets up on the link joint is received and unreels the cylinder, wire rope is received and unreeled and is provided with the wire rope on the frame, link joint front end both sides are provided with the winding respectively and set up the wire rope on wire rope is received and unreels the cylinder. Compact semiconductor evaporation platform, pull the link joint through wire rope for the link joint can cover on the opening of crucible, carries out the collection of impurity, and is easy and simple to handle, small after the link joint rolling moreover, compact structure.
Description
Technical Field
The utility model relates to a semiconductor production facility field especially relates to a compact semiconductor evaporation table.
Background
In the production process of semiconductor element silicon wafers, an evaporation table is one of important devices, and metal particles in a crucible are heated by an electron beam, evaporated and impacted on the surfaces of the silicon wafers and condensed on the silicon wafers to form metal films.
In the working process of the evaporation table, the purity of the metal particles determines the quality of the metal film, and if the metal particles contain impurities, the impurities are easy to evaporate and transfer to the surface of the silicon wafer after heating, so that the quality of the silicon wafer is influenced. Therefore, utilize the baffle to carry out the cover of crucible opening usually at the metal particle heating initial stage for impurity and partial metal evaporate the baffle bottom surface, carry out the collection of impurity, reduce the problem that impurity evaporates the top silicon chip, but the baffle is bulky, and the operation is inconvenient, has influenced the work efficiency of evaporation stage, and the horizontal migration of baffle has further increased the volume of evaporation stage with accomodating moreover, and the installation space who occupies is big, needs to improve.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a compact semiconductor evaporation table carries out the collection of impurity, promotes easy and simple to handle nature, keeps the compactness of structure.
To achieve the purpose, the utility model adopts the following technical proposal:
a compact semiconductor evaporation station, comprising: evaporating station casing, crucible, link joint are received and are unreeled frame and wire rope and receive and unreel the frame, the crucible sets up in the evaporating station casing, link joint is received and unreel the frame and wire rope is received and unreel the frame and set up the both sides at the crucible, be provided with the link joint on the link joint is received and unreels the cylinder, the link joint winding sets up on the link joint is received and unreels the cylinder, wire rope is received and unreeled and is provided with the wire rope on the frame, link joint front end both sides are provided with the winding respectively and set up the wire rope on wire rope is received and unreels the cylinder.
Wherein, be provided with the fixing base that is located the crucible below in the evaporation stage casing.
The crucible winding and unwinding device is characterized in that a guide frame is arranged between the crucible and the chain plate winding and unwinding frame, a guide roller is arranged on the guide frame, and the bottom position of the guide roller is higher than the top position of the crucible.
And screws for fixing the steel wire rope are arranged on two sides of the front end of the chain plate.
The chain plate winding and unwinding frame is provided with a first motor for driving the chain plate winding and unwinding roller to rotate.
And a second motor for driving the steel wire rope winding and unwinding roller to rotate is arranged on the steel wire rope winding and unwinding frame.
The utility model has the advantages that: a chain plate winding and unwinding frame is specially designed to wind and unwind a chain plate, and the chain plate is pulled through a steel wire rope, so that the chain plate can cover an opening of a crucible to collect impurities, the operation is simple and convenient, the volume of the wound chain plate is small, and the structure of an evaporation table can be kept compact.
Drawings
Fig. 1 is a schematic structural diagram of the present invention;
fig. 2 is a partially enlarged view of a portion a in fig. 1.
Detailed Description
The technical solution of the present invention is further described with reference to fig. 1 to 2 by specific examples.
A compact semiconductor evaporation station as shown in fig. 1, comprising: evaporating station casing 1, crucible 2, link joint 8, link joint are received and are unreeled frame 5 and wire rope and receive and unreel frame 9, crucible 2 sets up in evaporating station casing 1 for hold the metal particle, be provided with the fixing base 3 that is located crucible 2 below in the evaporating station casing 1, ensure crucible 2's positional stability.
The utility model discloses a crucible pot, including crucible pot 2, link joint coiling and uncoiling frame 5, wire rope coiling and uncoiling frame 9, be provided with link joint coiling and uncoiling cylinder 6 on link joint coiling and uncoiling frame 5, link joint 8 winding sets up on link joint coiling and uncoiling cylinder 6, in this embodiment, be provided with the first motor that drive link joint coiling and uncoiling cylinder 6 was rotatory on link joint coiling and uncoiling frame 5, carry out the rotatory drive of link joint coiling and uncoiling cylinder 6, realize that the coiling of link joint 8 unreels.
The wire rope winding and unwinding frame 9 is provided with a wire rope winding and unwinding roller 10, as shown in fig. 2, two sides of the front end of the chain plate 8 are respectively provided with a wire rope 12 wound on the wire rope winding and unwinding roller 10, and the chain plate 8 is pulled by the wire rope 12, so that the chain plate 8 can cover the opening of the crucible 2 after being unwound, and impurities can be collected, and the operation is simple and convenient. And screws 11 for fixing a steel wire rope 12 are arranged on two sides of the front end of the chain plate 8, so that the assembling is convenient and the structure is stable.
In this embodiment, a second motor for driving the wire rope winding and unwinding drum 10 to rotate is disposed on the wire rope winding and unwinding frame 9, so as to drive the wire rope winding and unwinding drum 10 to rotate, thereby realizing winding and unwinding of the wire rope 12. First motor and second motor can utilize the controller of evaporating station to carry out rotation control, and is easy and simple to handle, have promoted automatic level, and the compactness of evaporating station structure is ensured to the small after 8 rolling of link joint moreover, reduces the space that occupies the installation.
A guide frame 4 is arranged between the crucible 2 and the chain plate winding and unwinding frame 5, a guide roller 7 is arranged on the guide frame 4, the bottom position of the guide roller 7 is higher than the top position of the crucible 2, the chain plate 8 is guided, the chain plate 8 moves through the bottom of the guide roller 7, and the opening of the crucible 2 is covered under the traction of a steel wire rope 12.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention, and it is to be understood that the present invention is not limited to the above embodiments, but may be modified within the scope of the present invention.
Claims (6)
1. A compact semiconductor evaporation stage, comprising: evaporating station casing, crucible, link joint are received and are unreeled frame and wire rope and receive and unreel the frame, the crucible sets up in the evaporating station casing, link joint is received and unreel the frame and wire rope is received and unreel the frame and set up the both sides at the crucible, be provided with the link joint on the link joint is received and unreels the cylinder, the link joint winding sets up on the link joint is received and unreels the cylinder, wire rope is received and unreeled and is provided with the wire rope on the frame, link joint front end both sides are provided with the winding respectively and set up the wire rope on wire rope is received and unreels the cylinder.
2. The compact semiconductor evaporation stage of claim 1, wherein the evaporation stage housing has a mounting seat disposed therein below the crucible.
3. The compact semiconductor evaporation stage of claim 1, wherein a guide frame is arranged between the crucible and the chain plate unwinding frame, a guide roller is arranged on the guide frame, and the bottom position of the guide roller is higher than the top position of the crucible.
4. The compact semiconductor evaporation stage of claim 1, wherein screws for fixing the wire rope are disposed on both sides of the front end of the chain plate.
5. The compact semiconductor evaporation station of claim 1, wherein the chain take-up and pay-off rack is provided with a first motor for driving the chain take-up and pay-off roller to rotate.
6. The compact semiconductor evaporation station of claim 1, wherein the wire rope reeling and unreeling rack is provided with a second motor for driving the wire rope reeling and unreeling roller to rotate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221554209.9U CN217536136U (en) | 2022-06-21 | 2022-06-21 | Compact semiconductor evaporation table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221554209.9U CN217536136U (en) | 2022-06-21 | 2022-06-21 | Compact semiconductor evaporation table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217536136U true CN217536136U (en) | 2022-10-04 |
Family
ID=83419340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221554209.9U Active CN217536136U (en) | 2022-06-21 | 2022-06-21 | Compact semiconductor evaporation table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217536136U (en) |
-
2022
- 2022-06-21 CN CN202221554209.9U patent/CN217536136U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206767199U (en) | The unreeling machine of adjustable let off roll height | |
| CN217536136U (en) | Compact semiconductor evaporation table | |
| CN213921632U (en) | Film coating machine | |
| CN110788162A (en) | Winding equipment is used in brass area processing | |
| CN213530229U (en) | Strip steel coil protection type uncoiler | |
| CN207629407U (en) | Coiled strip gum marking machine device | |
| CN213111831U (en) | Toilet paper production coiling mechanism | |
| CN215664144U (en) | Film unwinding structure for aluminum plate double-sided laminating machine | |
| CN219341320U (en) | Cable winding and unwinding device for electric power construction | |
| CN213583373U (en) | High-stability power electrical transformer | |
| CN218174108U (en) | Unwinding device for preventing current collector from warping | |
| CN209922654U (en) | Can receive and release detachable device of electric wire | |
| CN221720077U (en) | Aluminum film feeding device | |
| CN218024385U (en) | Single cantilever unwinding mechanism | |
| CN212711891U (en) | A processing binding apparatus for paper | |
| CN218182050U (en) | Dry-type transformer coil winding device | |
| CN218384821U (en) | Iron core winding machine for transformer processing | |
| CN216997091U (en) | Novel coiling machine of high efficiency winding displacement | |
| CN220200822U (en) | Loading frame for welding strip processing | |
| CN220563862U (en) | Unreeling deviation correcting device for aluminizer production | |
| CN106865340B (en) | A kind of cable winding device | |
| CN218024791U (en) | Automatic cable winding and unwinding device | |
| CN221915015U (en) | Stripping device for self-adhesive labels | |
| CN213445650U (en) | Laser film winding and unwinding device | |
| CN220391625U (en) | Winding and unwinding device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |