CN217483952U - Airtight sampler of gaseous material in polycrystalline silicon production - Google Patents
Airtight sampler of gaseous material in polycrystalline silicon production Download PDFInfo
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- CN217483952U CN217483952U CN202220236158.9U CN202220236158U CN217483952U CN 217483952 U CN217483952 U CN 217483952U CN 202220236158 U CN202220236158 U CN 202220236158U CN 217483952 U CN217483952 U CN 217483952U
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Abstract
The utility model relates to the technical field of chemical production equipment, in particular to a closed sampler for gas materials in polysilicon production, which comprises a cooler, a sampling valve, a sampling container, a three-way switching valve and an active adsorption tank; a material inlet pipeline is arranged on the cooler; the sampling valve is communicated with the cooler through a first material outlet pipeline; a first material outlet valve is arranged on the material outlet pipeline; a cooling water inlet pipeline is arranged on the cooler; a cooling water return pipeline is arranged on the cooler; the sampling container is communicated with the sampling valve; the three-way switching valve is communicated with the nitrogen inlet pipeline; the three-way switching valve is communicated with the material inlet pipeline; the three-way switching valve is communicated with the sampling valve through a nitrogen purging pipeline; the sampling valve is connected with a material outlet pipeline II; the active adsorption tank is communicated with the sampling valve through an emptying connecting pipe; the active adsorption tank is provided with an emptying pipeline. Adopt the utility model discloses can accurate sample, avoid polluting, and convenient and fast.
Description
Technical Field
The utility model relates to a chemical production equipment technical field especially relates to an airtight sampler of gaseous material in polycrystalline silicon production.
Background
With the increasing competition of the polysilicon production industry, how to ensure stable, high-quality and high-yield becomes an important ring whether to win the competition or not. Trichlorosilane is an intermediate product in the process of producing polycrystalline silicon by an improved Siemens method and is also a raw material for reduction production; in the reduction production, dichlorosilane is often added in a certain proportion to promote the reduction reaction and improve the conversion rate; however, dichlorosilane has the characteristics of low boiling point, high volatility, high water solubility, flammability, explosiveness, high corrosiveness and the like, is very unstable, and has abnormal furnace conditions of the reduction furnace due to too large component content change, even abnormal products appear in severe cases, so that accurate sampling monitoring is performed on dichlorosilane contained in trichlorosilane fed into the reduction furnace, stable production is realized, the product quality is ensured, and the yield is improved.
In the prior art, the sampling of trichlorosilane is realized by an injector type sample injector; the metal needle of the injector type sample injector is easy to corrode, so that the metal impurities of the sample are polluted; moreover, during the sampling and moving of the injector type sample injector and the insertion of the needle head into the sampling bottle, dichlorosilane materials are easy to volatilize and leak, the real reliability of analysis data can be directly influenced, and production can be misguided; moreover, the leakage of the materials can cause environmental pollution, even flash explosion, fire, harm to human health and the like.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a gaseous material's airtight sampler in polycrystalline silicon production, main aim at can accurate sample, avoid polluting, and convenient and fast.
In order to achieve the above object, the utility model mainly provides the following technical scheme:
the embodiment of the utility model provides a closed sampler for gas materials in polysilicon production, which comprises a cooler, a sampling valve, a sampling container, a three-way switching valve and an active adsorption tank;
a material inlet pipeline is arranged on the cooler; a material inlet valve is arranged on the material inlet pipeline; a material inlet pressure gauge is arranged on the material inlet pipeline;
the sampling valve is communicated with the cooler through a first material outlet pipeline; a first material outlet valve is arranged on the first material outlet pipeline;
the cooler is provided with a cooling water inlet pipeline for cooling water to enter and cool the material in the cooler; a cooling water inlet valve is arranged on the cooling water inlet pipeline; a cooling water inlet filter is arranged on the cooling water inlet pipeline;
a cooling water return pipeline is arranged on the cooler; a cooling water return valve is arranged on the cooling water return pipeline;
a water outlet is arranged on the cooler, and a drain valve is arranged on the water outlet;
the sampling container is communicated with the sampling valve;
the three-way switching valve is communicated with the nitrogen inlet pipeline; the nitrogen inlet pipeline is provided with a nitrogen inlet valve; the nitrogen inlet pipeline is provided with a nitrogen inlet one-way valve;
the three-way switching valve is communicated with the material inlet pipeline; the connecting point of the three-way switching valve and the material inlet pipeline is positioned at the downstream of the material inlet valve;
the three-way switching valve is communicated with the sampling valve through a nitrogen purging pipeline; a nitrogen regulating valve is arranged on the nitrogen purging pipeline;
a material outlet pipeline II is connected to the sampling valve; a material outlet pressure gauge is arranged on the material outlet pipeline; a material outlet valve II is arranged on the material outlet pipeline II;
the sampling valve is a six-way valve;
the active adsorption tank is communicated with the sampling valve through an emptying connecting pipe; a nitrogen purging outlet valve is arranged on the emptying connecting pipe; a nitrogen outlet one-way valve is arranged on the emptying connecting pipe;
and the active adsorption tank is provided with an emptying pipeline.
Furthermore, the cooling water return valve, the cooling water inlet valve, the material inlet valve, the nitrogen inlet valve, the three-way switching valve, the drain valve, the first material outlet valve, the sampling valve, the second material outlet valve and the nitrogen purging outlet valve are all electromagnetic valves.
Further, the nitrogen regulating valve is an electric control valve.
Further, still include: a control system;
the control system is respectively connected with the cooling water return valve, the cooling water inlet valve, the material inlet valve, the nitrogen inlet valve, the three-way switching valve, the drain valve, the first material outlet valve, the sampling valve, the second material outlet valve, the nitrogen purging outlet valve and the nitrogen regulating valve.
Furthermore, a display unit is arranged on the control system and used for displaying the states of the cooling water return valve, the cooling water inlet valve, the material inlet valve, the nitrogen gas inlet valve, the three-way switching valve, the drain valve, the first material outlet valve, the sampling valve, the second material outlet valve, the nitrogen purging outlet valve and the nitrogen regulating valve.
Further, the control system is connected with the material inlet pressure gauge and is used for collecting the pressure of the material in the material inlet pipeline;
and the control system is connected with the material outlet pressure gauge and is used for acquiring the pressure of the material in the material outlet pipeline II.
Further, an inlet and an outlet are arranged on the sampling container; the inlet and the outlet are respectively communicated with the sampling valve.
By means of the technical scheme, the utility model discloses airtight sampler of gaseous material has following advantage at least in polycrystalline silicon production:
can accurate sample, avoid polluting, and convenient and fast.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
Fig. 1 is a schematic diagram of a closed sampler for gas materials in polysilicon production according to an embodiment of the present invention.
Shown in the figure:
101 is a cooling water return pipeline, 102 is a cooling water inlet pipeline, 103 is a material inlet pipeline, 104 is a nitrogen gas inlet pipeline, 105 is a material outlet pipeline I, 106 is a nitrogen gas purging pipeline, 107 is a material outlet pipeline II, 108 is an emptying pipeline, 201 is a cooling water return valve, 202 is a cooling water inlet valve, 203 is a material inlet valve, 204 is a nitrogen gas inlet valve, 205 is a nitrogen gas inlet one-way valve, 206 is a three-way switching valve, 207 is a nitrogen gas regulating valve, 208 is a water drain valve, 209 is a material outlet valve I, 210 is a sampling valve, 211 is a material outlet valve II, 212 is a nitrogen gas purging outlet valve, 213 is a nitrogen gas outlet one-way valve, 301 is a cooling water inlet filter, 302 is a cooler, 303 is a sampling container, 304 is an active adsorption tank, 401 is a material inlet pressure gauge, and 402 is a material outlet pressure gauge.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the intended purpose of the present invention, the following detailed description is given with reference to the accompanying drawings and preferred embodiments, in order to explain the detailed embodiments, structures, features and effects of the present invention. In the following description, different "one embodiment" or "an embodiment" refers to not necessarily the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
As shown in FIG. 1, one embodiment of the present invention provides a closed sampler for gas materials in polysilicon production, which comprises a cooler 302, a sampling valve 210, a sampling container 303, a three-way switching valve 206 and an active adsorption tank 304;
the cooler 302 is provided with a material inlet pipeline 103; a material inlet valve 203 is arranged on the material inlet pipeline 103 to control the on-off of the material inlet pipeline 103; a material inlet pressure gauge 401 is arranged on the material inlet pipeline 103 to detect the pressure at the material inlet.
The sampling valve 210 is communicated with the cooler 302 through a first material outlet pipeline 105; a first material outlet valve 209 is arranged on the first material outlet pipeline 105 to control the on-off of the first material outlet pipeline 105;
the cooler 302 is provided with a cooling water inlet pipeline 102 for cooling water to enter and cool the materials in the cooler 302; a cooling water inlet valve 202 is arranged on the cooling water inlet pipeline 102 and used for controlling the on-off of the cooling water inlet pipeline 102; a cooling water inlet filter 301 is disposed on the cooling water inlet pipe 102 to filter the cooling water. The cooler 302 is provided with a cooling water return pipe 101 for returning cooling water. A cooling water return valve 201 is arranged on the cooling water return pipe 101 to control the on-off of the cooling water return pipe 101. The cooler 302 is provided with a drain for emergency water. The water outlet is provided with a drain valve to control the on-off of the water outlet.
The sampling vessel 303 is in communication with the sampling valve 210; preferably, the sampling container 303 is provided with an inlet and an outlet; the inlet and outlet ports are respectively in communication with a sampling valve 210. The sampling container 303 may be a sampling bottle.
The three-way switching valve 206 is communicated with the nitrogen inlet pipeline 104; a nitrogen inlet valve 204 is arranged on the nitrogen inlet pipeline 104 to control the connection and disconnection of the nitrogen inlet pipeline 104; the nitrogen inlet pipe 104 is provided with a nitrogen inlet check valve 205 to make the nitrogen flow in one direction. The three-way switching valve 206 is communicated with the material inlet pipeline 103; the connection point of the three-way switching valve 206 to the material inlet pipe 103 is located downstream of the material inlet valve 203; the three-way switching valve 206 is communicated with the sampling valve 210 through the nitrogen purge pipeline 106; the nitrogen purge line 106 is provided with a nitrogen adjustment valve 207 to adjust the nitrogen flow rate in the nitrogen purge line 106. Preferably, the nitrogen regulating valve 207 is an electrically controlled valve for automatic control.
The sampling valve 210 is connected with a second material outlet pipeline 107; a material outlet pressure gauge 402 is arranged on the material outlet pipeline II 107 to detect the pressure in the material outlet pipeline II 107; and a material outlet valve II 211 is arranged on the material outlet pipeline II 107 and is used for controlling the on-off of the material outlet pipeline II 107. The sampling valve 210 is a six-way valve to control the communication of the various pipes.
The active adsorption tank 304 is communicated with the sampling valve 210 through an emptying connecting pipe; the evacuation connecting pipe is provided with a nitrogen purging outlet valve 212 to control the connection and disconnection of the evacuation connecting pipe. The evacuation connection pipe is provided with a nitrogen outlet check valve 213 to make nitrogen gas flow in one direction. An evacuation line 108 is provided to the active canister 304 for evacuation.
The utility model discloses an embodiment provides an airtight sampler of gaseous material in polycrystalline silicon production, can accurate sample, avoids polluting, and convenient and fast.
Preferably, the cooling water return valve 201, the cooling water inlet valve 202, the material inlet valve 203, the nitrogen gas inlet valve 204, the three-way switching valve 206, the cooler 302 drain valve 208, the material outlet valve one 209, the sampling valve 210, the material outlet valve two 211 and the nitrogen purge outlet valve 212 are all solenoid valves so as to be controlled.
Further preferably, an embodiment of the present invention provides a closed sampler for gas materials in polysilicon production, further comprising: a control system; the control system is respectively connected with the cooling water return valve 201, the cooling water inlet valve 202, the material inlet valve 203, the nitrogen inlet valve 204, the three-way switching valve 206, the drain valve 208 of the cooler 302, the first material outlet valve 209, the sampling valve 210, the second material outlet valve 211, the nitrogen purging outlet valve 212 and the nitrogen regulating valve 207 so as to be automatically controlled through the control system. Further preferably, the control system is provided with a display unit for displaying the states of the cooling water return valve 201, the cooling water inlet valve 202, the material inlet valve 203, the nitrogen gas inlet valve 204, the three-way switching valve 206, the drain valve 208 of the cooler 302, the first material outlet valve 209, the sampling valve 210, the second material outlet valve 211, the nitrogen purging outlet valve 212 and the nitrogen gas regulating valve 207 so as to be convenient for an operator to view.
Preferably, the control system is connected with a material inlet pressure gauge 401 and is used for collecting the pressure of the material in the material inlet pipeline 103; the control system is connected with the material outlet pressure gauge 402 and is used for collecting the pressure of the material in the material outlet pipeline II 107, monitoring the flow of the material by collecting data and further controlling the action of each valve.
The embodiment of the utility model provides an airtight sampler of gaseous material in polycrystalline silicon production, the implementation step is as follows:
standby state:
the cooling water inlet valve 202 and the cooling water return valve 201 are opened, and cooling water enters a cooling material pipeline of the cooler 302 through the cooling water inlet filter 301; the material inlet valve 203, the first material outlet valve 209 and the second material outlet valve 211 are closed; the nitrogen passes through a nitrogen inlet valve 204, a nitrogen inlet one-way valve 205, a three-way switching valve 206, a nitrogen regulating valve 207, a sampling valve 210, a nitrogen purging outlet valve 212 and a nitrogen outlet one-way valve 213 in sequence, is adsorbed by an active adsorption tank 304 and is exhausted.
Sampling operation:
replacement sampling container 303: the nitrogen sequentially passes through a nitrogen inlet valve 204, a nitrogen inlet one-way valve 205, a three-way switching valve 206, a nitrogen regulating valve 207 and a sampling valve 210, enters a sampling container 303 to replace the gas in the sampling container 303, passes through a nitrogen purging outlet valve 212 and a nitrogen outlet one-way valve 213 from the sampling valve 210, is subjected to adsorption treatment by an active adsorption tank 304 and is then emptied;
circulating sampling materials: opening a second material outlet valve 211, switching the sampling valve 210 to a second material outlet pipeline 107, opening a first material outlet valve 209 and a first material inlet valve 203 in sequence; the material flows to the cooler 302 through the material inlet pipeline 103, passes through the sampling valve 210, and enters the material recovery pipeline through the material outlet pipeline II 107; whether the material circulates or not is judged through a material inlet pressure gauge 401 and a material outlet pressure gauge 402. To ensure sample circulation, a predetermined pressure difference is required between the inlet and outlet of the sampling point to ensure that the sample is fresh material.
Sampling: circulating for a certain time in the previous step; closing the second material outlet valve 211, opening the nitrogen purging outlet valve 212, switching the sampling valve 210 to the sampling container 303, and starting sampling; the nitrogen in the sampling container 303 is pressed out by the material entering the sampling container 303, passes through the nitrogen purging outlet valve 212 and the nitrogen outlet one-way valve 213, is adsorbed by the active adsorption tank 304, and is then emptied. After sampling is finished, the sampling valve 210 is switched to the second material outlet pipeline 107, the material inlet valve 203 and the nitrogen purging outlet valve 212 are closed, and the second material outlet valve 211 is opened.
Nitrogen back flushing: the material inlet pipeline 103 is communicated with the nitrogen inlet pipeline 104 through the three-way switching valve 206, residual materials in the cooler 302 are purged through nitrogen, and the residual materials enter a recovery pipeline through the sampling valve 210 and the material outlet pipeline II 107; and (5) finishing the operation, and putting all valves into a standby state.
The utility model discloses an embodiment provides a airtight sampler of gaseous material in polycrystalline silicon production, and the sample is safe, and is pollution-free, and the sample result is accurate, can in time guide production, and feedback production is unusual.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.
The utility model discloses the standard part that uses all can purchase from the market, and dysmorphism piece all can be customized according to the description with the record of drawing of description, and the concrete connection mode of each part all adopts conventional means such as ripe bolt, rivet, welding among the prior art, and machinery, part and equipment all adopt prior art, and conventional model, including circuit connection adopts conventional connection mode among the prior art, does not detailed here again.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical spirit of the present invention are all within the scope of the technical solution of the present invention.
Claims (7)
1. A closed sampler for gas materials in polycrystalline silicon production is characterized by comprising a cooler, a sampling valve, a sampling container, a three-way switching valve and an active adsorption tank;
a material inlet pipeline is arranged on the cooler; a material inlet valve is arranged on the material inlet pipeline; a material inlet pressure gauge is arranged on the material inlet pipeline;
the sampling valve is communicated with the cooler through a first material outlet pipeline; a first material outlet valve is arranged on the first material outlet pipeline;
the cooler is provided with a cooling water inlet pipeline for cooling water to enter and cool the material in the cooler; a cooling water inlet valve is arranged on the cooling water inlet pipeline; a cooling water inlet filter is arranged on the cooling water inlet pipeline;
a cooling water return pipeline is arranged on the cooler; a cooling water return valve is arranged on the cooling water return pipeline;
a water outlet is arranged on the cooler, and a drain valve is arranged on the water outlet;
the sampling container is communicated with the sampling valve;
the three-way switching valve is communicated with the nitrogen inlet pipeline; a nitrogen inlet valve is arranged on the nitrogen inlet pipeline; the nitrogen inlet pipeline is provided with a nitrogen inlet one-way valve;
the three-way switching valve is communicated with the material inlet pipeline; the connecting point of the three-way switching valve and the material inlet pipeline is positioned at the downstream of the material inlet valve;
the three-way switching valve is communicated with the sampling valve through a nitrogen purging pipeline; a nitrogen regulating valve is arranged on the nitrogen purging pipeline;
a material outlet pipeline II is connected to the sampling valve; a material outlet pressure gauge is arranged on the material outlet pipeline; a material outlet valve II is arranged on the material outlet pipeline;
the sampling valve is a six-way valve;
the active adsorption tank is communicated with the sampling valve through an emptying connecting pipe; a nitrogen purging outlet valve is arranged on the emptying connecting pipe; a nitrogen outlet one-way valve is arranged on the emptying connecting pipe;
and an emptying pipeline is arranged on the active adsorption tank.
2. The closed sampler for gas materials in polysilicon production according to claim 1,
the cooling water return valve, the cooling water inlet valve, the material inlet valve, the nitrogen gas inlet valve, the three-way switching valve, the drain valve, the first material outlet valve, the sampling valve, the second material outlet valve and the nitrogen purging outlet valve are all electromagnetic valves.
3. The closed sampler for gas materials in the production of polysilicon according to claim 2,
the nitrogen regulating valve is an electric control valve.
4. The closed sampler for gaseous materials in the production of polysilicon according to claim 3, further comprising: a control system;
the control system is respectively connected with the cooling water return valve, the cooling water inlet valve, the material inlet valve, the nitrogen inlet valve, the three-way switching valve, the drain valve, the first material outlet valve, the sampling valve, the second material outlet valve, the nitrogen purging outlet valve and the nitrogen regulating valve.
5. The closed sampler for gaseous materials in the production of polysilicon according to claim 4,
and the control system is provided with a display unit for displaying the states of the cooling water return valve, the cooling water inlet valve, the material inlet valve, the nitrogen inlet valve, the three-way switching valve, the drain valve, the first material outlet valve, the sampling valve, the second material outlet valve, the nitrogen purging outlet valve and the nitrogen regulating valve.
6. The closed sampler for gas materials in the production of polysilicon according to claim 5,
the control system is connected with the material inlet pressure gauge and is used for acquiring the pressure of the material in the material inlet pipeline;
and the control system is connected with the material outlet pressure gauge and is used for acquiring the pressure of the material in the material outlet pipeline II.
7. The closed sampler for gas materials in the production of polysilicon according to claim 1,
the sampling container is provided with an inlet and an outlet; the inlet and the outlet are respectively communicated with the sampling valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220236158.9U CN217483952U (en) | 2022-01-28 | 2022-01-28 | Airtight sampler of gaseous material in polycrystalline silicon production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220236158.9U CN217483952U (en) | 2022-01-28 | 2022-01-28 | Airtight sampler of gaseous material in polycrystalline silicon production |
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| Publication Number | Publication Date |
|---|---|
| CN217483952U true CN217483952U (en) | 2022-09-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220236158.9U Active CN217483952U (en) | 2022-01-28 | 2022-01-28 | Airtight sampler of gaseous material in polycrystalline silicon production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217483952U (en) |
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2022
- 2022-01-28 CN CN202220236158.9U patent/CN217483952U/en active Active
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