CN217479593U

CN217479593U - Sliding locking mechanism for vertical diffusion furnace box body

Info

Publication number: CN217479593U
Application number: CN202221766719.2U
Authority: CN
Inventors: 刘明利; 王佩佩; 周文智
Original assignee: Qingdao Saier Technology Co ltd
Current assignee: Qingdao Saier Technology Co ltd
Priority date: 2022-07-11
Filing date: 2022-07-11
Publication date: 2022-09-23
Anticipated expiration: 2032-07-11

Abstract

The utility model discloses a dead mechanism of vertical diffusion furnace box sliding lock, including the diffusion furnace body, the inside fixedly connected with baffle of diffusion furnace body, the top of baffle is provided with the diffusion chamber. The utility model discloses in, through the dead mechanism of slip lock that sets up, installation piece and draw-in groove, when advancing to push interior box diffusion furnace body, utilize the handle to press and promote the push rod and remove, the spliced pole that promotes in the installation shell when the push rod removes slides in the inside that leads to the groove, make the fixed block remove, it slides on the bottom plate to drive the connecting rod simultaneously, the connecting plate can extrude the spring and drive the fixture block and remove, loosen the handle under reaching suitable position, when the effort that receives the spring, can make the fixture block peg graft and install in the inside draw-in groove of installation piece, the interior box has been prevented to cause unstable effect after pushing, can guarantee normal use, the practicality is stronger.

Description

Sliding locking mechanism for vertical diffusion furnace box body

Technical Field

The utility model relates to a vertical diffusion furnace technical field especially relates to a dead mechanism of vertical diffusion furnace box sliding lock.

Background

The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, and is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like.

The box inside current vertical diffusion furnace is for pushing formula sliding connection, lacks dead lock mechanism after the box of inside pushes away for the in-process box that uses at vertical diffusion furnace box can't remain stable, leads to the in-process practicality of using relatively poor, in order to solve this difficult problem, consequently provides a vertical diffusion furnace box slide lock dead mechanism.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a sliding locking mechanism for a vertical diffusion furnace box body.

In order to achieve the above purpose, the utility model adopts the following technical scheme: a sliding locking mechanism of a vertical diffusion furnace box body comprises a diffusion furnace body, a partition plate is fixedly connected inside the diffusion furnace body, a diffusion cavity is arranged at the top of the partition plate, an inner box body is arranged inside the diffusion furnace body, a baffle plate is fixedly connected to one side of the surface of the inner box body, a first handle is fixedly connected to the outer surface of the baffle plate, connecting sleeves are fixedly connected to two sides of the surface of the inner box body, two sliding rods are symmetrically and fixedly connected to the inner side wall of the diffusion furnace body, limiting rods are fixedly connected to the outer surfaces of the two sliding rods in a penetrating manner, the connecting sleeves are sleeved on the outer portions of the sliding rods in a sliding manner, a plurality of mechanical devices are arranged inside the inner box body, two bottom plates are symmetrically and fixedly connected to the bottom of the inner box body, sliding locking mechanisms are arranged on the two bottom plates, each sliding locking mechanism comprises a connecting rod, the connecting rod penetrates through two ends of the bottom plate, one end of the connecting rod is fixedly connected with a connecting plate, one end of the connecting plate is fixedly connected with a clamping block, a spring is sleeved outside the connecting rod, two ends of the spring are respectively and fixedly connected with one side of the surface of the connecting plate and one side of the surface of the bottom plate, the other end of the connecting rod is fixedly connected with a fixed block, the surface of the fixed block is provided with a through groove, the outer part of the fixed block is sleeved with a mounting shell, the inner part of the mounting shell is fixedly connected with a connecting column, the connecting column is arranged on the inner side wall of the through groove and is in sliding connection with the inner side wall of the through groove, one side of the surface of the mounting shell is fixedly connected with a push rod, one end of the push rod penetrates through a handle fixedly connected with one side of the baffle, two mounting blocks are symmetrically and fixedly connected to the inner side wall of the diffusion furnace body, clamping grooves are formed in the mounting blocks, and a display is fixedly mounted on the outer surface of the diffusion furnace body.

Furthermore, the symmetry is provided with two sets of hinges on the surface of diffusion furnace body, every group the hinge all rotate on the surface and be connected with the chamber door, the fixed connection has the second handle on the surface of chamber door, be provided with the observation window on the surface of chamber door, utilize the second handle can be quick open the chamber door, convenience very during the operation, the practicality is stronger.

Furthermore, a control panel is fixedly connected to the outer surface of the diffusion furnace body, and a controller is arranged on the outer surface of the control panel, so that simple control can be conveniently carried out, and the operation process is more flexible.

Furthermore, a plurality of supporting legs of the bottom symmetry fixedly connected with of diffusion furnace body, it is a plurality of the bottom fixedly connected with backup pad of supporting leg can be convenient for steadily place, stability effect when improving the use.

Furthermore, fixedly connected with antiskid sleeves are sleeved on the outer surfaces of the first handle and the second handle, so that the handle can be conveniently held for use, and the handle is more comfortable and has the best effect in the use process.

Furthermore, the fixture block is in plug-in connection with the clamping groove, so that the structure is simple, firm clamping and fixing are facilitated, and the practicability is stronger.

The utility model has the advantages that:

the utility model discloses when using, dead mechanism of slip lock through setting up, installation piece and draw-in groove, when pushing diffusion furnace body with interior box, utilize the handle to press the promotion push rod and remove, the spliced pole in the promotion installation shell slides in the inside that leads to the groove when the push rod removes, make the fixed block remove, it slides on the bottom plate to drive the connecting rod simultaneously, the connecting plate can extrude the spring and drive the fixture block and remove, loosen the handle under reacing suitable position, when the effort that receives the spring, can make the fixture block peg graft install in the inside draw-in groove of installation piece, interior box has been prevented to cause unstable effect after pushing, can guarantee normal use, the quick pull-out of being convenient for when the inside mechanical equipment of box needs the maintenance in the while, therefore, the steam generator is very convenient, the in-process of operation is very convenient, the practicality is stronger.

Drawings

FIG. 1 is a perspective view of a sliding locking mechanism of a vertical diffusion furnace casing of the present invention;

FIG. 2 is a main sectional view of a sliding locking mechanism of a vertical diffusion furnace box body of the present invention;

fig. 3 is a schematic structural view of the sliding locking mechanism of the vertical diffusion furnace box of the present invention.

Illustration of the drawings:

1. supporting legs; 2. a baffle plate; 3. a support plate; 4. a slide locking mechanism; 401. a push rod; 402. a handle; 403. a spring; 404. a connecting rod; 405. mounting a shell; 406. a connecting plate; 407. a fixed block; 408. a clamping block; 409. connecting columns; 410. a through groove; 5. a first handle; 6. a second handle; 7. a box door; 8. a controller; 9. a diffusion furnace body; 10. a control panel; 11. a display; 12. a hinge; 13. a diffusion chamber; 14. a partition plate; 15. connecting sleeves; 16. a slide bar; 17. an inner box body; 18. a mechanical device; 19. a base plate; 20. and (7) installing the block.

Detailed Description

Referring to fig. 1-3, a sliding locking mechanism for a vertical diffusion furnace box body comprises a diffusion furnace body 9, a partition 14 is fixedly connected inside the diffusion furnace body 9, a diffusion cavity 13 is arranged on the top of the partition 14, an inner box body 17 is arranged inside the diffusion furnace body 9, a baffle 2 is fixedly connected on one side of the surface of the inner box body 17, a first handle 5 is fixedly connected on the outer surface of the baffle 2, connecting sleeves 15 are fixedly connected on two sides of the surface of the inner box body 17, two sliding rods 16 are symmetrically and fixedly connected on the inner side wall of the diffusion furnace body 9, a limiting rod is fixedly connected on the outer surfaces of the two sliding rods 16 in a penetrating manner, the connecting sleeves 15 are sleeved on the outer portions of the sliding rods 16 and are in sliding connection, a plurality of mechanical devices 18 are arranged inside the inner box body 17, two bottom plates 19 are symmetrically and fixedly connected on the bottom of the inner box body 17, and a sliding locking mechanism 4 is arranged on the two bottom plates 19, two installation pieces 20 of symmetry fixedly connected with on the inside wall of diffusion furnace body 9, the inside of two installation pieces 20 is provided with the draw-in groove, fixed mounting has display 11 on the surface of diffusion furnace body 9, the symmetry is provided with two sets of hinges 12 on the surface of diffusion furnace body 9, every group hinge 12 all rotates on the surface and is connected with chamber door 7, chamber door 7's fixedly connected with second handle 6 on the surface, be provided with the observation window on the surface of chamber door 7, fixedly connected with control panel 10 on the surface of diffusion furnace body 9, be provided with controller 8 on control panel 10's the surface, a plurality of supporting legs 1 of bottom symmetry fixedly connected with of diffusion furnace body 9, the bottom fixedly connected with backup pad 3 of a plurality of supporting legs 1, all overlap fixedly connected with antiskid cover on the surface of first in command 5 and second in command 6, fixture block 408 is plug-in connection with the draw-in groove.

Referring to fig. 1 and 3, the sliding locking mechanism 4 includes a connecting rod 404, the connecting rod 404 penetrates through two ends of the bottom plate 19, one end fixedly connected with connecting plate 406 of the connecting rod 404, one end fixedly connected with clamping block 408 of the connecting plate 406, the outer sleeve of the connecting rod 404 is provided with a spring 403, two ends of the spring 403 are respectively fixedly connected with one side of the surface of the connecting plate 406 and one side of the surface of the bottom plate 19, the other end fixedly connected with fixing block 407 of the connecting rod 404, the surface of the fixing block 407 is provided with a through groove 410, the outer sleeve of the fixing block 407 is provided with an installation shell 405, the inside fixedly connected with connecting column 409 of the installation shell 405, the connecting column 409 is installed on the inner side wall of the through groove 410 in a sliding connection manner, one side fixedly connected with a push rod 401 of the installation shell 405, one end of the push rod 401 penetrates through a handle 402 which extends to one side of the baffle 2.

When the utility model is used, when the inner box body 17 needs to be pushed into the diffusion furnace body 9, the handle 402 is used for pressing and pushing the push rod 401 to move, when the push rod 401 moves, the connecting column 409 in the installation shell 405 is pushed to slide in the through groove 410, so that the fixing block 407 moves, and meanwhile, the connecting rod 404 is driven to slide on the bottom plate 19, the connecting plate 406 can be used for extruding the spring 403 to drive the fixture block 408 to move, meanwhile, the first handle 5 is used for pushing the inner box body 17, so that the connecting sleeve 15 slides on the sliding rod 16 to be pushed, after reaching a proper position, the handle 402 is loosened, the fixture block 408 can be inserted and installed in the clamping groove of the installation block 20 under the action of the elastic force of the spring 403, so that the inner box body 17 can be kept stable after being pushed, when the inner box body 17 needs to be pulled out of the mechanical equipment 18 inside to be maintained, the push rod 401 is pushed and moved by using the handle 402, push rod 401 promotes spliced pole 409 in the installation shell 405 when removing and slides in the inside that leads to groove 410 for fixed block 407 removes, drive connecting rod 404 simultaneously and slide on bottom plate 19, connecting plate 406 can push spring 403 and drive fixture block 408 and remove, make fixture block 408 and the inside draw-in groove separation of installation piece 20, the quick interior box 17 of taking out of being convenient for, the convenience is maintained inside mechanical equipment 18, it is very convenient during the operation, the practicality is stronger.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. The utility model provides a dead mechanism of vertical diffusion furnace box slip lock, includes diffusion furnace body (9), its characterized in that: the diffusion furnace is characterized in that a partition plate (14) is fixedly connected to the inside of a diffusion furnace body (9), a diffusion cavity (13) is arranged at the top of the partition plate (14), an inner box body (17) is arranged inside the diffusion furnace body (9), a baffle plate (2) is fixedly connected to one side of the surface of the inner box body (17), a first handle (5) is fixedly connected to the outer surface of the baffle plate (2), connecting sleeves (15) are fixedly connected to two sides of the surface of the inner box body (17), two sliding rods (16) are symmetrically and fixedly connected to the inner side wall of the diffusion furnace body (9), two limiting rods are fixedly connected to the outer surface of each sliding rod (16) in a penetrating mode, each connecting sleeve (15) is sleeved on the corresponding sliding rod (16) and connected in a sliding mode, a plurality of mechanical devices (18) are arranged inside the inner box body (17), and two bottom plates (19) are symmetrically and fixedly connected to the bottom of the inner box body (17), two sliding locking mechanisms (4) are arranged on the bottom plates (19), each sliding locking mechanism (4) comprises a connecting rod (404), each connecting rod (404) penetrates through two ends of each bottom plate (19), one end of each connecting rod (404) is fixedly connected with a connecting plate (406), one end of each connecting plate (406) is fixedly connected with a clamping block (408), a spring (403) is sleeved outside each connecting rod (404), two ends of each spring (403) are respectively fixedly connected with one side of the surface of each connecting plate (406) and one side of the surface of each bottom plate (19), the other end of each connecting rod (404) is fixedly connected with a fixing block (407), a through groove (410) is formed in the surface of each fixing block (407), an installation shell (405) is sleeved outside each fixing block (407), a connecting column (409) is fixedly connected inside each installation shell (405), and the connecting columns (409) are installed on the inner side wall of each through groove (410) in a sliding connection mode, the utility model discloses a diffusion furnace, including installation shell (405), one side fixedly connected with push rod (401) of surface of installation shell (405), one side fixedly connected with handle (402) that extend to baffle (2) are run through to the one end of push rod (401), two installation pieces (20) of symmetry fixedly connected with on the inside wall of diffusion furnace body (9), two the inside of installation piece (20) is provided with the draw-in groove, fixed mounting has display (11) on the surface of diffusion furnace body (9).

2. The sliding locking mechanism of the vertical diffusion furnace box body as claimed in claim 1, wherein: the outer surface of the diffusion furnace body (9) is symmetrically provided with two groups of hinges (12), the surface of each group of hinges (12) is rotatably connected with a box door (7), the surface of the box door (7) is fixedly connected with a second handle (6), and the outer surface of the box door (7) is provided with an observation window.

3. The sliding locking mechanism of the vertical diffusion furnace box body of claim 1, wherein: the diffusion furnace is characterized in that a control panel (10) is fixedly connected to the outer surface of the diffusion furnace body (9), and a controller (8) is arranged on the outer surface of the control panel (10).

4. The sliding locking mechanism of the vertical diffusion furnace box body of claim 1, wherein: the bottom symmetry fixedly connected with of diffusion furnace body (9) is a plurality of supporting legs (1), and is a plurality of the bottom fixedly connected with backup pad (3) of supporting leg (1).

5. The sliding locking mechanism of the vertical diffusion furnace box body of claim 2, wherein: and the outer surfaces of the first handle (5) and the second handle (6) are respectively sleeved with an anti-skidding sleeve fixedly connected with the first handle.

6. The sliding locking mechanism of the vertical diffusion furnace box body of claim 1, wherein: the clamping block (408) is in plug connection with the clamping groove.