CN217479241U - Treatment process system for preparing ultrapure water from urban reclaimed water - Google Patents

Treatment process system for preparing ultrapure water from urban reclaimed water Download PDF

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CN217479241U
CN217479241U CN202220812457.2U CN202220812457U CN217479241U CN 217479241 U CN217479241 U CN 217479241U CN 202220812457 U CN202220812457 U CN 202220812457U CN 217479241 U CN217479241 U CN 217479241U
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water
oxidant
water tank
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advanced oxidation
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刘澈
王鹏
李锦生
王凌旭
郑伟
蔡睿
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SY Technology Engineering and Construction Co Ltd
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SY Technology Engineering and Construction Co Ltd
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Abstract

The utility model discloses aA treatment process system for preparing ultrapure water from municipal reclaimed water comprises a pretreatment system, a preparation system and a polishing system. Adding oxidant into the advanced oxidation device, activating the oxidant by medium-pressure ultraviolet rays to generate free radicals, and oxidizing the organic matters into micromolecular organic matters or mineralizing the organic matters into CO 2 And H 2 And O, the organic matters are efficiently degraded after being adsorbed by the activated carbon particles. The vacuum ultraviolet light in the urea degradation device catalyzes the oxidant to generate free radicals to rapidly degrade the urea. The treatment process method simplifies the conventional pretreatment process flow, saves the occupied area, has strong conformity with the existing ultrapure water treatment process, can upgrade and transform a pure water station through the existing conditions, and is convenient for industrialized large-scale popularization and application.

Description

Treatment process system for preparing ultrapure water from urban reclaimed water
Technical Field
The utility model relates to a water treatment technical field especially relates to a ultrapure water treatment process systems of city reclaimed water preparation.
Background
At the present stage, the situation of water resource shortage in China is severe, and according to statistics, China has 21% of population all over the world, but accounts for 6% of the total amount of water resources, and the per-capita water resource amount is only one fourth of the per-capita level in the world, and is one of the most scarce countries of the per-capita water resources in the world. In more than ten years, the reuse of reclaimed water in China is rapidly developed, and a series of sewage treatment and reuse projects are successively established in northern cities with serious water shortage, such as Beijing, Tianjin and the like. On the basis that the national sewage treatment reuse rate is greatly improved in recent years, the state clearly puts forward the requirement of the sewage treatment reuse proportion.
The manufacturing industries of electronic equipment such as integrated circuits, semiconductors, liquid crystal panels and the like are large industrial water consumers, a large amount of ultrapure water is needed in the process manufacturing procedure, urban recycled water is used as a water source for preparing the ultrapure water, the substitution of tap water is actively promoted, the method is an effective way for solving the shortage of urban water resources at present, and the method has important significance for promoting water-saving cities.
At present, because the turbidity, the chroma, the chemical oxygen demand, the ammonia nitrogen, the total phosphorus, the total nitrogen, the salt and other contents of the urban reclaimed water are high, the urban reclaimed water cannot be directly treated by adopting the existing ultrapure water treatment process, and needs to be pretreated. The pretreatment is currently generally a conventional process using coagulation, sedimentation, filtration and disinfection. The traditional water treatment process has the defects of more treatment structures, large occupied area and high construction cost, and in addition, the traditional process has poor removal effect on organic matters and can increase the organic matter load of the subsequent ultrapure water treatment process. Therefore, aiming at the problem of high organic matter content of the reclaimed water, especially the raw water, the solution of the ultrapure water treatment system which is safe and reliable in operation, reaches the standard of pure water quality and saves the construction and operation costs is very urgent and necessary.
Urea H 2 NCONH 2 Also known as carbamide, is widely found in municipal reclaimed water. The urea molecules are small and have high polarity, so that the urea molecules can easily enter the ultrapure water through the reverse osmosis membrane. In the production process of semiconductors, urea molecules are hydrolyzed on the surface of products to generate ammonia, which has great influence on the yield of the products.
In the utility model CN102781849A, "water treatment method and ultrapure water manufacturing method", water-soluble bromide salt and oxidant are added to perform oxidation reaction with urea, and then the urea is removed by biological treatment using biological treatment equipment.
In the patent CN103168006A, "ultrapure water manufacturing method", raw water is heated first, urea is decomposed by the two-stage biological treatment device, and then microorganisms are prevented from entering water by the bacteria separation device.
The utility model CN106029579A method for removing urea from water comprises heating raw water, adding nitrite ions into water, and removing urea with cation exchange resin.
The prior technical scheme has the following defects:
1. the reverse osmosis membrane process cannot effectively remove urea;
2. the biological method is adopted to remove urea, the volume of a biological reaction tank is large, the occupied area is large, the construction cost is increased, in addition, the microorganism is required to be domesticated, a nitrogen source required by the microorganism is added, the microbial biomass is obviously increased in effluent, and obviously, the microbial method is not suitable for large-scale industrial application;
3. the heat exchanger is adopted to heat the raw water, so that the energy consumption is high and the operating cost is high;
4. various chemical substances are added, which is not beneficial to the treatment of the subsequent pure water process.
Therefore, in order to solve the above technical problems, it is necessary to provide a treatment method which is high in urea degradation efficiency, environment-friendly, simple to operate, and convenient for industrial large-scale popularization and application.
The ultraviolet advanced oxidation technology generally activates an oxidant in water through ultraviolet rays to generate hydroxyl free radicals OH and sulfate free radicals SO with extremely strong oxidizability 4 - Conversion of organic matter into small-molecule organic matter, or mineralization into CO 2 And H 2 O, hydrogen peroxide H as common oxidant 2 O 2 Ozone O 3 Peroxyacetic acid, persulfates, and the like. The ultraviolet advanced oxidation technology has the advantages of high efficiency, universality, small secondary pollution and the like which are highlighted by researchers.
Currently, the most widely used ultraviolet treatment systems are low pressure, high intensity ultraviolet lamps and medium pressure ultraviolet lamps. The former mainly emits 254nm monochromatic light, and the latter emits a continuous spectrum of 200-300 nm. Compared with a low-pressure high-strength ultraviolet lamp, the medium-pressure ultraviolet lamp has stronger advantage in degrading organic matters. In addition, the medium-pressure ultraviolet lamp has the advantages of wide spectrum range, higher power, small volume of the required reactor, small number of lamp tubes, small occupied area and the like when the same water quantity is treated to achieve the same effect.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a reaction condition is mild, to organic matter and urea degradation efficient, no secondary pollution, operation reliable, reduce investment and fortune dimension cost, high-efficient safety, realize the ultrapure water treatment process system of city reclaimed water preparation that the modularization was used easily.
In order to achieve the above object, the present invention provides the following technical solutions:
the utility model discloses a city reclaimed water preparation ultrapure water treatment process system, this process systems includes:
a pre-treatment system, a fabrication system downstream of the pre-treatment system process, and a polishing system downstream of the fabrication system process;
the pretreatment system comprises a raw water tank for storing raw water, and the pretreatment system is used for pretreating the raw water in the raw water tank;
the preparation system receives and processes the water produced after the pretreatment of the pretreatment system, and the water produced after the treatment of the preparation system enters the polishing system to prepare ultrapure water;
the ultrapure water is stored in an ultrapure water tank.
Further, the pretreatment system sequentially comprises the following steps according to the process flow:
the device comprises a flocculation sedimentation tank, a multi-medium filter, a filtering water tank, an advanced oxidation device and an activated carbon filter;
the flocculation sedimentation tank is connected with the raw water tank;
the advanced oxidation device is a medium-pressure ultraviolet reactor, and a medium-pressure ultraviolet lamp tube is arranged in the advanced oxidation device;
the emission spectrum of the medium-voltage ultraviolet lamp tube is 200-300 nm;
the irradiation dose of the medium-pressure ultraviolet lamp tube is 50mJ/cm 2 ~300mJ/cm 2
Further, an oxidant and HCl or NaOH are added into the pipeline before the effluent of the filtering water tank enters the advanced oxidation device;
preferably, the oxidant is added into the pipeline as H 2 O 2 、O 3 Peroxyacetic acid, peroxymonosulfate, persulfate, chloramine, sodium hypochlorite, and the like;
the adding amount of the oxidant added into the pipeline in front of the advanced oxidation device is 1-30 mg/L;
more preferably, H is added into the pipeline simultaneously 2 O 2 And O 3
H is simultaneously added into the pipeline in front of the advanced oxidation device 2 O 2 And O 3 The total adding amount of the active ingredients is 1-20 mg/L;
the activated carbon filter removes excessive oxidant added into the advanced oxidation device;
the water inlet temperature of the advanced oxidation device is room temperature;
the pH of the inlet water entering the advanced oxidation device is 5-9;
preferably, the pH value of inlet water entering the advanced oxidation device is 8-9;
and an online oxidant concentration detector is arranged on the rear pipeline of the activated carbon filter.
Further, the manufacturing system sequentially comprises the following steps according to the process flow:
the system comprises a cation exchange tower, a decarbonization tower, an anion exchange tower, a DI water tank, a cartridge filter, a reverse osmosis device, an RO water tank, a urea degradation device, a mixed bed filter, a first degassing membrane and a ultrapure water tank;
the urea degradation device is a medium-pressure vacuum ultraviolet reactor, and a medium-pressure vacuum ultraviolet lamp tube is arranged in the urea degradation device;
the emission spectrum of the medium-pressure vacuum ultraviolet lamp tube is 185-300 nm;
the irradiation dose of the medium-pressure vacuum ultraviolet lamp tube is 10mJ/cm 2 ~200mJ/cm 2
Further, the outlet water of the RO water tank is pressurized by a water pump and enters a pipeline before the urea degradation device, and a proper amount of oxidant is added into the pipeline;
preferably, the oxidant added into the pipeline is H 2 O 2 、O 3 Peroxyacetic acid, peroxymonosulfate, persulfate, chloramine, sodium hypochlorite, and the like;
more preferably, the oxidant is added into the pipeline as H 2 O 2
Adding 1-20 mg/L of oxidant into the pipeline in front of the urea degradation device;
an online oxidant concentration detector is arranged on a rear pipeline of the urea degradation device;
the water inlet temperature of the urea degradation device is room temperature;
and the pH value of inlet water entering the urea degradation device is 5-9.
In the technical scheme, the utility model provides a pair of ultrapure water treatment process systems is prepared to city reclaimed water has following beneficial effect:
1) organic matters are oxidized in the advanced oxidation device and then adsorbed by activated carbon particles, so that the degradation rate of the organic matters is more than 95 percent, the organic matter load of a subsequent reverse osmosis membrane can be reduced, and the cleaning period of the reverse osmosis membrane is prolonged; the advanced oxidation device has good effect of inactivating microorganisms in water, and disinfectants such as sodium hypochlorite and the like do not need to be added in front of the multi-media filter, so that a medicament adding device and the operating cost are saved;
2) adding H into the advanced oxidation device at the same time 2 O 2 And O 3 Compared with the independent addition of H 2 O 2 Or O 3 The adding amount of the oxidant can be reduced, and the operation cost is reduced;
3) using oxidizing agents, e.g. H 2 O 2 、O 3 The peroxyacetic acid and the like have no secondary pollution to treated water, are cheap and easily obtained, are non-toxic and harmless and are convenient to use;
4) the process flow of the conventional pretreatment is simplified, the types of process equipment are reduced, the occupied area is saved, and the equipment investment and the operation cost are saved;
5) the urea degradation device adopts a medium-pressure vacuum ultraviolet reactor, the ultraviolet spectrum range is wider, photons have higher energy, urea can be degraded more efficiently, the content of the urea in the effluent is less than 1 microgram/L, and the index is superior to the requirement of ultrapure water for the process;
6) free radicals generated in the advanced oxidation device can oxidize macromolecular organic matters into micromolecular organic matters which are easier to be absorbed by activated carbon particles, and the activated carbon particles can remove excessive oxidant, so that the advanced oxidation device is arranged between a filter water tank and an activated carbon filter in the traditional ultrapure water treatment process.
The reverse osmosis membrane can intercept most organic matters except a small part of urea molecules, so that the urea degradation device is arranged behind the reverse osmosis membrane to degrade urea more specifically.
The utility model discloses set up advanced oxidation unit and urea degradation device ingeniously in the ultrapure water processing system of current mainstream, agree with the ability reinforce with current ultrapure water treatment process, can upgrade the transformation to the pure water station through existing condition, the industrialization of being convenient for is promoted and is applied on a large scale.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings can be obtained by those skilled in the art according to these drawings.
Fig. 1 is a flow chart of a treatment process system for preparing ultrapure water from city reclaimed water according to an embodiment of the present invention.
Description of reference numerals:
1. a raw water tank; 2. a flocculation sedimentation tank; 3. a multi-media filter; 4. a filtering water tank; 5. an advanced oxidation unit; 6. an activated carbon filter; 7. a cation exchange column; 8. a decarbonizing tower; 9. an anion exchange column; 10. a DI water tank; 11. a cartridge filter; 12 a reverse osmosis unit; 13. an RO water tank; 14. a urea degradation unit; 15. mixing the bed; 16. a mixed bed filter; 17. a first degassing membrane; 18. an ultra pure water tank; 19. a TOC degradation unit; 20. polishing the mixed bed; 21. a second degassing membrane; 22. an ultrafiltration device; 23. the point of use.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings.
As shown in fig. 1;
the embodiment discloses a treatment process method for preparing ultrapure water from urban reclaimed water, which mainly comprises the following steps:
s1, pretreating raw water in the raw water tank 1, and pretreating the raw water through a pretreatment system;
s2, the pretreated produced water enters a preparation system, and the produced water is obtained through treatment of the preparation system;
and S3, the produced water obtained by the manufacturing system enters a polishing system, and ultrapure water is prepared by the treatment of the polishing system.
Wherein, the step S1 mainly includes:
s101, enabling urban reclaimed water to enter a raw water tank 1, enabling water discharged from the raw water tank 1 to enter a flocculation sedimentation tank 2, and adding a coagulant and a coagulant aid into a pipeline before the water enters the flocculation sedimentation tank 2;
s102, enabling the effluent of the flocculation sedimentation tank 2 to enter a multi-media filter 3, and adding a coagulant into a pipeline before the water enters the multi-media filter 3;
s103, water enters a filtering water tank 4 after passing through a multi-media filter 3;
s104, pressurizing the outlet water of the filter water tank 4 by a water pump, feeding the outlet water into the advanced oxidation device 5, and adding an oxidant and HCl or NaOH into a pipeline before the outlet water of the water tank enters the advanced oxidation device 5;
and S105, enabling outlet water of the advanced oxidation device 5 to enter an activated carbon filter 6.
Wherein, the step S2 mainly includes:
s201, enabling effluent of the activated carbon filter 6 to enter a cation exchange tower 7;
s202, enabling effluent of the cation exchange tower 7 to enter a decarbonizing tower 8;
s203, enabling effluent of the decarbonizing tower 8 to enter an anion exchange tower 9;
s204, water enters the DI water tank 10 after passing through the anion exchange tower 9;
s205, pressurizing outlet water of the DI water tank 10 by a water pump to enter a cartridge filter 11;
s206, enabling the effluent of the cartridge filter 11 to enter a reverse osmosis device 12;
s207, enabling the water discharged from the reverse osmosis device 12 to enter an RO water tank 13;
s208, pressurizing the effluent of the RO water tank 13 by a water pump, feeding the effluent into the urea degradation device 14, and adding an oxidant into the pipeline before the effluent enters the urea degradation device 14;
s209, enabling the effluent of the urea degradation device 14 to enter a mixed bed 15;
s210, enabling the effluent of the mixed bed 15 to enter a mixed bed filter 16;
s211, filtering the effluent by the mixed bed filter 16, and enabling the effluent to enter a first degassing membrane 17;
s212, the effluent of the first degassing membrane 17 enters the ultrapure water tank 18.
Wherein, the step S3 mainly includes:
s301, pressurizing the effluent of the ultrapure water tank 18 by a water pump, and enabling the effluent to enter a TOC degradation device 19;
s302, enabling the effluent of the TOC degradation device 19 to enter a polishing mixed bed 20;
s303, allowing water to enter a second degassing membrane 21 after passing through the polishing mixed bed 20;
s304, enabling effluent of the second degassing membrane 21 to enter an ultrafiltration device 22;
s305, the water filtered by the ultrafiltration device 22 is supplied to the use point 23, and the use point 23 is connected with the ultrapure water tank 18 through a circulating pipeline.
The ultrapure water treatment process system for urban reclaimed water preparation of this embodiment includes:
a pre-treatment system, a fabrication system downstream of the pre-treatment system process, and a polishing system downstream of the fabrication system process;
the pretreatment system comprises a raw water tank 1 for storing raw water, and is used for pretreating the raw water in the raw water tank 1;
the preparation system receives and processes the water produced after the pretreatment of the pretreatment system, and the water produced after the treatment of the preparation system enters the polishing system to prepare ultrapure water;
ultrapure water is stored in the ultrapure water tank 18.
Wherein, pretreatment system in this embodiment includes according to the process flow in proper order:
a flocculation sedimentation tank 2, a multi-media filter 3, a filtering water tank 4, an advanced oxidation device 5 and an activated carbon filter 6;
the flocculation sedimentation tank 2 is connected with the raw water tank 1;
specifically, the embodiment discloses a treatment process system for preparing ultrapure water from municipal reclaimed water, which is sequentially divided into a pretreatment system, a preparation system and a polishing system according to a process flow; the polishing system is then connected to an ultrapure water point of use 23 and, at point of use 23, to the ultrapure water tank 18 with a circulation line.
The system of this example uses a pretreatment system to pretreat raw water, a production system to treat produced water pretreated by the pretreatment system, and a polishing system to treat produced water produced by the production system and produce ultrapure water.
It is preferable that:
the advanced oxidation device 5 is a medium-pressure ultraviolet reactor, and a medium-pressure ultraviolet lamp tube is arranged in the advanced oxidation device;
the emission spectrum of the medium-voltage ultraviolet lamp tube is 200-300 nm, and the irradiation dose is 50mJ/cm 2 ~300mJ/cm 2
Adding an oxidant and HCl or NaOH into the pipeline before the effluent of the filtering water tank 4 enters the advanced oxidation device 5;
adding an oxidant H into the pipeline 2 O 2 、O 3 Peroxyacetic acid, peroxymonosulfate, persulfate, chloramine, sodium hypochlorite, and the like;
the adding amount of an oxidant added into the pipeline in front of the advanced oxidation device 5 is 1-30 mg/L;
more preferably, H is added into the pipeline simultaneously 2 O 2 And O 3
H is simultaneously added into the pipeline in front of the advanced oxidation device 5 2 O 2 And O 3 The total adding amount of (2) is 1-20 mg/L;
the activated carbon filter 6 removes the excessive oxidant added in the advanced oxidation device 5;
the water inlet temperature of the advanced oxidation device 5 is room temperature;
the pH value of the inlet water entering the advanced oxidation device 5 is 5-9;
preferably, the pH value of the inlet water entering the advanced oxidation device 5 is 8-9.
An online oxidant concentration detector is arranged on a pipeline behind the activated carbon filter 6.
Preferably, the system manufactured in this embodiment sequentially includes, according to a process flow:
a cation exchange tower 7, a decarbonization tower 8, an anion exchange tower 9, a DI water tank 10, a cartridge filter 11, a reverse osmosis device 12, an RO water tank 13, a urea degradation device 14, a mixed bed 15, a mixed bed filter 16, a first degassing membrane 17 and the ultrapure water tank 18;
the urea degradation device 14 is a medium-pressure vacuum ultraviolet reactor, and a vacuum ultraviolet lamp tube is arranged in the urea degradation device;
the emission spectrum of the medium-pressure vacuum ultraviolet lamp tube is 185-300 nm;
the irradiation dose of the medium-pressure vacuum ultraviolet lamp tube is 10mJ/cm 2 ~200mJ/cm 2
Wherein, the water discharged from the RO water tank 13 is pressurized by a water pump and enters the urea degradation device 14, and a proper amount of oxidant is added into the pipeline;
preferably, the oxidant is added into the pipeline as H 2 O 2 、O 3 Peroxyacetic acid, peroxymonosulfate, persulfate, chloramine, sodium hypochlorite, and the like;
more preferably, the oxidant is added into the pipeline as H 2 O 2
The adding amount of an oxidant added into the pipeline in front of the urea degradation device 14 is 1-20 mg/L;
an online oxidant concentration detector is arranged on a rear pipeline of the urea degradation device 14;
the inlet water temperature of the urea degradation device 14 is room temperature;
the pH value of the inlet water entering the urea degradation device 14 is 5-9.
The specific steps of ultrapure water preparation of the process system disclosed in this embodiment are as follows: urban recycled water enters a raw water tank 1, raw water in the raw water tank 1 enters a flocculation sedimentation tank 2, a coagulant and a coagulant aid are added into a pipeline before the water enters the flocculation sedimentation tank 2, effluent from the flocculation sedimentation tank 2 enters a multi-media filter 3, the coagulant is added into the pipeline before the water enters the multi-media filter 3, the water enters a filter water tank 4 after passing through the multi-media filter 3, effluent from the filter water tank 4 enters a high-grade oxidation device 5 after being pressurized by a water pump, an oxidant and HCl or NaOH are added into the pipeline before the effluent from the filter water tank 4 enters the high-grade oxidation device 5, and the water enters an activated carbon filter 6 after passing through the high-grade oxidation device 5; the effluent of the activated carbon filter 6 enters a cation exchange tower 7, the effluent of the cation exchange tower 7 enters a decarbonization tower 8, the effluent of the decarbonization tower 8 enters an anion exchange tower 9, the effluent of the ion exchange tower 9 enters a DI water tank 10, the effluent of the DI water tank 10 enters a cartridge filter 11 through a water pump under pressure, the effluent of the cartridge filter 11 enters a reverse osmosis device 12, the effluent of the reverse osmosis device 12 enters an RO water tank 13, the effluent of the RO water tank 13 enters a urea degradation device 14 through a water pump under pressure, an oxidant is added into a pipeline before the effluent enters the urea degradation device 14, the effluent of the urea degradation device 14 enters a mixed bed 15, the effluent of the mixed bed 15 enters a mixed bed filter 16, the effluent after being filtered by the mixed bed filter 16 enters a first degassing membrane 17, and the effluent of the first degassing membrane 17 enters a super pure water tank 18; the effluent of the ultrapure water tank 18 enters a TOC degradation device 19 through pressurization of a water pump, the effluent of the TOC degradation device 19 enters a polishing mixed bed 20, the water enters a second degassing membrane 21 after passing through the polishing mixed bed 20, the effluent of the second degassing membrane 21 enters an ultrafiltration device 22, and the water filtered by the ultrafiltration device 22 is supplied to an ultrapure water use point 23. The extra amount of ultrapure water circulated through the ultrapure water use point 23 is returned from the circulation line to the ultrapure water tank 18.
Based on the above embodiment:
the city regenerated water enters the raw water tank 1, and the effluent of the raw water tank 1 enters the flocculation sedimentation tank 2 through the pressurization of a water pump. Coagulant and coagulant aid are added into the pipeline before the water enters the flocculation sedimentation tank 2. The flocculation sedimentation tank 2 integrates mixing and flocculation, and the medicament is added to enable the suspended particles in the water to gather and grow to form floccules, thereby accelerating the coagulation of the particles and achieving the aim of solid-liquid separation. The effluent of the flocculation sedimentation tank 2 enters a multi-media filter 3, and the multi-media filter 3 intercepts suspended impurities in the water and reduces the turbidity of the water by utilizing the adsorption of anthracite and quartz sand filter materials and the action of a mechanical screen. Coagulant is added into the pipeline before the water enters the multi-media filter 3. The coagulant can form larger particles from suspended matters in water through adsorption and neutralization so as to be effectively intercepted by the multi-medium filter 3 and further reduce the turbidity of the water. Typically the multi-media filter 3 has an effluent turbidity of < 0.1 NTU. The turbidity of the effluent of the multi-media filter is reduced, and simultaneously, the contents of organic matters, ammonia nitrogen, heavy metals, salts and the like in the water are also reduced to a certain extent. Water passes throughAnd the water discharged from the filtering water tank 4 enters the advanced oxidation device 5 after being pressurized by a water pump. The advanced oxidation device 5 is a medium-pressure ultraviolet reactor, a medium-pressure ultraviolet lamp tube is arranged in the medium-pressure ultraviolet reactor, and the irradiation dose of the lamp tube is 50mJ/cm 2 ~300mJ/cm 2 . And adding an oxidant and HCl or NaOH into the pipeline before the effluent of the filtering water tank 4 enters the advanced oxidation device 5. Adding an oxidant H into the pipeline 2 O 2 、O 3 The oxidant is 1-30 mg/L. Preferably, H is simultaneously added into the pipeline 2 O 2 And O 3 The total adding amount is 1-20 mg/L. The water inlet temperature of the advanced oxidation device is room temperature, and the pH value is 5-9; preferably, the pH is 8-9. Irradiating oxidant with medium-pressure ultraviolet lamp in advanced oxidation device 5 to generate a large amount of free radicals with strong oxidizing property, rapidly reacting with organic matter, oxidizing partial organic matter into micromolecular organic matter, mineralizing partial organic matter into CO 2 And H 2 And O. The free radicals have high-efficiency and rapid inactivation to microorganisms, and the number of microorganisms in the effluent of the advanced oxidation device 5 is very small. After passing through the advanced oxidation device 5, water enters an activated carbon filter 6, filler of the activated carbon filter 6 is activated carbon particles, the activated carbon particles can adsorb small molecular organic matters oxidized by free radicals, and the activated carbon filter 6 has a quenching function and can remove excessive oxide added from the advanced oxidation device 5, residual chlorine in the water and the like. Usually, the residual chlorine of the effluent of the activated carbon filter 6<0.1mg/L,H 2 O 2 <0.05mg/L,O 3 <0.05 mg/L. An on-line oxidant concentration detector is arranged on a pipeline behind the active carbon filter 6, and when the oxidant concentration exceeds a certain numerical value, the adding amount of the oxidant is reduced. The treatment process before the activated carbon filter 6 is a pretreatment system.
The water enters the preparation system after passing through the pretreatment system. The effluent of the activated carbon filter 6 enters a cation exchange column 7. The packing in the cation exchange column 7 is strong acid cation resin which can remove Na in water + 、K + 、Ca 2+ And Mg 2+ Conversion of isocationic acid to H + And removing the cations.The effluent of the cation exchange column 7 enters a decarbonization column 8. H in the water after the water passes through the cation exchange column 7 + With HCO 3 - Combined to CO 2 . The decarbonizing tower 8 is filled with polyhedral hollow spheres, so that the contact area of water and air is increased, and CO is generated 2 Is removed. The water after passing through the decarbonizing column 8 enters an anion exchange column 9. The filler in the anion exchange tower 9 is strong base anion resin used for removing Cl in water - 、SO 4 2- 、HCO 3 - 、CO 3 2- And (3) plasma anions. The effluent of the anion exchange tower 9 enters a DI water tank 10, the effluent of the DI water tank 10 enters a cartridge filter 11 through the pressurization of a water pump, and the effluent enters a reverse osmosis device 12 after being filtered by the cartridge filter 11. In order to prevent the resin of the ion exchange tower 9 from leaking into the reverse osmosis device 12, the cartridge filter 11 has a filter element with the diameter of 5 μm, and can remove the resin with the particle diameter of more than 5 μm and impurity particles. The reverse osmosis device 12 can remove total organic carbon, silica, fine particles, bacterial colonies, dissolved salts, and the like in water. The water from the reverse osmosis unit 12 enters the RO water tank 13. The reverse osmosis device 12 has a poor effect on removing urea, and therefore a urea degradation device 14 is provided after the RO water tank 13. The water discharged from the RO water tank 13 is pressurized by a water pump and enters the urea degradation device 14. The urea degradation device 14 is a medium-pressure vacuum ultraviolet reactor, and a medium-pressure vacuum ultraviolet lamp tube for generating 185-300nm wavelength is arranged in the medium-pressure vacuum ultraviolet reactor. Adding a proper amount of oxidant H into the pipeline before entering the urea degradation device 14 2 O 2 、O 3 Peroxyacetic acid, peroxymonosulfate, persulfate, chloramine, sodium hypochlorite and the like, wherein the adding amount of the oxidant is 1-20 mg/L. Preferably, the oxidant is added H 2 O 2 . The water inlet temperature of the urea degradation device is room temperature, and the pH value is 5-9. The vacuum ultraviolet photons have more energy, the catalytic oxidant generates more free radicals, urea and trace organic matters in water can be efficiently degraded, and most of urea molecules and organic matters are mineralized into CO 2 And H 2 And O. An on-line oxidant concentration detector is arranged on a pipeline behind the urea degradation device 14. The water passing through the urea degradation unit 14 enters the mixed bed 15. The filler in the mixed bed 15 is strong acid H type and strong base OH type resin, and can further remove anions and cations in water. In generalThe water outlet resistivity of the mixed bed 15 can be stabilized above 17.5M omega cm. The effluent of the mixed bed 15 enters a mixed bed filter 16, and the effluent of the mixed bed filter 16 enters a first degassing membrane 17. In order to prevent the resin leakage of the mixed bed 15 from affecting the first degassing membrane 17, the mixed bed filter 16 has a filter element of 1 μm, and can remove resin and impurity particles with a particle size of more than 1 μm. The first degassing membrane 17 is operated in a vacuum mode to remove the dissolved gases and volatile substances in the water. The effluent of the first degassing membrane 17 enters a ultrapure water tank 18. The ultra pure water tank 18 is sealed with a nitrogen seal to prevent air from entering the ultra pure water. The treatment system before the ultrapure water tank 18 is a production system, and the produced system effluent enters the polishing system.
The effluent of the ultrapure water tank 18 enters a TOC degradation device 19 through pressurization of a water pump. The TOC degradation device 19 is a vacuum ultraviolet reactor, and a low-pressure high-strength vacuum ultraviolet lamp tube for generating 185nm and 254nm wavelengths is arranged in the reactor. The OH generated by the ultraviolet light activated water can further decompose trace organic matters in the water. The effluent of the TOC degradation device 19 enters a polishing mixed bed 20, and the polishing mixed bed 20 can further remove trace anions and cations in the pure water. The specific resistance of the water discharged from the polishing mixed bed 20 is more than or equal to 18M omega cm. The water from the polishing mixed bed 20 enters a second degassing membrane 21 to further remove trace gases in the water. The effluent of the second degassing membrane 21 enters a terminal ultrafiltration device 22. Generally, the amount of particles generally larger than 0.05 μm in the filtered water of the terminal ultrafiltration device 22 is less than 200 particles/L. The water filtered by the ultrafiltration unit 22 is supplied to an ultrapure water use point 23. The point of use 23 is connected to the ultrapure water tank 18 via a circulation line. In order to ensure the quality of the ultrapure water, an additional amount of ultrapure water, which is usually circulated in an amount of about 50% of the amount of produced water, is returned to the ultrapure water tank 18 through a pipe.
The first embodiment is as follows:
the amount of ultrapure water used in a 12-inch chip manufacturing plant was 105m 3 Per hour, run 24 hours per day. The raw water is urban reclaimed water, and the water quality indexes are as follows:
Figure BDA0003585450130000121
Figure BDA0003585450130000131
the first embodiment comprises the following steps:
the urban recycled water enters a flocculation sedimentation tank 2 from a raw water tank 1 through a water pump under pressure, and coagulant polyaluminium chloride and coagulant aid polyacrylamide are added into a pipeline before the raw water enters the flocculation sedimentation tank 2. The effluent of the flocculation sedimentation tank 2 enters a multi-media filter 3. Before the effluent enters the multi-media filter 3, coagulant polyaluminium chloride is added into the pipeline, and the adding amount is 12 mg/L. The turbidity of the water output from the multi-medium filter 3 is less than 0.1 NTU. The filtered water enters the filter tank 4. The outlet water of the filtering water tank 4 is pressurized by a water pump and enters the advanced oxidation device 5. The advanced oxidation device 5 is a medium-pressure ultraviolet reactor, a medium-pressure ultraviolet lamp tube is arranged in the medium-pressure ultraviolet reactor, and the ultraviolet dose is 220mJ/cm 2 . H is added into the pipeline before the water enters the advanced oxidation device 5 2 O 2 、O 3 And NaOH, H 2 O 2 The dosage is 12mg/L, O 3 The dosage is 7mg/L, and the pH is 8.5. The effluent of the advanced oxidation device 5 enters an activated carbon filter 6. The filter material of the active carbon filter 6 is coconut shell active carbon particles, and the iodine adsorption value of the active carbon is more than 1000 mg/g. The TOC of the effluent of the activated carbon filter 6 is 0.4mg/L, and the residual chlorine<0.1mg/L,H 2 O 2 <0.01mg/L,O 3 <0.01mg/L。
The effluent of the activated carbon filter 6 enters a preparation system and sequentially passes through a cation exchange tower 7, a decarbonization tower 8, an anion exchange tower 9, a DI water tank 10, a cartridge filter 11, a reverse osmosis device 12, an RO water tank 13 and a urea degradation device 14. The urea degradation device 14 is a medium-pressure vacuum ultraviolet reactor, a medium-pressure vacuum ultraviolet lamp tube is arranged in the urea degradation device, and the ultraviolet dose is 75mJ/cm 2 . H is added into the pipeline before the water enters the urea degradation device 14 2 O 2 The dosage is 4 mg/L. Urea content at outlet of urea degradation device 14<1. mu.g/L. The effluent of the urea degradation device 14 enters a mixed bed 15, and the resistivity of the effluent of the mixed bed 15 is 17.6M omega cm. The effluent of the mixed bed 15 passes through the mixed bed filter 16 and the first degassing membrane 17 in sequence, and the effluent of the first degassing membrane 17 enters the ultrapure water tank 18.
The effluent of the ultra-pure water tank 18 enters a polishing system and sequentially passes through a TOC degradation device 19, a polishing mixed bed 20, a second degassing membrane 21 and an ultrafiltration device 22. The effluent from the ultrafiltration unit 22 is supplied to a point of use 23 for process ultrapure water. The extra amount of ultrapure water is circulated through the use point 23 and returned to the ultrapure water tank 18.
The water quality indexes of the ultrapure water after the implementation of the embodiment are as follows:
Figure BDA0003585450130000132
Figure BDA0003585450130000141
example two:
the water consumption of ultrapure water in a certain gallium nitride semiconductor manufacturing factory is 75m 3 And/h, running for 24h every day. The raw water is urban reclaimed water, and the water quality indexes are as follows:
Figure BDA0003585450130000142
the second embodiment comprises the following steps:
the urban reclaimed water enters a flocculation sedimentation tank 2 from a raw water tank 1 through a water pump under pressure, and coagulant polyaluminium chloride and coagulant aid polyacrylamide are added into a pipeline before the raw water enters the flocculation sedimentation tank 2. The adding amount of the polyaluminium chloride and the polyacrylamide is respectively 26mg/L and 18mg/L, and the effluent of the flocculation sedimentation tank 2 enters a multi-medium filter 3. Before the effluent enters the multi-media filter 3, coagulant polyaluminium chloride is added into the pipeline, and the adding amount is 10 mg/L. The turbidity of the water output from the multi-medium filter 3 is less than 0.1 NTU. The filtered water enters the filter tank 4. The outlet water of the filtering water tank 4 is pressurized by a water pump and enters the advanced oxidation device 5. The advanced oxidation device 5 is a medium-pressure ultraviolet reactor, a medium-pressure ultraviolet lamp tube is arranged in the medium-pressure ultraviolet reactor, and the ultraviolet dose is 185mJ/cm 2 . H is added into the pipeline before the water enters the advanced oxidation device 5 2 O 2 、O 3 And NaOH, H 2 O 2 The dosage is 16mg/L, O 3 The dosage is 6mg/L, and the pH is 8.7. The effluent of the advanced oxidation device 5 enters an activated carbon filter 6. The filter material of the active carbon filter 6 is coconut shell active carbon particles, and the iodine adsorption value of the active carbon is more than 1000 mg/g. The TOC of the effluent of the activated carbon filter 6 is 0.3mg/L, and the residual chlorine<0.1mg/L,H 2 O 2 <0.01mg/L,O 3 <0.01mg/L。
The effluent of the activated carbon filter 6 enters a preparation system and sequentially passes through a cation exchange tower 7, a decarbonization tower 8, an anion exchange tower 9, a DI water tank 10, a cartridge filter 11, a reverse osmosis device 12, an RO water tank 13 and a urea degradation device 14. The urea degradation device 14 is a medium-pressure vacuum ultraviolet reactor, a medium-pressure vacuum ultraviolet lamp tube is arranged in the urea degradation device, and the ultraviolet dose is 66mJ/cm 2 . H is added into the pipeline before the water enters the urea degradation device 14 2 O 2 The dosage is 6 mg/L. Urea degradation unit 14 effluent urea content<1. mu.g/L. The effluent of the urea degradation device 14 enters a mixed bed 15, and the resistivity of the effluent of the mixed bed 15 is 17.8M omega cm. The effluent of the mixed bed 15 passes through the mixed bed filter 16 and the first degassing membrane 17 in sequence, and the effluent of the first degassing membrane 17 enters the ultrapure water tank 18.
The effluent of the ultra-pure water tank 18 enters a polishing system and sequentially passes through a TOC degradation device 19, a polishing mixed bed 20, a second degassing membrane 21 and an ultrafiltration device 22. The effluent from the ultrafiltration unit 22 is supplied to a point of use 23 for process ultrapure water. The extra amount of ultrapure water is circulated through the use point 23 and returned to the ultrapure water tank 18.
The water quality index of ultrapure water in the second embodiment is as follows:
item Numerical value
Resistivity (25 ℃), M omega cm ≥18.1
Total organic carbon,. mu.g/L <1
Dissolved oxygen, μ g/L <15
>0.1 μm particle, one/L <1
Number of bacteria/100 mL <2
Total SiO 2 ,μg/L <0.1
Urea, μ g/L <1
In the technical scheme, the utility model provides a pair of ultrapure water processing technology system of city recycled water preparation has following beneficial effect:
1) organic matters are oxidized in the advanced oxidation device and then adsorbed by activated carbon particles, so that the degradation rate of the organic matters is more than 95 percent, the organic matter load of a subsequent reverse osmosis membrane can be reduced, and the cleaning period of the reverse osmosis membrane is prolonged; the advanced oxidation device has good effect of inactivating microorganisms in water, and disinfectants such as sodium hypochlorite and the like do not need to be added in front of the multi-media filter, so that a medicament adding device and the operating cost are saved;
2) adding H into the advanced oxidation device at the same time 2 O 2 And O 3 Compared with the independent addition of H 2 O 2 Or O 3 The adding amount of the oxidant can be reduced, and the operation cost is reduced;
3) using oxidizing agents, e.g. H 2 O 2 、O 3 The peroxyacetic acid and the like have no secondary pollution to treated water and are cheapEasy to obtain, non-toxic and harmless, and convenient to use;
4) the process flow of the conventional pretreatment is simplified, the types of process equipment are reduced, the occupied area is saved, and the equipment investment and the operation cost are saved;
5) the urea degradation device adopts a medium-pressure vacuum ultraviolet reactor, the ultraviolet spectrum range is wider, photons have higher energy, urea can be degraded more efficiently, the content of the effluent urea is less than 1 mug/L, and the index is superior to the requirement of the index of ultrapure water for the process;
6) free radicals generated in the advanced oxidation device can oxidize macromolecular organic matters into micromolecular organic matters which are easier to be absorbed by activated carbon particles, and the activated carbon particles can remove excessive oxidant, so that the advanced oxidation device is arranged between a filter water tank and an activated carbon filter pool in the traditional ultrapure water treatment process.
The reverse osmosis membrane can intercept most organic matters except a small part of urea molecules, so that the urea degradation device is arranged behind the reverse osmosis membrane to degrade urea more specifically.
The utility model discloses set up advanced oxidation unit and urea degradation device ingeniously in the ultrapure water processing system of current mainstream, agree with the ability reinforce with current ultrapure water treatment process, can upgrade the transformation to the pure water station through current condition, the industrialization of being convenient for is promoted and is applied on a large scale.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the present invention. Accordingly, the drawings and description are illustrative in nature and should not be construed as limiting the scope of the invention.

Claims (5)

1. A treatment process system for preparing ultrapure water by using city reclaimed water is characterized by comprising the following steps:
a pre-treatment system, a fabrication system downstream of the pre-treatment system process, and a polishing system downstream of the fabrication system process;
the pretreatment system comprises a raw water tank (1) for storing raw water, and is used for pretreating the raw water in the raw water tank (1);
the preparation system receives and processes the water produced after the pretreatment of the pretreatment system, and the water produced after the treatment of the preparation system enters the polishing system to prepare ultrapure water;
the ultrapure water is stored in an ultrapure water tank (18).
2. The treatment process system for preparing ultrapure water from municipal reclaimed water according to claim 1, wherein the pretreatment system comprises the following steps in sequence according to the process flow:
a flocculation sedimentation tank (2), a multi-medium filter (3), a filtering water tank (4), an advanced oxidation device (5) and an active carbon filter (6);
the flocculation sedimentation tank (2) is connected with the raw water tank (1);
the advanced oxidation device (5) is a medium-pressure ultraviolet reactor, and a medium-pressure ultraviolet lamp tube is arranged in the advanced oxidation device;
the emission spectrum of the medium-voltage ultraviolet lamp tube is 200-300 nm;
the irradiation dose of the medium-pressure ultraviolet lamp tube is 50mJ/cm 2 ~300mJ/cm 2
3. The treatment process system for preparing ultrapure water from municipal reclaimed water according to claim 2, wherein the effluent of the filtration water tank (4) enters the advanced oxidation device (5) and an oxidant, HCl or NaOH, is added into the pipeline;
the oxidant which is simultaneously added into the pipeline is H 2 O 2 And O 3
H is simultaneously added into a pipeline in front of the advanced oxidation device (5) 2 O 2 And O 3 The total adding amount of the active ingredients is 1-20 mg/L;
the activated carbon filter (6) removes the excessive oxidant added in the advanced oxidation device (5);
the water inlet temperature of the advanced oxidation device (5) is room temperature;
the pH value of the inlet water entering the advanced oxidation device (5) is 8-9;
an on-line oxidant concentration detector is arranged on a pipeline behind the active carbon filter (6).
4. The treatment process system for preparing ultrapure water from municipal reclaimed water according to claim 1, wherein the preparation system comprises the following steps in sequence according to the process flow:
a cation exchange tower (7), a decarbonization tower (8), an anion exchange tower (9), a DI water tank (10), a cartridge filter (11), a reverse osmosis device (12), an RO water tank (13), a urea degradation device (14), a mixed bed (15), a mixed bed filter (16), a first degassing membrane (17) and the ultrapure water tank (18);
the urea degradation device (14) is a medium-pressure vacuum ultraviolet reactor, and a medium-pressure vacuum ultraviolet lamp tube is arranged in the urea degradation device;
the emission spectrum of the medium-pressure vacuum ultraviolet lamp tube is 185-300 nm;
the irradiation dose of the medium-pressure vacuum ultraviolet lamp tube is 10mJ/cm 2 ~200mJ/cm 2
5. The treatment process system for preparing ultrapure water from municipal reclaimed water according to claim 4, wherein the outlet water of the RO water tank (13) is pressurized by a water pump and fed into a pipeline before the urea degradation device (14) with an oxidant;
adding an oxidant H into the pipeline 2 O 2
The adding amount of the oxidant added into the pipeline in front of the urea degradation device (14) is 1-20 mg/L;
an on-line oxidant concentration detector is arranged on a rear pipeline of the urea degradation device (14);
the water inlet temperature of the urea degradation device (14) is room temperature;
the pH value of the inlet water entering the urea degradation device (14) is 5-9.
CN202220812457.2U 2022-04-07 2022-04-07 Treatment process system for preparing ultrapure water from urban reclaimed water Active CN217479241U (en)

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