CN217493967U - Vacuum chuck clamping device is used in processing of plasma electric charge filter equipment - Google Patents

Vacuum chuck clamping device is used in processing of plasma electric charge filter equipment Download PDF

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Publication number
CN217493967U
CN217493967U CN202123387141.8U CN202123387141U CN217493967U CN 217493967 U CN217493967 U CN 217493967U CN 202123387141 U CN202123387141 U CN 202123387141U CN 217493967 U CN217493967 U CN 217493967U
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vacuum chuck
processing
fixedly connected
seted
device main
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韩立民
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Suzhou Zishan Semiconductor Technology Co ltd
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Suzhou Zishan Semiconductor Technology Co ltd
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Abstract

The utility model discloses a vacuum chuck clamping device is used in processing of plasma electric charge filter equipment, the device comprises a device body, side centre gripping groove has been seted up to the both sides of device main part, the outside fixedly connected with pipe connection of device main part, the inboard fixedly connected with sucking disc installation frame of device main part, the mounting groove has been seted up to the inboard of sucking disc installation frame, two draw-in grooves have been seted up to the inboard of mounting groove, the air guide has been seted up to the both sides of mounting groove and has been connect the hole. A processing of plasma electric charge filter equipment is with vacuum chuck clamping device, through adopting vacuum chuck tool processing sheet metal type part, can effectively promote product quality stability, reduce the processing cost, can easily the clamping, easily dismantle, reduce the degree of difficulty of the repeated clamping of operating personnel, effectively protect absorbent work piece at the handling in-process, avoid work piece outward appearance to damage and produce the defective products.

Description

Vacuum chuck clamping device is used in processing of plasma electric charge filter equipment
Technical Field
The utility model relates to a clamping device field, in particular to processing of plasma electric charge filter equipment is with vacuum chuck clamping device.
Background
The vacuum chuck clamping device for processing the plasma charge filtering device is a device for clamping through a vacuum chuck, the vacuum chuck clamping device is required to be used when a thin plate workpiece is clamped, the traditional clamping device has large damage to the workpiece, and along with the continuous development of science and technology, the manufacturing process requirements of people on the vacuum chuck clamping device for processing the plasma charge filtering device are higher and higher.
In the prior art, the patent with the publication number of CN201520630114.4 discloses a vacuum chuck clamping device for processing the thickness of a tray, the defect of inconvenient operation is overcome by the cooperation of an upper plate of the vacuum chuck, a bottom plate of the vacuum chuck, a joint screw, a locking screw, an air pipe and a vacuum generator, the semi-automation of clamping is realized, the operation is convenient, the clamping time is reduced, and the processing precision is improved, a plurality of through holes are arranged on the upper plate of the vacuum chuck, the distance between the adjacent through holes is equal, the diameter of each through hole is 1-5mm, the vacuum suction is uniformly dispersed in each through hole, so that the bottom of the placed tray can uniformly receive the suction effect, the tray is more closely connected with the upper plate of the vacuum chuck, the edge of a groove on the bottom plate of the vacuum chuck is provided with a rectangular frame-shaped embedding groove, a sealing ring with a circular cross section is arranged inside the embedding groove in a matching manner, and the situation that the upper plate of the vacuum chuck is prevented from being matched with the vacuum chuck in the vacuum process, The vacuum chuck clamping device for processing the plasma charge filtering device is provided for the reason that a gap existing in a bottom plate of the vacuum chuck causes vacuum leakage, the existing processing and clamping scheme is clamping in a mode that a bolt locks a part or a pressing plate compresses the part, and the like, and a product of the vacuum chuck clamping device is extremely easy to deform and bend in the processing process, so that the defects of repair, scrapping and the like are caused, and certain adverse effects are brought to the use process of people.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
The utility model provides a not enough to prior art, the utility model provides a vacuum chuck clamping device is used in processing of plasma electric charge filter equipment through adopting vacuum chuck tool processing sheet metal type part, can effectively promote product quality stability, reduces the processing cost, can easily the clamping, easily dismantles, reduces the degree of difficulty of the repeated clamping of operating personnel, effectively protects absorbent work piece at the handling in-process, avoids work piece outward appearance to damage and produces the defective products, can effectively solve the problem in the background art.
(II) technical scheme
In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides a processing of plasma electric charge filter equipment is with vacuum chuck clamping device, includes the device main part, side centre gripping groove has been seted up to the both sides of device main part, the outside fixedly connected with pipe connection of device main part, the inboard fixedly connected with sucking disc installation frame of device main part, the mounting groove has been seted up to the inboard of sucking disc installation frame, two draw-in grooves have been seted up to the inboard of mounting groove.
Preferably, the air guide of having seted up in the both sides of mounting groove connects the hole, the inboard fixed joint of mounting groove has the vacuum chuck mainboard, the outside fixedly connected with of sucking disc installation frame is connecting pipe everywhere, the both sides fixedly connected with fixture block of vacuum chuck mainboard.
Preferably, the inside of vacuum chuck mainboard is seted up there is the gas pocket, the upper end fixedly connected with contact plate of vacuum chuck mainboard, the inboard fixedly connected with customizable flexible suction plate of contact plate, the seal groove has been seted up around the customizable flexible suction plate.
Preferably, the device main body and the side clamping groove are integrally formed in a cutting mode, an installation cavity is formed between the device main body and the air pipe connector, and one side of the device main body is fixedly connected with the inner side of the air pipe connector through the installation cavity.
Preferably, the sucking disc installation frame and the clamping groove, the air guide connection hole and the installation groove are integrally formed in a casting mode, and the device main body is fixedly connected with the sucking disc installation frame in a welding mode.
Preferably, the vacuum chuck main board, the contact plate, the fixture block and the air hole are integrally formed in an injection molding mode, the customizable flexible suction plate is fixedly connected to the upper end of the contact plate, and the customizable flexible suction plate can be specially designed according to the shape and the size of a workpiece.
(III) advantageous effects
Compared with the prior art, the utility model provides a processing of plasma electric charge filter equipment is with vacuum chuck clamping device possesses following beneficial effect:
1. this vacuum chuck clamping device is used in processing of plasma electric charge filter equipment through adopting vacuum chuck tool processing sheet metal type part, can effectively promote product quality stability, reduces the processing cost, according to the outward appearance of carrying out the adaptation design customizable flexible suction plate of product, can be better closely laminate with the absorbent product of handling, prevent that the work piece from closely dropping inadequately in the laminating of adsorption process.
2. This vacuum chuck clamping device is used in processing of plasma electric charge filter equipment can easily the clamping, and easily dismantles, reduces the degree of difficulty of the repeated clamping of operating personnel, effectively protects absorbent work piece at the handling in-process, avoids work piece outward appearance to damage and produces the defective products.
Drawings
Fig. 1 is the overall structure schematic diagram of the vacuum chuck clamping device for processing a plasma charge filtering device of the present invention.
Fig. 2 is a schematic structural diagram of the device main body in the vacuum chuck clamping device for processing the plasma charge filtering device of the present invention.
Fig. 3 is the schematic structural diagram of the chuck mounting frame in the vacuum chuck clamping device for processing the plasma charge filtering device of the present invention.
Fig. 4 is the utility model relates to a plasma electric charge is customizable vacuum chuck's among vacuum chuck clamping device for filter equipment processing structure sketch map.
Reference numerals: 1. a device main body; 2. a vacuum chuck main board; 3. a card slot; 4. mounting grooves; 5. a side clamping groove; 6. a gas pipe joint; 7. a sucker mounting frame; 8. an air guide connection hole; 9. a connecting pipe; 10. The flexible suction plate can be customized; 11. a sealing groove; 12. a contact plate; 13. a clamping block; 14. and (4) air holes.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings. It should be understood that the description is intended to be illustrative only and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
The first embodiment is as follows:
as shown in fig. 1 to 4, a vacuum chuck clamping device for processing a plasma charge filtering device comprises a device body 1, wherein side clamping grooves 5 are formed in two sides of the device body 1, an air pipe connector 6 is fixedly connected to the outer side of the device body 1, a chuck mounting frame 7 is fixedly connected to the inner side of the device body 1, a mounting groove 4 is formed in the inner side of the chuck mounting frame 7, and two clamping grooves 3 are formed in the inner side of the mounting groove 4.
Air guide connecting hole 8 has been seted up to the both sides of mounting groove 4, and the inboard fixed joint of mounting groove 4 has vacuum chuck mainboard 2, and the outside fixedly connected with of sucking disc installation frame 7 is connecting pipe 9 everywhere, and vacuum chuck mainboard 2's both sides fixedly connected with fixture block 13.
Air hole 14 has been seted up to the inside of vacuum chuck mainboard 2, and the upper end fixedly connected with contact plate 12 of vacuum chuck mainboard 2, the inboard fixedly connected with customizable flexible suction plate 10 of contact plate 12, and seal groove 11 has been seted up around customizable flexible suction plate 10.
The device main body 1 and the side clamping groove 5 are integrally formed in a cutting mode, a mounting cavity is arranged between the device main body 1 and the air pipe connector 6, one side of the device main body 1 is fixedly connected with the inner side of the air pipe connector 6 through the mounting cavity, and after the actual overall dimension, hole dimension and other details of a processed product need to be confirmed before use, the overall dimension, thickness, the specific shape, trend, air inlet and other specific details of the actual vacuum sucker are determined.
Through the mode integrated into one piece of casting between sucking disc installation frame 7 and draw-in groove 3, the air guide connects hole 8, the mounting groove 4, through welded mode fixed connection between device main part 1 and the sucking disc installation frame 7, according to the outward appearance of carrying out the customizable flexible suction plate 10 of adaptation design of product, can be better closely laminate with the absorbent product of handling, prevent that the work piece from closely dropping inadequately in the laminating of adsorption process.
Example two:
as shown in fig. 1 to 4, a vacuum chuck clamping device for processing a plasma charge filtering device comprises a device body 1, wherein side clamping grooves 5 are formed in two sides of the device body 1, an air pipe connector 6 is fixedly connected to the outer side of the device body 1, a chuck mounting frame 7 is fixedly connected to the inner side of the device body 1, a mounting groove 4 is formed in the inner side of the chuck mounting frame 7, and two clamping grooves 3 are formed in the inner side of the mounting groove 4.
Air guide connecting hole 8 has been seted up to the both sides of mounting groove 4, and the inboard fixed joint of mounting groove 4 has vacuum chuck mainboard 2, and the outside fixedly connected with of sucking disc installation frame 7 is connecting pipe 9 everywhere, and vacuum chuck mainboard 2's both sides fixedly connected with fixture block 13.
Air hole 14 has been seted up to the inside of vacuum chuck mainboard 2, the upper end fixedly connected with contact plate 12 of vacuum chuck mainboard 2, the inboard fixedly connected with customizable flexible suction plate 10 of contact plate 12, seal groove 11 has been seted up around customizable flexible suction plate 10, install vacuum chuck mainboard 2 and fix in the inboard mounting groove 4 of sucking disc installation frame 7, carry out the joint through the inboard draw-in groove 3 of mounting groove 4 and the fixture block 13 of vacuum chuck mainboard 2 both sides.
Through the mode integrated into one piece of moulding plastics between vacuum chuck mainboard 2 and contact plate 12, fixture block 13, gas pocket 14, the upper end fixedly connected with customizable flexible suction plate 10 of contact plate 12, customizable flexible suction plate 10 can be according to the design of work piece overall dimension special system, makes the air guide connect hole 8 and 14 adaptation connections of gas pocket, and the connecting pipe 9 in the sucking disc installation frame 7 outside and 1 inside trachea fixed connection and the air pipe connection 6 of laying of device main part communicate.
The utility model relates to a vacuum chuck clamping device for processing a plasma charge filtering device, which comprises a device main body, a vacuum chuck main board, a clamping groove, a mounting groove, a side clamping groove, a gas pipe joint, a chuck mounting frame, a gas guide connection hole, a connecting pipe, a customizable flexible suction plate, a sealing groove, a contact plate, a clamping block and a gas hole, wherein after the actual appearance size, the hole size and other details of a processed product are confirmed before use, the appearance size, the thickness, the shape, the trend, the gas inlet and other details of the actual vacuum chuck are determined, the appearance of the customizable flexible suction plate is designed according to the adaptation of the product, the customizable flexible suction plate can be better tightly attached to a product to be lifted and adsorbed, the workpiece is prevented from not tightly falling off during the attaching process, the vacuum chuck main board is mounted in the mounting groove at the inner side of the chuck mounting frame for fixation, the clamping groove through the mounting groove inboard carries out the joint with the fixture block of vacuum chuck mainboard both sides, make the air guide connect hole and gas pocket adaptation connection, the connecting pipe in the sucking disc installation frame outside is communicated with the inside trachea fixed connection of laying of device main part and air pipe connector, through adopting vacuum chuck tool processing sheet metal class part, can effectively promote product quality stability, reduce the processing cost, can easily the clamping, easily dismantle, reduce the degree of difficulty of the repeated clamping of operating personnel, effectively protect absorbent work piece at the handling in-process, avoid work piece outward appearance to damage and produce the defective products, whole easy operation is swift, and is relatively practical.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modifications, equivalents, improvements and the like which are made without departing from the spirit and scope of the present invention should be considered within the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundary of the appended claims, or the equivalents of such scope and boundary.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention.

Claims (6)

1. The utility model provides a processing of plasma electric charge filter equipment is with vacuum chuck clamping device, includes device main part (1), its characterized in that: side centre gripping groove (5) have been seted up to the both sides of device main part (1), the outside fixedly connected with air pipe connector (6) of device main part (1), inboard fixedly connected with sucking disc installation frame (7) of device main part (1), mounting groove (4) have been seted up to the inboard of sucking disc installation frame (7), two draw-in grooves (3) have been seted up to the inboard of mounting groove (4).
2. The vacuum chuck clamping device for processing the plasma charge filtering device according to claim 1, characterized in that: the air guide that has seted up in the both sides of mounting groove (4) connects hole (8), the inboard fixed joint of mounting groove (4) has vacuum chuck mainboard (2), the outside fixedly connected with of sucking disc installation frame (7) is connecting pipe (9) everywhere, the both sides fixedly connected with fixture block (13) of vacuum chuck mainboard (2).
3. The vacuum chuck clamping device for processing the plasma charge filtering device according to claim 2, characterized in that: the inside of vacuum chuck mainboard (2) is seted up there is gas pocket (14), the upper end fixedly connected with contact plate (12) of vacuum chuck mainboard (2), the inboard fixedly connected with customizable flexible suction disc (10) of contact plate (12), seal groove (11) have been seted up around customizable flexible suction disc (10).
4. The vacuum chuck clamping device for processing the plasma charge filtering device according to claim 1, characterized in that: the device is characterized in that the device main body (1) and the side clamping groove (5) are integrally formed in a cutting mode, an installation cavity is arranged between the device main body (1) and the air pipe connector (6), and one side of the device main body (1) is fixedly connected with the inner side of the air pipe connector (6) through the installation cavity.
5. The vacuum chuck clamping device for processing the plasma charge filtering device according to claim 1, characterized in that: sucking disc installation frame (7) and draw-in groove (3), air guide connect hole (8), mounting groove (4) between through the mode integrated into one piece of casting, through welded mode fixed connection between device main part (1) and sucking disc installation frame (7).
6. The vacuum chuck clamping device for processing the plasma charge filtering device according to claim 3, wherein: vacuum chuck mainboard (2) and contact plate (12), fixture block (13), mode integrated into one piece through moulding plastics between gas pocket (14), the upper end fixedly connected with customizable flexible suction plate (10) of contact plate (12), customizable flexible suction plate (10) can be according to the design of work piece shape and size system.
CN202123387141.8U 2021-12-30 2021-12-30 Vacuum chuck clamping device is used in processing of plasma electric charge filter equipment Active CN217493967U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202123387141.8U CN217493967U (en) 2021-12-30 2021-12-30 Vacuum chuck clamping device is used in processing of plasma electric charge filter equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202123387141.8U CN217493967U (en) 2021-12-30 2021-12-30 Vacuum chuck clamping device is used in processing of plasma electric charge filter equipment

Publications (1)

Publication Number Publication Date
CN217493967U true CN217493967U (en) 2022-09-27

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ID=83344130

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202123387141.8U Active CN217493967U (en) 2021-12-30 2021-12-30 Vacuum chuck clamping device is used in processing of plasma electric charge filter equipment

Country Status (1)

Country Link
CN (1) CN217493967U (en)

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