CN217472844U - Filter - Google Patents

Abstract

The utility model relates to a filter, including the casing, the pedestal, the support and the filter core, the casing is installed on the pedestal, make inside form a filtration cavity, the pedestal side has an entry joint, the bottom has an outlet joint, the pedestal center has a bearing, the bearing center has a water outlet channel and communicates with the outlet joint, the support is installed in the bearing, the support outer wall has the through-hole of multiunit different apertures, the aperture of the through-hole is progressively increased from bottom to top, the filter core is the tube-shape with opening down and installs around the support; therefore, when the pressure of the liquid in the filter is balanced, the stress of the filtering area is uniform, the filtering efficiency is improved, and the service life is prolonged.

Description

Filter

Technical Field

The utility model relates to a technical field who relates to the filter especially indicates a filtration technology for semiconductor grinding fluid.

Background

Chemical Mechanical Polishing (CMP) in semiconductor manufacturing process means that during polishing, a Chemical removal force and a Mechanical removal force are combined to remove redundant substances on the surface of a wafer, i.e., a technology for performing overall Planarization on the surface of the wafer, the CMP basically uses a polishing device, a concentrated stock solution of a polishing solution is mixed with a certain amount of deionized water and a Chemical solvent, and then is conveyed to the polishing device, and the polishing solution is continuously injected and drives a polishing pad to rotate and press on the wafer, so as to achieve the purpose of polishing/planarizing the surface of the wafer, wherein key consumables influencing the polishing quality are the polishing solution and the polishing pad.

In order to ensure the supply quality of the slurry and achieve the purpose of fine and uniform slurry particles, one or more filters are usually used in the slurry transportation process to remove the residual impurities in the slurry and the coarse particles condensed by shear stress in the mixing process, however, a general filter is usually provided with a filter element only inside, so that the impurities or the coarse particles are removed by the filter element in the path of the slurry flowing in and out, the liquid flow rate is usually in inverse proportion to the resistance, the inlet and the outlet of the general filter are both arranged near the bottom, therefore, when the clean filter element is used initially, the flow rate of the lower layer of the filter element is greater than that of the upper layer, the lower layer of the filter rate is greater than that of the upper layer, as the filtering time is prolonged, the impurities or the coarse particles are easy to fill the surface of the lower layer of the filter element, and then gradually move to the upper layer, but the lower layer region is close to the liquid inlet, the liquid supply pressure is large, coarse particles are easy to break through the filtration of the filter element due to the large pressure, and the subsequent grinding quality is seriously influenced by the outflow coarse particles. In addition, when the lower layer area of the filter element is blocked, the flow rate is also influenced, the filtering efficiency is reduced, and therefore the filter element can be forced to be replaced in advance, and the service life of the filter element is terminated in advance.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a filter is in the inside a set of support that increases of filter core, and this support can change the upper and middle, lower floor of filter core and pass through the velocity of flow of liquid, under the inside fluid pressure balance of filter for the filter area atress is even, borrows this and improves filtration efficiency and life.

In order to achieve the above purpose, the utility model discloses a following technical scheme:

the utility model relates to a filter, include: the filter comprises a shell, a seat body, a support and a filter element, wherein the shell is arranged on the seat body, a filtering cavity is formed in the shell, an inlet connector is arranged on the side edge of the seat body, an outlet connector is arranged at the bottom of the seat body, a bearing seat is arranged in the center of the seat body, a water outlet channel is arranged in the center of the bearing seat and is communicated with the outlet connector, the support is arranged on the bearing seat, a plurality of groups of through holes with different apertures are formed in the outer wall of the support, the apertures of the through holes are gradually increased from bottom to top, and the filter element is cylindrical and is arranged around the support.

In a preferred embodiment, the bracket is cylindrical with an opening facing downward and is inserted into the seat.

In a preferred embodiment, the filter element is disposed around the support and abuts against the top surface of the seat.

In a preferred embodiment, the top of the housing further has a pressure relief connector, which is connected to other pipes and the valve body, and the pipeline is closed at ordinary times, and can be opened only when the filter element is to be replaced.

According to the above, the utility model discloses the filter is equipped with the support in that the filter core is inside, utilizes support outer wall from bottom to top to distribute a plurality of through-holes that the aperture is gradually increased, changes the filter core upper and middle, lower floor's velocity of flow, and then when the filter is filled to the lapping liquid for the filter core filter area atress is even, improves filtration efficiency, can not take place if current filter core seriously and change the situation of filter core in advance because of the regional jam of lower floor, the utility model discloses a design can let the filter core fully use with increase of service life.

Drawings

Fig. 1 is a side view of the filter of the present invention.

Fig. 2 is an exploded view of the filter of the present invention.

Fig. 3 is a schematic perspective sectional view of the filter of the present invention.

Fig. 4 is a schematic diagram of the operation of the filter of the present invention.

Description of the reference numerals:

10-a housing;

11-a flange;

12-a pressure relief fitting;

20-a seat body;

21-an inlet connection;

22-an outlet connection;

23-a bearing seat;

24-external threads;

25-a fixing ring;

30-a support;

31-a through hole;

32-a via hole;

33-a via hole;

and 40-filter element.

Detailed Description

The technical solution of the present invention will be described clearly and completely with reference to the following embodiments and accompanying drawings. It will be understood that when an element is referred to as being "mounted on" or "secured to" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. In the illustrated embodiment, the directions indicate that up, down, left, right, front, rear, and the like are relative, and are used to explain that the structures and movements of the various components are relative in this case. These representations are appropriate when the components are in the positions shown in the figures. However, if the specification of the component location changes, it is assumed that these representations will change accordingly.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Fig. 1 and 2 show a side view and an exploded view of the filter of the present invention. The utility model discloses the filter includes casing 10, pedestal 20, support 30 and filter core 40. The housing 10 is mounted on the housing body 20 to form a filtering chamber therein. The seat body 20 has an inlet connector 21 on its side, an outlet connector 22 on its bottom, a seat 23 in its center, and an outlet channel in the center of the seat 23 and connected to the outlet connector 22. The bracket 30 is mounted on the bearing 23, and the outer wall of the bracket 30 has a plurality of sets of through holes 31, 32, 33 with different apertures, and the apertures of the through holes 31, 32, 33 are gradually increased from bottom to top. A cartridge 40 is mounted around the frame 30. Therefore the utility model discloses utilize the through- hole 31, 32, 33 in different apertures, when filter and inside fluid pressure balance are filled to the lapping liquid, can make filter core 40 upper and middle, lower floor's filter area atress even, improve filtration efficiency and life.

Next, the structure of each component will be described in detail, and refer to fig. 3:

the housing 10 is a hollow cylindrical shell with a downward opening, and has a flange 11 at the bottom for facilitating the butt joint with the seat 20. The housing 10 forms a filter chamber for the slurry to be injected into and for the filter element 40 and the bracket 30 to be disposed therein. In addition, the top of the casing 10 is further provided with a pressure relief joint 12, the pressure relief joint 12 is connected with other pipe fittings and valve bodies, and the pipeline is closed at ordinary times and can be opened only when the filter element 40 is to be replaced, so that the pressure is relieved quickly, and the casing 10 can be conveniently opened to replace the filter element 40.

The base 20 is mainly used to connect the pipelines for supplying and delivering the polishing slurry. The side wall of the seat 20 has an inlet connector 21, the bottom has an outlet connector 22, the center of the seat has a seat 23, the center of the seat 23 has a water outlet channel and communicates with the outlet connector 22. The outer wall of the base 20 has an external thread 24, and cooperates with a fixing ring 25 to be screwed and fixed at the position, and the fixing ring 25 is used to clamp the flange 11 of the housing 10 during screwing, so that the housing 10 can be firmly fixed on the base 20 and the inside is sealed. The utility model discloses casing 10 and pedestal 20 can provide a lapping liquid does not have spiral disturbance or ring type flow path's design, and the lapping liquid is injected into the back by entry joint 21, must fill the casing 10 inner space rapidly, and rethread filter element 40 back assembles the back to central authorities, flows out through outlet joint 22 at last, so can avoid producing rotatory flow field and let lapping liquid shear stress increase and condense into the coarse grain.

The bracket 30 is cylindrical with a downward opening and is installed at the bearing seat 23, and the filter element 40 is also cylindrical with a downward opening and is installed at the periphery of the bracket 30, so that the flow velocity of the upper, middle and lower layers in the filter is changed, and the filtering area of the filter element 40 is uniformly stressed. The utility model discloses the technical means is that the through- hole 31, 32, 33 that have the different apertures of multiunit in support 30 outer wall, and the aperture of through- hole 31, 32, 33 is crescent from bottom to top, only is equipped with three different apertures of group in this embodiment, nevertheless not so as to limit. The outer wall of the carrier 30 near the bottom edge is provided with a plurality of sealing rings 34 to facilitate a good seal when the carrier 30 is inserted into the socket 23. The filter element 40 can be made of a material selected according to the user's requirement, so as to effectively filter the slurry.

Fig. 4 is a schematic diagram showing the practical operation of the filter of the present invention. The lapping liquid is got into by entry joint 21, later and fill in the casing 10 and between the filter core 40, along with injection pressure's rising lapping liquid can get into inside by the outer wall of filter core 40, cooperation support 30 outer wall from bottom to top gradual through- hole 31, 32, 33, let filter core 40 surface pressure everywhere can be average, each filtration lapping liquid of utilizing filter core 40 fully, the event can not produce if current mode concentrates on the regional filterable situation of filter core lower floor, consequently the utility model relates to a can promote filtration efficiency and increase of service life, in addition outlet joint 22 sets up in middle bottom position, also can let the lapping liquid by filter inside around directly to central authorities assemble the flow, reduces the production of shearing stress, avoids producing the coarse grain.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the embodiments of the present invention. All the equivalent changes and modifications made according to the claims of the present invention are covered by the claims of the present invention.

Claims (4)

1. A filter, comprising: casing, pedestal, support and filter core, this casing install on this pedestal and make inside one form and filter the cavity, this pedestal lateral wall has an entry to connect, and the bottom has an outlet joint, and this pedestal central authorities have a bearing, and this bearing central authorities have a water outlet channel and connect the intercommunication with this outlet, its characterized in that: the bracket is arranged on the bearing seat, the outer wall of the bracket is provided with a plurality of groups of through holes with different apertures, the apertures of the through holes are gradually increased from bottom to top, and the filter element is in a cylindrical shape with a downward opening and is arranged around the bracket.

2. The filter of claim 1, wherein the bracket is cylindrical with a downward opening and is inserted into the seat.

3. The filter of claim 1, wherein the filter element is disposed around the periphery of the frame and abuts the top surface of the seat.

4. The filter of claim 1, wherein the top of the housing further comprises a pressure relief connector, the pressure relief connector is connected to other pipes and the valve body, the pipeline is normally closed, and the pipeline can be opened only when the filter element is to be replaced.

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