CN217465721U

CN217465721U - Rotating frame detection device

Info

Publication number: CN217465721U
Application number: CN202221132507.9U
Authority: CN
Inventors: 徐长亮; 冯柳君
Original assignee: Nafeng Vacuum Coating Shanghai Co ltd
Current assignee: Nafeng Vacuum Coating Shanghai Co ltd
Priority date: 2022-05-11
Filing date: 2022-05-11
Publication date: 2022-09-20
Anticipated expiration: 2032-05-11

Abstract

The utility model discloses a revolving rack detection device, include: the bracket is used for being vertically fixed on a door frame of the cavity during detection; the distance measuring unit is horizontally arranged on the bracket and is arranged towards a rotating center arranged in the cavity; when the rotating frame is installed on the rotating center and is in a rotating state, the distance value of the rotating frame when the hanging rod vertically arranged on the circumference of the rotating frame passes through is obtained through the distance measuring unit and is used as a basis for judging whether the hanging rod is installed in place on the rotating frame. The utility model discloses fixed, dismantle convenient and fast, it is higher to detect precision and efficiency, is suitable for and uses widely.

Description

Rotating frame detection device

Technical Field

The utility model relates to a coating equipment test technical field especially relates to a revolving rack detection device.

Background

The rotating frame is applied to a cavity of the PVD coating equipment, is used for carrying loaded products, and performs a coating process in rotation.

Refer to fig. 1. The conventional turret 10 generally adopts a column type cylindrical structure. The rotating frame 10 is provided with an annular upper disc 12 and an annular lower disc 11, and the upper disc 12 and the lower disc 11 are connected through a plurality of vertically arranged support columns 13; meanwhile, a plurality of hanging rods 14 are installed between the upper tray 12 and the lower tray 11, and a jig is installed on the hanging rods 14 so that a product is loaded on the hanging rods 14 through the jig. The lower disc 11 is provided with a mounting portion 15 which is matched with the rotation center in the cavity. Wherein, the mounting number and the position of the hanging rods 14 between the upper plate 12 and the lower plate 11 can be adjusted.

When the assembled rotating stand 10 is installed in the cavity, it is necessary to confirm the rotating state of the rotating stand 10 on the rotating center of the cavity, and it is generally necessary to confirm whether the rotating stand 10 is eccentric or eccentric.

However, because the rotating frame 10 has a large volume and is installed inside the cavity of the equipment, a large measuring tool matched with the rotating frame is absent at present, and the detection is difficult. If the concentricity of the turret 10 is measured using a simple method of plumb line, it is difficult to judge with the naked eye accurately, and the efficiency is low.

SUMMERY OF THE UTILITY MODEL

The utility model aims at overcoming the not enough of prior art, provide a revolving rack detection device.

The utility model discloses a technical scheme who realizes above-mentioned purpose is:

a turret detection apparatus comprising:

the bracket is used for being vertically fixed on a door frame of the cavity during detection;

the distance measuring unit is horizontally arranged on the bracket and is arranged towards a rotating center arranged in the cavity;

when the rotating frame is installed on the rotating center and is in a rotating state, the distance value of the rotating frame when the hanging rod vertically arranged on the circumference of the rotating frame passes through is obtained through the distance measuring unit and is used as a basis for judging whether the hanging rod is installed in place on the rotating frame.

Furthermore, the upper end and the lower end of the support are respectively provided with a positioning fixing plate and a clamping mechanism, the two positioning fixing plates are respectively used for being in lap joint with the outer side surfaces of the upper end and the lower end of the door frame, and the two clamping mechanisms are respectively used for being matched with the positioning fixing plates on the corresponding sides to clamp the upper end and the lower end of the support on the upper end and the lower end of the door frame.

Further, the positioning fixing plate is connected to an end of the bracket in an orthogonal manner and extends laterally with respect to the bracket.

Furthermore, a fastening mechanism is arranged on the positioning fixing plate.

Further, the fastening mechanism includes a fastening pin.

Furthermore, the clamping mechanism comprises a quick clamp positioned on the inner side of the positioning fixing plate, and the quick clamp is provided with a movable chuck opposite to the positioning fixing plate.

Furthermore, the number of the distance measuring units is three, and the three distance measuring units are respectively used for detecting the distance values of the upper part, the middle part and the lower part of the hanging rod.

Further, the ranging unit includes a laser range finder.

Compared with the prior art, the utility model has the advantages of it is following:

(1) the device is fixed, convenient and fast to dismantle, and detection efficiency is high.

(2) And laser detection is adopted, so that the accuracy is high.

Drawings

Fig. 1 is a schematic structural diagram of a conventional rotating stand.

Fig. 2 is a schematic structural diagram of a turret detection device according to a preferred embodiment of the present invention.

Fig. 3 is a schematic view of a partially enlarged structure of a turret detection device according to a preferred embodiment of the present invention.

Fig. 4 is a schematic view of a usage status of a turret detecting device according to a preferred embodiment of the present invention.

Detailed Description

In order to better understand the technical solution of the present invention, the present invention will be described in detail through specific embodiments.

Refer to fig. 2-3. The utility model discloses a revolving rack detection device 20, include support 24 and install ranging unit 23 on support 24.

Wherein the bracket 24 is used for being vertically fixed on a door frame 30 of the cavity during detection. The distance measuring unit 23 is horizontally installed on the bracket 24 and is disposed toward a rotation center provided in the cavity.

The test is performed for one of the types of turret 10 shown in fig. 1. When the rotating frame 10 is installed on the rotating center in the equipment cavity and is in a rotating state, the distance value of the hanging rod 14 vertically arranged on the circumference of the rotating frame 10 relative to the distance measuring unit 23 when passing through the distance measuring unit 23 is obtained through the distance measuring unit 23 and is used as a basis for judging whether the hanging rod 14 is installed in place on the rotating frame 10, namely, whether the rotating frame 10 is installed qualified is judged.

In a preferred embodiment, to facilitate the fixing of the bracket 24 to the door frame 30, the fixing plate 22 and the clamping mechanism 21 may be separately positioned at the upper and lower ends of the bracket 24.

Reference is made to fig. 2-3 in combination with fig. 4. Take an example of the application to a PVD coating apparatus. The chamber of the PVD coating apparatus is provided with a rectangular door frame 30, for example. The two positioning fixing plates 22 are respectively used for being lapped with the outer side surfaces of the upper end and the lower end of the door frame 30; the two clamping mechanisms 21 are respectively used for matching with the positioning fixing plates 22 on the corresponding sides to clamp the upper and lower ends of the bracket 24 on the upper and lower ends of the door frame 30.

In a preferred embodiment, each of the positioning and fixation plates 22 is connected to an end of the bracket 24 in an orthogonal manner and extends laterally relative to the bracket 24. Namely, the positioning fixing plate 22 and the bracket 24 in the vertical direction are installed in a mutually perpendicular manner.

The positioning and fixing plate 22 may have an inner profile corresponding to the surface shape of the door frame 30.

In a preferred embodiment, the clamping mechanism 21 may comprise quick clamps located inside the positioning fixture plate 22. And, when the quick clamp is mounted to the bracket 24, the movable clamp 211 on the quick clamp is brought into an orientation opposite to the positioning fixing plate 22. Thus, when the bracket 24 is overlapped on the upper and lower ends of the door frame 30 through the positioning fixing plate 22, only the adjustable wrench on the quick clamp needs to be pulled, so that the movable clamp 211 on the quick clamp can move towards the positioning fixing plate 22 on the corresponding side until abutting against the inner side of the corresponding door frame 30, and the door frame 30 is clamped through the movable clamp 211 and the positioning fixing plate 22, so that the bracket 24 and the distance measuring unit 23 carried by the bracket are firmly locked on the door frame 30 in the vertical direction.

In a preferred embodiment, a fastening mechanism 221 may be provided on the positioning and fixing plate 22. For example, the fastening mechanism 221 may include a fastening pin. After the bracket 24 is fixed to the doorframe 30 by using the quick clamp, the fixing plate 22 is further secured against slipping off the doorframe 30 by tightening the fastening pin toward the doorframe 30.

In a preferred embodiment, three distance measuring units 23 may be installed on the bracket 24 for detecting the distance values of the upper, middle and lower portions of the hanging rod 14 with respect to the distance measuring units 23, respectively.

In a preferred embodiment, the distance measuring unit 23 may comprise a laser distance meter.

In a preferred embodiment, the bracket 24 is an aluminum frame structure.

The quick clamp and laser rangefinder are commercially available and are mounted to the bracket 24.

When the utility model is used, the bracket 24 is placed on the cavity door frame 30. The retainer plate 22 is then mated with the chamber door frame 30 and clamped with the quick clamp. The turret 10 within the chamber, such as the turret 10 illustrated in fig. 1, may be actuated to rotate the turret 10. The laser rangefinder is then turned on. When the laser beam 231 from the laser range finder scans the hanging rod 14, for example, the hanging rod 14 in the shape of 16 hexagonal rods, the laser range finder records the distance to the 16 hexagonal rods, and then transmits the data to the equipment control system. The control system compares the data transmitted by the laser range finder with the distance setting standard, and prompts or alarms when the detection value exceeds the standard, so that a certain hanging rod or a plurality of hanging rods 14 are not installed in place. According to the difference value between the distance detection value and the distance setting standard, the positive and negative offset of the hanging rod 14 relative to the rotation center can be obtained, and the mounting position of the hanging rod 14 on the rotating frame 10 can be conveniently adjusted until the detection value meets the standard requirement.

The utility model discloses both make things convenient for the site personnel to measure, more directly perceived accuracy again is worth popularizing using.

It should be understood by those skilled in the art that the above embodiments are only used for illustrating the present invention, and not used as a limitation of the present invention, and that the changes and modifications to the above embodiments are within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.

Claims

1. A turret detection device, comprising:

2. The device for detecting the revolving rack of claim 1, wherein the upper and lower ends of the rack are respectively provided with a positioning fixing plate and a clamping mechanism, the two positioning fixing plates are respectively used for being overlapped with the outer side surfaces of the upper and lower ends of the door frame, and the two clamping mechanisms are respectively used for being matched with the positioning fixing plates on the corresponding sides to clamp the upper and lower ends of the rack on the upper and lower ends of the door frame.

3. The turret detection device of claim 2, wherein the fixed positioning plate is attached to an end of the frame in an orthogonal manner and extends laterally relative to the frame.

4. The turret detection device of claim 3, wherein a fastening mechanism is provided on the positioning fixing plate.

5. The turret detection device of claim 4, wherein the fastening mechanism comprises a fastening pin.

6. The turret detection device according to claim 2, wherein the clamping mechanism comprises a quick clamp located inside the fixed positioning plate, the quick clamp being provided with a movable clamp opposite the fixed positioning plate.

7. The turret detection device according to claim 1, wherein there are three distance measurement units for detecting distance values of the upper, middle and lower portions of the hanging bar, respectively.

8. The turret detection device of claim 1, wherein the ranging unit comprises a laser rangefinder.