CN217494793U

CN217494793U - Adjustable workbench of wafer placing frame

Info

Publication number: CN217494793U
Application number: CN202221283353.3U
Authority: CN
Inventors: 兑志魁; 郑自菲; 陈松涛
Original assignee: Zhengzhou Rtit Research Institute
Current assignee: Zhengzhou Rtit Research Institute
Priority date: 2022-05-26
Filing date: 2022-05-26
Publication date: 2022-09-27
Anticipated expiration: 2032-05-26

Abstract

The utility model belongs to the technical field of chip production, specifically be a wafer places adjustable workbench of frame, including brace table, motor, buckle, a serial communication port, the brace table on rotate and be connected with elevating screw, the brace table on sliding connection have with lead screw threaded connection's moving platform, moving platform on can dismantle and be connected with the plummer, the plummer on seted up four groups sliding tray along the circumference interval, four groups the sliding tray in all rotate and be connected with adjusting screw, the first bevel gear of adjusting screw one end fixedly connected with, four groups the sliding tray in all sliding connection have with lead screw threaded connection's clamp plate, backup pad bottom rotate be connected with first bevel gear complex second bevel gear.

Description

Adjustable workbench of wafer placing frame

Technical Field

The utility model belongs to the technical field of chip production, specifically be an adjustable workstation of frame is placed to wafer.

Background

When processing the wafer, generally place the frame with the wafer and place the workstation of processing machine on, the clamping device who places the frame workstation at present can not adjust, need change the clamping device of whole workstation and go to be applicable to not the wafer of equidimension and place the frame, when frequently changing the wafer of different specifications size and place the frame, current workstation can lead to work efficiency to reduce, and it is troublesome to dismantle simultaneously, increases work load for the staff.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a but the adjustable workbench of frame is placed to wafer, solved the current clamping device who places the frame workstation and can not adjust, need change the clamping device of whole workstation and go to be applicable to the not wafer of equidimension and place the frame, when frequently changing the wafer of different specifications size and place the frame, current workstation can lead to work efficiency to reduce, and it is troublesome to dismantle simultaneously, increases the technical problem of work load for the staff.

The utility model discloses the scheme of taking does: the utility model provides an adjustable workstation of frame is placed to wafer, includes brace table, motor, buckle, its characterized in that, the brace table on rotate and be connected with elevating screw, the brace table on sliding connection have with lead screw threaded connection's moving platform, moving platform on can dismantle and be connected with the plummer, the plummer on seted up four groups sliding tray along circumference interval, four groups the sliding tray in all rotate and be connected with the regulation lead screw, the first bevel gear of regulation lead screw one end fixedly connected with, four groups the sliding tray in all sliding connection have with lead screw threaded connection's clamp plate, the plummer bottom rotate be connected with first bevel gear complex second bevel gear.

Preferably, the second bevel gear rotating shaft is fixedly connected with a handle, a plurality of groups of friction grooves are formed in the handle at intervals along the circumferential direction, and a buckle is arranged between the handle and the bearing table.

Preferably, the sliding groove is internally and slidably connected with an auxiliary plate sleeved with an adjusting screw rod, a plurality of groups of clamping springs are fixedly connected between the auxiliary plate and the clamping plate at intervals, and a plurality of groups of rectangular blocks are fixedly connected on the auxiliary plate at intervals.

Preferably, the upper part of the auxiliary board inclines outwards.

The utility model has the advantages that:

the adjusting screw rod is driven to rotate by the driving motor to drive the moving platform to act, meanwhile, the bearing platform detachably connected with the moving platform also acts, when the distance between the clamping plates needs to be adjusted, the second bevel gear is driven to act by the adjusting handle, the first bevel gear meshed with the second bevel gear also acts, the purpose of adjusting the positions of the clamping plates is achieved, the clamping plates are adjusted to the proper distance positions, a buckle can be installed between the bearing platform and the handle, and after the clamping plates are adjusted, the positions of the clamping plates cannot be changed through the buckle;

after the adjustment is finished, the wafer placing frame is placed on the bearing table and is firstly contacted with the auxiliary plate, the upper part of the auxiliary plate inclines outwards, so that a transition effect is well achieved, the wafer placing frame can be smoothly placed on the bearing table, the wafer placing plate can be clamped through the clamping spring, and the purpose that the wafer placing frame cannot shake is achieved;

rectangular blocks are arranged on the clamping plate at intervals in order to increase friction force and enable the auxiliary plate and the wafer placing frame to be matched more tightly.

Drawings

Fig. 1 is one of perspective views of the present invention.

Fig. 2 is one of the perspective sectional views of the present invention.

Fig. 3 is a second perspective view of the cross-sectional view of the present invention.

Reference numerals: 1. a support table; 2. lifting a screw rod; 3. a mobile platform; 4. a bearing table; 5. a sliding groove; 6. adjusting the lead screw; 7. a first bevel gear; 8. a clamping plate; 9. a second bevel gear; 10. a handle; 11. a friction groove; 12. an auxiliary plate; 13. a clamping spring; 14. a rectangular block; 15. an electric motor.

Detailed Description

The foregoing and other features, aspects and utilities of the present invention will be apparent from the following more particular description of the embodiments of the invention, as illustrated in the accompanying drawings in which reference is made to figures 1-3. The structural contents mentioned in the following embodiments are all referred to the attached drawings of the specification.

Exemplary embodiments of the present invention will be described below with reference to the accompanying drawings.

The embodiment I provides an adjustable workbench of a wafer placing frame, which comprises a supporting table 1, a motor 15 and a buckle, and is characterized in that the supporting table 1 is connected with a lifting screw 2 in a rotating manner, the supporting table 1 is connected with a moving platform 3 in a sliding manner, the moving platform 3 is connected with a bearing table 4 in a detachable manner, the bearing table 4 is provided with four groups of sliding grooves 5 at intervals along the circumferential direction, the four groups of sliding grooves 5 are connected with adjusting screws 6 in a rotating manner, one ends of the adjusting screws 6 are fixedly connected with first bevel gears 7, the four groups of sliding grooves 5 are connected with clamping plates 8 in a sliding manner, the clamping plates are in threaded connection with the adjusting screws 6, the bottom end of the bearing table is connected with second bevel gears 9 matched with the first bevel gears 7 in a rotating manner, and the lifting screw 2 is driven by the motor 15.

In the second embodiment, on the basis of the first embodiment, a handle 10 is fixedly connected to a rotating shaft end of the second bevel gear 9, a plurality of groups of friction grooves 11 are circumferentially arranged on the handle 10 at intervals, and a buckle is arranged between the handle 10 and the bearing table 4.

In the third embodiment, on the basis of the second embodiment, an auxiliary plate 12 sleeved with the adjusting screw 6 is slidably connected in the sliding groove 5, a plurality of groups of clamping springs 13 are fixedly connected between the auxiliary plate 12 and the clamping plate 8 at intervals, and a plurality of groups of rectangular blocks 14 are fixedly connected on the auxiliary plate 12 at intervals.

In the fourth embodiment, on the basis of the third embodiment, the upper part of the auxiliary plate 12 is inclined outwards.

When the embodiment is used, the adjusting screw 6 is driven to rotate by the driving motor to drive the moving platform 3 to move, and meanwhile, the bearing table 4 detachably connected with the moving platform 3 also moves along with the adjusting screw, when the distance between the clamping plates 8 needs to be adjusted, the handle 10 is adjusted to drive the second bevel gear 9 to move, so that the first bevel gear 7 meshed with the clamping plate 7 also moves, the purpose of adjusting the positions of the clamping plates 8 is achieved, the clamping plates 8 are adjusted to proper distance positions, a buckle can be arranged between the bearing table 4 and the handle 10, and after the clamping plates 8 are adjusted, the positions of the clamping plates 8 cannot be changed through the buckle;

after the adjustment is finished, the wafer placing frame is placed on the bearing table 4 and is firstly contacted with the auxiliary plate 12, the upper part of the auxiliary plate 12 inclines outwards, so that a transition effect is well achieved, the wafer placing frame can be smoothly placed on the bearing table 4, the wafer placing frame can be clamped through the clamping spring 13, and the purpose that the wafer placing frame cannot shake is achieved;

rectangular blocks 14 are spaced apart from the clamping plate 8 to increase friction and to further secure the engagement between the auxiliary plate 12 and the wafer-placing frame.

The above description is only for the purpose of illustration, and it should be understood that the present invention is not limited to the above embodiments, and various modifications conforming to the spirit of the present invention are within the scope of the present invention.

Claims

1. An adjustable workbench of a wafer placing frame comprises a supporting table (1), a motor (15) and a buckle, and is characterized in that a lifting screw rod (2) is rotatably connected onto the supporting table (1), a moving platform (3) in threaded connection with the screw rod (2) is slidably connected onto the supporting table (1), a bearing table (4) is detachably connected onto the moving platform (3), four groups of sliding grooves (5) are formed in the bearing table (4) at intervals along the circumferential direction, adjusting screw rods (6) are rotatably connected into the four groups of sliding grooves (5), one end of each adjusting screw rod (6) is fixedly connected with a first bevel gear (7), clamping plates (8) in threaded connection with the adjusting screw rods (6) are slidably connected into the four groups of sliding grooves (5), and a second bevel gear (9) matched with the first bevel gear (7) is rotatably connected to the bottom end of the bearing table (4), the lifting screw rod (2) is driven by a motor (15).

2. The adjustable workbench of a wafer placing frame according to claim 1, wherein a handle (10) is fixedly connected to a rotating shaft end of the second bevel gear (9), a plurality of groups of friction grooves (11) are arranged on the handle (10) at intervals along the circumferential direction, and a buckle is arranged between the handle (10) and the bearing platform (4).

3. An adjustable worktable as claimed in claim 2, wherein an auxiliary plate (12) sleeved with the adjusting screw (6) is slidably connected in the sliding groove (5), a plurality of clamping springs (13) are fixedly connected between the auxiliary plate (12) and the clamping plate (8) at intervals, and a plurality of rectangular blocks (14) are fixedly connected on the auxiliary plate (12) at intervals.

4. An adjustable work table of a wafer placing frame according to claim 3, wherein the upper portion of the auxiliary plate (12) is inclined outward.