CN217443401U - Equipment for detecting insulation and voltage resistance of copper-clad ceramic substrate in air - Google Patents
Equipment for detecting insulation and voltage resistance of copper-clad ceramic substrate in air Download PDFInfo
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- CN217443401U CN217443401U CN202220508859.3U CN202220508859U CN217443401U CN 217443401 U CN217443401 U CN 217443401U CN 202220508859 U CN202220508859 U CN 202220508859U CN 217443401 U CN217443401 U CN 217443401U
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Abstract
The utility model relates to a semiconductor manufacturing technology field. The equipment for detecting the insulation and voltage resistance of the copper-clad ceramic substrate in the air comprises a sealing box, wherein the sealing box comprises a box body and a top cover which are detachably connected, the box body and the top cover are made of insulating materials, and a sealing cavity is enclosed by the box body and the top cover; the top cover is provided with an air hole for vacuumizing or filling insulating gas into the sealed cavity; the insulating sheath is arranged in the box body, and a groove for placing the copper-clad ceramic substrate is formed in the center of the insulating sheath; a bottom electrode layer is arranged at the bottom of the groove; the top cap includes roof, top elastic layer and the top electrode layer that sets gradually from last to down. The utility model discloses a sealed environment is convenient for realize covering copper ceramic substrate and carry out withstand voltage test in the seal box.
Description
Technical Field
The utility model relates to a semiconductor manufacturing field specifically is detect and covers insulating withstand voltage test equipment of copper ceramic substrate.
Background
With the continuous improvement of the voltage grade and the increase of the integration density of the IGBT module, higher requirements are put forward on the insulation performance of the power module. In the internal structure of the high-voltage IGBT module, there are two main media that affect the insulating performance of the module: the ceramic substrate is a ceramic substrate which has high dielectric strength and is coated with metal layers on two sides, and circuit patterns on the surface of the substrate and electrical insulation between the substrate and devices on the upper surface of the lining board are realized. The metal ceramic substrate is subjected to insulation and voltage resistance testing and good products are screened, so that the detection efficiency of the metal ceramic substrate can be effectively improved, and the cleaning process flow is simplified.
In the prior art, the insulation withstand voltage of a mother board of a metal ceramic substrate is generally detected in an insulating medium (such as insulating oil). The surface metal layer is etched with complex and fine island-shaped circuit patterns, dozens or even hundreds of island-shaped metal units are arranged on one motherboard, the insulation and voltage resistance of each island-shaped metal unit of the whole motherboard is tested at one time, hundreds of probes are needed, the cost is huge, the probes are easy to scratch the metal layer, and nondestructive testing cannot be realized. If the test is carried out after the cutting into small pieces, the test efficiency is low. Meanwhile, the insulation and voltage resistance detection is generally carried out in an insulating medium (such as insulating oil) for testing, after the test is finished, the product needs to be degreased and cleaned, and if the product is not cleaned properly, the risk of insulating oil residue or pollution exists.
SUMMERY OF THE UTILITY MODEL
Problem to prior art existence, the utility model provides an in the air detect cover copper ceramic substrate insulating withstand voltage's equipment to solve above at least one technical problem.
In order to achieve the purpose, the utility model provides a device for detecting the insulation and pressure resistance of a copper-clad ceramic substrate in the air, which is characterized by comprising a sealing box, wherein the sealing box comprises a box body and a top cover which are detachably connected, the box body and the top cover are made of insulating materials, and a sealing cavity is enclosed by the box body and the top cover;
the top cover is provided with an air hole for vacuumizing or filling insulating gas into the sealed cavity;
the insulating sheath is arranged in the box body, and a groove for placing the copper-clad ceramic substrate is formed in the center of the insulating sheath;
a bottom electrode layer is arranged at the bottom of the groove;
the top cap includes roof, top elastic layer and the top electrode layer that sets gradually from last to down.
The utility model discloses a sealed environment is convenient for realize covering copper ceramic substrate and carry out withstand voltage test in the seal box. When the top electrode and the bottom electrode are used for elastically clamping the upper side and the lower side of the copper-clad ceramic substrate, the isolated metal units of the copper-clad ceramic substrate are conducted, and the whole copper-clad ceramic substrate is tested at one time.
And the insulating sheath clamped in the copper-clad ceramic substrate realizes the amplification of the insulating part at the periphery of the copper-clad ceramic substrate and weakens the discharge effect. Vacuum pumping is carried out through the air holes or insulating gas is filled in the air holes. Is beneficial to insulation.
Preferably, the top electrode layer extends out of the top plate through a top conductive member, and a sealant is present between the top conductive member and the top plate;
the bottom electrode layer extends out of the box body through the bottom conductive piece, and a sealant is arranged between the bottom conductive piece and the box body.
Further preferably, the top conductive piece and the bottom conductive piece are connected with a test loop, and a high-voltage source generator and a microampere ammeter which are arranged in series are arranged on the test loop.
Preferably, the top elastic layer is provided with a channel extending from the top conductive member;
and a channel extending from the bottom conductive piece is formed in the insulating sheath.
Further preferably, the top conductive piece is a conductive wire or a metal spring;
the bottom conductive piece is a conductive wire or a metal spring.
Further preferably, an insulation limiting block is mounted on the outer edge of the bottom electrode layer.
Limiting of the outer edge of the copper-clad ceramic substrate is convenient to realize.
Further preferably, a transparent visual window is installed on the box body. It is convenient to observe whether the electrode layer is embedded in the insulating sheath.
Further preferably, the transparent visual windows are annularly arranged around the box body;
the outer wall of top elastic layer is equipped with from last pigment coating to the different colours that set gradually down.
Whether the top electrode layer normally presses down is convenient to observe.
Drawings
Fig. 1 is a cross-sectional view of the present invention;
fig. 2 is another cross-sectional view of the present invention;
fig. 3 is a schematic structural diagram of the present invention.
Wherein, 1 is the box body, 2 is the top cap, 3 is insulating sheath, 4 is the bottom electrode layer, 5 is the top electrode layer, 6 is the top elastic layer, 7 is the gas pocket, 8 is insulating stopper, 9 is transparent visual window, 10 is the guide rail.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
Referring to fig. 1 to 3, embodiment 1: the equipment for detecting the insulation and voltage resistance of the copper-clad ceramic substrate in the air comprises a sealing box, wherein the sealing box comprises a box body 1 and a top cover 2 which are detachably connected, the box body 1 and the top cover 2 are made of insulating materials, and a sealing cavity is enclosed by the box body 1 and the top cover 2; the top cover 2 is provided with an air hole 7 for vacuumizing or filling insulating gas into the sealed cavity. The air hole 7 is provided with a valve. The box body 1 is internally provided with an insulating sheath 3 used for clamping a copper-clad ceramic substrate, the insulating sheath 3 is arranged in the box body 1, and the center of the insulating sheath 3 is provided with a groove for placing the copper-clad ceramic substrate; a bottom electrode layer 4 is arranged at the bottom of the groove; the top cover 2 comprises a top plate, a top elastic layer 6 and a top electrode layer 5 which are sequentially arranged from top to bottom. The utility model discloses a sealed environment is convenient for realize covering copper ceramic substrate and carry out withstand voltage test in the seal box. When the top electrode and the bottom electrode are used for elastically clamping the upper side and the lower side of the copper-clad ceramic substrate, the isolated metal units of the copper-clad ceramic substrate are conducted, and the whole copper-clad ceramic substrate is tested at one time. And the insulating sheath 3 of the copper-clad ceramic substrate is clamped, so that the amplification of the peripheral insulating part of the copper-clad ceramic substrate is realized, and the discharge effect is weakened. Vacuum pumping is carried out through the air holes or insulating gas is filled in the air holes. Is beneficial to insulation. The air hole is provided with a valve.
The top electrode layer 5 extends out of the top plate through the top conductive piece, and sealant is stored between the top conductive piece and the top plate; the bottom electrode layer 4 extends out of the box body 1 through the bottom conductive piece, and a sealant is arranged between the bottom conductive piece and the box body 1. The top conductive piece and the bottom conductive piece are connected with a test loop, and a high-voltage source generator and a microampere ammeter which are arranged in series are arranged on the test loop. A channel extending from the top conductive piece is arranged on the top elastic layer 6; the insulating sheath 3 is provided with a channel extending from the bottom conductive piece. The top conductive piece is a conductive wire or a metal spring; the bottom conductive piece is a conductive wire or a metal spring. The insulating sheath is a sleeve body made of insulating materials.
Referring to fig. 2, an insulating stopper 8 is mounted on the outer edge of the bottom electrode layer 4. Limiting of the outer edge of the copper-clad ceramic substrate is convenient to realize. Or, referring to fig. 1, an insulation limit block 8 is installed in the groove. Limiting of the outer edge of the copper-clad ceramic substrate is convenient to realize.
Referring to fig. 3, a transparent viewing window 9 is installed on the case body 1. It is convenient to observe whether the electrode layer is embedded in the insulating sheath 3. The transparent viewing window 9 is higher than the insulating sheath. The transparent visual windows are annularly arranged around the box body 1; the outer wall of the top elastic layer 6 is provided with pigment coatings with different colors which are sequentially arranged from top to bottom. Whether the top electrode layer normally presses down is convenient to observe. The box body 1 is provided with a vertically arranged chute, and the cover body is provided with a guide rail 10 which is connected with the chute in a sliding way; the box body 1 and the cover body are detachably connected with the bolt seat through mutually matched bolts. And a sealing ring is arranged at the joint of the box body 1 and the cover body.
Copper-clad ceramic substrate who indicates in this patent also is exactly two-sided copper-clad ceramic substrate, uses this tool to cover the test process of copper-clad ceramic substrate:
1) the tested sample is placed on the bottom electrode layer of the sealing box, and an insulation limiting block is arranged around the bottom electrode layer, so that the tested sample is ensured to be correctly positioned.
2) The top cover is covered. When the top cover is buckled down, a certain pressure is applied to ensure that the top electrode layer is completely attached to the surface of the test sample, so that all the metal islands on the surface are mutually conducted to form a whole.
3) The high-voltage source generator applies voltage according to requirements, and the leakage current value of the detected sample detected by the microampere ammeter is read.
4) And judging whether the test sample has insulation problems or not according to the leakage current value. The judging method comprises the following steps: and reading the leakage current value of the tested sample after being stable for 20-30 seconds, and if the leakage current value is larger than a standard value, judging that the leakage current is too large and the sample is failed in insulation. And if the leakage current value of the sample is smaller than the standard value, the insulation test of the sample passes.
5) After the pressure is reduced, the sample is taken out and flows into the next procedure.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (8)
1. The equipment for detecting the insulation and voltage resistance of the copper-clad ceramic substrate in the air is characterized by comprising a sealing box, wherein the sealing box comprises a box body and a top cover which are detachably connected, the box body and the top cover are made of insulating materials, and a sealing cavity is enclosed by the box body and the top cover;
the top cover is provided with an air hole for vacuumizing or filling insulating gas into the sealed cavity;
the insulating sheath is arranged in the box body, and a groove for placing the copper-clad ceramic substrate is formed in the center of the insulating sheath;
a bottom electrode layer is arranged at the bottom of the groove;
the top cap includes roof, top elastic layer and the top electrode layer that sets gradually from last to down.
2. The equipment for detecting the insulation and voltage resistance of the copper-clad ceramic substrate in the air according to claim 1, is characterized in that: the top electrode layer extends out of the top plate through the top conductive piece, and sealant is stored between the top conductive piece and the top plate;
the bottom electrode layer extends out of the box body through the bottom conductive piece, and a sealant is arranged between the bottom conductive piece and the box body.
3. The apparatus for detecting insulation withstand voltage of the copper-clad ceramic substrate in the air according to claim 2, wherein: the top conductive piece and the bottom conductive piece are connected with a test loop, and a high-voltage source generator and a microampere ammeter which are arranged in series are arranged on the test loop.
4. The equipment for detecting the insulation and voltage resistance of the copper-clad ceramic substrate in the air as claimed in claim 2, wherein: a channel extending out of the top conductive piece is formed in the top elastic layer;
and a channel extending out of the bottom conductive piece is formed on the insulating sheath.
5. The equipment for detecting the insulation and voltage resistance of the copper-clad ceramic substrate in the air as claimed in claim 2, wherein: the top conductive piece is a conductive wire or a metal spring;
the bottom conductive piece is a conductive wire or a metal spring.
6. The equipment for detecting the insulation and voltage resistance of the copper-clad ceramic substrate in the air according to claim 1, is characterized in that: and an insulating limiting block is arranged on the outer edge of the bottom electrode layer.
7. The equipment for detecting the insulation and voltage resistance of the copper-clad ceramic substrate in the air according to claim 1, is characterized in that: the box body is provided with a transparent visual window.
8. The device for detecting the insulation and voltage resistance of the copper-clad ceramic substrate in the air as claimed in claim 7, wherein: the transparent visual windows are annularly arranged around the box body;
the outer wall of top elastic layer is equipped with from last pigment coating to the different colours that set gradually down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220508859.3U CN217443401U (en) | 2022-03-09 | 2022-03-09 | Equipment for detecting insulation and voltage resistance of copper-clad ceramic substrate in air |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220508859.3U CN217443401U (en) | 2022-03-09 | 2022-03-09 | Equipment for detecting insulation and voltage resistance of copper-clad ceramic substrate in air |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217443401U true CN217443401U (en) | 2022-09-16 |
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ID=83214740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220508859.3U Active CN217443401U (en) | 2022-03-09 | 2022-03-09 | Equipment for detecting insulation and voltage resistance of copper-clad ceramic substrate in air |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217443401U (en) |
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2022
- 2022-03-09 CN CN202220508859.3U patent/CN217443401U/en active Active
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