CN217488013U - Semiconductor material drying cabinet - Google Patents
Semiconductor material drying cabinet Download PDFInfo
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- CN217488013U CN217488013U CN202220313360.7U CN202220313360U CN217488013U CN 217488013 U CN217488013 U CN 217488013U CN 202220313360 U CN202220313360 U CN 202220313360U CN 217488013 U CN217488013 U CN 217488013U
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- storage drawer
- cabinet body
- semiconductor material
- material drying
- wall
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Abstract
The utility model discloses a semiconductor material drying cabinet, which comprises a cabinet body, a storage mechanism and a reset mechanism; the interior of the cabinet body is of a cavity structure, and an air inlet pipe and an air outlet pipe are arranged on the cabinet body; the storage mechanism is provided with at least one storage drawer; the reset mechanism is arranged on the inner wall of the cabinet body, and the reset mechanism is connected with the storage drawer and used for resetting the storage drawer after being pulled out. The utility model discloses but self-closing storage drawer to the material of avoiding depositing wets.
Description
Technical Field
The utility model relates to a semiconductor production field especially relates to a semiconductor material drying cabinet.
Background
In the process of storing semiconductor materials, in order to avoid the semiconductor materials from being damaged due to contact with particulate pollutants in the air, the semiconductor materials are often stored in a drying cabinet filled with inert gas.
However, when the existing drying cabinet for storing semiconductor materials is used, the cabinet door is large, and a large amount of environmental gas and gas in the drying cabinet can exchange after the cabinet door is opened, so that the possibility of moisture of the stored materials is increased; and the cabinet door needs manual closing after being opened, and if people do not close the door due to operation negligence or do not close the door tightly, materials stored inside can be affected with damp.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a semiconductor material drying cabinet to the material that the realization was avoided depositing wets.
In order to solve the technical problem, the utility model provides a semiconductor material drying cabinet, include:
the cabinet body, the storage mechanism and the reset mechanism;
the interior of the cabinet body is of a cavity structure, and an air inlet pipe and an air outlet pipe are arranged on the cabinet body;
the storage mechanism is provided with at least one storage drawer;
the reset mechanism is arranged on the inner wall of the cabinet body, and the reset mechanism is connected with the storage drawer and used for resetting the storage drawer after being pulled out.
Furthermore, storing mechanism is including setting up the installation framework of the internal portion of cabinet, the installation framework is inside to be provided with at least one and to support the slide, support the slide outer wall with a surperficial sliding contact of storage drawer.
Furthermore, a plurality of rollers are arranged on the surface of one side of the supporting sliding plate, which is close to the storage drawer.
Furthermore, a baffle is arranged at one end, away from the reset mechanism, of the storage drawer, and a handle is arranged at one end, away from the storage drawer, of the baffle.
Furthermore, the baffle is close to be provided with sealed the pad on the one side outer wall of the cabinet body, sealed pad pass through the seal groove with cabinet body outer wall sealing connection, the seal groove sets up on the cabinet body outer wall.
Furthermore, a plurality of air holes are formed in the installation frame body.
Furthermore, one side of the storage drawer, which is far away from the supporting sliding plate, is provided with at least one stop lever, and one end of the stop lever is rotatably connected with the outer wall of the storage drawer.
Furthermore, the reset mechanism is including setting up the reset spring on the storage drawer side surface, reset spring is provided with one at least, reset spring keeps away from storage drawer's one end with cabinet body inner wall is connected.
Furthermore, the reset mechanism further comprises a damping piece, and the damping piece is arranged on the outer wall of one side, close to the reset spring, of the storage drawer.
Further, the shock absorbing member includes any one of a damping shock absorber and a shock absorbing plate.
Compared with the prior art, the utility model discloses following beneficial effect has at least: the drying cabinet is characterized in that a plurality of mounting frame bodies are arranged inside the cabinet body of the drying cabinet, and the storage drawers are arranged inside the mounting frame bodies, so that when materials are taken out, the corresponding storage drawers are only required to be opened, and the phenomenon that the materials are affected with damp due to the fact that a large amount of ambient gas enters the cabinet body is avoided; meanwhile, the reset mechanism corresponding to the storage drawer is arranged in the cabinet body, so that the storage drawer can be automatically closed and reset after being opened, and the reliability of material storage is improved.
Drawings
Fig. 1 is a schematic external structural view in an embodiment of the present invention;
fig. 2 is a schematic diagram of the internal structure in an embodiment of the present invention;
fig. 3 is a schematic view of the overall structure of the reset mechanism in an embodiment of the present invention;
figure 4 is a top view of an external storage drawer according to one embodiment of the present invention.
Detailed Description
The semiconductor material drying cabinet of the present invention will now be described in greater detail with reference to the schematic drawings, in which preferred embodiments of the invention are shown, it being understood that those skilled in the art may modify the invention herein described while still achieving the advantageous effects of the invention. Accordingly, the following description should be construed as broadly as possible to those skilled in the art and not as limiting the invention.
The invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become more fully apparent from the following description and appended claims. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.
As shown in fig. 1 to fig. 3, an embodiment of the present invention provides a semiconductor material drying cabinet, including:
the cabinet body 1, the storage mechanism 2 and the reset mechanism 3;
the interior of the cabinet body 1 is of a cavity structure, and an air inlet pipe 11 and an air outlet pipe 12 are arranged on the cabinet body 1;
at least one storage mechanism 2 is arranged, and at least one storage drawer 22 is arranged in the storage mechanism 2;
reset mechanism 3 sets up on the internal wall of cabinet 1, just reset mechanism 3 with storage drawer 22 is connected for storage drawer 22 takes out the back and resets.
A plurality of storage drawers 22 are arranged in the cabinet body 1 through the storage mechanism 2 so as to store semiconductor materials, and meanwhile, the reset mechanism 3 is arranged so that the storage drawers 22 can be automatically reset and retracted into the cabinet body 1 by loosening the storage drawers 22 after the materials are pulled out and taken out; inert gas is introduced into the cabinet body 1 through the air inlet pipe 11 and is discharged from the air outlet pipe 12, so that the interior of the cabinet body 1 is filled with the inert gas to protect semiconductor materials.
While the preferred embodiments of the semiconductor material drying cabinet are illustrated below for clarity of description of the present invention, it should be understood that the present invention is not limited to the following embodiments, and other modifications by conventional techniques of those skilled in the art are within the scope of the present invention.
In one embodiment, the storage mechanism 2 includes a mounting frame 21 disposed inside the cabinet 1, and at least one support slide 23 is disposed inside the mounting frame 21, and an outer wall of the support slide 23 is in sliding contact with one surface of the storage drawer 22. Through the setting of installation framework 21 and support slide 23 for storage drawer 22 can slide at support slide 23 upper surface, realizes taking out or accomodating, and simultaneously, storage drawer 22 surface and installation framework 21 inner wall sliding connection carry on spacingly to storage drawer 22, improve storage drawer 22's stability.
In one embodiment, a plurality of rollers 231 are disposed on a side surface of the support sled 23 adjacent to the storage drawer 22. Rollers 231 are provided on the support slide 23 to facilitate the extension of the storage drawer 22.
In one embodiment, the end of the locker drawer 22 remote from the reset mechanism 3 is provided with a flap 24, and the end of the flap 24 remote from the locker drawer 22 is provided with a handle 241. A baffle 24 to limit the storage drawer 22, a handle 241 to facilitate removal of the storage drawer 22; also, a label may be provided on the outer surface of the baffle 24 to facilitate identification when different storage drawers 22 store different types of materials, and may be quickly identified by the label on the baffle 24.
In one embodiment, a sealing gasket 25 is arranged on the outer wall of the side, close to the cabinet body 1, of the baffle plate 24, the sealing gasket 25 is connected with the outer wall of the cabinet body 1 in a sealing manner through a sealing groove 251, the sealing groove 251 is arranged on the outer wall of the cabinet body 1, and the baffle plate 24 is sealed with the outer wall of the cabinet body 1 through the matching of the sealing gasket 25 and the sealing groove 251, so that the inert gas inside the cabinet body 1 is prevented from leaking.
In one embodiment, the installation frame 21 is provided with a plurality of ventilation holes 211. The installation frame 21 is provided with a plurality of air holes 211, so that inert gas can enter the installation frame 21 conveniently and the semiconductor material in the storage drawer 22 can be protected.
Referring to FIG. 4, in one embodiment, at least one stop lever 26 is disposed on a side of the storage drawer 22 away from the support slide 23, and one end of the stop lever 26 is rotatably coupled to an outer wall of the storage drawer 22. The stop lever 26 is arranged, so that after the storage drawer 22 is pulled out, the stop lever 26 can be rotated to be positioned outside the storage drawer 22, the stop lever 26 is matched with the outer wall of the cabinet body 1, the limiting of the storage drawer 22 is realized, and an operator can take out materials from the storage drawer 22 conveniently; after the material is removed, the stop lever 26 can be rotated to be positioned inside the storage drawer 22 and the storage drawer 22 can be closed.
In one embodiment, the return mechanism 3 includes at least one return spring 31 disposed on a side surface of the storage drawer 22, and one end of the return spring 31 away from the storage drawer 22 is connected to the inner wall of the cabinet 1. Through the setting of reset spring 31, make the locker room 22 open the back, can realize locker room 22's restoration to the inside activity of cabinet 1 under the effect of reset spring 31.
In one embodiment, the return mechanism 3 further includes a shock absorber 32, and the shock absorber 32 is disposed on an outer wall of the storage drawer 22 on a side thereof adjacent to the return spring 31. Set up the damping piece 32 for storage drawer 22 when reseing, carry out the shock attenuation through damping piece 32, avoid storage drawer 22 direct and the striking of the internal wall of cabinet, lead to storage drawer 22 to take place the condition of warping, damaging, and avoid storage drawer 22 inside material to damage.
In one embodiment, the shock absorbing members 32 comprise any one of a damping shock absorber, a shock absorbing plate. The shock absorber 32 may include any one of a damping shock absorber and a shock absorbing plate to provide improved protection to the storage drawer 22 and the materials stored within the storage drawer 22.
In summary, a plurality of installation frames 21 are arranged inside the cabinet body 1 of the drying cabinet, and storage drawers 22 are arranged inside the installation frames 21, so that when materials are taken out, the corresponding storage drawers 22 are only required to be opened, and the material damp condition caused by the fact that a large amount of ambient gas enters the cabinet body 1 is avoided; meanwhile, the reset mechanism 3 corresponding to the storage drawer 22 is arranged in the cabinet body 1, so that the storage drawer 22 is automatically closed and reset after being opened, and the reliability of material storage is improved.
It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. A semiconductor material drying cabinet, comprising:
the cabinet body, the storage mechanism and the reset mechanism;
the interior of the cabinet body is of a cavity structure, and an air inlet pipe and an air outlet pipe are arranged on the cabinet body;
the storage mechanism is provided with at least one storage drawer;
the reset mechanism is arranged on the inner wall of the cabinet body, and the reset mechanism is connected with the storage drawer and used for resetting the storage drawer after being pulled out.
2. The semiconductor material drying cabinet of claim 1, wherein the storage mechanism comprises a mounting frame disposed within the cabinet body, the mounting frame having at least one support slide disposed therein, an outer wall of the support slide being in sliding contact with a surface of the storage drawer.
3. The semiconductor material drying cabinet of claim 2, wherein a side surface of the support slide adjacent to the storage drawer is provided with a plurality of rollers.
4. The semiconductor material drying cabinet of claim 2, wherein the end of the storage drawer distal from the reset mechanism is provided with a baffle, and the end of the baffle distal from the storage drawer is provided with a handle.
5. The semiconductor material drying cabinet as claimed in claim 4, wherein a sealing gasket is disposed on an outer wall of the baffle plate near one side of the cabinet body, the sealing gasket is connected with the outer wall of the cabinet body in a sealing manner through a sealing groove, and the sealing groove is disposed on the outer wall of the cabinet body.
6. The semiconductor material drying cabinet of claim 2, wherein the mounting frame has a plurality of ventilation holes formed therein.
7. The semiconductor material drying cabinet of claim 2, wherein the storage drawer is provided with at least one blocking lever at a side thereof remote from the support slide, the blocking lever being pivotally coupled at one end to an outer wall of the storage drawer.
8. The semiconductor material drying cabinet according to claim 1, wherein the return mechanism comprises at least one return spring disposed on a side surface of the storage drawer, and one end of the return spring, which is away from the storage drawer, is connected to the inner wall of the cabinet body.
9. The semiconductor material drying cabinet of claim 8, wherein the return mechanism further comprises a shock absorber disposed on an outer wall of the storage drawer on a side thereof proximate the return spring.
10. The semiconductor material drying cabinet of claim 9, wherein the shock absorbing member comprises any one of a damping shock absorber and a shock absorbing plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220313360.7U CN217488013U (en) | 2022-02-16 | 2022-02-16 | Semiconductor material drying cabinet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220313360.7U CN217488013U (en) | 2022-02-16 | 2022-02-16 | Semiconductor material drying cabinet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217488013U true CN217488013U (en) | 2022-09-27 |
Family
ID=83346281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220313360.7U Active CN217488013U (en) | 2022-02-16 | 2022-02-16 | Semiconductor material drying cabinet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217488013U (en) |
-
2022
- 2022-02-16 CN CN202220313360.7U patent/CN217488013U/en active Active
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