CN217505909U

CN217505909U - Test head mobile device

Info

Publication number: CN217505909U
Application number: CN202123338666.2U
Authority: CN
Inventors: 李一然; 崔勇彬; 王宪兵
Original assignee: Shanghai Weice Semiconductor Technology Co ltd
Current assignee: Shanghai Weice Semiconductor Technology Co ltd
Priority date: 2021-12-28
Filing date: 2021-12-28
Publication date: 2022-09-27
Anticipated expiration: 2031-12-28

Abstract

The utility model discloses a test head mobile device, including the base, be used for centre gripping test head's centre gripping arm, buffering subassembly and adjusting means, the centre gripping arm slides and sets up on the lateral wall of base for carry test head and probe card and contact, the buffering subassembly includes the sleeve, the sleeve sets up on the base, sleeve inside slidable mounting has the sliding plate, there is the buffering head through spring mounting on the sliding plate for the buffering of centre gripping arm, the adjusting means sets up on the sleeve, be used for adjusting the sliding plate with interval between the buffering head diapire. The utility model discloses an above-mentioned device's cooperation is used, cushions the centre gripping arm to prevent that the too big emergence of impact force from damaging between test head and the probe card, and can also carry out self-adaptation adjustment to the buffering effort that the buffering head provided according to the actual demand, can perfectly laminate between assurance test head and the probe card.

Description

Test head mobile device

Technical Field

The utility model relates to a semiconductor test technical field especially relates to a test head mobile device.

Background

When the semiconductor equipment is used, the testing head and the detector are required to be attached and contacted in advance to check whether the device can normally operate. The existing testing method generally adopts a lifting device to drive a testing head to be in contact with a probe card, but the testing head is often damaged due to overlarge local impact force when in contact with the probe card.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a test head mobile device to because of the too big function that takes place to damage of local impact force when realizing preventing test head and detector contact.

In order to solve the technical problem, the utility model provides a test head mobile device, including the base, be used for centre gripping test head's centre gripping arm, buffering subassembly and adjusting means, the centre gripping arm slides and sets up on the lateral wall of base for carry test head and probe card and contact, the buffering subassembly includes the sleeve, the sleeve sets up on the base, sleeve inside slidable mounting has the sliding plate, there is the buffering head through spring mounting on the sliding plate for the buffering of centre gripping arm, adjusting means sets up on the sleeve, be used for adjusting the sliding plate with interval between the buffering head diapire.

Further, the adjusting member comprises a latch rod, and the latch rod penetrates through the sliding plate and is used for driving the sliding plate to move.

Furthermore, a plurality of bolt holes matched with the bolt rods are formed in the inner wall of the sleeve.

Furthermore, one end of the bolt rod is connected with the inner wall of the bolt hole through threads.

Furthermore, the outer wall of the sleeve is provided with a groove for sliding the bolt rod.

Furthermore, the outer wall of the base is provided with a sliding rail for mounting the clamping arm.

Further, at least one buffering component is arranged.

Compared with the prior art, the utility model discloses following beneficial effect has at least:

through being provided with sleeve, buffer head and spring, utilize the elastic force that spring self deformation brought to reduce the speed that the centre gripping arm descends, make the test head that the centre gripping arm top was carried slowly laminate with the probe card, reach the problem that the impact force was too big and takes place the damage when preventing test head and probe card contact.

And through being provided with adjusting member and sliding plate, control the interval between bottom wall of the buffer head and the sliding plate to change the flexible deflection of spring, make the buffer head change to the elastic support force that the centre gripping arm provided, so can be according to actual demand, carry out the self-adaptation adjustment to the buffering effort, in order to ensure to laminate perfectly between probe card and the test head.

Drawings

Fig. 1 is a schematic view of the overall structure of the test head moving device of the present invention;

FIG. 2 is a schematic structural view of a buffer device in the test head moving device according to the present invention;

fig. 3 is a cross-sectional view of a buffer device in the test head moving device of the present invention.

Detailed Description

The test head moving device of the present invention will be described in greater detail with reference to the schematic drawings, in which preferred embodiments of the present invention are shown, it being understood that those skilled in the art can modify the invention described herein while still achieving the advantageous effects of the present invention. Accordingly, the following description should be construed as broadly as possible to those skilled in the art and not as limiting the invention.

The invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become more fully apparent from the following description and appended claims. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.

As shown in fig. 1-3, an embodiment of the present invention provides a test head moving device, which includes a base 1, a clamping arm 2 for clamping a test head, a buffer assembly 3, and an adjusting member 4.

The clamping arm 2 is slidably arranged on the side wall of the base 1 and is used for carrying a test head to be in contact with a probe card.

The buffer assembly 3 comprises a sleeve 31, the sleeve 31 is arranged on the base 1, a sliding plate 32 is slidably mounted inside the sleeve 31, and a buffer head 34 is mounted on the sliding plate 32 through a spring 33 and used for buffering the clamping arm 2. The clamping arm 2 is buffered by the spring 33 between the sliding plate 32 and the buffer head 34, and when the clamping arm 2 is pressed down to contact with the buffer head 34, the spring 33 is deformed to provide reverse elasticity for the clamping arm 2, so that the aim of reducing the descending speed of the clamping arm 2 is fulfilled, and the problem of damage caused by overlarge impact force between the test head and the probe card is solved.

The adjusting member 4 is provided on the sleeve 31 for adjusting the distance between the sliding plate 32 and the bottom wall of the cushioning head 34. The distance between the sliding plate 32 and the cushion head 34 is changed by the adjusting member 4 (i.e. the amount of expansion and contraction deformation of the spring 33 is changed), thereby changing the elastic force applied by the spring 33 to the cushion head 34. Therefore, the self-adaptive adjustment can be carried out according to the descending speed of the clamping arm 2, and the impact force applied when the clamping arm 2 drives the test head to be jointed with the probe card is the lowest, so that the aim of perfectly jointing the test head and the probe card is fulfilled.

To facilitate adjustment of the spacing between the slide plate 32 and the bumper head 34. The adjusting member 4 includes a latch rod 41, the latch rod 41 penetrates the sliding plate 32 to drive the sliding plate 32 to move, and the position of the sliding plate 32 is changed by moving the latch rod 41 up and down to achieve the purpose of adjusting the distance between the sliding plate 32 and the buffer head 34.

In order to fix the position of the sliding plate 32 after adjustment, a plurality of latch holes 42 matched with the latch rods 41 are formed in the inner wall of the sleeve 31. The position of the sliding plate 32 is limited by using the bolt principle, so that the aim of quickly fixing the sliding plate 32 is fulfilled.

In order to ensure the fixing effect of the slide plate 32. One end of the bolt rod 41 is connected with the inner wall of the bolt hole 42 through threads. The screw is used for connection, which further ensures the connection effect of the latch rod 41 and the latch hole 42 (i.e. ensures that the position of the sliding plate 32 is not easily changed).

In addition, the inner wall of the sleeve 31 is provided with a limiting groove which limits the sliding plate 32, so that the sliding plate 32 can only move along the vertical direction, and the sliding plate 32 is prevented from rotating when the latch rod 41 is in threaded connection with the latch hole 42.

The outer wall of the sleeve 31 is provided with a groove 311 for sliding the latch rod 41, so that manual poking of the latch rod 41 is facilitated.

Further, the outer wall of the base 1 is provided with a sliding rail 11 for installing the clamping arm 2, so that the clamping arm 2 is prevented from deviating.

Buffering subassembly 3 is provided with one at least, preferably, buffering subassembly 3 is provided with two and is located the both sides of centre gripping arm 2, guarantees that the buffering effect that centre gripping arm 2 both sides received is comparatively even, avoids leading to centre gripping arm 2 operation to break down because of the atress inequality.

It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. A test head moving device is characterized by comprising a base, a clamping arm for clamping a test head, a buffer assembly and an adjusting member;

the clamping arm is arranged on the side wall of the base in a sliding mode and is used for carrying a test head to be in contact with a probe card;

the buffer assembly comprises a sleeve, the sleeve is arranged on the base, and a sliding plate is slidably arranged in the sleeve;

the sliding plate is provided with a buffer head through a spring and used for buffering the clamping arm;

the adjusting member is arranged on the sleeve and used for adjusting the distance between the sliding plate and the bottom wall of the buffer head.

2. The test head movement apparatus of claim 1, wherein the adjustment member comprises a latch rod extending through the slide plate for moving the slide plate.

3. The test head movement apparatus of claim 2, wherein the interior wall of the sleeve defines a plurality of latch holes for mating with the latch rods.

4. The test head movement apparatus of claim 3, wherein the one end of the latch rod is threadably engaged with the inner wall of the latch bore.

5. The test head movement apparatus of claim 2, wherein the sleeve outer wall defines a groove for sliding movement of the latch rod.

6. The test head movement apparatus of claim 1, wherein the base outer wall is provided with a slide for mounting the clamp arm.

7. The test head movement apparatus of claim 1, wherein at least one of the buffer assemblies is provided.