CN217499502U

CN217499502U - Diffusion furnace with uniform and efficient diffusion

Info

Publication number: CN217499502U
Application number: CN202221751707.2U
Authority: CN
Inventors: 刘明利; 王佩佩; 周文智
Original assignee: Qingdao Saier Technology Co ltd
Current assignee: Qingdao Saier Technology Co ltd
Priority date: 2022-07-08
Filing date: 2022-07-08
Publication date: 2022-09-27
Anticipated expiration: 2032-07-08

Abstract

The utility model discloses an even and efficient diffusion furnace of diffusion, the induction cooker comprises a cooker bod, bottom one side fixedly connected with fixed plate of furnace body, the one end fixedly connected with casing of furnace body is kept away from to the fixed plate, the bottom fixed mounting of casing has the motor, install drive assembly between furnace body and the casing jointly, and be connected between the drive shaft of drive assembly and motor, the internally mounted of furnace body has rotating assembly, and is connected between rotating assembly and the drive assembly, the gas distribution subassembly is installed to rotating assembly's expansion end. The utility model discloses in, through motor, drive assembly, rotating assembly and the gas distribution subassembly that sets up, can be even and quick distribute the diffusion source gas in the furnace body, avoid appearing the problem that one side concentration is high one side concentration is low for the reaction rate and the diffusion rate of the inside silicon chip of furnace body are close, have not only improved the diffusion efficiency of silicon chip, have also improved the yields of silicon chip simultaneously.

Description

Diffusion furnace with uniform and efficient diffusion

Technical Field

The utility model relates to a diffusion furnace technical field especially relates to an even and efficient diffusion furnace of diffusion.

Background

The diffusion furnace consists of a control system, a boat inlet and outlet system, a furnace body heating system, a gas control system and the like. The diffusion process is mainly used for doping a semiconductor wafer under a high-temperature condition, namely, elements of phosphorus and boron are diffused into a silicon wafer, so that the types, the concentrations and the distribution of impurities in a semiconductor are changed and controlled, and different electrical characteristic regions are established;

when the diffusion furnace is used, diffusion source gas directly enters the furnace body from the middle of the furnace tail, so that the concentration of the diffusion source gas on one side close to the gas inlet is high, the concentration of the diffusion source gas on one side far away from the gas inlet is low, the reaction speed and the diffusion speed of the silicon wafer on one side close to the gas inlet are far higher than that of the silicon wafer on one side far away from the gas inlet, and the diffusion yield of the silicon wafer is influenced.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a diffusion furnace with uniform diffusion and high efficiency.

In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides an even and efficient diffusion stove of diffusion, includes the furnace body, bottom one side fixedly connected with fixed plate of furnace body, the one end fixedly connected with casing of furnace body is kept away from to the fixed plate, the bottom fixed mounting of casing has the motor, install drive assembly jointly between furnace body and the casing, and be connected between the drive shaft of drive assembly and motor, the internally mounted of furnace body has rotating assembly, and is connected between rotating assembly and the drive assembly, the gas distribution subassembly is installed to rotating assembly's expansion end, the surface one side of furnace body is fixed and is link up the intake pipe, and the gas vent of gas distribution subassembly and intake pipe is connected.

Furthermore, the transmission assembly comprises a first bevel gear, the first bevel gear is fixedly connected with a driving shaft of the motor, a second bevel gear is meshed with one side of the top of the first bevel gear, the second bevel gear is fixedly connected with a transmission shaft close to the center of one side of the furnace body, the transmission shaft vertically penetrates through the inside of the shell and extends to the inside of the furnace body, one end, away from the second bevel gear, of the transmission shaft is fixedly connected with a transmission gear, the motor drives the first bevel gear to rotate, and the transmission shaft is driven to rotate through the second bevel gear, so that the gear is driven to rotate.

Furthermore, the rotating assembly comprises a ring gear, the ring gear is meshed with the transmission gear, the ring gear is far away from the mounting ring fixedly connected with one end of the air inlet pipe, and the transmission gear drives the ring gear to rotate so as to drive the mounting ring to rotate.

Furthermore, the outer surface of the mounting ring is connected with an annular supporting guide rail in a sliding mode, the annular supporting guide rail is fixedly connected with the furnace body, the annular supporting guide rail has a supporting and limiting effect on the mounting ring, and the mounting ring can be guaranteed to rotate stably.

Further, the gas distribution assembly comprises two gas distribution pipes, the gas distribution pipes are fixedly connected with the mounting ring, a plurality of gas distribution holes are formed in adjacent one sides of the gas distribution pipes, the gas distribution holes are formed in two adjacent sides of the gas distribution pipes, a flow division pipe is fixedly communicated between the gas distribution pipes, and therefore the diffusion source gas can be uniformly distributed in the furnace body.

Further, the one end fixedly connected with rotary joint that the gas distribution pipe was kept away from to the shunt tubes, and rotary joint keep away from between the one end of shunt tubes and the furnace body fixed connection and with the intake pipe phase-match, rotary joint's use is favorable to the shunt tubes to rotate.

Furthermore, the fixing plate is connected with the shell through welding, and the welding structure is high in rigidity and good in connectivity.

The utility model has the advantages that:

the utility model discloses when using, this even and efficient diffusion furnace of diffusion, through motor, drive assembly, rotating assembly and the gas distribution subassembly that sets up, can be even and quick distribute the diffusion source gas in the furnace body, avoid appearing the problem that one side concentration is high one side concentration is low for the reaction rate and the diffusion rate of the inside silicon chip of furnace body are close, have not only improved the diffusion efficiency of silicon chip, have also improved the yields of silicon chip simultaneously.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a cross-sectional view of the present invention;

fig. 3 is an enlarged view of a portion a in fig. 2 according to the present invention.

Illustration of the drawings:

1. a furnace body; 2. an air inlet pipe; 3. a housing; 4. a fixing plate; 5. a motor; 6. an air distribution pipe; 7. a shunt tube; 8. a ring gear; 9. a rotary joint; 10. a second bevel gear; 11. an annular support rail; 12. a mounting ring; 13. a transmission gear; 14. a drive shaft; 15. a first bevel gear; 16. and (5) air distribution holes.

Detailed Description

Fig. 1 to 3 show, relate to an even and efficient diffusion furnace of diffusion, including furnace body 1, bottom one side fixedly connected with fixed plate 4 of furnace body 1, furnace body 1's one end fixedly connected with casing 3 is kept away from to fixed plate 4, the bottom fixed mounting of casing 3 has motor 5, install transmission assembly between furnace body 1 and the casing 3 jointly, and be connected between transmission assembly and motor 5's the drive shaft, the internally mounted of furnace body 1 has rotating assembly, and be connected between rotating assembly and the transmission assembly, the gas distribution subassembly is installed to rotating assembly's expansion end, the fixed intake pipe 2 that has gone through in surface one side of furnace body 1, and the gas distribution subassembly is connected with the gas vent of intake pipe 2.

As shown in fig. 1, the fixing plate 4 and the housing 3 are connected by welding.

As shown in fig. 2, the transmission assembly includes a first bevel gear 15, the first bevel gear 15 is fixedly connected with a driving shaft of the motor 5, a second bevel gear 10 is engaged with one side of the top of the first bevel gear 15, a transmission shaft 14 is fixedly connected to the center of one side of the second bevel gear 10 close to the furnace body 1, the transmission shaft 14 vertically penetrates through the inside of the housing 3 and extends to the inside of the furnace body 1, and a transmission gear 13 is fixedly connected to one end of the transmission shaft 14 far away from the second bevel gear 10.

The rotating assembly comprises a ring gear 8, the ring gear 8 is meshed with a transmission gear 13, and one end, far away from the air inlet pipe 2, of the ring gear 8 is fixedly connected with a mounting ring 12.

The outer surface of the mounting ring 12 is connected with an annular support guide rail 11 in a sliding manner, and the annular support guide rail 11 is fixedly connected with the furnace body 1.

As shown in fig. 2 and 3, the air distribution assembly includes two air distribution pipes 6, the air distribution pipes 6 are fixedly connected with the mounting ring 12, a plurality of air distribution holes 16 are formed in adjacent sides of the two air distribution pipes 6, and a shunt pipe 7 is fixedly communicated between the two air distribution pipes 6.

One end of the shunt tube 7 far away from the gas distribution tube 6 is fixedly connected with a rotary joint 9, and one end of the rotary joint 9 far away from the shunt tube 7 is fixedly connected with the furnace body 1 and is matched with the gas inlet tube 2.

When using the even and efficient diffusion furnace of diffusion, at first starting motor 5, motor 5 drives first bevel gear 15 and rotates to rotate through second bevel gear 10, second bevel gear 10 drives transmission shaft 14 and rotates, thereby drives ring gear 8 through drive gear 13 and rotates, thereby drives two gas distribution pipes 6 through collar 12 and rotates, then gets into the diffusion source gas through intake pipe 2, the diffusion source gas gets into the inside of gas distribution pipe 6 through rotary joint 9 and shunt tubes 7, then discharges through gas distribution hole 16.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. The utility model provides a diffusion furnace that diffusion is even and efficient, includes furnace body (1), its characterized in that: the utility model discloses a furnace body, including furnace body (1), one end fixedly connected with casing (3), the bottom fixed mounting of casing (3) has motor (5), install transmission assembly between furnace body (1) and casing (3) jointly, and be connected between the drive shaft of transmission assembly and motor (5), the internally mounted of furnace body (1) has rotating assembly, and is connected between rotating assembly and the transmission assembly, the gas distribution subassembly is installed to rotating assembly's expansion end, fixed intake pipe (2) of having link up in surface one side of furnace body (1), and the gas vent of gas distribution subassembly and intake pipe (2) is connected.

2. A diffusion furnace with uniform and high efficiency of diffusion as claimed in claim 1, wherein: the transmission assembly comprises a first bevel gear (15), a driving shaft of the first bevel gear (15) is fixedly connected with a driving shaft of the motor (5), one side of the top of the first bevel gear (15) is meshed with a second bevel gear (10), the center of one side, close to the furnace body (1), of the second bevel gear (10) is fixedly connected with a transmission shaft (14), the transmission shaft (14) vertically penetrates through the inside of the shell (3) and extends to the inside of the furnace body (1), and one end, far away from the second bevel gear (10), of the transmission shaft (14) is fixedly connected with a transmission gear (13).

3. A diffusion furnace with uniform and high efficiency of diffusion according to claim 2, wherein: the rotating assembly comprises a ring gear (8), the ring gear (8) is meshed with the transmission gear (13), and one end, far away from the air inlet pipe (2), of the ring gear (8) is fixedly connected with a mounting ring (12).

4. A diffusion furnace with uniform and high efficiency of diffusion according to claim 3, wherein: the outer surface of the mounting ring (12) is connected with an annular supporting guide rail (11) in a sliding manner, and the annular supporting guide rail (11) is fixedly connected with the furnace body (1).

5. The furnace of claim 4, wherein the furnace further comprises: the gas distribution assembly comprises two gas distribution pipes (6), the gas distribution pipes (6) are fixedly connected with the mounting ring (12), a plurality of gas distribution holes (16) are formed in one adjacent side of each gas distribution pipe (6), and the gas distribution pipes (6) are fixedly communicated with one another to form flow distribution pipes (7).

6. The furnace of claim 5, wherein the furnace further comprises: one end fixed connection that gas distribution pipe (6) were kept away from in shunt tubes (7) has rotary joint (9), and rotary joint (9) keep away from between one end of shunt tubes (7) and furnace body (1) fixed connection and with intake pipe (2) phase-match.

7. A diffusion furnace with uniform and high efficiency of diffusion as claimed in claim 1, wherein: the fixed plate (4) is connected with the shell (3) through welding.