CN217476311U

CN217476311U - Main structure of semiconductor scribing machine

Info

Publication number: CN217476311U
Application number: CN202221147169.6U
Authority: CN
Inventors: 廖招军; 张智广; 于飞; 吴鹏飞; 征建高
Original assignee: Suzhou Teste Semiconductor Equipment Co ltd
Current assignee: Suzhou Teste Semiconductor Equipment Co ltd
Priority date: 2022-05-13
Filing date: 2022-05-13
Publication date: 2022-09-23
Anticipated expiration: 2032-05-13

Abstract

The application discloses semiconductor wafer dicing machine's major structure, including the main part body, the main part body includes: the marble platform is arranged on the scribing machine base; the marble base is longitudinally arranged on the upper surface of the marble platform; and locating marble platform one side and span the marble portal frame of marble base, the marble portal frame is by locating the marble stand of marble base both sides and connect both sides the marble crossbeam of marble stand is constituteed. The main part body of this application comprises marble platform, marble base and marble portal frame, and its single marble spare is not only convenient for carry, and the accurate grinding in surface of being convenient for moreover, polishing to and the linear guide and linear electric motor's of being convenient for installation is fixed.

Description

Main structure of semiconductor scribing machine

Technical Field

The application relates to the field of scribing machines, in particular to a main structure of a semiconductor scribing machine.

Background

The dicing saw, also called a wafer cutting machine, is mainly used for dicing semiconductor wafers, integrated circuits, QFNs, light emitting diodes, LED chips, solar cells, electronic substrates and the like, and is suitable for materials comprising silicon, quartz, aluminum oxide, ferric oxide, gallium arsenide, lithium niobate, sapphire, glass and the like. At present, the main body frame in the existing dicing saw generally adopts integrally formed marble or cast, however, no matter the marble or cast is adopted, the dicing saw is difficult to meet the requirements of processing and installation due to large volume, heavy weight, difficult carrying and low assembly surface processing precision.

SUMMERY OF THE UTILITY MODEL

An object of the application is to provide a major structure of a semiconductor dicing saw, which has the advantages of convenient carrying, processing and installation.

In order to achieve the above purpose, the present application provides the following technical solutions:

a main body structure of a semiconductor dicing saw, comprising a main body, the main body comprising:

the marble platform is arranged on the scribing machine base;

the marble base is longitudinally arranged on the upper surface of the marble platform; and the number of the first and second groups,

locate marble platform one side and span the marble portal frame of marble base, the marble portal frame is by locating the marble stand of marble base both sides and connection both sides the marble crossbeam of marble stand constitutes.

Realize above-mentioned technical scheme, the marble platform is used for bearing of marble base and marble portal frame, and the marble base is used for the assembly of vertical (Y axle direction) linear guide and linear electric motor, and the marble crossbeam on the marble portal frame is used for the assembly of horizontal (X axle direction) linear guide and linear electric motor, and marble base and marble crossbeam compare in the marble platform, and its quality is light, the accurate grinding in surface of being convenient for, the polishing to and linear guide and linear electric motor's installation and debugging.

As a preferred scheme of this application, the marble platform sets up to T type platform, the marble base is located the centre of T type platform, the marble stand is located the both sides of T type platform.

According to the technical scheme, the design of the T-shaped platform can reduce the weight of the marble platform on one hand, on the other hand, the marble base and the marble upright post can be conveniently installed, and the areas lacking on the two sides can be used for installing a wafer feeding mechanism, a wafer cleaning mechanism, a wafer discharging mechanism and the like, so that the whole size of the dicing saw is reduced.

As a preferred scheme of this application, the upper surface of T type platform is provided with the installation the groove of dodging and the installation of marble base the spacing groove of marble stand, the spacing groove is located dodge the both sides in groove, it is provided with the connection to dodge one side in groove the constant head tank of marble base.

Realize above-mentioned technical scheme to the installation location of marble stand and marble base is convenient for.

As an precedence scheme of this application, the upper surface of marble base is provided with the first assembly groove of installation linear electric motor and the first stopper of installation linear guide, first stopper is located the both sides in first assembly groove.

Realize above-mentioned technical scheme to in longitudinal linear electric motor of installation and linear guide on marble base.

As a preferred scheme of this application, the marble stand is established to reverse T type stand, the bottom of T type stand with the marble platform is connected, the top of T type stand with the marble crossbeam is connected.

Realize above-mentioned technical scheme, help increasing the intensity of marble stand on the one hand, on the other hand is so that the installation of marble stand and marble platform is fixed.

As an precedence scheme of this application, horizontal one side of marble crossbeam is provided with installation linear electric motor's second assembly groove, the both sides in second assembly groove are provided with installation linear guide's second stopper.

By the technical scheme, the transverse linear motor and the transverse linear guide rail can be conveniently mounted on the marble beam.

As a preferred scheme of this application, the marble crossbeam passes through screw locking in both sides the top of marble stand, the marble stand with the marble base passes through screw locking and is in the marble platform.

The technical scheme is realized, and the fixing device is used for fixing the main body structure.

The beneficial effect of this application is:

the application discloses semiconductor wafer scriber's major structure, including the main part body, the main part body includes: the marble platform is arranged on the scribing machine base; the marble base is longitudinally arranged on the upper surface of the marble platform; and locating marble platform one side and span the marble portal frame of marble base, the marble portal frame is by locating the marble stand of marble base both sides and connect both sides the marble crossbeam of marble stand is constituteed. The main part body of this application comprises marble platform, marble base and marble portal frame, and its single marble spare is not only convenient for carry, and the accurate grinding in surface of being convenient for moreover, polishing to and the linear guide and linear electric motor's of being convenient for installation is fixed.

Drawings

FIG. 1 is a schematic diagram of a structure to which the present application relates;

FIG. 2 is a schematic representation of a body to which the present application relates;

fig. 3 is a schematic view of a marble slab to which the present application relates.

In the figure: 1. a marble platform; 101. an avoidance groove; 102. a limiting groove; 103. positioning a groove; 2. a marble base; 201. a first fitting groove; 202. a first stopper; 203. a second assembly groove; 204. a second limiting block; 3. a marble portal frame; 301. a marble pillar; 302. and a marble beam.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Example (b):

the main body structure of the semiconductor scribing machine, referring to fig. 1 and 2, comprises a main body, wherein the main body comprises a marble platform 1 installed on a scribing machine base, a marble base 2 longitudinally installed on the upper surface of the marble platform 1, and a marble portal frame 3 installed on one side of the marble platform 1 and stretching across the marble base 2, and the marble portal frame 3 consists of marble upright columns 301 installed on two sides of the marble base 2 and marble beams 302 installed on the tops of the marble upright columns 301 on two sides. In the embodiment, the main structure of the marble has better shock absorption and wear resistance and operation stability; wherein, marble platform 1 is used for bearing of marble base 2 and marble portal frame 3, and marble base 1 is used for the assembly of the linear guide and linear motor of vertical (Y axle direction), and marble crossbeam 302 on the marble portal frame 3 is used for the assembly of the linear guide and linear motor of horizontal (X axle direction), and marble base 2 and marble crossbeam 302 compare in marble platform 1, and its quality is light, the accurate grinding in surface of being convenient for, the polishing to and linear guide and linear motor's installation and debugging.

Referring to fig. 2 and 3, the marble platform 1 is a T-shaped platform, while the marble base 2 is installed in the middle of the T-shaped platform and the marble pillars 301 are installed at both sides of the T-shaped platform. In this embodiment, the design of the T-shaped platform can be used to reduce the weight of the marble platform 1, and on the other hand, the marble base 2 and the marble upright 301 can be conveniently installed, and the areas lacking on both sides can be used to install a wafer loading mechanism, a wafer cleaning mechanism, a wafer unloading mechanism, etc. for reducing the overall size of the dicing saw.

Returning to fig. 2 and 3, the upper surface of the T-shaped platform is provided with an avoiding groove 101 for installing the marble base 2 and a limiting groove 102 for installing the marble upright 301, the limiting groove 102 is located on two sides of the avoiding groove 101, and one side of the avoiding groove 101 is provided with a positioning groove 103 for installing the marble base 2. In this embodiment, the design of the limiting groove 102 is convenient for the marble upright 301 to limit during assembly, the design of the avoiding groove 101 is used for avoiding the installation of the marble base 2 on one hand, and is used for avoiding the installation of internal parts and the storage of liquid on the other hand, and the design of the positioning groove 103 is used for positioning two sides of the marble base 2.

Referring to fig. 2, a first assembly groove 201 for installing a linear motor and a first limiting block 202 for installing a linear guide rail are formed in the upper surface of the marble base 2, and the first limiting block 202 is located on two sides of the first assembly groove 201. In this embodiment, it is convenient to mount a longitudinal linear motor and a linear guide on the marble base 2.

Returning to fig. 2, the marble pillar 301 is set as an inverted T-pillar, the bottom of the T-pillar is connected to the marble platform 1, and the top of the T-pillar is connected to the marble beam 302. In this embodiment, on the one hand, it is helpful to increase the strength of the marble pillar 301, and on the other hand, to facilitate the installation of the marble pillar 301 and the marble platform 1, screw holes are processed on both sides of the T-shaped pillar.

Returning to fig. 2 again, a second assembly groove 203 for installing a linear motor is formed in one lateral side of the marble beam 302, and second limit blocks 204 for installing linear guide rails are formed on two sides of the second assembly groove 203. In this embodiment, it is convenient to mount a transverse linear motor and linear guide on the marble beam 302.

The marble beams 302 are screwed to the tops of the marble posts 301 on both sides, and the marble posts 301 and the marble base 2 are screwed to the marble platform 1. In this embodiment, the marble beam 302 and the marble posts 301 on both sides are installed and positioned by the positioning posts, and the marble posts 301 and the marble base 2 can also be connected and positioned by the positioning posts. In other embodiments, the marble beams 302 and the marble columns 301 can be positioned by convex-concave positioning tables and positioning grooves, and the marble columns 301 and the marble base 2 can be positioned by convex-concave positioning tables and positioning grooves connected with the marble platform 1.

In this embodiment, the marble beam 302, the marble pillar 301, the marble base 2, and the marble platform 1 are provided with embedded screw copper posts, so that the components can be locked by screws.

In this embodiment, the marble has fine texture, uniform structure, low expansion coefficient, no internal stress, high precision, high hardness, high wear resistance, acid, alkali and salt corrosion resistance, easy maintenance, difficult surface scratching, no magnetization, easy polishing, long service life, difficult surface gloss loss, stable and durable structure, stronger bearing capacity and pressure resistance compared with metal, smooth and wear-resistant surface, smaller roughness and contribution to prolonging the service life of the main structure.

Specifically, in actual use, the marble base 2 can be installed in the middle of the marble platform 1, then the marble upright columns 301 are installed on two sides of the marble platform 1, and finally the marble beams 302 are installed on the tops of the marble upright columns 301 on two sides; or the marble base 2 can be installed firstly, and then the marble upright 301 and the marble cross beam 302 can be installed; the linear guide rails and the linear motors can be installed on the marble base 2 and the marble beams 302, and then the installed marble base 2 and the installed marble beams 302 are installed on the marble upright columns 301 and the marble platform 1.

It will be evident to those skilled in the art that the present application is not limited to the details of the foregoing illustrative embodiments, and that the present application may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. A main body structure of a semiconductor dicing saw, comprising a main body, characterized in that the main body comprises:

a marble platform (1) arranged on the base of the scribing machine;

a marble base (2) longitudinally arranged on the upper surface of the marble platform (1); and the number of the first and second groups,

locate marble platform (1) one side and span marble portal frame (3) of marble base (2), marble portal frame (3) are by locating marble stand (301) and the connection both sides of marble base (2) the marble crossbeam (302) of marble stand (301) are constituteed.

2. The main structure of a semiconductor dicing saw according to claim 1, wherein the marble platform (1) is configured as a T-shaped platform, the marble base (2) is disposed in the middle of the T-shaped platform, and the marble pillar (301) is disposed on both sides of the T-shaped platform.

3. The main structure of a semiconductor scribing machine according to claim 2, wherein the upper surface of the T-shaped platform is provided with an avoiding groove (101) for installing the marble base (2) and a limiting groove (102) for installing the marble upright post (301), the limiting groove (102) is located at two sides of the avoiding groove (101), and one side of the avoiding groove (101) is provided with a positioning groove (103) for connecting the marble base (2).

4. The main body structure of a semiconductor dicing saw according to claim 1, wherein the upper surface of the marble base (2) is provided with a first assembly groove (201) for mounting a linear motor and a first stopper (202) for mounting a linear guide, and the first stoppers (202) are located at both sides of the first assembly groove (201).

5. The main structure of a semiconductor dicing saw according to claim 1, wherein the marble pillar (301) is an inverted T-pillar, the bottom of the T-pillar is connected to the marble platform (1), and the top of the T-pillar is connected to the marble beam (302).

6. The main body structure of a semiconductor dicing saw according to claim 1, wherein one lateral side of the marble beam (302) is provided with a second mounting groove (203) for mounting a linear motor, and both sides of the second mounting groove (203) are provided with second stoppers (204) for mounting a linear guide.

7. The main structure of a semiconductor dicing saw according to claim 1, wherein the marble beam (302) is screwed to the top of the marble pillar (301) on both sides, and the marble pillar (301) and the marble base (2) are screwed to the marble platform (1).