CN217502753U

CN217502753U - Sealing cover plate device for outer assembly of valve door plate piston of semiconductor equipment

Info

Publication number: CN217502753U
Application number: CN202221255880.3U
Authority: CN
Inventors: 王虎斌; 李得平
Original assignee: Shengjisheng Semiconductor Technology Shanghai Co ltd
Current assignee: Shengjisheng Semiconductor Technology Shanghai Co ltd
Priority date: 2022-05-24
Filing date: 2022-05-24
Publication date: 2022-09-27
Anticipated expiration: 2032-05-24

Abstract

The utility model discloses a sealing cover plate device of a valve door plate piston outer assembly of semiconductor equipment, which comprises a valve door plate piston shell assembly, the back plate is fixed on the back side wall of the valve door plate piston shell assembly, three door plate pistons which are arranged at equal intervals are arranged on the valve door plate piston shell assembly, two symmetrically arranged positioning plates are fixed at the top end and the bottom end of the valve door plate piston shell assembly, the sealing cover plate device of the valve door plate piston outer assembly of the semiconductor equipment is different from the prior art, through wholly installing sealed apron additional at three piston shell assembly rear of valve door plant, and wholly install dustless glue seal spare additional at three piston shell assembly rear of door plant and do sealed test, make it cover the three piston shell total subassembly of door plant completely, through the emergence of experimental verification having solved the product oil defect case, solved the problem that the greasy granule spills when the valve door plant is at piston motion switch.

Description

Sealing cover plate device for outer assembly of valve door plate piston of semiconductor equipment

Technical Field

The utility model relates to a sealed apron technical field specifically is a sealed apron device of outer assembly of semiconductor equipment valve door plant piston.

Background

Because the front end load fixed cabin valve door plant is opening and closing, when the piston moves back and forth, greasy granule spill production has in the door plant piston motion process to waiting for the data send in-process or waiting for the data send in-process at the wafer, having greasy particulate matter spill attached to the wafer when the switch door, can often lead to the production of product oil defect case when the wafer technology is finished.

At present, when the problem of oil particles splashing out in the process of door panel piston movement is solved, a mode of installing a sealing cover plate is generally adopted to solve the problem of oil particles splashing out when a valve door panel is opened and closed by piston movement, but the existing sealing cover plate device, when in installation or disassembly, the mode of fastening and installing a plurality of screws is still adopted, which causes low disassembly and assembly efficiency, especially when in preparation for maintenance, the disassembly efficiency of the sealing cover plate is greatly reduced, the use is inconvenient, secondly, the dust-free glue sealing piece on the sealing cover plate is generally integrated with the sealing cover plate, which is inconvenient to disassemble and replace and causes damage to a single dust-free glue sealing piece, need wholly change, cause the increase of replacement cost then, greatly reduced device's practicality, for this reason, we provide a semiconductor equipment valve door plant piston outer assembly sealed apron device.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a sealed apron device of outer assembly of semiconductor equipment valve door plant piston to solve the problem that provides among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a semiconductor equipment valve door plant piston outer assembly sealed cover plate device, including valve door plant piston shell assembly, be fixed with the backplate on the back lateral wall of valve door plant piston shell assembly, the door plant piston that is equipped with three equidistance setting on the valve door plant piston shell assembly, the top and the bottom of valve door plant piston shell assembly all are fixed with the locating plate that two symmetries set up, the outside movable cover of valve door plant piston shell assembly is equipped with sealed apron, all set up the cooperation groove with locating plate matched with on the sealed apron, the through-hole corresponding with the door plant piston has all been seted up on the sealed apron, the U-shaped passageway that two symmetries set up is still seted up to the bottom of sealed apron, all be connected with sealing mechanism between through-hole and the sealed apron, portable dismouting mechanism is all installed to the top and the bottom of sealed apron.

Preferably, the sealing mechanism comprises a sealing ring movably installed in the through hole, a dust-free rubber sealing piece with an annular vertical section is fixed on the inner side of the sealing ring, and the dust-free rubber sealing piece is movably sleeved on the outer side of the corresponding door panel piston.

Preferably, the periphery of the outer side of the sealing ring is fixed with L-shaped connecting rods, the periphery of the outer side of the through hole is provided with studs fixed on the outer side of the sealing cover plate, the L-shaped connecting rods are movably sleeved on the outer sides of the corresponding studs, and the outer sides of the studs are spirally connected with hand nuts.

Preferably, the portable dismouting mechanism includes that the carousel of connection on sealed apron rotates through the pivot, and the surperficial edge of carousel articulates there are the push-and-pull rod of two symmetry settings, and the other end of push-and-pull rod all articulates there is the movable plate.

Preferably, the movable plate is slidably connected to the outer side of the sealing cover plate through two sliding seats with inverted T-shaped or T-shaped vertical cross sections, sliding grooves matched with the sliding seats are formed in the sealing cover plate, two symmetrically-arranged positioning columns are fixed on the opposite side walls of the two movable plates, and positioning holes matched with the positioning holes are formed in the positioning plates.

Preferably, the sliding seats are all slidably sleeved on the outer sides of the sliding rods, the sliding rods are all fixed in the sliding grooves, and springs sleeved on the outer sides of the sliding rods are arranged between one ends of the sliding seats and one corresponding end portions of the sliding grooves.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model is different from the prior art, through wholly installing sealed apron additional at three piston shell assembly rear of valve door plant, and wholly install dustless glue sealing member additional at three piston shell assembly rear of door plant and do sealed experiment, make it cover the total subassembly of three piston shell of door plant completely, the emergence of product oil defect case has been solved through experimental verification, the problem of greasy granule spill when the valve door plant is at piston motion switch has been solved, secondly, utilize sealing mechanism, can conveniently tear open and trade the inboard dustless glue sealing member of sealing ring, need not to wholly tear open and trade sealed apron, only need single tear open and trade, reduce the cost loss who tears open and trade, furthermore, utilize portable dismouting mechanism, conveniently demolish sealed apron, reach the purpose that conveniently overhauls valve door plant piston shell assembly, the practicality of device is greatly improved.

Drawings

Fig. 1 is a schematic overall structure diagram of the present invention;

FIG. 2 is a schematic view of the structure of the sealing cover plate of the present invention after installation;

FIG. 3 is a schematic view of the seal cover plate of the present invention in a back view after disassembly;

fig. 4 is a schematic view of the seal mechanism of the present invention in a top view after disassembly;

FIG. 5 is a schematic structural view of each component of the portable disassembling and assembling mechanism of the present invention;

fig. 6 is an enlarged schematic view of the a position of the present invention.

In the figure: 1. a valve door panel piston housing assembly; 2. a back plate; 3. a door panel piston; 4. positioning a plate; 5. sealing the cover plate; 51. a through hole; 52. a mating groove; 53. a U-shaped channel; 6. a sealing mechanism; 601. a seal ring; 602. a dust-free glue seal; 603. an L-shaped connecting rod; 604. a stud; 605. screwing the nut by hand; 7. a portable disassembling and assembling mechanism; 701. a rotating shaft; 702. a turntable; 703. a push-pull rod; 704. moving the plate; 705. a sliding seat; 706. a positioning column; 707. a slide bar; 708. a spring.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

Referring to fig. 1-6, the present invention provides a technical solution: the utility model provides a sealed apron device of outer assembly of semiconductor equipment valve door plant piston, including valve door plant piston shell assembly 1, be fixed with backplate 2 on the back lateral wall of valve door plant piston shell assembly 1, be equipped with the door plant piston 3 that three equidistance set up on valve door plant piston shell assembly 1, valve door plant piston shell assembly 1's top and bottom all are fixed with the locating plate 4 that two symmetries set up, valve door plant piston shell assembly 1's outside movable cover is equipped with sealed apron 5, all set up the cooperation groove 52 with locating plate 4 matched with on the sealed apron 5, all set up the through-hole 51 corresponding with door plant piston 3 on the sealed apron 5, the U-shaped passageway 53 that two symmetries set up is still seted up to the bottom of sealed apron 5, the setting of U-shaped passageway 53, conveniently cooperate and install between the valve door plant piston shell assembly 1.

Further, a sealing mechanism 6 is connected between the through hole 51 and the sealing cover plate 5, the sealing mechanism 6 includes a sealing ring 601 movably mounted in the through hole 51, a dust-free glue sealing element 602 with an annular vertical section is fixed on the inner side of the sealing ring 601, the dust-free glue sealing element 602 is movably sleeved on the outer side of the corresponding door panel piston 3, L-shaped connecting rods 603 are fixed on the peripheries of the outer sides of the sealing ring 601, studs 604 fixed on the outer side of the sealing cover plate 5 are arranged on the peripheries of the outer sides of the through hole 51, the L-shaped connecting rods 603 are movably sleeved on the outer sides of the corresponding studs 604, hand-screwed nuts 605 are spirally connected on the outer sides of the studs 604, sealing strips are arranged on the outer sides of the sealing ring 601, and the movable connection between the sealing ring 601 and the through hole 51 can be sealed.

Further, the top end and the bottom end of the sealing cover plate 5 are both provided with a portable disassembly and assembly mechanism 7, the portable disassembly and assembly mechanism 7 comprises a rotary plate 702 rotatably connected to the sealing cover plate 5 through a rotary shaft 701, the surface edge of the rotary plate 702 is hinged with two symmetrically arranged push-pull rods 703, the other ends of the push-pull rods 703 are both hinged with a movable plate 704, the movable plate 704 is slidably connected to the outer side of the sealing cover plate 5 through two sliding seats 705 with inverted T-shaped or T-shaped vertical sections, the sealing cover plate 5 is both provided with sliding grooves matched with the sliding seats 705, two symmetrically arranged positioning columns 706 are fixed on the opposite side walls of the two movable plates 704, the positioning plate 4 is both provided with positioning holes matched with the positioning holes, the sliding seats 705 are both slidably sleeved on the outer sides of the sliding rods 707, the sliding rods 707 are both fixed in the sliding grooves, a spring 708 sleeved on the outer sides of the sliding rods 707 is arranged between one end of the sliding seats 705 and the corresponding end of the sliding grooves, the outer side of the rotating shaft 701 is also provided with a rotating handle which is convenient for twisting.

In the scheme, when in use, because the front end load fixed cabin valve door plate is opened and closed, when the piston moves back and forth, greasy particles are splashed out and generated in the process of moving the door plate piston 3, so that the greasy particles are splashed out and attached to a wafer when the door is opened and closed in the process of waiting and conveying the wafer, and the case of product oil defect is frequently generated when the wafer process is finished, then a sealing cover plate 5 is integrally and additionally arranged behind three piston shell assemblies of the valve door plate, a dust-free rubber sealing piece 602 is integrally and additionally arranged behind the three piston shell assemblies of the door plate for sealing test, so that the dust-free rubber sealing piece 602 completely covers the three piston shell assemblies of the door plate, the problem of product oil defect is solved through experimental verification, the problem of the splashing of the greasy particles when the valve door plate is opened and closed during the piston movement is solved, secondly, when the single dust-free rubber sealing piece 602 needs to be replaced, the corresponding hand nuts 605 can be loosened, so that the L-shaped connecting rods 603 can be disengaged from the corresponding studs 604, thereby facilitating the replacement of the dust-free rubber sealing element 602 at the inner side of the sealing ring 601, not requiring the whole replacement of the sealing cover plate 5, only needing single replacement, reducing the cost loss of replacement, and furthermore, when the sealing cover plate 5 needs to be detached and the valve door plate piston shell assembly 1 needs to be overhauled, the two corresponding moving plates 704 can be moved relatively by simultaneously twisting the upper and lower rotating shafts 701 to rotate the rotating disc 702 and cooperating with the two corresponding push-pull rods 703 to move the two corresponding moving plates 704 relatively, and the two corresponding positioning posts 706 are disengaged from the corresponding positioning holes on the positioning plate 4, and the springs 708 are compressed, thereby conveniently demolish sealed apron 5, reach the purpose that conveniently overhauls valve door plant piston shell assembly 1.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a sealed apron device of outer assembly of semiconductor equipment valve door plant piston, includes valve door plant piston shell assembly (1), its characterized in that: be fixed with backplate (2) on the back lateral wall of valve door plant piston shell assembly (1), be equipped with door plant piston (3) that three equidistance set up on valve door plant piston shell assembly (1), locating plate (4) that two symmetries set up all are fixed with to the top and the bottom of valve door plant piston shell assembly (1), the outside movable cover of valve door plant piston shell assembly (1) is equipped with sealed apron (5), all set up on sealed apron (5) with locating plate (4) matched with cooperation groove (52), all set up on sealed apron (5) with corresponding through-hole (51) of door plant piston (3), U-shaped passageway (53) that two symmetries set up are still seted up to the bottom of sealed apron (5), all be connected with sealing mechanism (6) between through-hole (51) and sealed apron (5), portable dismouting mechanism (7) are all installed to the top and the bottom of sealed apron (5).

2. The sealing cover plate device for the piston outer assembly of the valve door panel of the semiconductor equipment according to claim 1, wherein: the sealing mechanism (6) comprises a sealing ring (601) movably arranged in the through hole (51), a dust-free rubber sealing piece (602) with an annular vertical section is fixed on the inner side of the sealing ring (601), and the dust-free rubber sealing piece (602) is movably sleeved on the outer side of the corresponding door plate piston (3).

3. The sealing cover plate device for the piston outer assembly of the valve door panel of the semiconductor equipment as claimed in claim 2, wherein: l-shaped connecting rods (603) are fixed on the periphery of the outer side of the sealing ring (601), studs (604) fixed on the outer side of the sealing cover plate (5) are arranged on the periphery of the outer side of the through hole (51), the L-shaped connecting rods (603) are movably sleeved on the outer sides of the corresponding studs (604), and hand-screwed nuts (605) are spirally connected on the outer sides of the studs (604).

4. The sealing cover plate device for the piston outer assembly of the valve door panel of the semiconductor equipment according to claim 1, wherein: the portable disassembly and assembly mechanism (7) comprises a rotary disc (702) which is rotatably connected onto the sealing cover plate (5) through a rotary shaft (701), two push-pull rods (703) which are symmetrically arranged are hinged to the edge of the surface of the rotary disc (702), and a movable plate (704) is hinged to the other end of each push-pull rod (703).

5. The sealing cover plate device for the piston outer assembly of the valve door panel of the semiconductor equipment as claimed in claim 4, wherein: the movable plate (704) is connected to the outer side of the sealing cover plate (5) in a sliding mode through two sliding seats (705) with inverted T-shaped or T-shaped vertical sections, sliding grooves matched with the sliding seats (705) are formed in the sealing cover plate (5), two positioning columns (706) which are symmetrically arranged are fixed on one opposite side wall of the two movable plates (704), and positioning holes matched with the positioning holes are formed in the positioning plate (4).

6. The sealing cover plate device for the piston outer assembly of the valve door panel of the semiconductor equipment as claimed in claim 5, wherein: the sliding seats (705) are all sleeved on the outer sides of the sliding rods (707) in a sliding mode, the sliding rods (707) are all fixed in the sliding grooves, and springs (708) sleeved on the outer sides of the sliding rods (707) are arranged between one ends of the sliding seats (705) and one corresponding end portions of the sliding grooves.